JPH0125903B2 - - Google Patents
Info
- Publication number
- JPH0125903B2 JPH0125903B2 JP20018185A JP20018185A JPH0125903B2 JP H0125903 B2 JPH0125903 B2 JP H0125903B2 JP 20018185 A JP20018185 A JP 20018185A JP 20018185 A JP20018185 A JP 20018185A JP H0125903 B2 JPH0125903 B2 JP H0125903B2
- Authority
- JP
- Japan
- Prior art keywords
- relief valve
- valve
- cryopump
- piston
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 25
- 238000007789 sealing Methods 0.000 description 11
- 230000006835 compression Effects 0.000 description 7
- 238000007906 compression Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
Landscapes
- Safety Valves (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20018185A JPS6260988A (ja) | 1985-09-10 | 1985-09-10 | リリ−フ弁装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20018185A JPS6260988A (ja) | 1985-09-10 | 1985-09-10 | リリ−フ弁装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6260988A JPS6260988A (ja) | 1987-03-17 |
JPH0125903B2 true JPH0125903B2 (de) | 1989-05-19 |
Family
ID=16420140
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20018185A Granted JPS6260988A (ja) | 1985-09-10 | 1985-09-10 | リリ−フ弁装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6260988A (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6200197B2 (ja) * | 2013-04-23 | 2017-09-20 | 株式会社モリタホールディングス | 高速開放機構 |
CN108252893B (zh) * | 2018-01-25 | 2019-07-23 | 乐清市乐翔电气有限公司 | 一种无气耗气体增压系统 |
-
1985
- 1985-09-10 JP JP20018185A patent/JPS6260988A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6260988A (ja) | 1987-03-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |