JPH0129063B2 - - Google Patents

Info

Publication number
JPH0129063B2
JPH0129063B2 JP59011044A JP1104484A JPH0129063B2 JP H0129063 B2 JPH0129063 B2 JP H0129063B2 JP 59011044 A JP59011044 A JP 59011044A JP 1104484 A JP1104484 A JP 1104484A JP H0129063 B2 JPH0129063 B2 JP H0129063B2
Authority
JP
Japan
Prior art keywords
wafer
holder
suction
urethane foam
suction piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59011044A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60157231A (ja
Inventor
Takayuki Minamyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP59011044A priority Critical patent/JPS60157231A/ja
Publication of JPS60157231A publication Critical patent/JPS60157231A/ja
Publication of JPH0129063B2 publication Critical patent/JPH0129063B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/78—
    • H10P72/50—

Landscapes

  • Manipulator (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP59011044A 1984-01-26 1984-01-26 ウエ−ハロ−ダ Granted JPS60157231A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59011044A JPS60157231A (ja) 1984-01-26 1984-01-26 ウエ−ハロ−ダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59011044A JPS60157231A (ja) 1984-01-26 1984-01-26 ウエ−ハロ−ダ

Publications (2)

Publication Number Publication Date
JPS60157231A JPS60157231A (ja) 1985-08-17
JPH0129063B2 true JPH0129063B2 (OSRAM) 1989-06-07

Family

ID=11767041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59011044A Granted JPS60157231A (ja) 1984-01-26 1984-01-26 ウエ−ハロ−ダ

Country Status (1)

Country Link
JP (1) JPS60157231A (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07264B2 (ja) * 1987-08-10 1995-01-11 住友電気工業株式会社 半導体ウエハの貼付方法および装置
US5443416A (en) * 1993-09-09 1995-08-22 Cybeq Systems Incorporated Rotary union for coupling fluids in a wafer polishing apparatus
KR100967222B1 (ko) 2008-06-16 2010-07-05 정진황 이송챔버 및 기판이송방법
JP5493633B2 (ja) 2009-09-18 2014-05-14 株式会社Ｓｕｍｃｏ 研磨方法及びその装置
US9355882B2 (en) * 2013-12-04 2016-05-31 Taiwan Semiconductor Manufacturing Co., Ltd. Transfer module for bowed wafers
CN106826510A (zh) * 2016-12-30 2017-06-13 郑州晶润光电技术有限公司 一种晶片扫光工艺

Also Published As

Publication number Publication date
JPS60157231A (ja) 1985-08-17

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