JPH01176933U - - Google Patents
Info
- Publication number
- JPH01176933U JPH01176933U JP7464588U JP7464588U JPH01176933U JP H01176933 U JPH01176933 U JP H01176933U JP 7464588 U JP7464588 U JP 7464588U JP 7464588 U JP7464588 U JP 7464588U JP H01176933 U JPH01176933 U JP H01176933U
- Authority
- JP
- Japan
- Prior art keywords
- coating film
- elastic material
- cooling stand
- wafer cooling
- film made
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000001816 cooling Methods 0.000 claims 2
- 239000013013 elastic material Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
図面は本考案の一実施例を示す縦断面図である
。 １は金属電極、２は第１の塗膜、３は第２の塗
膜。
。 １は金属電極、２は第１の塗膜、３は第２の塗
膜。
Claims (1)
- 半導体工業用ウエハにエツチング或いは成膜処
理等を施すに際し、これを静電気力により保持し
冷却するウエハ冷却台であつて、冷却される金属
電極面上に導電性弾性体からなる第１の塗膜を、
また該第１の塗膜上に絶縁性弾性体からなる第２
の塗膜を形成して電極の一方を構成したことを特
徴とする静電チヤツク式ウエハ冷却台。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7464588U JPH01176933U (ja) | 1988-06-03 | 1988-06-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7464588U JPH01176933U (ja) | 1988-06-03 | 1988-06-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01176933U true JPH01176933U (ja) | 1989-12-18 |
Family
ID=31299748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7464588U Pending JPH01176933U (ja) | 1988-06-03 | 1988-06-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01176933U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02308520A (ja) * | 1989-05-23 | 1990-12-21 | Sony Corp | 低温処理装置 |
-
1988
- 1988-06-03 JP JP7464588U patent/JPH01176933U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02308520A (ja) * | 1989-05-23 | 1990-12-21 | Sony Corp | 低温処理装置 |
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