JPS6210267A - イオンプレーティング装置 - Google Patents

イオンプレーティング装置

Info

Publication number
JPS6210267A
JPS6210267A JP14770585A JP14770585A JPS6210267A JP S6210267 A JPS6210267 A JP S6210267A JP 14770585 A JP14770585 A JP 14770585A JP 14770585 A JP14770585 A JP 14770585A JP S6210267 A JPS6210267 A JP S6210267A
Authority
JP
Japan
Prior art keywords
materials
vapor deposition
voltage
range
ion plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14770585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0136553B2 (OSRAM
Inventor
Hiroshi Nohara
野原　浩
Shinichi Shirasawa
白沢　新一
Hiroyuki Terauchi
寺内　宏之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Electronic Components Ltd
Original Assignee
Seiko Electronic Components Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Electronic Components Ltd filed Critical Seiko Electronic Components Ltd
Priority to JP14770585A priority Critical patent/JPS6210267A/ja
Publication of JPS6210267A publication Critical patent/JPS6210267A/ja
Publication of JPH0136553B2 publication Critical patent/JPH0136553B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14770585A 1985-07-05 1985-07-05 イオンプレーティング装置 Granted JPS6210267A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14770585A JPS6210267A (ja) 1985-07-05 1985-07-05 イオンプレーティング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14770585A JPS6210267A (ja) 1985-07-05 1985-07-05 イオンプレーティング装置

Publications (2)

Publication Number Publication Date
JPS6210267A true JPS6210267A (ja) 1987-01-19
JPH0136553B2 JPH0136553B2 (OSRAM) 1989-08-01

Family

ID=15436370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14770585A Granted JPS6210267A (ja) 1985-07-05 1985-07-05 イオンプレーティング装置

Country Status (1)

Country Link
JP (1) JPS6210267A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5896047B1 (ja) * 2015-01-26 2016-03-30 三菱マテリアル株式会社 成膜装置、コーティング膜付き切削工具の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5253778A (en) * 1975-10-29 1977-04-30 Yoichi Murayama Ion plating apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5253778A (en) * 1975-10-29 1977-04-30 Yoichi Murayama Ion plating apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5896047B1 (ja) * 2015-01-26 2016-03-30 三菱マテリアル株式会社 成膜装置、コーティング膜付き切削工具の製造方法
WO2016121121A1 (ja) * 2015-01-26 2016-08-04 三菱マテリアル株式会社 成膜装置、コーティング膜付き切削工具の製造方法
CN107208260A (zh) * 2015-01-26 2017-09-26 三菱综合材料株式会社 成膜装置、带涂膜切削工具的制造方法
CN107208260B (zh) * 2015-01-26 2019-07-19 三菱综合材料株式会社 成膜装置、带涂膜切削工具的制造方法

Also Published As

Publication number Publication date
JPH0136553B2 (OSRAM) 1989-08-01

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