JPH01120336U - - Google Patents

Info

Publication number
JPH01120336U
JPH01120336U JP1575088U JP1575088U JPH01120336U JP H01120336 U JPH01120336 U JP H01120336U JP 1575088 U JP1575088 U JP 1575088U JP 1575088 U JP1575088 U JP 1575088U JP H01120336 U JPH01120336 U JP H01120336U
Authority
JP
Japan
Prior art keywords
shaft
housing
sealed
arm
link
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1575088U
Other languages
Japanese (ja)
Other versions
JPH0533011Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1575088U priority Critical patent/JPH0533011Y2/ja
Publication of JPH01120336U publication Critical patent/JPH01120336U/ja
Application granted granted Critical
Publication of JPH0533011Y2 publication Critical patent/JPH0533011Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の実施例を示す図、第２図は第
１図のＺ矢方向から見た図である。 図において、１は真空容器の壁、２はベローズ
、３，５はフランジ、４，６はＯリング、７はハ
ウジング、８はガイド、９は直線駆動手段、１０
，１０′，１４，１４′はシール手段、１１，１
５はモータ、１２はベルト、１３は第１の軸、１
６は第２の軸、１７は平行リンク機構、１８，２
０はベアリング孔、１９はアーム、２１はリンク
、２２，２３はピン、２４は基板保持レバー、２
５は基板保持部、を示す。 FIG. 1 is a diagram showing an embodiment of the present invention, and FIG. 2 is a diagram seen from the Z arrow direction in FIG. 1. In the figure, 1 is the wall of the vacuum container, 2 is a bellows, 3 and 5 are flanges, 4 and 6 are O-rings, 7 is a housing, 8 is a guide, 9 is a linear drive means, and 10
, 10', 14, 14' are sealing means, 11, 1
5 is a motor, 12 is a belt, 13 is a first shaft, 1
6 is a second axis, 17 is a parallel link mechanism, 18, 2
0 is a bearing hole, 19 is an arm, 21 is a link, 22, 23 is a pin, 24 is a board holding lever, 2
5 indicates a substrate holding section.

Claims (1)

【実用新案登録請求の範囲】 真空容器の壁１に対しベローズ２でシールされ
、該壁面に対し垂直方向に移動可能に設けられた
ハウジング７と、 該ハウジング７に設けられた中空部を挿通し、
Ｏリング等のシール手段１０，１０′でシールさ
れた回転自在で且つ中空な第１の軸１３と、 該第１の軸１３の中空部を挿通し、Ｏリング等
のシール手段１４，１４′でシールされた回転自
在な第２の軸１６と、 上記第１の軸１３及び第２の軸１６に取付けら
れた平行リンク機構１７とより構成され、 上記平行リンク機構１７は第２の軸１６の端部
に一端を固定され他端にベアリング孔１８を有す
るアーム１９と、第１の軸１３の端面にその回転
中心から離れた位置に一端を回動自在に軸着され
且つ前記アーム１９と同じ長さを有するリンク２
１と、前記アーム１９とリンク２１とが平行とな
るように他端を軸着した基板保持レバー２４とよ
りなることを 特徴とする真空用半導体基板搬送装置。[Claims for Utility Model Registration] A housing 7 that is sealed to a wall 1 of a vacuum container with a bellows 2 and is movable in a direction perpendicular to the wall surface, and a hollow part provided in the housing 7 that is inserted through the housing 7. ,
A rotatable and hollow first shaft 13 sealed with sealing means 10, 10' such as an O-ring, and sealing means 14, 14' such as an O-ring inserted through the hollow part of the first shaft 13. It is composed of a rotatable second shaft 16 that is sealed with an arm 19 having one end fixed to the end of the first shaft 13 and having a bearing hole 18 at the other end; Link 2 with the same length
1; and a substrate holding lever 24 whose other end is pivoted so that the arm 19 and the link 21 are parallel to each other.
JP1575088U 1988-02-10 1988-02-10 Expired - Lifetime JPH0533011Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1575088U JPH0533011Y2 (en) 1988-02-10 1988-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1575088U JPH0533011Y2 (en) 1988-02-10 1988-02-10

Publications (2)

Publication Number Publication Date
JPH01120336U true JPH01120336U (en) 1989-08-15
JPH0533011Y2 JPH0533011Y2 (en) 1993-08-23

Family

ID=31228071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1575088U Expired - Lifetime JPH0533011Y2 (en) 1988-02-10 1988-02-10

Country Status (1)

Country Link
JP (1) JPH0533011Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013047519A1 (en) * 2011-09-30 2013-04-04 東京エレクトロン株式会社 Drive device and substrate processing system
JP2017513036A (en) * 2014-11-14 2017-05-25 マッパー・リソグラフィー・アイピー・ビー．ブイ． Cargo fixing system and method for transferring a substrate in a lithography system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013047519A1 (en) * 2011-09-30 2013-04-04 東京エレクトロン株式会社 Drive device and substrate processing system
JP2013077775A (en) * 2011-09-30 2013-04-25 Tokyo Electron Ltd Driving device and substrate processing method
KR20140069045A (en) * 2011-09-30 2014-06-09 도쿄엘렉트론가부시키가이샤 Drive device and substrate processing system
US9995378B2 (en) 2011-09-30 2018-06-12 Tokyo Electron Limited Drive device and substrate processing system
JP2017513036A (en) * 2014-11-14 2017-05-25 マッパー・リソグラフィー・アイピー・ビー．ブイ． Cargo fixing system and method for transferring a substrate in a lithography system
US10087019B2 (en) 2014-11-14 2018-10-02 Mapper Lithography Ip B.V. Load lock system and method for transferring substrates in a lithography system

Also Published As

Publication number Publication date
JPH0533011Y2 (en) 1993-08-23

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