JPH0120640Y2 - - Google Patents

Info

Publication number
JPH0120640Y2
JPH0120640Y2 JP1984168873U JP16887384U JPH0120640Y2 JP H0120640 Y2 JPH0120640 Y2 JP H0120640Y2 JP 1984168873 U JP1984168873 U JP 1984168873U JP 16887384 U JP16887384 U JP 16887384U JP H0120640 Y2 JPH0120640 Y2 JP H0120640Y2
Authority
JP
Japan
Prior art keywords
heat
insulating layer
lead terminal
furnace
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984168873U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6184500U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984168873U priority Critical patent/JPH0120640Y2/ja
Publication of JPS6184500U publication Critical patent/JPS6184500U/ja
Application granted granted Critical
Publication of JPH0120640Y2 publication Critical patent/JPH0120640Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Resistance Heating (AREA)
  • Resistance Heating (AREA)
  • Furnace Details (AREA)
JP1984168873U 1984-11-07 1984-11-07 Expired JPH0120640Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984168873U JPH0120640Y2 (OSRAM) 1984-11-07 1984-11-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984168873U JPH0120640Y2 (OSRAM) 1984-11-07 1984-11-07

Publications (2)

Publication Number Publication Date
JPS6184500U JPS6184500U (OSRAM) 1986-06-03
JPH0120640Y2 true JPH0120640Y2 (OSRAM) 1989-06-21

Family

ID=30726634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984168873U Expired JPH0120640Y2 (OSRAM) 1984-11-07 1984-11-07

Country Status (1)

Country Link
JP (1) JPH0120640Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007110163A (ja) * 2007-01-10 2007-04-26 Hitachi Kokusai Electric Inc 半導体製造装置及び熱処理装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2651601B2 (ja) * 1987-07-31 1997-09-10 東京エレクトロン株式会社 加熱炉
JP5077808B2 (ja) * 2007-05-18 2012-11-21 日産自動車株式会社 燃料電池スタック用断熱容器及び燃料電池装置
JP5686467B2 (ja) * 2010-10-15 2015-03-18 株式会社日立国際電気 基板処理装置及び半導体装置の製造方法
JP5787723B2 (ja) * 2011-10-28 2015-09-30 株式会社東芝 超伝導コイルの加熱処理装置及び加熱処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54174041U (OSRAM) * 1978-05-29 1979-12-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007110163A (ja) * 2007-01-10 2007-04-26 Hitachi Kokusai Electric Inc 半導体製造装置及び熱処理装置

Also Published As

Publication number Publication date
JPS6184500U (OSRAM) 1986-06-03

Similar Documents

Publication Publication Date Title
US5659127A (en) Substrate structure of monolithic gas sensor
JPH05504227A (ja) 電気炉
JPH0120640Y2 (OSRAM)
JP3434721B2 (ja) 封止端子
US3406275A (en) Furnace having fingers interdigitatedly engaged with its heating elements
KR0159527B1 (ko) 열처리장치
JPS60245215A (ja) 縦型炉
US4185980A (en) Manufacturing glass with improved silicon carbide bushing operation
JPS63278227A (ja) 熱処理装置
JPH0110921Y2 (OSRAM)
JPS63284787A (ja) 撚線ヒ−タおよび半導体熱処理装置
CA1199177A (en) Auxiliary side heater for a float glass forming chamber
JPH05500435A (ja) シリコン加熱エレメント
JP4438246B2 (ja) 熱処理装置
JP3257986B2 (ja) 半導体処理装置用温度センサー及び熱電対
JP4184724B2 (ja) 熱処理装置
JPH0718445A (ja) 熱処理装置
JPH05303914A (ja) 安定化したセラミック高温超電導体およびその製造方法
JP4159066B2 (ja) プロセスチューブ
JPH08181082A (ja) 縦型高速熱処理装置
JP2012089557A (ja) 基板処理装置及び半導体装置の製造方法
JPS61141123A (ja) 半導体製造装置
JPS61287225A (ja) 加熱炉
JP3178245B2 (ja) 酸化物超電導線材の製造方法
JPH0669144A (ja) 熱処理装置