JP2002161949A - Carrier device using eccentric rocking type reduction gear - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a carrier device which allows taking out output from a plurality of coaxial shafts (two or more shafts) by using an eccentric rocking type reduction gear. SOLUTION: The conveyer is provided with driving motors 51 and 61 laterally juxtaposed, driving arms 11 and 21 actuated by the driving motors, and a carrier base connected to the tip of the driving arm. Two eccentric rocking type reduction gears 70 are vertically mounted which respectively comprise an eccentric body shaft 71, a carrier 31 which supports an eccentric body shaft at both ends, an, eccentric shaft external gear wheel 78 which is provided with an external gear and supported by a carrier, and an internal gear wheel 75 which has an internal gear meshed with the external gear. The internal gear wheels 75 of both eccentric rocking type reduction gears are coupled and connected to a fixing member 34, wherein outputs from the driving motors are respectively transmitted to the driving arms via the eccentric rocking type reduction gears 70.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer apparatus using an eccentric oscillating type speed reducer and a coaxial multi-axis output mechanism capable of outputting from a plurality of coaxially arranged output shafts.

[0002]

2. Description of the Related Art In a field such as a semiconductor wafer or an LCD (liquid product display) glass substrate, which requires sophisticated processing that dislikes particles, a conveyed object cannot be conveyed by chucking (eg, grasping the conveyed object) (cannot be gripped). ). For this reason, as a handling system in such a transport field, at present, the transport is performed by a transport device of a type in which a transported object is merely placed (supported only) on a hand (end effector) portion.

However, in such a transport device, there are two types of support, an organic material (such as rubber) and an inorganic material (such as ceramic). The organic material support has a relatively large frictional force, but has a relatively high frictional force. There is a problem that can not be used.

For this reason, in many cases, the transferred object (eg, wafer) is held only by the frictional force with the hand support. However, such a conveyed product is suddenly moved,
If it is moved while vibrating, the conveyed object slips and shifts, causing problems such as generation of particles, poor positioning, and damage to the conveyed object. For this reason,
Transport devices used in such a sophisticated transport field include:
A drive device capable of carrying (smooth carrying) with as little vibration (acceleration) as possible is required.

[0005] In a transfer device such as a semiconductor wafer or an LCD (liquid product display) glass substrate, which dislikes particles and requires elaborate processing, a direct drive (DD) type driving device is conventionally used. (JP-A-3-281183). However, the drive device of the DD system has a problem in that the output density (torque / volume, torque / motor capacity) is small, so the drive device is large and the power supply capacity is also large.

On the other hand, there is also a transfer device using a speed reducer having a gear mechanism in order to reduce the size of the drive device.
By using a speed reducer having a gear mechanism, it is possible to make the drive device compact.

Japanese Patent Application Laid-Open No. 2-107846 discloses an eccentric body shaft, an eccentric body provided on the eccentric body shaft, and an internal gear that penetrates the eccentric body and is oscillated by the rotation of the eccentric body. An eccentric oscillating type speed reducer including a moving body and an external gear that meshes with the internal gear oscillating body is disclosed.

[0008]

In the above-described transfer apparatus for semiconductor wafers, LCD glass substrates, and the like, in order to move the arm having the link mechanism to extend, retract, and turn,
It is preferable that the driving device has a plurality of coaxial (for example, two) axes.

However, if it is attempted to connect a speed reducer having a gear mechanism used in the above-described transfer device to a plurality of coaxial axes, the plurality of speed reducers are arranged on the same plane (not on the same axis). In addition, the arrangement has to be through a gear or the like, and the arrangement is limited.

[0010] Further, the structure disclosed in Japanese Patent Application Laid-Open No. 2-107846 is not structured to output a plurality of (for example, two) coaxial axes. To provide outputs of two or more axes, reduction gears must be arranged in parallel.
In the device described in Japanese Patent No. 107846, it cannot be formed coaxially, and when used for a transfer device such as a semiconductor wafer or an LCD glass substrate, the transfer device becomes large.

[0011]

SUMMARY OF THE INVENTION An object of the present invention is to solve the various problems associated with the prior art as described above, and to provide a compact and compact transfer device using an eccentric oscillating type speed reducer, and a coaxial multiple shaft having a simple structure. An object of the present invention is to provide a coaxial multi-axis output mechanism using an eccentric oscillating type speed reducer capable of extracting (two or more axes) output.

[0012]

SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems by providing a transfer device including a drive motor, a drive arm driven by the drive motor, and a transfer table connected to the tip of the drive arm. Wherein the output from the drive motor is an eccentric shaft, a carrier that supports the eccentric shaft, an external gear that has external teeth and is supported by the carrier, and an internal gear that meshes with the external teeth. This is achieved by a transfer device using an eccentric oscillating speed reducer, which is transmitted to the drive arm via an eccentric oscillating speed reducer including an internal gear having teeth.

In the eccentric oscillating type speed reducer, since the carrier for rotatably supporting the eccentric body shaft is formed of a rigid body, according to the present invention, even if the conveyed object becomes heavy, a compact and compact conveying device can be provided. It is possible to carry heavy objects.

Further, in the present invention, the transfer device has a plurality of output shafts arranged coaxially, and a plurality of the eccentric oscillating speed reducers are arranged in an axial direction, and the plurality of output shafts are provided. It is preferable to use a transfer device using an eccentric oscillating type speed reducer capable of extracting coaxial output from a shaft. With this configuration, a plurality of eccentric oscillating reduction gears can be arranged vertically in the axial direction, and the transfer device can be made small and compact.

In particular, as shown in the embodiment, by connecting the carriers or the internal gears of two or more eccentric oscillating type speed reducers, the transfer device can be made small and compact. In this case, the transfer device is provided with two or more eccentric oscillating speed reducers respectively connected to two or more drive motors arranged in parallel, and the carrier of the eccentric oscillating type speed reducer is arranged. Eccentric oscillating device using an eccentric oscillating type speed reducer, wherein two or more outputs are taken out from the internal gears of both eccentric oscillating type speed reducers by connecting the eccentric oscillating type speed reducers Transfer device using a type reduction gear, or
Two eccentric oscillating reduction gears for driving and driven respectively connected to two driving motors for driving and driven arranged in parallel are arranged vertically, and the eccentric oscillating gear for driving arranged below is arranged. Connect the carrier of the dynamic reduction gear to the fixed member and take out the output of the driving arm for driving from the internal gear,
The driven eccentric oscillating type speed reducer is characterized in that the internal gear is connected to the internal gear of the driving eccentric oscillating type speed reducer so that the output of the driven drive arm is obtained from the carrier. It is preferable to constitute a transfer device using an eccentric oscillating type speed reducer using a type speed reducer.

Further, in the present invention, the above-mentioned object is achieved by:
An eccentric body shaft, an eccentric body provided on the eccentric body shaft, an internal tooth oscillating body that penetrates the eccentric body and is oscillated and rotated by the rotation of the eccentric body, and an external gear that meshes with the internal tooth oscillating body A plurality of sets of eccentric oscillating reduction gears and the same number of output shafts as the number of sets of the eccentric oscillating reduction gears. Attached to each corresponding output shaft at intervals in the axial direction, fixing a support that rotatably supports the eccentric shaft of the plurality of sets of eccentric oscillating reducers, This is achieved by a coaxial multi-axis output mechanism that can input rotation and output coaxially from the external gear to a plurality of output shafts.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the accompanying drawings. 1 and 2 show an embodiment of a transfer apparatus using a coaxial multi-axis output mechanism according to the present invention in which two output shafts are arranged coaxially. FIG. 1 is a longitudinal section of an embodiment of the present invention. 2 is a cross-sectional view taken along line XX of FIG. 1, FIG. 3 is a cross-sectional view of FIG. 1, (a) is a cross-sectional view taken along line AA, and (b) is a line BB.
Sectional drawing, (c) is a CC sectional view.

The arms 11, 21 of the transfer device 10 are provided inside a processing chamber for processing semiconductor wafers, LCD (liquid product display) glass substrates, and the like, such as a clean room.
The inside of the processing chamber is depressurized (a so-called vacuum state), and a driving device 30 for driving the arms 11 and 21 is provided outside the processing chamber. It has become. Arms 11, 2
A well-known carrier (not shown) for mounting a semiconductor wafer, a substrate, and the like is connected to the tip of 1.

The transfer device 10 includes a hollow output shaft (outer shaft) 12
And a solid output shaft (inner shaft) 22 penetrating through the hollow portion of the hollow output shaft 12. Reference numeral 31 indicates a carrier of the driving device 30.

A hollow output shaft (outer shaft) 12, which is coaxial with the lower surface of the mount 40 for mounting the transfer device 10 and the carrier 31 of the transfer device 10 in a hermetically sealed state, is solid. A drive device 30 for driving the arms 11 and 21 is provided outside the processing chamber by sealing around the output shaft (inner shaft) 22.

Vacuum seal 1 on hollow output shaft (outer shaft) 12
9 is provided, and a vacuum seal 29 is provided on the solid output shaft (inner shaft) 22. The vacuum seals 19 and 21 maintain the vacuum inside the processing chamber and prevent dust from being discharged into the processing chamber. In the embodiment shown, each of the vacuum seals 19, 21 is stacked three in the axial direction. The two lower ones prevent the air from leaking from the drive device side to the processing chamber side, while the one on the arm 11, 21 side does not release dust into the processing chamber interior. As the vacuum seals 19 and 21, for example, a contact seal in which a lip seal is pressed against a shaft, a magnetic fluid seal, or the like is used. The contact seal has the advantage that the device can be made compact and maintenance can be performed easily.

Hollow output shaft (outer shaft) coaxial with each other
12 and a solid output shaft (inner shaft) 22 are rotatably supported by bearings 13 and 23 with respect to a carrier 31 of the transfer device 10. That is, the hollow output shaft (outer shaft) 12
Is rotatably supported by a bearing 13 provided inside a carrier 31, and a solid output shaft (inner shaft) 22 is supported by a bearing 23 provided inside a hollow output shaft (outer shaft) 12. It is mounted rotatably in the shaft 12.

A hollow output shaft (outer shaft) 12 and a solid output shaft (inner shaft) 22 have first and second arms 11 and 21 for handling a semiconductor wafer, an LCD (liquid product display) glass substrate, and the like, respectively. , 24 attached.

Hollow output shaft (outer shaft) coaxial with each other
12 and a solid output shaft (inner shaft) 22 from an outer shaft drive motor 51 and an inner shaft drive motor 61 via a corresponding eccentric oscillating reduction gear 70, respectively, to the hollow output shaft (outer shaft) 1.
The driving force is transmitted through external gears 15 and 25 attached to the second and solid output shafts (inner shafts) 22 at intervals in the axial direction.

As described above, a plurality (two) of output shafts 1
External gears 15 and 25 are attached to 2 and 22 at an interval in the axial direction, respectively. In other words, one donut-shaped external gear (external gear for external shaft) 15 is fastened to the lower end of the hollow output shaft (external shaft) 12 by the bolt 16. The solid output shaft (inner shaft) 22 penetrates through the hollow portion of the hollow output shaft (outer shaft) 12 and the outer gear 15 for the outer shaft, and the lower end thereof has the other disc-shaped external gear. (Internal shaft external gear) 25 is fastened by bolts 26.

The two external gears (external gear for external shaft, external gear for internal shaft) 15, 25 attached to a plurality (two) of output shafts 12, 22 at intervals in the axial direction are: These are external gears of the eccentric oscillating reduction gear 70, respectively.

Each eccentric oscillating type speed reducer 70 has an eccentric body shaft 71.
An eccentric body 72 provided on an eccentric body shaft 71;
The eccentric body shaft 71 includes an internal tooth oscillating body 75 that penetrates and is oscillated by the rotation of the eccentric body 72 and the above-described external gears 15 and 25 that mesh with the internal tooth oscillating body 75.
Is a support of the present invention,
Fixed against rotation.

With the structure described below, the outer shaft drive motor 51 and the inner shaft drive motor 61 are attached to both output shafts 12 and 22 with an interval in the axial direction via the eccentric oscillating type speed reducer 70. Power is transmitted to both external gears (external gear for external shaft, external gear for internal shaft) 15 and 25. In addition, the structure of each eccentric oscillating type speed reducer 70 is similar, and in the figure, the elements for driving the hollow output shaft (outer shaft) 12 are denoted by the suffix 1 and the solid output shaft (inner The element for driving the shaft 22 is suffixed with 2
, But suffixes are omitted in the following description.

As shown in FIG. 1, a hollow output shaft (outer shaft) 1
The center gear 18 for the outer shaft reducer and the center gear 28 for the inner shaft reducer are rotatably provided coaxially on an extension below the rotation axis of the 2 and the solid output shaft (inner shaft) 22. In each of the center gears 18, 28, upper and lower gears and a boss connecting them are integrally formed.

Further, as shown in FIG. 1, an outer shaft drive motor 51 and an inner shaft drive motor 61 are attached to the lower end of the carrier 31 of the transfer device 10. Outer shaft drive motor 51
The output shaft of the inner shaft drive motor 61 is provided with pinions 52 and 62, respectively.
Are meshed with the corresponding lower gears of the center gear 18 for the outer shaft reducer and the center gear 28 for the inner shaft reducer. The upper gears of the outer shaft reducer center gear 18 and the inner shaft reducer center gear 28 mesh with the corresponding transmission gears 73 via the outer shaft reducer idler gear 17 and the inner shaft reducer idler gear 27, respectively. .

In the present embodiment, the transmission gear 73 is connected to each output shaft (hollow output shaft (outer shaft) 12, solid output shaft (inner shaft) 22).
And three transmission gears 73 are meshed with the corresponding idler gears 17 and 27 to transmit the driving force. Note that the number of the transmission gears 73 is not limited to three, and one or more is sufficient.

Each transmission gear 73 is provided on a corresponding eccentric shaft 71, and the eccentric shaft 71 has an eccentric body 72. Each eccentric shaft 71 is supported by a bearing 74. The eccentric body 72 penetrates the two internal tooth oscillating bodies 75, and a roller 77 is provided between the outer circumference of the eccentric body 72 and the inner circumference of the through hole of the internal tooth oscillating body 75.
(FIG. 3A) is provided. The internal tooth oscillating body 75 has internal teeth formed of pins 76, and as described above, an external gear (an external gear for an external shaft) fastened to the hollow output shaft (external shaft) 12.
15 and an external gear (an external gear for an internal shaft) 25 fastened to a solid output shaft (an internal shaft) 22.

With the above configuration, the drive motor 51,
The rotation of the output shaft 61 is transmitted to the transmission gear 73 via the pinions 52 and 62, the center gears 18 and 28, and the idler gears 17 and 27, and is transmitted to the eccentric shaft 7 by the transmission gear 73.
1 is rotated. The rotation of the eccentric body shaft 71 rotates the eccentric body 72, and the internal tooth oscillating body 75 swings and rotates. On the other hand, as described above, the carrier 31 that rotatably supports the eccentric shaft 71 is fixed against rotation. For this reason, the external gears 15 and 25 meshing with the internal tooth oscillating body 75 are rotated at a reduced speed.

In this embodiment, the drive motors 51, 6 are connected to the three eccentric shafts 71 via the plurality of idler gears 17, 27.
The rotation from 1 is input at the same time,
The rotation from the drive motors 51 and 61 may be directly input to one eccentric shaft 71, and by doing so,
When the speed reduction mechanisms are provided in the preceding stage, they can be arranged in parallel at the tip of each eccentric body shaft.

Further, in the present embodiment, as shown in FIG. 2, a linear guide 33 of a known type is provided between a bracket 32 installed above and below a carrier 31 of the carrier 10 and the inside of a housing 34 of the carrier 10. Are provided so that the carrier 31 of the transfer device 10 can be moved up and down inside the housing 34.

A female screw portion 35 for linear movement is attached to the center of the bottom surface of the carrier 31, and a ball screw portion 36 screwed to the female screw portion 35 is vertically provided on the bottom surface inside the housing 34. The vertical drive motor 37 and the ball screw 36 are connected by gears 38 and 39.

Accordingly, by the rotation of the vertical drive motor 37, the carrier 10 moves up and down with respect to the housing 34 via the ball screw portion 36 and the female screw portion 35 together with the carrier 31. During this elevating operation, the seal is maintained by the above-mentioned elastic bellows 41.

According to this embodiment, a compact and compact transfer device is provided and can be a drive unit having a coaxial two-axis configuration, so that compactness is possible.

FIG. 4 is a longitudinal sectional view of an embodiment of a transfer device using another eccentric oscillating type speed reducer, and FIG.
It is sectional drawing. In this embodiment, two eccentric oscillating speed reducers respectively connected to two drive motors arranged in parallel are arranged above and below, and the carriers of both eccentric oscillating speed reducers are connected to the fixed member. The two eccentric oscillating reduction gears are connected to take out two outputs from the internal gear. 1 and 2 are denoted by the same reference numerals, and detailed description thereof will be omitted.

Referring to FIG. 4, two eccentric oscillating reduction gears 70 arranged vertically include an eccentric shaft 71, a carrier 31 supporting the eccentric shaft 71 at both ends, and a carrier 31 having external teeth. And an internal gear 75 having internal teeth that mesh with the external teeth.

At the lower end of FIG. 4, an outer shaft drive motor 51 and an inner shaft drive motor 61 are arranged in parallel on the left and right, and the outer shaft drive motor 51 and the inner shaft drive motor 61 are arranged vertically. Reducers (lower eccentric oscillating reducer for outer shaft, upper eccentric oscillating reducer for inner shaft) 70, 70 are connected. That is, a pinion 52 is provided on the output shaft of the outer shaft drive motor 51, and the pinion 52 is connected to the eccentric body of the eccentric oscillating type speed reducer 70 for the outer shaft via the upper and lower two-stage center gear 18 for the outer shaft reducer. It is connected to the shaft 71. An output shaft of the inner shaft drive motor 61 is provided with a pinion 62, and the pinion 62 is connected to the outer shaft eccentric oscillating type speed reducer 70 via the upper and lower two-stage inner shaft reducer center gears 28.
Is connected to the eccentric shaft 71 of the eccentric oscillating reduction gear 70 for the inner shaft.

Two eccentric oscillating reduction gears 7 arranged vertically
The carriers 31, 31 of 0, 70 are connected by bolts 81. In addition, the carriers 31, 31 connected to each other
Are connected to the housing 34 of the transfer device, which is a fixing member, by bolts 82.

With this configuration, the rotation of the outer shaft drive motor 51 is reduced by the lower outer shaft eccentric oscillating type speed reducer 70, and the internal gear 75 of the outer shaft eccentric oscillating type speed reducer 70 is rotated. Then, the power is transmitted to the first arm 11 from the outer shaft 12 connected to the internal gear 75 by bolts 84. On the other hand, the rotation of the inner shaft drive motor 51 is reduced by the upper inner shaft eccentric oscillating speed reducer 70, and the internal gear 7 of the inner shaft eccentric oscillating speed reducer 70 is rotated.
5 and transmitted to the second arm 22 from the inner shaft 22 connected to the internal gear 75 by bolts 85.

FIG. 6 is a longitudinal sectional view of a further embodiment of a transfer apparatus using an eccentric oscillating type speed reducer. In this embodiment, two eccentric oscillating reduction gears for driving and driven (lower motors) connected to two driving motors 51 and 61 for driving and driven arranged in parallel on the left and right, respectively. Eccentric oscillating reduction gear for drive, eccentric oscillating reduction gear for upper driven)
70, 70 are arranged vertically, the carrier 31 of the eccentric oscillating reduction gear for driving arranged on the lower side is connected to the fixed member, and the output of the driving arm for driving is taken out from the internal gear 75, and the eccentricity for driven In the oscillating reduction gear, the internal gear is connected to the internal gear of the eccentric oscillating reduction gear for driving so that the output of the driven arm for driving is obtained from the carrier. The same members as those in FIGS. 1 to 5 are denoted by the same reference numerals, and detailed description thereof will be omitted. In FIG. 6, two eccentric oscillating reduction gears 70 arranged vertically include an eccentric shaft 71, a carrier 31 that supports the eccentric shaft 71 at both ends, and an external eccentric shaft 71, similarly to the embodiment of FIG. An external gear 78 having teeth and supported by the carrier 31 and an internal gear 75 having internal teeth meshing with the external teeth.

An outer driving motor 51 for driving is provided at the lower end of FIG.
And the driven inner shaft drive motor 61 are arranged in parallel, and the driving outer shaft drive motor 51 and the driven inner shaft drive motor 6
Numeral 1 is connected to two eccentric oscillating reduction gears 70, 70 arranged on the lower side for driving and disposed on the upper side. That is, the output shaft of the driving outer shaft drive motor 51 is provided with the pinion 52, and the pinion 52
It is connected to an eccentric shaft 71 of an eccentric oscillating reduction gear for prime mover 70 via a center gear 18 for the outer shaft reduction gear of the stage. Also,
A pinion 62 is provided on the output shaft of the inner shaft drive motor 61, and the pinion 62 penetrates through the hollow portion of the eccentric oscillating reduction gear 70 for driving through the upper and lower two-stage center gears 28 for the inner reduction gear. Thus, it is connected to the eccentric body shaft 71 of the driven eccentric oscillating reduction gear 70.

Two eccentric oscillating reduction gears 7 arranged vertically
The internal gears 75, 75 of 0, 70 are connected by a bolt 81.

With this configuration, the driving outer shaft drive motor 5
The rotation of the first eccentric oscillating reduction gear 70 for the outer shaft for the driving
Eccentric oscillating type speed reducer 70 for the driving outer shaft
Are transmitted to the driving arm 11 from the driving outer shaft 12 connected to the internal gear 75 by bolts 84 via the internal gear 75. On the other hand, the internal gear 75 of the driven eccentric oscillating reducer 70
Is connected to the internal gear 75 of the prime mover,
The carrier 31 of the driven eccentric oscillating reduction gear 70 is decelerated by the rotation difference between the driving motor 51 and the driving motor 61. The internal gear 75 of the driven eccentric oscillating reduction gear 70 is connected to the driven shaft (inner shaft) 22 by a bolt 86, and the driven shaft (inner shaft) 22 is connected to the driving motor 51 and the driving motor 61. And the driven arm (second arm) 21 is driven to rotate by the driving arm 11.

An example of the operation of the embodiment having this configuration will be described. For example, in a case where the outer shaft 12 and the inner shaft 22 are rotated by the same amount in the same direction, the outer shaft 12 is driven by the rotation of the driving motor 51 through the eccentric oscillating reduction gear 70 for the driving outer shaft. The inner shaft 22 is also rotated directly by a predetermined amount by the driving motor 51 for driving. Therefore, the inner shaft 22 can be operated and rotated by the driven motor 61 and the driven outer shaft eccentric oscillating reducer 70 so that the inner shaft 22 is at a target position. The above description is an example of differential rotation, and the present invention is not limited to this embodiment, and differential rotation can be appropriately adopted in various cases.

In the embodiment shown in FIGS. 4 to 6, two drive motors for driving the inner shaft and the outer shaft are arranged side by side, and the speed reducers for the inner shaft and the outer shaft are vertically moved in the axial direction. In this case, the carrier or the internal gears of the two reduction gears are connected and connected to the fixed member, so that a compact and compact transfer device can be obtained.

Further, since the speed reducer has a hollow hole, even if the speed reducer is provided up and down in the axial direction, it can penetrate the (hollow) output shaft and the member for transmitting the output rotation of the drive motor.
Coaxial output can be easily obtained.

[0051]

According to the present invention, various problems associated with the prior art can be solved, and a compact and compact transfer device using an eccentric oscillating speed reducer, and a coaxial multi-shaft (2
The present invention provides a coaxial multiple-shaft output mechanism using an eccentric oscillating reduction gear capable of extracting an output of at least one shaft.

According to the present invention, since the drive unit can be a coaxial two-axis drive unit, it can be made compact.

In the eccentric oscillating type speed reducer, the carrier for rotatably supporting the eccentric body shaft is formed of a rigid body. Therefore, according to the transfer device of the present invention, even if the load is heavy, it is small and compact. It can be a transfer device, and can transfer heavy objects.

Further, in the present invention, the transfer device has a plurality of output shafts arranged coaxially, and the eccentric oscillating speed reducer is arranged in a plurality in the axial direction, and the plurality of output shafts are provided. By using a transfer device that uses an eccentric oscillating speed reducer that can take out coaxial output from the shaft, a plurality of eccentric oscillating speed reducers can be arranged vertically in the axial direction. It can be compact.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of one embodiment of the present invention.

FIG. 2 is a sectional view taken along line XX of FIG.

FIGS. 3A and 3B are cross-sectional views of FIG. 1, wherein FIG. 3A is a cross-sectional view taken along line AA, FIG. 3B is a cross-sectional view taken along line BB, and FIG.

FIG. 4 is a longitudinal sectional view of an embodiment of a transfer device using another eccentric oscillating speed reducer.

FIG. 5 is a sectional view taken along line DD of FIG. 4;

FIG. 6 is a longitudinal sectional view of an embodiment of a transfer device using another eccentric oscillating type speed reducer.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Conveying apparatus 11, 21 Arm 12, 22 Output shaft 78 External gear 30 Drive 31 Carrier 34 Housing 70 Eccentric oscillating reduction gear 71 Eccentric body shaft 72 Eccentric body 73 Transmission gear 75 Internal oscillating body (internal gear)

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3J027 FA19 FB31 GA01 GB03 GB08 GB09 GB10 GC02 GC24 GD04 GD07 GD13 GE29

Claims (5)

[Claims] 1. A transfer device comprising a drive motor, a drive arm driven by the drive motor, and a transfer table connected to a tip of the drive arm, wherein an output from the drive motor is an eccentric shaft. An eccentric oscillating type comprising: a carrier supporting the eccentric body shaft at both ends; an external gear having external teeth and supported by the carrier; and an internal gear having internal teeth meshing with the external teeth. A transfer device using an eccentric oscillating speed reducer, which is transmitted to the drive arm via a speed reducer. 2. The transfer device has a plurality of output shafts arranged coaxially, a plurality of the eccentric oscillating type speed reducers are arranged in an axial direction, and a plurality of output shafts are coaxially arranged from the plurality of output shafts. 2. A transfer device using an eccentric oscillating type speed reducer using the eccentric oscillating type speed reducer according to claim 1, wherein output can be taken out. 3. Two or more eccentric oscillating speed reducers respectively connected to two or more drive motors arranged in parallel are arranged vertically to connect the carriers of both eccentric oscillating speed reducers. The eccentricity using the eccentric oscillating type speed reducer according to claim 2, wherein two or more outputs are taken out from the internal gears of the eccentric oscillating type speed reducer by being connected to a fixed member. A transfer device using an oscillating reduction gear. 4. Two eccentric oscillating reduction gears for driving and driven respectively connected to two driving motors for driving and driven, which are arranged in parallel, are disposed vertically and are disposed below. In addition to connecting the carrier of the eccentric oscillating reduction gear for driving to the fixed member, the output of the driving arm for driving is taken out from the internal gear, and the eccentric oscillating reduction gear for driven uses the eccentric oscillating gear for driving. 3. An eccentric oscillating type speed reducer using an eccentric oscillating type speed reducer according to claim 2, wherein the output of the driven arm for driving is taken out of the carrier by being connected to the internal gear of the speed reducer. The transport device used. 5. An eccentric body shaft, an eccentric body provided on the eccentric body shaft, an internal tooth oscillating body that penetrates the eccentric body and is oscillated and rotated by rotation of the eccentric body, and meshes with the internal tooth oscillating body. A plurality of sets of eccentric oscillating speed reducers comprising external gears; and a plurality of eccentric oscillating speed reducers comprising the same number of output shafts as the number of sets of the eccentric oscillating speed reducers. External gears are attached to the corresponding output shafts at intervals in the axial direction,
By fixing a support that rotatably supports the eccentric body shaft of the plurality of sets of eccentric oscillating reduction gears, rotation is input from the eccentric body shaft, and coaxial output from the external gear to a plurality of output shafts is enabled. Coaxial multi-axis output mechanism.