JPH01120336U - - Google Patents
Info
- Publication number
- JPH01120336U JPH01120336U JP1575088U JP1575088U JPH01120336U JP H01120336 U JPH01120336 U JP H01120336U JP 1575088 U JP1575088 U JP 1575088U JP 1575088 U JP1575088 U JP 1575088U JP H01120336 U JPH01120336 U JP H01120336U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- housing
- sealed
- arm
- link
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1575088U JPH0533011Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-02-10 | 1988-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1575088U JPH0533011Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-02-10 | 1988-02-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01120336U true JPH01120336U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-08-15 |
| JPH0533011Y2 JPH0533011Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-23 |
Family
ID=31228071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1575088U Expired - Lifetime JPH0533011Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-02-10 | 1988-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0533011Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013047519A1 (ja) * | 2011-09-30 | 2013-04-04 | 東京エレクトロン株式会社 | 駆動装置及び基板処理システム |
| JP2017513036A (ja) * | 2014-11-14 | 2017-05-25 | マッパー・リソグラフィー・アイピー・ビー．ブイ． | 貨物固定システムおよびリソグラフィシステム内で基板を移送するための方法 |
-
1988
- 1988-02-10 JP JP1575088U patent/JPH0533011Y2/ja not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013047519A1 (ja) * | 2011-09-30 | 2013-04-04 | 東京エレクトロン株式会社 | 駆動装置及び基板処理システム |
| JP2013077775A (ja) * | 2011-09-30 | 2013-04-25 | Tokyo Electron Ltd | 駆動装置及び基板処理システム |
| KR20140069045A (ko) * | 2011-09-30 | 2014-06-09 | 도쿄엘렉트론가부시키가이샤 | 구동 장치 및 기판 처리 시스템 |
| US9995378B2 (en) | 2011-09-30 | 2018-06-12 | Tokyo Electron Limited | Drive device and substrate processing system |
| JP2017513036A (ja) * | 2014-11-14 | 2017-05-25 | マッパー・リソグラフィー・アイピー・ビー．ブイ． | 貨物固定システムおよびリソグラフィシステム内で基板を移送するための方法 |
| US10087019B2 (en) | 2014-11-14 | 2018-10-02 | Mapper Lithography Ip B.V. | Load lock system and method for transferring substrates in a lithography system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0533011Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-23 |