JPH0136553B2 - - Google Patents

Info

Publication number
JPH0136553B2
JPH0136553B2 JP60147705A JP14770585A JPH0136553B2 JP H0136553 B2 JPH0136553 B2 JP H0136553B2 JP 60147705 A JP60147705 A JP 60147705A JP 14770585 A JP14770585 A JP 14770585A JP H0136553 B2 JPH0136553 B2 JP H0136553B2
Authority
JP
Japan
Prior art keywords
chain
evaporation
deposition
vacuum chamber
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60147705A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6210267A (ja
Inventor
Hiroshi Nohara
Shinichi Shirasawa
Hiroyuki Terauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SEIKOO DENSHI BUHIN KK
Original Assignee
SEIKOO DENSHI BUHIN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SEIKOO DENSHI BUHIN KK filed Critical SEIKOO DENSHI BUHIN KK
Priority to JP14770585A priority Critical patent/JPS6210267A/ja
Publication of JPS6210267A publication Critical patent/JPS6210267A/ja
Publication of JPH0136553B2 publication Critical patent/JPH0136553B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14770585A 1985-07-05 1985-07-05 イオンプレーティング装置 Granted JPS6210267A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14770585A JPS6210267A (ja) 1985-07-05 1985-07-05 イオンプレーティング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14770585A JPS6210267A (ja) 1985-07-05 1985-07-05 イオンプレーティング装置

Publications (2)

Publication Number Publication Date
JPS6210267A JPS6210267A (ja) 1987-01-19
JPH0136553B2 true JPH0136553B2 (OSRAM) 1989-08-01

Family

ID=15436370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14770585A Granted JPS6210267A (ja) 1985-07-05 1985-07-05 イオンプレーティング装置

Country Status (1)

Country Link
JP (1) JPS6210267A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5896047B1 (ja) * 2015-01-26 2016-03-30 三菱マテリアル株式会社 成膜装置、コーティング膜付き切削工具の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5253778A (en) * 1975-10-29 1977-04-30 Yoichi Murayama Ion plating apparatus

Also Published As

Publication number Publication date
JPS6210267A (ja) 1987-01-19

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