JPH0149018B2 - - Google Patents

Info

Publication number
JPH0149018B2
JPH0149018B2 JP60178656A JP17865685A JPH0149018B2 JP H0149018 B2 JPH0149018 B2 JP H0149018B2 JP 60178656 A JP60178656 A JP 60178656A JP 17865685 A JP17865685 A JP 17865685A JP H0149018 B2 JPH0149018 B2 JP H0149018B2
Authority
JP
Japan
Prior art keywords
pellet
jig
pellets
row
taken out
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60178656A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6240736A (ja
Inventor
Wataru Watanabe
Keizo Tsucha
Takashi Nirei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP60178656A priority Critical patent/JPS6240736A/ja
Publication of JPS6240736A publication Critical patent/JPS6240736A/ja
Publication of JPH0149018B2 publication Critical patent/JPH0149018B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)
  • Supply And Installment Of Electrical Components (AREA)
JP60178656A 1985-08-15 1985-08-15 ペレツト治具の移動操作方法 Granted JPS6240736A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60178656A JPS6240736A (ja) 1985-08-15 1985-08-15 ペレツト治具の移動操作方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60178656A JPS6240736A (ja) 1985-08-15 1985-08-15 ペレツト治具の移動操作方法

Publications (2)

Publication Number Publication Date
JPS6240736A JPS6240736A (ja) 1987-02-21
JPH0149018B2 true JPH0149018B2 (enEXAMPLES) 1989-10-23

Family

ID=16052272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60178656A Granted JPS6240736A (ja) 1985-08-15 1985-08-15 ペレツト治具の移動操作方法

Country Status (1)

Country Link
JP (1) JPS6240736A (enEXAMPLES)

Also Published As

Publication number Publication date
JPS6240736A (ja) 1987-02-21

Similar Documents

Publication Publication Date Title
US6722840B2 (en) Wafer ring supplying and returning apparatus
US4685852A (en) Process apparatus and method and elevator mechanism for use in connection therewith
JPH0149018B2 (enEXAMPLES)
JPH05338728A (ja) ウエーハ搬送方法及び装置
KR102518344B1 (ko) 반도체 다이 본딩용 장치 및 그 방법
US7170045B2 (en) Apparatus having at least two image recording devices and its method for placing at least one component in a desired position on a substrate
JPS63142630A (ja) 移載装置
JPS62128523A (ja) ウエ−ハ収納ボ−トの熱処理炉への搬入出装置
JPS6016433A (ja) 組立装置
JPH05175256A (ja) ペレットボンディング装置
JP2592304B2 (ja) 半導体ウエハの移載方法
JPS59104137A (ja) 半導体装置またはその部品の組立て前予熱装置
JPS6227248A (ja) 給送装置
JP2974803B2 (ja) パレット分配システム
JP2874771B2 (ja) バンプの形成方法
JP2526790B2 (ja) 半導体製造装置
JPS61217442A (ja) ウエ−ハ插入装置
JPH01239864A (ja) 基板搬送装置
JPH0138912Y2 (enEXAMPLES)
JPS6063936A (ja) リ−ドフレ−ムの処理方法
JP3195134B2 (ja) 電子部品移載装置
JPS62105434A (ja) ワイヤボンダ
JPS62154762A (ja) 半導体製造方法
JP3149027B2 (ja) 熱処理用ボートの位置決め装置
JPS6171693A (ja) チツプ部品の装着方法