JPH0114709B2 - - Google Patents

Info

Publication number
JPH0114709B2
JPH0114709B2 JP56182330A JP18233081A JPH0114709B2 JP H0114709 B2 JPH0114709 B2 JP H0114709B2 JP 56182330 A JP56182330 A JP 56182330A JP 18233081 A JP18233081 A JP 18233081A JP H0114709 B2 JPH0114709 B2 JP H0114709B2
Authority
JP
Japan
Prior art keywords
wiring
protective film
photoresist
metal
polyimide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56182330A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5884447A (ja
Inventor
Kazuyoshi Asai
Katsuhiko Kurumada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP18233081A priority Critical patent/JPS5884447A/ja
Publication of JPS5884447A publication Critical patent/JPS5884447A/ja
Publication of JPH0114709B2 publication Critical patent/JPH0114709B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP18233081A 1981-11-16 1981-11-16 素子間配線接続方法 Granted JPS5884447A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18233081A JPS5884447A (ja) 1981-11-16 1981-11-16 素子間配線接続方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18233081A JPS5884447A (ja) 1981-11-16 1981-11-16 素子間配線接続方法

Publications (2)

Publication Number Publication Date
JPS5884447A JPS5884447A (ja) 1983-05-20
JPH0114709B2 true JPH0114709B2 (en, 2012) 1989-03-14

Family

ID=16116414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18233081A Granted JPS5884447A (ja) 1981-11-16 1981-11-16 素子間配線接続方法

Country Status (1)

Country Link
JP (1) JPS5884447A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59210716A (ja) * 1983-05-13 1984-11-29 Matsushita Electric Ind Co Ltd 表面波デバイス用基板
JP4877201B2 (ja) * 2007-11-06 2012-02-15 株式会社デンソー スタータ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629347A (en) * 1979-08-17 1981-03-24 Nec Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5884447A (ja) 1983-05-20

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