JPS57184901A - Correcting device for degree of straight of straight travelling table - Google Patents

Correcting device for degree of straight of straight travelling table

Info

Publication number
JPS57184901A
JPS57184901A JP56068888A JP6888881A JPS57184901A JP S57184901 A JPS57184901 A JP S57184901A JP 56068888 A JP56068888 A JP 56068888A JP 6888881 A JP6888881 A JP 6888881A JP S57184901 A JPS57184901 A JP S57184901A
Authority
JP
Japan
Prior art keywords
displacement
straight
travelling table
measuring reference
side air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56068888A
Other languages
Japanese (ja)
Other versions
JPH0157286B2 (en
Inventor
Hidezo Sano
Ryuichi Funatsu
Masayoshi Serizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56068888A priority Critical patent/JPS57184901A/en
Publication of JPS57184901A publication Critical patent/JPS57184901A/en
Publication of JPH0157286B2 publication Critical patent/JPH0157286B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B23Q1/385—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE:To perform an easy correction of a travelling table to a high-precise degree of straight, by a method wherein a set value coincides with a displacement through adjustment of a fluid pressure fed to side static pressure fluid bearings mounted in a plural number of spots at both sides of the travelling direction of the travelling table. CONSTITUTION:Two measuring reference blocks 12a and 12b are mounted at one side of a Y-direction, being perpendicular to an X-direction of a travelling table 2 and at a distance in the X-direction. A displacement meter 12a is situated facing and opposite to the measuring reference block 12a and in the proximity of a bearing 6a of two side air bearings 6a and 6b, and a displacement meter 13b is located facing and opposite to the measuring reference block 12b and in the proximity of a side air bearing 6c of side air bearings 6c and 6d. In the two displacement meters 13a and 13b, for example, an electrostatic capacity type non-contact minute displacement meter is employed to detect a minute displacement of an object as a change in electrostatic capacity, and this permits the measurement of a minute displacement of 0.1mum or less.
JP56068888A 1981-05-09 1981-05-09 Correcting device for degree of straight of straight travelling table Granted JPS57184901A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56068888A JPS57184901A (en) 1981-05-09 1981-05-09 Correcting device for degree of straight of straight travelling table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56068888A JPS57184901A (en) 1981-05-09 1981-05-09 Correcting device for degree of straight of straight travelling table

Publications (2)

Publication Number Publication Date
JPS57184901A true JPS57184901A (en) 1982-11-13
JPH0157286B2 JPH0157286B2 (en) 1989-12-05

Family

ID=13386640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56068888A Granted JPS57184901A (en) 1981-05-09 1981-05-09 Correcting device for degree of straight of straight travelling table

Country Status (1)

Country Link
JP (1) JPS57184901A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60224009A (en) * 1984-04-20 1985-11-08 Mitsutoyo Mfg Co Ltd Three dimensional automatic measuring machine
JPS62257008A (en) * 1986-04-30 1987-11-09 Tokyo Seimitsu Co Ltd Bridge-shaped moving apparatus
JPH07302742A (en) * 1994-02-14 1995-11-14 Canon Inc Scanning type aligner
JP2011257232A (en) * 2010-06-08 2011-12-22 Denso Corp Balance measurement device for rotor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5397859A (en) * 1977-02-08 1978-08-26 Fujitsu Ltd Plane positioning shifter
JPS53125055A (en) * 1977-04-07 1978-11-01 Masakazu Miyashita Micro position finder

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5397859A (en) * 1977-02-08 1978-08-26 Fujitsu Ltd Plane positioning shifter
JPS53125055A (en) * 1977-04-07 1978-11-01 Masakazu Miyashita Micro position finder

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60224009A (en) * 1984-04-20 1985-11-08 Mitsutoyo Mfg Co Ltd Three dimensional automatic measuring machine
JPH0349364B2 (en) * 1984-04-20 1991-07-29 Mitutoyo Corp
JPS62257008A (en) * 1986-04-30 1987-11-09 Tokyo Seimitsu Co Ltd Bridge-shaped moving apparatus
JPH07302742A (en) * 1994-02-14 1995-11-14 Canon Inc Scanning type aligner
JP2567811B2 (en) * 1994-02-14 1996-12-25 キヤノン株式会社 Scanning exposure device
JP2011257232A (en) * 2010-06-08 2011-12-22 Denso Corp Balance measurement device for rotor

Also Published As

Publication number Publication date
JPH0157286B2 (en) 1989-12-05

Similar Documents

Publication Publication Date Title
GB1199328A (en) Method of Measuring the Surface Waviness of Sheet or Strip Material
ATE25552T1 (en) ARRANGEMENT FOR MEASURING THE DIFFERENCE BETWEEN TWO FLOW IN TWO DIFFERENT LINES.
JPS57184901A (en) Correcting device for degree of straight of straight travelling table
EP1055905A3 (en) Method to determine the flatness of a web of material
Boffey et al. An experimental investigation of the effect of orifice restrictor size on the stiffness of an industrial air lubricated thrust bearing
SE8602859L (en) PROCEDURE AND DEVICE FOR SEATING AND REGISTRATION OF THE WIDTH OF A MOLDING CUT IN A STRING MOLDING MACHINE
ES8402038A1 (en) Feeler for detecting web seams.
DK0588892T3 (en) Method and apparatus for spectrophotometric measurement of non-liquid liquids
ES458797A1 (en) Measuring apparatus for determining the position of the roller apron of a continuous casting installation
DE59706908D1 (en) MEASURING STOP DEVICE FOR A DISTANCE MEASURING DEVICE
AT382019B (en) MEASURING DEVICE FOR MEASURING THE GAP BETWEEN TWO ROLLS OR ROLLERS AND METHOD FOR CARRYING OUT THE MEASUREMENT
JPS5342762A (en) Radiation measuring apparatus
JPS56111423A (en) Measuring device for gas flow rate of nozzle valve or the like
DE3376502D1 (en) Method and apparatus for measuring surface profiles
ES8304299A1 (en) Apparatus for measuring eccentricity of rolls
ATE190396T1 (en) APPARATUS FOR MARKING THE COORDINATES OF POINTS OF A FIGURE
JPS56110048A (en) Detector for detecting turbulence flaw
JPS5572801A (en) Detector for abnormality of surface of linear body
JPS57115925A (en) Centering device
JPS6449907A (en) Method and device for measuring flatness of sheet material
JPS6073309A (en) Measurement of surface roughness pattern of running sheet material
JPS57124561A (en) Measuring device for roll alignment
JPS56155161A (en) Tensimeter for travelling yarn
DE3381347D1 (en) DEVICE FOR BENDING WITH RIBBED ROLLERS WITH MEANS FOR TAKING INTO ACCOUNT OF THE THICKNESS THICKNESS AND MEANS FOR COMPENSATING THE BOW.
SU632900A1 (en) Pneumatic linear dimension measuring device