JPH0140505B2 - - Google Patents
Info
- Publication number
- JPH0140505B2 JPH0140505B2 JP55100200A JP10020080A JPH0140505B2 JP H0140505 B2 JPH0140505 B2 JP H0140505B2 JP 55100200 A JP55100200 A JP 55100200A JP 10020080 A JP10020080 A JP 10020080A JP H0140505 B2 JPH0140505 B2 JP H0140505B2
- Authority
- JP
- Japan
- Prior art keywords
- main surface
- diffusion
- oxide film
- silicon oxide
- mesa
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 20
- 238000009792 diffusion process Methods 0.000 description 12
- 239000008188 pellet Substances 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 239000011521 glass Substances 0.000 description 4
- 230000002457 bidirectional effect Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
Landscapes
- Bipolar Transistors (AREA)
- Thyristors (AREA)
- Weting (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10020080A JPS5724558A (en) | 1980-07-22 | 1980-07-22 | Semicondctor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10020080A JPS5724558A (en) | 1980-07-22 | 1980-07-22 | Semicondctor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5724558A JPS5724558A (en) | 1982-02-09 |
| JPH0140505B2 true JPH0140505B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-08-29 |
Family
ID=14267653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10020080A Granted JPS5724558A (en) | 1980-07-22 | 1980-07-22 | Semicondctor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5724558A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994028586A1 (en) * | 1993-06-01 | 1994-12-08 | Komatsu Ltd. | Semiconductor device having high breakdown strength |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109309001B (zh) * | 2017-07-26 | 2022-05-03 | 天津环鑫科技发展有限公司 | 一种采用印刷工艺制作gpp芯片的方法 |
-
1980
- 1980-07-22 JP JP10020080A patent/JPS5724558A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994028586A1 (en) * | 1993-06-01 | 1994-12-08 | Komatsu Ltd. | Semiconductor device having high breakdown strength |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5724558A (en) | 1982-02-09 |