JPH0142625B2 - - Google Patents
Info
- Publication number
- JPH0142625B2 JPH0142625B2 JP13230583A JP13230583A JPH0142625B2 JP H0142625 B2 JPH0142625 B2 JP H0142625B2 JP 13230583 A JP13230583 A JP 13230583A JP 13230583 A JP13230583 A JP 13230583A JP H0142625 B2 JPH0142625 B2 JP H0142625B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- rectangular
- patterns
- rows
- predetermined amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13230583A JPS6024021A (ja) | 1983-07-20 | 1983-07-20 | 寸法チエツクパタ−ン |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13230583A JPS6024021A (ja) | 1983-07-20 | 1983-07-20 | 寸法チエツクパタ−ン |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6024021A JPS6024021A (ja) | 1985-02-06 |
| JPH0142625B2 true JPH0142625B2 (enrdf_load_stackoverflow) | 1989-09-13 |
Family
ID=15078189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13230583A Granted JPS6024021A (ja) | 1983-07-20 | 1983-07-20 | 寸法チエツクパタ−ン |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6024021A (enrdf_load_stackoverflow) |
-
1983
- 1983-07-20 JP JP13230583A patent/JPS6024021A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6024021A (ja) | 1985-02-06 |
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