JPH0146550B2 - - Google Patents

Info

Publication number
JPH0146550B2
JPH0146550B2 JP14941286A JP14941286A JPH0146550B2 JP H0146550 B2 JPH0146550 B2 JP H0146550B2 JP 14941286 A JP14941286 A JP 14941286A JP 14941286 A JP14941286 A JP 14941286A JP H0146550 B2 JPH0146550 B2 JP H0146550B2
Authority
JP
Japan
Prior art keywords
container
present
fluorine
chemicals
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14941286A
Other languages
English (en)
Japanese (ja)
Other versions
JPS636078A (ja
Inventor
Shigehiro Komai
Shigemitsu Kamya
Riso Iwata
Ryozo Oono
Katsuhiro Fujino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zeon Corp
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Nippon Zeon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Zeon Co Ltd filed Critical Fujitsu Ltd
Priority to JP14941286A priority Critical patent/JPS636078A/ja
Publication of JPS636078A publication Critical patent/JPS636078A/ja
Publication of JPH0146550B2 publication Critical patent/JPH0146550B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packging For Living Organisms, Food Or Medicinal Products That Are Sensitive To Environmental Conditiond (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Sealing Material Composition (AREA)
JP14941286A 1986-06-27 1986-06-27 半導体用薬剤の収納容器部材 Granted JPS636078A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14941286A JPS636078A (ja) 1986-06-27 1986-06-27 半導体用薬剤の収納容器部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14941286A JPS636078A (ja) 1986-06-27 1986-06-27 半導体用薬剤の収納容器部材

Publications (2)

Publication Number Publication Date
JPS636078A JPS636078A (ja) 1988-01-12
JPH0146550B2 true JPH0146550B2 (en, 2012) 1989-10-09

Family

ID=15474553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14941286A Granted JPS636078A (ja) 1986-06-27 1986-06-27 半導体用薬剤の収納容器部材

Country Status (1)

Country Link
JP (1) JPS636078A (en, 2012)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59175497A (ja) * 1983-03-25 1984-10-04 Microbial Chem Res Found 新規なアミノプロピルアミノブレオマイシン誘導体及びその製造法
JPS59184199A (ja) * 1983-03-31 1984-10-19 Nippon Kayaku Co Ltd 新規アミドｎ置換ブレオマイシン類
JPS59210100A (ja) * 1983-05-14 1984-11-28 Nippon Kayaku Co Ltd 新規アミドｎ置換ブレオマイシン類の製造法
JPH0688219B2 (ja) * 1987-10-02 1994-11-09 株式会社日立製作所 可搬式教示装置
JPH03107554A (ja) * 1989-09-20 1991-05-07 Mazda Motor Corp エンジンの悪臭成分排出制御装置
JP2000281939A (ja) 1999-03-29 2000-10-10 Daikin Ind Ltd フッ素樹脂粉体塗料組成物

Also Published As

Publication number Publication date
JPS636078A (ja) 1988-01-12

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