JPH01175236A - 自動リフトオフ方法 - Google Patents

自動リフトオフ方法

Info

Publication number
JPH01175236A
JPH01175236A JP33291587A JP33291587A JPH01175236A JP H01175236 A JPH01175236 A JP H01175236A JP 33291587 A JP33291587 A JP 33291587A JP 33291587 A JP33291587 A JP 33291587A JP H01175236 A JPH01175236 A JP H01175236A
Authority
JP
Japan
Prior art keywords
wafer
cylinder
spin chuck
organic solvent
unloader
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP33291587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0465527B2 (enrdf_load_stackoverflow
Inventor
Satoru Iguchi
悟 井口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHIOTANI SEISAKUSHO KK
Original Assignee
SHIOTANI SEISAKUSHO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHIOTANI SEISAKUSHO KK filed Critical SHIOTANI SEISAKUSHO KK
Priority to JP33291587A priority Critical patent/JPH01175236A/ja
Publication of JPH01175236A publication Critical patent/JPH01175236A/ja
Publication of JPH0465527B2 publication Critical patent/JPH0465527B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP33291587A 1987-12-29 1987-12-29 自動リフトオフ方法 Granted JPH01175236A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33291587A JPH01175236A (ja) 1987-12-29 1987-12-29 自動リフトオフ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33291587A JPH01175236A (ja) 1987-12-29 1987-12-29 自動リフトオフ方法

Publications (2)

Publication Number Publication Date
JPH01175236A true JPH01175236A (ja) 1989-07-11
JPH0465527B2 JPH0465527B2 (enrdf_load_stackoverflow) 1992-10-20

Family

ID=18260226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33291587A Granted JPH01175236A (ja) 1987-12-29 1987-12-29 自動リフトオフ方法

Country Status (1)

Country Link
JP (1) JPH01175236A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005529483A (ja) * 2002-05-08 2005-09-29 ウンアクシス バルツェルス アクチェンゲゼルシャフト 三次元表面パターンを有するユニットを形成する方法および同方法の使用
JP2008210841A (ja) * 2007-02-23 2008-09-11 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086837A (ja) * 1983-10-19 1985-05-16 Matsushita Electronics Corp 半導体装置の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086837A (ja) * 1983-10-19 1985-05-16 Matsushita Electronics Corp 半導体装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005529483A (ja) * 2002-05-08 2005-09-29 ウンアクシス バルツェルス アクチェンゲゼルシャフト 三次元表面パターンを有するユニットを形成する方法および同方法の使用
JP2010272877A (ja) * 2002-05-08 2010-12-02 Oerlikon Trading Ag Trubbach 三次元表面パターンを有するユニットを形成する方法および同方法の使用
JP2008210841A (ja) * 2007-02-23 2008-09-11 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法

Also Published As

Publication number Publication date
JPH0465527B2 (enrdf_load_stackoverflow) 1992-10-20

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