JP2002066976A - Vacuum robot for carrying substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vacuum robot for carrying a substrate capable of shortening the cycle time by using a magnet coupling. SOLUTION: A carrying part 10 is accommodated in a vacuum vessel 3, and a drive unit 30 is accommodated within a frame 5 on the atmosphere side. A bulkhead 4 projecting on the drive unit 30 side is formed in the vacuum vessel 3, and double drive shafts (a first drive shaft 11 and a second drive shaft 12) are concentrically disposed in the bulkhead 4. The first drive shaft 11 is connected to a first motor 31 via the magnet coupling 6 comprising an outer ring magnet 61 and an inner ring magnet 62 to transmit the drive of the first motor 31 to a first arm 14. The second drive shaft 12 is connected to a second motor 32 via the magnet coupling 7 comprising an outer ring magnet 71 and an inner ring magnet 72 to transmit the drive of the second motor 32 to a second arm 15 via a pulley 17.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer vacuum robot for transferring a substrate processed in a vacuum chamber, and more particularly to a substrate transfer vacuum robot driven by a magnetic coupling.

[0002]

2. Description of the Related Art Conventionally, a robot for processing in a vacuum vessel or for transporting a processed substrate has a magnetic fluid seal having sealability and pressure resistance in order to separate the atmosphere side from the vacuum side. Was used. For example,
As shown in FIG. 3, a general robot 41 configured with a magnetic fluid seal as a bearing includes a first drive shaft 43 that drives a first arm 42 and a second drive shaft 43 that drives a pulley 44 in the first arm 42. The drive shaft 45 is inserted into the insertion port 46 of the vacuum container 46.
a, and arranged so as to pass through the inside of the vacuum vessel 46 and the machine 47 on the atmosphere side. The first drive shaft 43 is inserted through the second drive shaft 45 and is rotated and driven by a first motor 48 in a machine base 47 to be connected to the first arm 42.
The second drive shaft 45 is arranged concentrically with the first drive shaft 43,
In addition, the first motor 49 is driven to rotate by a second motor 49 in the
It is connected to a pulley 44 disposed in the arm 42, and further configured to transmit the rotation of the second motor 49 to the second arm 50.

The outer peripheral surface of the second drive shaft 45 is
The magnetic fluid seal 52 is rotatably supported by a magnetic fluid seal 51 attached to the insertion opening 46a of the first drive shaft 43. A magnetic fluid seal 52 fits between the outer peripheral surface of the first drive shaft 43 and the inner peripheral surface of the second drive shaft 45. As a result, the first in the machine base 47 formed at atmospheric pressure
The motor 48 and the second motor 49 are configured to drive the first arm 42 and the second arm 50 in the vacuum vessel 46 and to prevent the air from entering the vacuum vessel 46.

However, a robot using a magnetic fluid seal has a problem in that the vacuum state in the vacuum vessel is delayed because the magnetic fluid seal itself must be large. Also, since the magnetic fluid seal is filled with oil, if gas is generated or a sudden pressure difference occurs, the film may be broken and the oil may be scattered, causing the generation of dust. Had become.

[0005] To solve the above-mentioned problems, Japanese Patent Laid-Open No. Hei 8 (1996) discloses a technology that is compact and eliminates dust by eliminating a magnetic fluid seal.
No. 172121.

[0006]

However, in the robot disclosed in the above-mentioned publication, there is provided a drive unit that is connected to a first arm and a pulley that are arranged on the vacuum side from one motor arranged on the atmosphere side. Since the shaft is configured to transmit to the first arm or the pulley while being switched by the clutch mechanism, the configuration for mounting the clutch mechanism becomes complicated, and the switching transmission time by the clutch mechanism increases, and The tact time was lost during transportation.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems, and an object of the present invention is to provide a vacuum robot for substrate transfer which can shorten the tact time to shorten the transfer time and reduce the generation of dust.

[0008]

SUMMARY OF THE INVENTION A substrate transfer vacuum robot according to the present invention has the following configuration to solve the above-mentioned problems. That is, it has a transfer unit that holds and transfers the substrate, and a drive unit that performs an X-axis movement that linearly moves the substrate and a θ rotation that rotates the substrate along a rotation center. A vacuum robot for transporting a substrate, wherein the transport unit is disposed in a vacuum vessel, and the driving unit is disposed on the atmosphere side, wherein the vacuum vessel has a partition wall protruding downward to separate from the atmosphere side. A drive shaft connected to the transport unit for moving the substrate in the X-axis direction or the θ-rotation position, the drive shaft is disposed in the partition and connected to a magnet coupling, and the magnet coupling is And an inner ring magnet mounted on the drive shaft and having a permanent magnet, and an outer ring magnet supported outside the partition and having a permanent magnet.

[0009] Preferably, the drive shaft is connected to the transport unit for at least X-axis movement, and the second drive shaft is connected to the transport unit for at least θ rotation. And the first drive shaft may be driven by a first motor in the drive unit, and the second drive shaft may be driven by a second motor in the drive unit.

A substrate transfer vacuum robot according to the present invention comprises: a transfer unit for holding and transferring a substrate; an X-axis movement for linearly moving the substrate; and a rotation of the substrate along a rotation center. And a drive unit for performing θ rotation movement, wherein the transfer unit is provided in a vacuum vessel, and the drive unit is provided on the atmosphere side, The container has a partition wall portion protruding toward the drive unit side to separate from the atmosphere side, and the transport unit, in order to move the substrate linearly, a pair of arms each supported at one end, A hand that holds the substrate, and a transmission member that is disposed in one arm and rotationally drives the other arm, and the one arm is disposed in the partition wall. The transmission member is connected to one end of the first drive shaft, and A first drive shaft connected to one end of a second drive shaft arranged concentrically with the first drive shaft, and a second end provided at the other end of the first drive shaft and having a permanent magnet disposed inside the partition wall; The first inner ring magnet is mounted, and the first inner ring magnet is driven to rotate together with a first outer ring magnet having a permanent magnet disposed outside the partition and driven to rotate by a first motor. At the other end of the second drive shaft, a second drive shaft having a permanent magnet disposed inside the partition wall is provided.
The inner ring magnet is mounted, and the second inner ring magnet is driven to rotate together with a second outer ring magnet having a permanent magnet disposed outside the partition and driven to rotate by a second motor. It is characterized by the following.

[0011]

According to the vacuum robot for transporting substrates of the present invention, the drive unit arranged on the atmosphere side rotates the outer ring magnet, thereby rotating the inner ring magnet arranged in the vacuum vessel with the partition wall interposed therebetween. By driving the transfer unit connected to the magnet, the substrate can be moved in the X-axis or rotated by θ, so the installation of the magnetic fluid seal increases the size of the device, scatters oil and generates gas. Or the problem of the delay in the vacuum state can be solved.

Further, in the substrate transfer vacuum robot, when the first outer ring magnet is rotated by the driving of the first motor, the first drive shaft arranged in the partition wall is rotated by the rotation of the first outer ring magnet. The substrate held by the hand means is rotationally driven to move in the X-axis through the first inner ring magnet that is rotated following the rotation. Further, when the second outer ring magnet is rotated by at least the driving of the second motor, the second drive shaft disposed in the partition is rotated by following the rotation with the second outer ring magnet. The substrate held by the hand means is rotated by θ through the inner ring magnet 2 and rotated by θ.

Accordingly, since the X-axis movement and the θ rotation of the substrate are transmitted from the outer ring magnet disposed outside the partition to the inner ring magnet disposed inside the partition, the substrate is driven. It is possible to solve the problem of scattering of oil or generation of gas or delay of vacuum state caused by mounting. Further, since the X-axis movement and the θ-rotation of the substrate are each driven by at least the second motor, the tact time for transporting the substrate can be reduced without the intervention of a clutch.

Further, the vacuum robot for transferring substrates is
If the robot has a pair of arms and is configured to linearly move the substrate held by the hand, the first drive shaft is transmitted from the first outer ring magnet disposed on the atmosphere side. By driving through the first inner ring magnet disposed on the vacuum side, the drive can be transmitted to one arm to move the substrate held by the hand in the X-axis. By driving the drive shaft via the second inner ring magnet which is transmitted from the second outer ring magnet disposed on the atmosphere side and disposed on the vacuum side, the drive is transmitted to the other arm, The substrate can be rotated θ by simultaneously driving one arm with one drive shaft, so that oil scattering, gas generation, or vacuum It is possible to solve the problem of delay of. Furthermore, since the X-axis movement and θ rotation of the substrate are driven by the first motor and the second motor, respectively,
The tact time for transporting the substrate can be reduced without the intervention of a clutch.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. As shown in FIGS. 1 and 2, a substrate transfer vacuum robot (hereinafter, referred to as a robot) 1 of the embodiment includes a transfer unit 10 stored in a vacuum container 3 and a drive unit 30 stored in a machine base 5. And is configured. The vacuum vessel 3 is disposed above the machine base 5 and includes a partition wall 4 projecting from the vacuum vessel 3 toward the machine base 5 in order to house the drive shaft in a vacuum chamber. Then, a pair of outer ring magnets 61 and 71 and inner ring magnets 62 and 7 are sandwiched between the partition walls 4.
Magnet couplings 6 and 7 constituted by 2 are arranged.

The transport unit 10 housed in the vacuum vessel 3
An X-axis movement that linearly moves while holding the substrate W;
The configuration is not particularly limited as long as it is configured to perform θ rotation movement of rotating the rotation about the rotation center.

In the embodiment, the transport section 10 includes a pair of arms 14 and 15 pivotally connected at one end, a hand 16 rotatably disposed at the tip of the arm 15, and a base section of the arm 14. And drive shafts 11 and 12 connected with each other.

More specifically, a double drive shaft (first drive shaft 11 and second drive shaft 11) concentrically arranged in partition 4
Drive shaft 12), a first arm 14 rotatably arranged along the axis of the first drive shaft 11 or the second drive shaft 12, and a first arm 14 at the distal end of the first arm 14. One arm 14
A second arm 15 rotatably disposed with respect to the second arm 15, and a hand 16 rotatably disposed with respect to the second arm 15 at the distal end of the second arm 15.

The first arm 14 is connected to the first drive shaft 11, and the first arm 14 has a first pulley 17 connected to the second drive shaft 12 and a rotation of the second arm 15. A second pulley 18 disposed at the moving center position and a first pulley 17
And a belt 19 for transmitting the rotation of the second pulley 18 to the second pulley 18.

The first arm 1 is provided in the second arm 15.
4th pulley 20 arranged concentrically with the 2nd pulley
And a fourth pulley 21 disposed at the center of rotation of the hand 16, and a belt 22 for transmitting the rotation of the third pulley 20 to the fourth pulley 21.

The first drive shaft 11 is disposed so as to pass through the second drive shaft 12, and has a bearing between the outer peripheral surface of the first drive shaft 11 and the inner peripheral surface of the second drive shaft 12. Supported through. Further, an inner ring magnet 62 of the first magnet coupling 6 is mounted on an outer peripheral surface of one end (lower end) of the first drive shaft 11, and the other end (upper end) is connected to the first arm 14 to be connected to the first arm 14. The rotation of one drive shaft 11 is transmitted to the first arm 14.

The second drive shaft 12 is supported by the partition wall 4 by bearings. The inner ring magnet 72 of the second magnet coupling 7 is mounted on one end (lower end) of the outer peripheral surface, and the other end (upper end) is the first. The arm 14 is supported by a bearing and connected to the first pulley 17. Then, the rotation of the second drive shaft 12 is transmitted to the first pulley 17.

The second pulley 18 is supported by a bearing on a shaft 141 integrally projecting from the first arm 14, and has an upper surface connected to the second arm 15. Therefore, the rotation of the first pulley 17 is transmitted to the second arm 15 via the second pulley 18.

The third pulley 20 is arranged concentrically with the second pulley 18 and has a shaft portion 14 of the first arm 14.
1 is integrally connected to the upper surface. Therefore, the third pulley 20 is rotated by the drive transmitted by the rotation of the first arm 14.

The fourth pulley 21 is supported by bearings on a shaft 151 integrally projecting from the second arm 15, and has an upper surface integrally connected to a base end 161 of the hand 16. Therefore, the rotation of the third pulley 20 is transmitted to the hand 16 via the fourth pulley 21, and the hand 16 is arranged rotatably with respect to the rotation center of the base end 161 (the rotation center of the fourth pulley 21). It will be.

The rotation ratio between the first pulley 17 and the second pulley 18 is 1: 2, the rotation ratio between the third pulley 20 and the fourth pulley 21 is 2: 1, and the second pulley 18 and the third pulley 18 are further rotated. 20 are concentrically arranged, and the first pulley 17 and the second
As long as the distance between the axes of the pulley 18 and the distance between the centers of the third pulley 20 and the fourth pulley 21 are the same, the substrate W held by the hand 16 as is well known Linear movement (X-axis movement) by rotation of one drive shaft 11
Will be done.

The driving section 30 is provided with a first
Motor 31, the second motor 32, and the first motor 31
A first housing 33 rotatably arranged by driving the first housing 33 and supported on the outer peripheral surface of the partition wall 4 by a bearing;
And a second housing 34 rotatably arranged by driving the second motor 32 and supported by bearings on the outer peripheral surface of the partition wall 4.

The first housing 33 includes a first motor 3
The first output shaft 311 has a pulley portion 331 connected to the pulley 35 and the belt 36 via a belt 36. The outer ring magnet 61 of the first magnet coupling 6 is mounted inside the pulley portion 331. The inner ring magnet 62 is arranged so as to face the partition 4 with the inner ring magnet 62 interposed therebetween.

The second housing 34 includes a second motor 3
2 has a pulley portion 341 connected to the output shaft 321 via a pulley 37 and a belt 38, and the outer ring magnet 71 of the second magnet coupling 7 is mounted inside the pulley portion 341. The inner ring magnet 72 is configured to be opposed to the arranged inner ring magnet 72 with the partition wall 4 interposed therebetween.

The partition 4 comprises a vacuum chamber in the vacuum vessel 3 and a machine base 5.
It is formed so as to be sufficiently sealed so as to shut off the side air and prevent the air from entering the vacuum chamber.

In the magnet couplings 6 and 7 which are separated from the vacuum chamber and the atmosphere, the outer ring magnets 61 and 71 and the inner ring magnets 62 and 72 are provided with permanent magnets, respectively. The inner ring magnets 62 and 72 are rotated following the rotation.

In the robot 1 configured as described above, when the substrate W held by the hand 16 is moved in the X-axis, the first motor 31 is driven to rotate the first drive shaft 11. This causes the first arm 14 to rotate. At this time, the driving of the first motor 31 rotates the first housing 33 disposed on the atmosphere side, and the outer ring magnet 61 is rotated with the rotation of the first housing 33. When the outer ring magnet 61 rotates, magnetic flux flows through the partition wall 4, and the outer ring magnet 61 and the inner ring magnet 6
Since a magnetic force is generated between the inner ring magnet 2 and the inner ring magnet 62, the inner ring magnet 62 is transmitted to the inner ring magnet 62 disposed with the partition wall 4 therebetween. Then, the first drive shaft 11 to which the inner ring magnet 62 is mounted is rotated, and the first arm 14 is rotated.

When the substrate W is moved by θ rotation, the first arm 14 and the second arm 15 are simultaneously rotated by the same rotation. To drive the first arm 14 and the second arm 15, the first motor 31 and the second motor 32
The first drive shaft 11 and the second drive shaft 1 via the magnet coupling 6 and the second magnet coupling 7
2 is driven.

However, in the case of the embodiment, the vacuum chamber 3 is formed with a main chamber 3a for performing the θ rotation of the transfer section 10 and a processing chamber 3b protruding from the main chamber 3a and performing the processing of the substrate W. Therefore, if the hand 16 is at the extended position, the first drive shaft 11 is rotated to move the hand 16 to the main body chamber in the X-axis, and then the first drive shaft 11 and the second drive shaft 12 are moved. Are driven to perform θ rotation.

The robot 1 has a pair of extendable arms and is configured to move in the X-axis or in the θ-rotation. For example, one arm is moved with respect to the rotation axis. However, even a robot configured to be able to advance and retreat in one direction can be driven via a magnetic coupling.

For example, a first drive shaft is connected to an arm via a mechanism for converting a rotary motion into a linear motion via a magnet coupling driven by a first motor,
Arrange the arm so that it can advance and retreat. Then, a rotating shaft as a second drive shaft is rotated by a magnet coupling driven by a second motor. The magnet coupling mounts an inner ring magnet on a first drive shaft and a rotating shaft in a vacuum chamber with a partition wall therebetween, and connects each outer ring magnet disposed outside the partition wall to a first motor or a second motor. When driven by a motor, the substrate held by one arm can perform X-axis movement and θ rotation movement.

As described above, the robot 1 has the pair of arms 14 and 15 and is configured to linearly move the substrate W held by the hand 16.
Is driven by a first inner ring magnet 62 which is transmitted from a first outer ring magnet 61 disposed on the atmosphere side and is disposed on a vacuum side, so that one of the arms 14 is driven. The substrate held by the hand 16 can be moved by X-axis movement, and the second drive shaft 12 can be moved to the second outer ring magnet 7 disposed on the atmosphere side.
By being driven through the second inner ring magnet 72 disposed on the vacuum side and transmitted from the first, the drive is transmitted to the other arm 15, and the first drive shaft 11 simultaneously drives one arm 14. The driving of the substrate W
Can be rotated by θ, so that the problem of scattering of oil, generation of gas, or delay of vacuum state caused by mounting the magnetic fluid seal can be solved. Furthermore, since the X-axis movement and the θ rotation of the substrate W are driven by the first motor 31 and the second motor 32, respectively, the tact time for transporting the substrate W can be shortened without the intervention of a clutch. Becomes possible.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a vacuum robot for transporting a substrate, showing one embodiment of the present invention.

FIG. 2 is a sectional view taken along the line II-II in FIG.

FIG. 3 is a sectional view showing a conventional vacuum robot equipped with a magnetic fluid seal.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Robot (vacuum robot for board | substrate conveyance) 3 ... Vacuum container 4 ... Partition wall 5 ... Machine base 6, 7 ... Magnetic coupling 10 ... Transport part 11 ... 1st drive shaft 12 ... 2nd drive shaft 14 ... 1st Arm 15 ... Second arm 16 ... Hand 17 ... First pulley (transmission member) 30 ... Driver 31 ... First motor 32 ... Second motor 61,71 ... Outer ring magnet 62,72 ... Inner ring magnet W ... substrate

Claims (3)

[Claims] A transport unit that holds and transports the substrate, a driving unit that performs an X-axis movement that linearly moves the substrate and a θ rotation that rotates the substrate along a rotation center;
A substrate transfer vacuum robot, wherein the transfer unit is disposed in a vacuum vessel, and the drive unit is disposed on the atmosphere side, wherein the vacuum vessel is driven to separate from the atmosphere side. A drive shaft connected to the transport unit for moving the substrate in the X-axis direction or in the θ-rotation direction, the drive shaft being disposed in the partition unit and connected to the magnetic coupling; Wherein the magnet coupling includes an inner ring magnet attached to the drive shaft and having a permanent magnet, and an outer ring magnet supported outside the partition and having a permanent magnet. Substrate transfer vacuum robot. A first drive shaft coupled to the transport unit for at least X-axis movement, and a second drive shaft coupled to the transport unit for at least θ rotation. Wherein the first drive shaft is driven by a first motor in the drive unit, and the second drive shaft is driven by a second motor in the drive unit. 2. The vacuum robot for transferring substrates according to 1. A transport unit for holding and transporting the substrate; a driving unit for performing an X-axis movement for linearly moving the substrate and a θ rotation for rotating the substrate along a rotation center;
A substrate transfer vacuum robot, wherein the transfer unit is disposed in a vacuum vessel, and the drive unit is disposed on the atmosphere side, wherein the vacuum vessel is driven to separate from the atmosphere side. Having a partition part protruding toward the part side, the transfer part, in order to linearly move the substrate,
A pair of arms each rotatably supported at one end, a hand holding the substrate, and a transmission member disposed in one arm and configured to rotationally drive the other arm. Arm is connected to one end of a first drive shaft disposed in the partition, and the transmission member is connected to one end of a second drive shaft arranged concentrically with the first drive shaft. At the other end of the first drive shaft, a first inner ring magnet provided inside the partition and having a permanent magnet is mounted, and the first inner ring magnet is disposed outside the partition. And a first motor having a permanent magnet rotatably driven by a first motor. The first outer ring magnet is rotatably driven. The other end of the second drive shaft is disposed inside the partition and is permanently mounted. A second inner ring magnet having a magnet is mounted and the second inner ring magnet is mounted. Magnet, the second substrate carrying a vacuum robot, characterized in that it is driven to rotate together with the outer ring magnet having a permanent magnet which is rotatably driven by a second motor is disposed outside of the partition wall.