JPS57209887A - Method of sintering silicon nitride - Google Patents

Method of sintering silicon nitride

Info

Publication number
JPS57209887A
JPS57209887A JP56094385A JP9438581A JPS57209887A JP S57209887 A JPS57209887 A JP S57209887A JP 56094385 A JP56094385 A JP 56094385A JP 9438581 A JP9438581 A JP 9438581A JP S57209887 A JPS57209887 A JP S57209887A
Authority
JP
Japan
Prior art keywords
silicon nitride
sintering silicon
sintering
nitride
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56094385A
Other languages
Japanese (ja)
Other versions
JPH0118031B2 (en
Inventor
Katsuhiko Honma
Tsuneo Tateno
Hiroshi Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP56094385A priority Critical patent/JPS57209887A/en
Priority to DE3141590A priority patent/DE3141590C2/en
Publication of JPS57209887A publication Critical patent/JPS57209887A/en
Priority to US07/251,052 priority patent/US5603876A/en
Publication of JPH0118031B2 publication Critical patent/JPH0118031B2/ja
Priority to US07/814,806 priority patent/US5445776A/en
Priority to US08/463,273 priority patent/US5665291A/en
Granted legal-status Critical Current

Links

JP56094385A 1980-10-20 1981-06-17 Method of sintering silicon nitride Granted JPS57209887A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP56094385A JPS57209887A (en) 1981-06-17 1981-06-17 Method of sintering silicon nitride
DE3141590A DE3141590C2 (en) 1980-10-20 1981-10-20 Process for the production of high density sintered silicon nitride
US07/251,052 US5603876A (en) 1980-10-20 1988-09-26 Method for producing high density sintered silicon nitride (SI3 N.sub.4
US07/814,806 US5445776A (en) 1980-10-20 1991-12-31 Method for producing high density sintered silicon nitride (Si3 N.sub.4
US08/463,273 US5665291A (en) 1980-10-20 1995-06-05 Method for producing high density sintered silicon nitride(Si3 N4)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56094385A JPS57209887A (en) 1981-06-17 1981-06-17 Method of sintering silicon nitride

Publications (2)

Publication Number Publication Date
JPS57209887A true JPS57209887A (en) 1982-12-23
JPH0118031B2 JPH0118031B2 (en) 1989-04-03

Family

ID=14108817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56094385A Granted JPS57209887A (en) 1980-10-20 1981-06-17 Method of sintering silicon nitride

Country Status (1)

Country Link
JP (1) JPS57209887A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59198690A (en) * 1983-04-25 1984-11-10 いすゞ自動車株式会社 Ceramic heater and method of producing same
JPS6355163A (en) * 1986-08-26 1988-03-09 株式会社豊田中央研究所 Silicon nitride base sintered body for antiabrasive material
JPH03150270A (en) * 1989-09-25 1991-06-26 General Electric Co <Ge> Ceramic body and manufacture thereof
CN108774066A (en) * 2018-06-19 2018-11-09 威海麒达特种陶瓷科技有限公司 High heat conduction nitrogenizes the manufacturing method of silicon chip

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59198690A (en) * 1983-04-25 1984-11-10 いすゞ自動車株式会社 Ceramic heater and method of producing same
JPH0547959B2 (en) * 1983-04-25 1993-07-20 Isuzu Motors Ltd
JPS6355163A (en) * 1986-08-26 1988-03-09 株式会社豊田中央研究所 Silicon nitride base sintered body for antiabrasive material
JPH03150270A (en) * 1989-09-25 1991-06-26 General Electric Co <Ge> Ceramic body and manufacture thereof
CN108774066A (en) * 2018-06-19 2018-11-09 威海麒达特种陶瓷科技有限公司 High heat conduction nitrogenizes the manufacturing method of silicon chip

Also Published As

Publication number Publication date
JPH0118031B2 (en) 1989-04-03

Similar Documents

Publication Publication Date Title
JPS54160410A (en) Method of sintering reactionncombined silicon nitride
GB2109810B (en) Sintered shapes of silicon carbide and method of making same
EP0075857A3 (en) Sintered bodies of aluminum nitride
JPS57162338A (en) Method of etching semiconductor
DE3266050D1 (en) Method for sintering silicon nitride
DE3272619D1 (en) Process for preparing silicon nitride powder
DE3261906D1 (en) Synthesis of silicon nitride
DE3662391D1 (en) Process for preparation of sintered silicon nitride
GB2129788B (en) Silicon nitride ceramic bodies
JPS56149378A (en) Manufacture of silicon nitride sintered body
DE3166037D1 (en) Method for manufacture of silicon nitride
GB2104103B (en) Forming shaped silicon carbide bodies
EP0158698A3 (en) Method of manufacturing b type silicon nitride whiskers
GB2105316B (en) Porous silicon nitride
DE3262765D1 (en) Making silicon carbide bodies
ZA844870B (en) Method of making silicon nitride comprising objects
JPS57175777A (en) Manufacture of silicon nitride sintered body
EP0206795A3 (en) Method of producing silicon nitride powders
JPS57106574A (en) Method of sintering silicon nitride
JPS57209887A (en) Method of sintering silicon nitride
ZA792082B (en) Method of manufacturing an object of silicon nitride
JPS57123865A (en) Manufacture of high density silicon nitride sintered body
GB2098798B (en) Method of making silicon semiconductor devices
JPS57160975A (en) Ceramics sintering method
JPS57146607A (en) Method of molding ceramic