JPH01157535A - パターン形成方法 - Google Patents

パターン形成方法

Info

Publication number
JPH01157535A
JPH01157535A JP31581587A JP31581587A JPH01157535A JP H01157535 A JPH01157535 A JP H01157535A JP 31581587 A JP31581587 A JP 31581587A JP 31581587 A JP31581587 A JP 31581587A JP H01157535 A JPH01157535 A JP H01157535A
Authority
JP
Japan
Prior art keywords
layer
resist
ultraviolet rays
resist layer
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31581587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519300B2 (enrdf_load_stackoverflow
Inventor
Katsuya Okumura
勝弥 奥村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP31581587A priority Critical patent/JPH01157535A/ja
Publication of JPH01157535A publication Critical patent/JPH01157535A/ja
Publication of JPH0519300B2 publication Critical patent/JPH0519300B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Weting (AREA)
JP31581587A 1987-12-14 1987-12-14 パターン形成方法 Granted JPH01157535A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31581587A JPH01157535A (ja) 1987-12-14 1987-12-14 パターン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31581587A JPH01157535A (ja) 1987-12-14 1987-12-14 パターン形成方法

Publications (2)

Publication Number Publication Date
JPH01157535A true JPH01157535A (ja) 1989-06-20
JPH0519300B2 JPH0519300B2 (enrdf_load_stackoverflow) 1993-03-16

Family

ID=18069888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31581587A Granted JPH01157535A (ja) 1987-12-14 1987-12-14 パターン形成方法

Country Status (1)

Country Link
JP (1) JPH01157535A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0519300B2 (enrdf_load_stackoverflow) 1993-03-16

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