JPH0118031B2 - - Google Patents
Info
- Publication number
- JPH0118031B2 JPH0118031B2 JP56094385A JP9438581A JPH0118031B2 JP H0118031 B2 JPH0118031 B2 JP H0118031B2 JP 56094385 A JP56094385 A JP 56094385A JP 9438581 A JP9438581 A JP 9438581A JP H0118031 B2 JPH0118031 B2 JP H0118031B2
- Authority
- JP
- Japan
- Prior art keywords
- sintering
- hip
- temperature
- sintered body
- silicon nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 56
- 238000005245 sintering Methods 0.000 claims description 55
- 238000010438 heat treatment Methods 0.000 claims description 27
- 239000007789 gas Substances 0.000 claims description 26
- 239000012298 atmosphere Substances 0.000 claims description 17
- 239000000843 powder Substances 0.000 claims description 17
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 16
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 16
- 230000001590 oxidative effect Effects 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 238000001513 hot isostatic pressing Methods 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 3
- 229910052593 corundum Inorganic materials 0.000 claims description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 2
- 230000036760 body temperature Effects 0.000 claims 1
- 229910001873 dinitrogen Inorganic materials 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 13
- 238000005452 bending Methods 0.000 description 11
- 238000005979 thermal decomposition reaction Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 238000000354 decomposition reaction Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 230000004580 weight loss Effects 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 238000005121 nitriding Methods 0.000 description 5
- 230000035939 shock Effects 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000000280 densification Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000000197 pyrolysis Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010574 gas phase reaction Methods 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000011863 silicon-based powder Substances 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000001272 pressureless sintering Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56094385A JPS57209887A (en) | 1981-06-17 | 1981-06-17 | Method of sintering silicon nitride |
| DE3141590A DE3141590C2 (de) | 1980-10-20 | 1981-10-20 | Verfahren zur Herstellung von hochdichtem gesintertem Siliziumnitrid |
| US07/251,052 US5603876A (en) | 1980-10-20 | 1988-09-26 | Method for producing high density sintered silicon nitride (SI3 N.sub.4 |
| US07/814,806 US5445776A (en) | 1980-10-20 | 1991-12-31 | Method for producing high density sintered silicon nitride (Si3 N.sub.4 |
| US08/463,273 US5665291A (en) | 1980-10-20 | 1995-06-05 | Method for producing high density sintered silicon nitride(Si3 N4) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56094385A JPS57209887A (en) | 1981-06-17 | 1981-06-17 | Method of sintering silicon nitride |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57209887A JPS57209887A (en) | 1982-12-23 |
| JPH0118031B2 true JPH0118031B2 (zh) | 1989-04-03 |
Family
ID=14108817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56094385A Granted JPS57209887A (en) | 1980-10-20 | 1981-06-17 | Method of sintering silicon nitride |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57209887A (zh) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59198690A (ja) * | 1983-04-25 | 1984-11-10 | いすゞ自動車株式会社 | セラミツクヒ−タ−及びその製造方法 |
| JPS6355163A (ja) * | 1986-08-26 | 1988-03-09 | 株式会社豊田中央研究所 | 耐摩耗材用窒化けい素質焼結体 |
| US5013696A (en) * | 1989-09-25 | 1991-05-07 | General Electric Company | Preparation of high uniformity polycrystalline ceramics by presintering, hot isostatic pressing and sintering and the resulting ceramic |
| CN108774066A (zh) * | 2018-06-19 | 2018-11-09 | 威海麒达特种陶瓷科技有限公司 | 高导热氮化硅基片的制造方法 |
-
1981
- 1981-06-17 JP JP56094385A patent/JPS57209887A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57209887A (en) | 1982-12-23 |
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