JPS6024021A - 寸法チエツクパタ−ン - Google Patents

寸法チエツクパタ−ン

Info

Publication number
JPS6024021A
JPS6024021A JP13230583A JP13230583A JPS6024021A JP S6024021 A JPS6024021 A JP S6024021A JP 13230583 A JP13230583 A JP 13230583A JP 13230583 A JP13230583 A JP 13230583A JP S6024021 A JPS6024021 A JP S6024021A
Authority
JP
Japan
Prior art keywords
pattern
patterns
rectangular
rows
order
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13230583A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0142625B2 (enrdf_load_stackoverflow
Inventor
「さな」田　克
Katsu Sanada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP13230583A priority Critical patent/JPS6024021A/ja
Publication of JPS6024021A publication Critical patent/JPS6024021A/ja
Publication of JPH0142625B2 publication Critical patent/JPH0142625B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Weting (AREA)
JP13230583A 1983-07-20 1983-07-20 寸法チエツクパタ−ン Granted JPS6024021A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13230583A JPS6024021A (ja) 1983-07-20 1983-07-20 寸法チエツクパタ−ン

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13230583A JPS6024021A (ja) 1983-07-20 1983-07-20 寸法チエツクパタ−ン

Publications (2)

Publication Number Publication Date
JPS6024021A true JPS6024021A (ja) 1985-02-06
JPH0142625B2 JPH0142625B2 (enrdf_load_stackoverflow) 1989-09-13

Family

ID=15078189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13230583A Granted JPS6024021A (ja) 1983-07-20 1983-07-20 寸法チエツクパタ−ン

Country Status (1)

Country Link
JP (1) JPS6024021A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0142625B2 (enrdf_load_stackoverflow) 1989-09-13

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