JPH0130861B2 - - Google Patents

Info

Publication number
JPH0130861B2
JPH0130861B2 JP1783A JP1783A JPH0130861B2 JP H0130861 B2 JPH0130861 B2 JP H0130861B2 JP 1783 A JP1783 A JP 1783A JP 1783 A JP1783 A JP 1783A JP H0130861 B2 JPH0130861 B2 JP H0130861B2
Authority
JP
Japan
Prior art keywords
group
radiation
polymer
sensitive
carbon atoms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58120636A (ja
Inventor
Rii Gofu Deibitsudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of JPS58120636A publication Critical patent/JPS58120636A/ja
Publication of JPH0130861B2 publication Critical patent/JPH0130861B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Macromolecular Compounds (AREA)
  • Polymerisation Methods In General (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP1783A 1982-01-04 1983-01-04 放射感受性ポリイミド前駆体組成物およびその製造方法 Granted JPS58120636A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US33676582A 1982-01-04 1982-01-04
US336765 1982-01-04
US427415 1982-09-29
US430856 1982-09-30

Publications (2)

Publication Number Publication Date
JPS58120636A JPS58120636A (ja) 1983-07-18
JPH0130861B2 true JPH0130861B2 (enExample) 1989-06-22

Family

ID=23317554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1783A Granted JPS58120636A (ja) 1982-01-04 1983-01-04 放射感受性ポリイミド前駆体組成物およびその製造方法

Country Status (1)

Country Link
JP (1) JPS58120636A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0646302B2 (ja) * 1987-06-22 1994-06-15 株式会社日立製作所 耐熱感光性重合体組成物
JP2675345B2 (ja) * 1988-08-29 1997-11-12 旭化成工業株式会社 感光性樹脂組成物
JP3211108B2 (ja) * 1992-06-25 2001-09-25 チッソ株式会社 感光性樹脂組成物

Also Published As

Publication number Publication date
JPS58120636A (ja) 1983-07-18

Similar Documents

Publication Publication Date Title
US4416973A (en) Radiation-sensitive polyimide precursor composition derived from a diaryl fluoro compound
EP0047184B1 (en) Radiation polymerizable composition for forming heat-resistant relief structures on electrical devices such as semiconductors and capacitors
US4454220A (en) Electrical device containing a radiation-sensitive polyimide precursor composition derived from a diaryl fluoro compound
US4430418A (en) Radiation-sensitive polyimide precursor composition derived from a diaryl fluoronated diamine compound
EP0084269B1 (en) Radiation-sensitive polyimide precursor composition derived from a diaryl fluoro compound
EP0456469B1 (en) Photosensitive heat-resistant polymer having hydroxyphenyl group
JPH03186847A (ja) 感光性樹脂組成物
JPH0130861B2 (enExample)
JPH0477741A (ja) 感光性樹脂組成物
JPH0990632A (ja) 感光性樹脂組成物及びそのパターン形成方法
JPH01283554A (ja) 耐熱感光性重合体組成物
JPH0470661A (ja) 感光性樹脂組成物
JPH0674323B2 (ja) 感光性樹脂の製造方法
JPH05134406A (ja) 半導体装置の製造方法
JP3040866B2 (ja) 感光性樹脂組成物
EP0341028A2 (en) Process for the preparation of photosensitive polymers
JPH03186849A (ja) 感光性樹脂組成物
JPS59131927A (ja) 感光性樹脂組成物
JPH0680780A (ja) 感光性樹脂の製造方法
JPH03179025A (ja) 感光性耐熱重合体の製造方法
JPH0495962A (ja) 感光性樹脂組成物
JPH09188762A (ja) 感光性ポリイミド前駆体の製造方法、重合体のアミド化方法および重合体のアミド化触媒
JPH05127384A (ja) 感光性樹脂組成物
JPH06282071A (ja) 感放射線性樹脂組成物
JPH03233457A (ja) 感光性樹脂組成物