JPH0123939B2 - - Google Patents

Info

Publication number
JPH0123939B2
JPH0123939B2 JP13831684A JP13831684A JPH0123939B2 JP H0123939 B2 JPH0123939 B2 JP H0123939B2 JP 13831684 A JP13831684 A JP 13831684A JP 13831684 A JP13831684 A JP 13831684A JP H0123939 B2 JPH0123939 B2 JP H0123939B2
Authority
JP
Japan
Prior art keywords
tube
gas
nozzle
double
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13831684A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6116531A (ja
Inventor
Shigeaki Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP13831684A priority Critical patent/JPS6116531A/ja
Publication of JPS6116531A publication Critical patent/JPS6116531A/ja
Publication of JPH0123939B2 publication Critical patent/JPH0123939B2/ja
Granted legal-status Critical Current

Links

JP13831684A 1984-07-03 1984-07-03 半導体装置の製造方法 Granted JPS6116531A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13831684A JPS6116531A (ja) 1984-07-03 1984-07-03 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13831684A JPS6116531A (ja) 1984-07-03 1984-07-03 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6116531A JPS6116531A (ja) 1986-01-24
JPH0123939B2 true JPH0123939B2 (OSRAM) 1989-05-09

Family

ID=15219042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13831684A Granted JPS6116531A (ja) 1984-07-03 1984-07-03 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6116531A (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8603111A (nl) * 1986-12-08 1988-07-01 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting waarbij een siliciumplak aan zijn oppervlak wordt voorzien van veldoxidegebieden.
KR970007113B1 (ko) * 1987-09-01 1997-05-02 도오교오 에레구토론 사가미 가부시끼 가이샤 산화 장치
JP2678184B2 (ja) * 1988-02-10 1997-11-17 東京エレクトロン株式会社 酸化炉
JPH0669940B2 (ja) * 1988-03-16 1994-09-07 ライオン株式会社 白髪防止剤
EP0435180B1 (en) * 1989-12-27 1993-08-18 Lion Corporation Composition for treating hair

Also Published As

Publication number Publication date
JPS6116531A (ja) 1986-01-24

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