WO2019021834A1 - Industrial robot - Google Patents

Industrial robot Download PDF

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Publication number
WO2019021834A1
WO2019021834A1 PCT/JP2018/026255 JP2018026255W WO2019021834A1 WO 2019021834 A1 WO2019021834 A1 WO 2019021834A1 JP 2018026255 W JP2018026255 W JP 2018026255W WO 2019021834 A1 WO2019021834 A1 WO 2019021834A1
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WO
WIPO (PCT)
Prior art keywords
arm
motor
fixed
hand
rotation shaft
Prior art date
Application number
PCT/JP2018/026255
Other languages
French (fr)
Japanese (ja)
Inventor
矢澤　隆之
志村　芳樹
陽介 高瀬
Original Assignee
日本電産サンキョー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電産サンキョー株式会社 filed Critical 日本電産サンキョー株式会社
Priority to CN201880048360.5A priority Critical patent/CN110944806A/en
Priority to KR1020197036602A priority patent/KR102328513B1/en
Publication of WO2019021834A1 publication Critical patent/WO2019021834A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/102—Gears specially adapted therefor, e.g. reduction gears
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

Definitions

  • the present invention relates to an industrial robot that transports an object to be transported in vacuum.
  • the industrial robot which conveys a glass substrate is known (for example, refer patent document 1).
  • the industrial robot described in Patent Document 1 includes a first hand and a second hand on which a glass substrate is mounted, a first hand support member to which the first hand is fixed, and a second hand to which the second hand is fixed.
  • the arm is formed in a substantially rectangular shape elongated in the front-rear direction.
  • the first hand support member and the second hand support member are linearly reciprocally movable in the front-rear direction with respect to the arm.
  • the industrial robot described in Patent Document 1 includes a first drive mechanism for reciprocating the first hand support member with respect to the arm, and a second drive mechanism for reciprocating the second hand support member with respect to the arm. Is equipped.
  • the first drive mechanism rotates a first screw member whose male screw is formed on the outer peripheral surface, a first nut member fixed to the first hand support member and engaged with the first screw member, and a first screw member.
  • a first motor rotates a second screw member whose male screw is formed on the outer peripheral surface, a second nut member fixed to the second hand support member and engaged with the second screw member, and a second screw member.
  • a second motor The first motor is fixed to the front end side inside the arm, and the second motor is fixed to the rear end side inside the arm.
  • an industrial robot for transporting a glass substrate in vacuum is known (see, for example, Patent Document 2).
  • the industrial robot described in Patent Document 2 includes a hand on which a glass substrate is mounted, an arm to which the hand is pivotably connected to the tip end, and a main body portion to which the base end of the arm is pivotably connected. Is equipped.
  • This industrial robot is used by being incorporated into a manufacturing system comprising a transfer chamber and a plurality of process chambers arranged to surround the transfer chamber. The transfer chamber and the interior of the process chamber are evacuated.
  • the hand and arm of the industrial robot described in Patent Document 2 are disposed in a transfer chamber.
  • Various apparatuses are installed in the process chamber, and various processes are performed on the glass substrate in the process chamber.
  • the industrial robot described in Patent Document 2 carries out the glass substrate from the process chamber and carries the glass substrate into the process chamber.
  • processing may be performed on the glass substrate in a high temperature environment, and the internal temperature of the process chamber in which the processing on the glass substrate is performed in the high temperature environment is high.
  • the inventor of the present invention is an industrial robot for transporting a transfer target such as a glass substrate in vacuum like the industrial robot described in Patent Document 2 with respect to the arm like the industrial robot described in Patent Document 1
  • a transfer target such as a glass substrate in vacuum like the industrial robot described in Patent Document 2
  • the arm like the industrial robot described in Patent Document 1
  • the first motor is fixed to the front end side inside the arm, and the second motor is fixed to the rear end side inside the arm.
  • the first motor or the second motor is a high temperature process chamber Approach to
  • the first motor or the second motor approaches the high temperature process chamber, the temperature of the first motor or the second motor becomes high, and the possibility that the first motor or the second motor may be damaged by the heat becomes high.
  • an object of the present invention is, for example, a process in which the temperature is high in an industrial robot having a first hand and a second hand reciprocally moving linearly with respect to an arm and transporting an object to be transported in vacuum. Even in the case of carrying in and out of the object to be transferred from the chamber, the damage due to the heat of the first motor for moving the first hand and the second motor for moving the second hand is suppressed It is to provide an industrial robot capable of
  • an industrial robot is an industrial robot that transports an object to be transported in vacuum, and the first hand and the second hand on which the object to be transported is mounted;
  • the first hand support member to which the hand is fixed, the second hand support member to which the second hand is fixed, and the first hand support member and the second hand support member reciprocate linearly in the same horizontal direction.
  • a second drive mechanism for reciprocating the motor, the first drive mechanism comprises a first motor as a drive source, and the second drive mechanism comprises a second motor as a drive source, the first motor and the second Motor is a Wherein the of being disposed within the central portion.
  • the first motor and the second motor are disposed inside the central portion of the arm. Therefore, with the industrial robot according to the present invention, for example, even when carrying in and out the object to be transferred to and from the high temperature process chamber, the first motor and the second motor and the high temperature process chamber It becomes possible to secure the distance. Therefore, according to the present invention, it is possible to suppress the temperature rise of the first motor and the second motor, for example, even when carrying in and out of the object to be transferred to and from the process chamber which is at a high temperature. As a result, damage to the first motor and the second motor due to the influence of heat can be suppressed.
  • the industrial robot includes, for example, a main body portion to which an arm is rotatably connected, and a center of the arm is connected to the main body portion.
  • the first motor and the second motor are disposed inside the central portion of the arm, in this case, it is possible to reduce the inertia of the arm or the like which pivots with respect to the main body. .
  • an inner space in which the first motor and the second motor are disposed be formed inside the central portion of the arm, and the inner space be at atmospheric pressure.
  • the first motor and the second motor can be efficiently used in the industrial robot according to the present invention, for example, even when carrying in or out the object to be transferred to or from the process chamber which is at a high temperature. It becomes possible to cool. Therefore, for example, even in the case of carrying in and out the object to be transferred to and from the process chamber which is at a high temperature, it becomes possible to effectively suppress the temperature rise of the first motor and the second motor. As a result, it is possible to prevent damage of the first motor and the second motor due to the influence of heat. Moreover, since it becomes unnecessary to use expensive vacuum grease as a lubricant of a 1st motor and a 2nd motor if comprised in this way, it becomes possible to reduce the initial cost and running cost of an industrial robot.
  • the first motor and the second motor are disposed in the internal space so that the output shaft of the first motor and the output shaft of the second motor project in the opposite direction, and the first drive mechanism is configured to And a second drive mechanism is provided with a first rotation shaft connected to the output shaft of the motor, and a first magnetic fluid seal that rotatably supports the first rotation shaft and prevents the outflow of air from the internal space.
  • the first rotation shaft is disposed such that the moving direction of the first hand support member and the second hand support member with respect to the arm coincides with the axial direction of the first rotation shaft
  • the second rotation shaft is
  • the first drive mechanism is fixed to the tip of the first rotation shaft so that the moving direction of the first hand support member and the second hand support member with respect to the arm coincides with the axial direction of the second rotation shaft.
  • the second drive mechanism includes a third bevel gear fixed to a tip end portion of the second rotation shaft, a fourth bevel gear meshing with the third bevel gear, and a fourth rotation shaft to which the fourth bevel gear is fixed , And two second drive pulleys fixed to the fourth rotation shaft.
  • the first drive mechanism includes two first driven pulleys rotatably held by the fourth rotation shaft, and is fixed to the first hand support member, and further includes the first drive pulley and the first driven pulley.
  • the second drive mechanism is fixed to the second hand support member and the two second driven pulleys rotatably held by the third rotation shaft.
  • the second bevel gear is fixed to the center side of the third rotation shaft in the axial direction of the third rotation shaft, and the second bevel gear is provided with two second belts bridged between the second drive pulley and the second driven pulley.
  • Each of the first drive pulleys is fixed to each end of the third rotary shaft in the axial direction of the third rotary shaft, and the second driven pulley is between the second bevel gear and the first drive pulley.
  • the fourth bevel gear is rotatably supported by the third rotation shaft, and the fourth bevel gear is axially aligned with the fourth rotation shaft.
  • the two first driven pulleys which are fixed to the center side of the fourth rotation shaft at each of the first and second rotation shafts, are rotatably held at both ends of the fourth rotation shaft in the axial direction of the fourth rotation shaft.
  • the pulley is preferably fixed to the fourth rotation shaft between the fourth bevel gear and the first driven pulley.
  • the second driven pulley is rotatably held by the third rotary shaft to which the first drive pulley is fixed, and the first driven pulley is rotatable to the fourth rotary shaft to which the second drive pulley is fixed.
  • the configuration of the industrial robot is It becomes possible to simplify.
  • positions so that two 1st belts and two 2nd belts may be located in a line with a horizontal direction if comprised in this way it becomes possible to make thickness of the arm in an up-down direction thin. Therefore, it is possible to lower the height of the industrial robot.
  • the temperature is high, for example. Even in the case of carrying in and out of the object to be transferred into and from the process chamber, the damage due to the heat of the first motor for moving the first hand and the second motor for moving the second hand is suppressed It will be possible to
  • FIG. 1 is a plan view of an industrial robot according to an embodiment of the present invention. It is a side view of the industrial robot shown in FIG. It is a rear view of the industrial robot shown in FIG. (A) is a top view for demonstrating the internal structure of the arm shown in FIG. 1, (B) is a figure for demonstrating the internal structure of an arm from the EE direction of (A).
  • (A) is an enlarged view of a portion F in FIG. 4 (A)
  • (B) is an enlarged view of a portion G in FIG. 4 (B).
  • A) is an enlarged view of H part of FIG. 4 (A)
  • (B) is an enlarged view of J part of FIG. 4 (A).
  • FIG. 5 is a cross-sectional view for describing the configuration of a first hand support member, a second hand support member, an arm, a first drive mechanism, and a second drive mechanism, as viewed from the direction NN in FIG. 4B.
  • FIG. 5 is a cross-sectional view for describing a configuration of a first hand support member, a second hand support member, an arm, a first drive mechanism, and a second drive mechanism in the direction of QQ in FIG. 4B. It is a figure for demonstrating the internal structure of the arm concerning other embodiment of this invention.
  • FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention.
  • FIG. 2 is a side view of the industrial robot 1 shown in FIG.
  • FIG. 3 is a rear view of the industrial robot 1 shown in FIG.
  • the industrial robot 1 of this embodiment (hereinafter referred to as “robot 1”) is a robot that conveys a glass substrate 2 for liquid crystal display (hereinafter referred to as “substrate 2”), which is an object to be conveyed, in vacuum. It is.
  • the robot 1 is used by being incorporated into a liquid crystal display device manufacturing system.
  • a transfer chamber 3 (hereinafter, referred to as “chamber 3”) disposed at the center and a plurality of process chambers 4 (hereinafter, “chamber 4”) disposed to surround the chamber 3 are provided. And (see FIG. 1).
  • the inside of the chambers 3 and 4 is vacuum. That is, the chambers 3 and 4 are vacuum chambers. Inside the chamber 3, a part of the robot 1 is disposed. The robot 1 carries in the substrate 2 to the chamber 4 and carries out the substrate 2 from the chamber 4. Various devices and the like are disposed in the chamber 4, and various processes are performed on the substrate 2 in the chamber 4. In the chamber 4 of the present embodiment, processing on the substrate 2 is performed in a high temperature environment. Therefore, the internal temperature of the chamber 4 is high.
  • the robot 1 includes a hand 5 as a first hand on which the substrate 2 is mounted, a hand 6 as a second hand on which the substrate 2 is mounted, and a hand support member as a first hand support member to which the hand 5 is fixed. 7, a hand support member 8 as a second hand support member to which the hand 6 is fixed, an arm 9 for holding the hand support members 7 and 8, and a body portion 10 to which the arm 9 is rotatably coupled.
  • the main body unit 10 includes a columnar elevating member 12 (see FIG. 2) to which the central portion of the arm 9 is fixed, an elevating mechanism for elevating the elevating member 12, a pivoting mechanism for pivoting the elevating member 12, And a case body 13 in which the configuration of the above is accommodated.
  • the case body 13 is formed in a substantially bottomed cylindrical shape.
  • a flange 14 formed in a disk shape is fixed to the upper end of the case body 13.
  • the flange 14 is formed with a through hole in which the upper end portion of the elevating member 12 is disposed.
  • the hands 5 and 6 and the arm 9 are disposed on the upper side of the main body 10.
  • a part of the robot 1 is disposed inside the chamber 3.
  • a portion of the robot 1 above the lower end surface of the flange 14 is disposed inside the chamber 3. That is, a portion of the robot 1 above the lower end surface of the flange 14 is disposed in the vacuum region VR, and the hands 5 and 6 and the arm 9 are disposed in the vacuum chamber (in vacuum).
  • the portion of the robot 1 below the lower end surface of the flange 14 is disposed in the atmosphere region AR (in the atmosphere).
  • the arm 9 holds the hand support members 7 and 8 so that the hand support member 7 and the hand support member 8 can linearly reciprocate in the same horizontal direction.
  • the robot 1 has a drive mechanism 17 as a first drive mechanism for reciprocating the hand support member 7 with respect to the arm 9 and a drive mechanism 18 as a second drive mechanism for reciprocate the hand support member 8 with respect to the arm 9. And (see FIG. 4).
  • the X direction in FIG. 1 etc. which is the moving direction of the hand support members 7 and 8 with respect to the arm 9, is referred to as “front and back direction”, and is perpendicular to the vertical direction (vertical direction)
  • the Y direction of is the "left and right direction”.
  • the X1 direction side is referred to as the “front” side
  • the opposite X2 direction side is referred to as the “rear” side.
  • FIG. 4A is a plan view for explaining the internal structure of the arm 9 shown in FIG. 1, and FIG. 4B shows the internal structure of the arm 9 from the EE direction of FIG. 4A. It is a figure for demonstrating.
  • FIG. 5 (A) is an enlarged view of a part F of FIG. 4 (A)
  • FIG. 5 (B) is an enlarged view of a part G of FIG. 4 (B).
  • 6 (A) is an enlarged view of a portion H in FIG. 4 (A)
  • FIG. 6 (B) is an enlarged view of a portion J in FIG. 4 (A).
  • FIG. 7A is a view for explaining the internal structure of the arm 9 from the direction of arrows K in FIG.
  • FIG. 4A, and FIG. 7B is from the direction of LL in FIG. 4A. It is a figure for demonstrating the internal structure of the arm 9.
  • FIG. FIG. 8 is a cross-sectional view for describing the configuration of the hand support members 7, 8, the arm 9, and the drive mechanisms 17, 18 from the direction NN in FIG. 4B.
  • FIG. 9 is a cross-sectional view for describing the configurations of the hand support members 7 and 8, the arm 9 and the drive mechanisms 17 and 18 in the direction of QQ in FIG. 4B.
  • the hand 5 includes a plurality of forks 20 on which the substrate 2 is mounted, and a hand base 21 to which base ends (rear ends) of the plurality of forks 20 are fixed.
  • the hand 6 includes a plurality of forks 20 on which the substrate 2 is mounted, and a hand base 22 to which base ends (rear ends) of the plurality of forks 20 are fixed.
  • the hands 5, 6 in this embodiment are provided with six forks 20.
  • the fork 20 is formed in an elongated linear shape in the front-rear direction.
  • the hand bases 21 and 22 are formed in a substantially rectangular flat plate shape elongated in the left-right direction. The length (length in the left-right direction) of the hand base 21 is longer than the length (length in the left-right direction) of the hand base 22.
  • the hand 5 and the hand 6 are arranged so as to overlap each other in the vertical direction when viewed from the front and rear direction.
  • the hand 5 is disposed on the upper side and the hand 6 is disposed on the lower side when viewed from the front-rear direction. That is, when viewed from the front-rear direction, the hand base 21 is disposed on the upper side, and the hand base 22 is disposed on the lower side.
  • the hand 5 and the hand 6 are arranged such that the center of the hand base 21 and the center of the hand base 22 coincide in the left-right direction when viewed from the front-rear direction. That is, the hand 5 and the hand 6 are arranged such that the center of the hand 5 and the center of the hand 6 coincide in the left-right direction when viewed in the front-rear direction.
  • the arm 9 is disposed below the hand 6.
  • the arm 9 is formed in a substantially rectangular shape elongated in the front-rear direction. Also, the arm 9 is formed in a hollow shape.
  • the width in the left-right direction of the arm 9 is narrower than the width in the left-right direction of the hands 5 and 6.
  • the arm 9 is disposed such that the centers of the hands 5 and 6 and the center of the arm 9 coincide with each other in the left-right direction when viewed from the front-rear direction.
  • the arm 9 includes an arm frame 23 which is a frame of the arm 9, a cover member 24 constituting upper and lower, right and left and front and rear sides of the arm 9, and a box-shaped motor housing member 25 disposed at the center of the arm 9. And an upper surface cover 26 fixed to the upper surface of the motor housing member 25. In FIG. 4 to FIG. 9, the illustration of the cover member 24 is omitted.
  • the arm frame 23 constitutes a frame of the arm 9 in the entire area of the arm 9 in the front-rear direction.
  • the arm frame 23 includes a right side plate portion 23a constituting a right side surface of the arm frame 23, a left side plate portion 23b constituting a left side surface of the arm frame 23, and an upper side plate portion 23c constituting an upper side surface of the arm frame 23. And a lower side plate portion 23d that constitutes the lower side surface of the arm frame 23.
  • the right side plate portion 23a, the left side plate portion 23b, the upper side plate portion 23c, and the lower side plate portion 23d are formed in a flat plate shape.
  • the right side plate portion 23a is disposed such that the thickness direction of the right side plate portion 23a coincides with the left and right direction
  • the left side plate portion 23b is disposed such that the thickness direction of the left side plate portion 23b coincides with the left and right direction It is done.
  • the upper side plate portion 23c is arranged such that the thickness direction of the upper side plate portion 23c coincides with the vertical direction
  • the lower side plate portion 23d is arranged such that the thickness direction of the lower side plate portion 23d coincides with the vertical direction It is done.
  • the right side plate portion 23a and the left side plate portion 23b are disposed in the state of being spaced apart in the left-right direction.
  • the upper side plate portion 23c is fixed to the upper end of the right side plate portion 23a and the upper end of the left side plate portion 23b by screws.
  • the lower side plate portion 23d is fixed to the lower end of the right side plate portion 23a and the lower end of the left side plate portion 23b by screws.
  • the right end of the upper side plate portion 23c and the right end of the lower side plate portion 23d are disposed on the right side of the right side plate portion 23a, and the left end of the upper side plate portion 23c and the left end of the lower side plate portion 23d are disposed on the left side of the left side plate portion 23b It is done.
  • the motor housing member 25 is formed in a substantially rectangular parallelepiped box shape whose upper surface side is open. Further, the motor housing member 25 is formed in a box shape of a substantially rectangular parallelepiped elongated in the front-rear direction.
  • the motor accommodating member 25 accommodates a motor 37 described later constituting the drive mechanism 17 and a motor 38 described later constituting the drive mechanism 18.
  • the motor housing member 25 is fixed to a central portion of the arm frame 23. That is, the motor housing member 25 is disposed at the central portion of the arm 9.
  • the center of the bottom surface of the motor housing member 25 is fixed to the upper end of the elevating member 12. That is, the center of the arm 9 is rotatably connected to the main body 10. Most parts other than the lower end of the motor housing member 25 are disposed between the right side plate 23a and the left side plate 23b in the left-right direction (see FIGS. 5A and 9).
  • the upper surface cover 26 is formed in a rectangular flat plate shape.
  • the upper surface cover 26 is fixed to the upper surface of the motor accommodation member 25 so as to close an opening formed on the upper surface side of the motor accommodation member 25.
  • An internal space S defined by the motor housing member 25 and the top cover 26 is formed inside the central portion of the arm 9.
  • a through hole 25a penetrating in the vertical direction is formed at the center of the bottom surface portion of the motor housing member 25, a through hole 25a penetrating in the vertical direction.
  • the elevating member 12 is formed in a cylindrical shape.
  • the elevating member 12 is fixed to the bottom surface of the motor housing member 25 so as to surround the through hole 25a, and the inside of the case body 13 communicates with the internal space S.
  • the internal space S of the case body 13 is at atmospheric pressure.
  • guide rails 29 for guiding the hand support member 7 in the front-rear direction are fixed to the right surface of the right side plate portion 23a and the left surface of the left side plate portion 23b.
  • a guide rail 30 for guiding the hand support member 8 in the front-rear direction is fixed to the right surface of the right side plate portion 23a and the left surface of the left side plate portion 23b.
  • the guide rails 29, 30 are fixed to the right side plate portion 23a and the left side plate portion 23b so that the longitudinal direction of the guide rails 29, 30 and the longitudinal direction coincide with each other.
  • a plurality of guide rails 29 divided in the front-rear direction are fixed to the right side plate portion 23a and the left side plate portion 23b (see FIG. 7).
  • a plurality of guide rails 30 divided in the front-rear direction are fixed to the right side plate portion 23a and the left side plate portion 23b.
  • the guide rail 29 fixed to the right side of the right side plate portion 23a and the guide rail 29 fixed to the left side of the left side plate portion 23b are arranged at the same position in the vertical direction.
  • the guide rail 30 fixed to the right surface of the right side plate portion 23a and the guide rail 30 fixed to the left surface of the left side plate portion 23b are arranged at the same position in the vertical direction.
  • the guide rail 30 is disposed on the upper side of the guide rail 29.
  • the hand support member 7 is composed of two slide portions 7 a that slide in the front-rear direction along the guide rails 29 and two hand fixing portions 7 b to which the hand base 21 of the hand 5 is fixed.
  • the hand support member 8 is composed of two slide portions 8a that slide in the front-rear direction along the guide rails 30, and two hand fixing portions 8b to which the hand base 22 of the hand 6 is fixed. There is.
  • each of the two slide portions 7a is disposed on the outer side in the left-right direction of the right side plate portion 23a and the left side plate portion 23b.
  • Each of the two slide parts 8a is arrange
  • the two slide parts 8a are arrange
  • the right end portions of the slide portions 7a and 8a disposed on the right side project to the right with respect to the right side surface of the cover member 24 and the left end portions of the slide portions 7a and 8a disposed on the left side are the cover It projects to the left from the left side surface of the member 24.
  • One hand fixing portion 7b of the two hand fixing portions 7b is fixed to the slide portion 7a so as to extend obliquely from the right end side of the slide portion 7a disposed on the right side to the upper right side.
  • the lower surface of the right end portion of the hand base portion 21 is fixed to the upper end of the hand fixing portion 7b as shown in FIG.
  • the other hand fixing portion 7b is fixed to the slide portion 7a so as to extend from the left end side of the slide portion 7a disposed on the left side toward the upper left, and the upper end of the hand fixing portion 7b As shown in 3, the lower surface of the left end portion of the hand base 21 is fixed.
  • One hand fixing portion 8b of the two hand fixing portions 8b is fixed to the slide portion 8a so as to extend obliquely from the right end side of the slide portion 8a disposed on the right side to the upper right side.
  • the lower surface of a portion of the hand base 22 that is closer to the right than the center in the left-right direction is fixed.
  • the other hand fixing portion 8b is fixed to the slide portion 8a so as to extend from the left end side of the slide portion 8a disposed on the left side to the upper left, and the upper end of the hand fixing portion 8b As shown in FIG. 3, the lower surface of the left side of the hand base 22 with respect to the center in the left-right direction is fixed.
  • the guide block 31 engaged with the guide rail 29 disposed on the right side is fixed to the slide portion 7 a disposed on the right side, and the slide portion 7 a disposed on the left side is attached to the guide rail 29 disposed on the left side
  • the guide block 31 to be engaged is fixed.
  • the guide block 32 engaged with the guide rail 30 disposed on the right is fixed to the slide 8a disposed on the right, and the guide 8 disposed on the left is disposed on the slide 8a disposed on the left
  • a guide block 32 engaged with the rail 30 is fixed.
  • three guide blocks 31 are fixed to each of the two slide portions 7a with a space in the front-rear direction (see FIG. 7B). Further, three guide blocks 32 are fixed to each of the two slide portions 8a in a state of being spaced in the front-rear direction (see FIG. 7A).
  • a guide mechanism 33 configured to guide the hand support member 7 in the front-rear direction is configured by the guide rail 29 and the guide block 31. Further, the guide rail 30 and the guide block 32 constitute a guide mechanism 34 for guiding the hand support member 8 in the front-rear direction.
  • the drive mechanisms 17 and 18 are disposed inside the arm 9.
  • the drive mechanism 17 includes a motor 37 as a drive source.
  • the drive mechanism 18 includes a motor 38 as a drive source.
  • the motors 37 and 38 are disposed in the internal space S. That is, the motors 37, 38 are disposed inside the central portion of the arm 9.
  • the motors 37 and 38 are fixed to the motor housing member 25 via predetermined brackets.
  • the motor 37 and the motor 38 are disposed in the state of being spaced apart in the front-rear direction. Specifically, the motor 37 is disposed on the rear side, and the motor 38 is disposed on the front side.
  • the motor 37 of this embodiment is a first motor
  • the motor 38 is a second motor.
  • the motors 37 and 38 are arranged such that the axial direction of the output shaft of the motors 37 and 38 coincides with the front-rear direction.
  • the motors 37 and 38 are disposed in the internal space S such that the output shaft of the motor 37 and the output shaft of the motor 38 protrude in the opposite direction.
  • the motors 37, 38 are disposed in the internal space S such that the output shaft of the motor 37 projects rearward and the output shaft of the motor 38 projects forward.
  • the rotation center of the motor 37 and the rotation center of the motor 38 coincide with each other.
  • the rotation centers of the motors 37 and 38 and the center of the arm 9 substantially coincide with each other. Note that air pipes (not shown) for cooling are wound around the motors 37 and 38.
  • the drive mechanism 17 includes a rotation shaft 39 as a first rotation shaft connected to the output shaft of the motor 37, a bevel gear 40 as a first bevel gear fixed to the tip of the rotation shaft 39, and a bevel gear A bevel gear 41 as a second bevel gear meshing with 40 and a rotation shaft 42 as a third rotation shaft to which the bevel gear 41 is fixed are provided.
  • the drive mechanism 18 includes a rotary shaft 43 as a second rotary shaft connected to the output shaft of the motor 38, a bevel gear 44 as a third bevel gear fixed to the tip of the rotary shaft 43, and a umbrella A bevel gear 45 as a fourth bevel gear meshing with the gear 44 and a rotation shaft 46 as a fourth rotation shaft to which the bevel gear 45 is fixed are provided.
  • the drive mechanism 17 spans two drive pulleys 48 fixed to the rotation shaft 42, two driven pulleys 49 rotatably held by the rotation shaft 46, the drive pulley 48 and the driven pulley 49. It has two belts 50 to be delivered.
  • the drive mechanism 18 comprises two drive pulleys 52 fixed to the rotary shaft 46, two driven pulleys 53 rotatably held by the rotary shaft 42, a drive pulley 52 and a driven pulley 53. It has two belts 54 to be bridged.
  • the drive pulley 48 of this embodiment is a first drive pulley
  • the driven pulley 49 is a first driven pulley
  • the belt 50 is a first belt
  • the drive pulley 52 is a second drive pulley
  • the driven pulley 53 is
  • the belt 54 is a second driven pulley.
  • the rotary shaft 39 is disposed such that the axial direction of the rotary shaft 39 coincides with the front-rear direction, and is connected to the front end (rear end) of the output shaft of the motor 37 via a coupling 55 (FIG. 5) reference).
  • the rotating shaft 43 is disposed so that the axial direction of the rotating shaft 43 coincides with the front-rear direction, and is connected to the tip (front end) of the output shaft of the motor 38 via a coupling 55 (see FIG. 5) ).
  • the bevel gears 40 and 41, the rotation shaft 42, the drive pulley 48 and the driven pulley 53 are disposed inside the rear end side of the arm 9.
  • the bevel gears 44 and 45, the rotation shaft 46, the drive pulley 52 and the driven pulley 49 are disposed inside the front end side of the arm 9.
  • the drive mechanism 17 is provided with a magnetic fluid seal 56 as a first magnetic fluid seal that holds the rotating shaft 39 rotatably and prevents the outflow of air from the internal space S.
  • the drive mechanism 18 is provided with a magnetic fluid seal 57 as a second magnetic fluid seal that holds the rotating shaft 43 rotatably and prevents the outflow of air from the internal space S.
  • the magnetic fluid seal 56 is fixed to a rear wall 25 b that constitutes the rear surface of the motor housing member 25.
  • the magnetic fluid seal 57 is fixed to a front wall 25 c that constitutes the front surface of the motor housing member 25.
  • the magnetic fluid seal 56 is fixed to the rear wall 25b in a state of being inserted into a through hole that penetrates the rear wall 25b in the front-rear direction, and the magnetic fluid seal 57 has a front wall 25c. It is being fixed to front wall 25c in the state where it was inserted in the penetration hole penetrated by the direction of order. That is, the arm 9 includes a rear wall 25 b which defines the inner space S and holds the magnetic fluid seal 56, and a front wall 25 c which defines the inner space S and holds the magnetic fluid seal 57.
  • the rear wall 25b of this embodiment is a first wall
  • the front wall 25c is a second wall.
  • the rotating shafts 39 and 43 are rotatably supported by a plurality of bearings 59 fixed to the arm frame 23.
  • the rotating shaft 39 of this form is formed of two short axes of short length, and one long axis of one long axis.
  • One of the two short shafts is coupled to the output shaft of the motor 37 via a coupling 55 and is rotatably held by the magnetic fluid seal 56.
  • a bevel gear 40 is fixed to the other short axis.
  • One short axis and the front end of the long axis are connected by a coupling 60 disposed behind the magnetic fluid seal 56 (see FIG. 5), and the other short axis and the rear end of the long axis are the rearmost It is connected by the coupling 60 arrange
  • the rotation shaft 43 of the present embodiment is formed by two short axes with a short length and one long axis with a long length.
  • One of the two short shafts is connected to the output shaft of the motor 38 via a coupling 55 and is rotatably held by the magnetic fluid seal 57.
  • a bevel gear 44 is fixed to the other short axis.
  • One short axis and the rear end of the long axis are connected by a coupling 60 disposed on the front side of the magnetic fluid seal 57 (see FIG. 5), and the other short axis and the front end of the long axis are the frontmost It connects by the coupling 60 arrange
  • the rotating shafts 39 and 43 may be configured by one long axis.
  • the rotation shaft 42 is disposed on the rear side of the bevel gear 40.
  • the rotation shaft 42 is disposed such that the axial direction of the rotation shaft 42 coincides with the left and right direction, and rotates with the power of the motor 37 as the rotation axial direction. That is, the drive pulley 48 fixed to the rotation shaft 42 rotates with the power of the motor 37 as the rotation axial direction in the left-right direction. Further, the driven pulley 53 rotatably held by the rotating shaft 42 also rotates with the left and right direction as an axial direction of rotation.
  • the bevel gear 41 is fixed to the center side of the rotation shaft 42 in the left-right direction.
  • the rotation shaft 46 is disposed on the front side of the bevel gear 44.
  • the rotating shaft 46 is disposed so that the axial direction of the rotating shaft 46 coincides with the left and right direction, and rotates with the power of the motor 38 as the rotating axial direction. That is, the drive pulley 52 fixed to the rotating shaft 46 rotates with the power of the motor 38 as the rotation axial direction in the left-right direction. Further, the driven pulley 49 rotatably held by the rotating shaft 46 also rotates with the left and right direction as an axial direction of rotation.
  • the bevel gear 45 is fixed to the center side of the rotation shaft 46 in the left-right direction.
  • Each of the two drive pulleys 48 is fixed to each end of the rotary shaft 42 in the left-right direction.
  • the driven pulley 53 is rotatably held on the rotating shaft 42 between the bevel gear 41 and the drive pulley 48, and the two driven pulleys 53 are disposed inside the two drive pulleys 48 in the left-right direction. It is done.
  • Each of the two driven pulleys 49 is rotatably held at each of both ends of the rotary shaft 46 in the left-right direction.
  • the drive pulley 52 is fixed to the rotating shaft 46 between the bevel gear 45 and the driven pulley 49, and the two drive pulleys 52 are disposed on the inner side in the left-right direction than the two driven pulleys 49. .
  • the belt 50 is fixed to the hand support member 7. Specifically, a part of each of the two belts 50 is fixed to the upper end of each of the two slide parts 7 a by a predetermined mounting member and a bolt.
  • the belt 50 according to the present embodiment is an end belt, and both ends of the belt 50 stretched over the drive pulley 48 and the driven pulley 49 are fixed to the slide portion 7a by the attachment member and the bolt (FIG. B) see).
  • the belt 50 may be an endless belt formed in an annular shape.
  • the belt 54 is fixed to the hand support member 8. Specifically, a portion of each of the two belts 54 is fixed to the lower end portion of each of the two slide portions 8 a by a predetermined mounting member and a bolt. Similar to the belt 50, the belt 54 of this embodiment is an end belt, and both ends of the belt 54 which is bridged by the drive pulley 52 and the driven pulley 53 are fixed to the slide portion 8a by the attachment member and the bolt. (See FIG. 7A).
  • the belt 54 may be an endless belt formed in an annular shape.
  • the two belts 50 are respectively provided on the left and right sides of the motors 37 and 38 when viewed from the front-rear direction.
  • the two belts 54 are disposed on the left and right sides of the motors 37 and 38, respectively.
  • the belt 54 is disposed adjacent to the belt 50 in the left-right direction and at the same height as the belt 50. That is, the belt 54 is disposed at the same height as the belt 50 so as to be adjacent to the belt 50 on the inner side in the left-right direction on both left and right end sides inside the arm 9.
  • the motors 37 and 38 are disposed inside the central portion of the arm 9. Therefore, in the present embodiment, even when the robot 1 carries the substrate 2 into and out of the chamber 4 whose temperature is high, the distance between the motors 37 and 38 and the high temperature chamber 4 is secured. Is possible (see Figure 1). Therefore, in the present embodiment, even when the robot 1 carries in and out the substrate 2 to and from the chamber 4 at high temperature, it is possible to suppress the temperature rise of the motors 37 and 38, and as a result , Damage to the motor 37, 38 due to the influence of heat.
  • the internal space S in which the motors 37 and 38 are disposed has an atmospheric pressure. Therefore, in the present embodiment, even when the robot 1 carries in and out the substrate 2 to and from the high temperature chamber 4, the motors 37 and 38 can be efficiently cooled using the cooling air. . Therefore, in the present embodiment, even when the robot 1 carries in and out the substrate 2 to and from the high temperature chamber 4, the temperature rise of the motors 37 and 38 can be effectively suppressed, and as a result , Damage to the motors 37, 38 due to the influence of heat. Further, in the present embodiment, since the motors 37, 38 are disposed in the internal space S at atmospheric pressure, it is not necessary to use expensive vacuum grease as a lubricant for the motors 37, 38. Therefore, in this embodiment, the initial cost and the running cost of the robot 1 can be reduced.
  • a magnetic fluid seal 56 that rotatably supports the rotation shaft 39 and prevents the outflow of air from the internal space S is attached to the rear wall 25 b that defines the internal space S, and the rotation shaft 43 can be rotated.
  • a magnetic fluid seal 57 is attached to the front wall 25c that defines the inner space S to support the inner space S and to prevent the air from flowing out of the inner space S. Therefore, in the present embodiment, only the internal space S formed in the central portion of the arm 9 has the atmospheric pressure inside the arm 9. Therefore, in the present embodiment, the internal configuration of the arm 9 can be simplified as compared with the case where the space to be the atmospheric pressure is extended to the end of the arm 9, and air can be discharged to the vacuum region VR. It becomes possible to reduce the risk of spillage.
  • the magnetic fluid seals 56, 57 are disposed on the center side of the arm 9, even when the robot 1 carries in and out the substrate 2 to and from the high temperature chamber 4, the magnetic fluid seal It becomes possible to secure the distance between 56 and 57 and the high temperature chamber 4. Therefore, in the present embodiment, it is possible to suppress the temperature rise of the magnetic fluid seals 56, 57, and as a result, it is possible to suppress the damage of the magnetic fluid seals 56, 57 due to the influence of heat.
  • the driven pulley 53 is rotatably held by the rotary shaft 42 to which the drive pulley 48 is fixed, and the driven pulley 49 is rotatably held by the rotary shaft 46 to which the drive pulley 52 is fixed. Therefore, in this embodiment, the configuration of the robot 1 is simplified as compared with the case where the shaft on which the driven pulley 53 is rotatably held and the shaft on which the driven pulley 49 is rotatably held are separately provided. Becomes possible. Further, in the present embodiment, since the two belts 50 and the two belts 54 arranged inside the arm 9 are arranged side by side in the left-right direction, the thickness of the arm 9 (thickness in the vertical direction) ) Can be made thinner. Therefore, in the present embodiment, the height of the robot 1 can be lowered.
  • the driven pulley 49 is rotatably held by the rotary shaft 46, but a shaft for rotatably holding the driven pulley 49 may be separately provided.
  • the driven pulley 53 is rotatably held by the rotating shaft 42, but a shaft for rotatably holding the driven pulley 53 may be separately provided.
  • the belt 54 is disposed adjacent to the belt 50 inside in the left-right direction, but the belt 54 may be disposed on the right side of the belt 50 disposed on the right side, for example Alternatively, the belt 54 may be disposed on the left side of the belt 50 disposed on the left side.
  • the belt 50 and the belt 54 may be arranged to overlap in the vertical direction. Specifically, when viewed from the front and rear direction, the belt 50 and the belt 54 may be arranged to overlap in the vertical direction on both left and right sides of the motors 37 and 38, respectively. Even in this case, the motors 37, 38 are disposed inside the central portion of the arm 9.
  • the same components as those described above are denoted by the same reference numerals.
  • the hand support members 7 and 8 are moved in the front-rear direction using the belts 50 and 54, but like the industrial robot described in the above-mentioned Patent Document 1, the hand using screw members The support members 7 and 8 may be moved in the front-rear direction. Even in this case, the motors 37, 38 are disposed inside the central portion of the arm 9.
  • the arm 9 is held by the arm support member so as to be linearly reciprocally movable in the front-rear direction with respect to the arm support member. May be
  • the motors 37 and 38 may be arranged such that the output shafts of the motors 37 and 38 coincide with the left and right direction.
  • the entire inside of the arm 9 may be at atmospheric pressure. Further, the entire inside of the arm 9 may be vacuum. That is, the motors 37 and 38 may be disposed in a vacuum.
  • the object to be transported by the robot 1 is the glass substrate 2 for liquid crystal display, but the object to be transported by the robot 1 is, for example, for organic EL (organic electroluminescence) display
  • the glass substrate may be an object of conveyance other than the glass substrate 2.

Abstract

Provided is an industrial robot which conveys an object to be conveyed in vacuum and which is capable of suppressing damaging of a motor for moving a first hand and a motor for moving a second hand caused by the influence of heat, even when, for example, the object to be conveyed is delivered into/out of a high-temperature process chamber. The industrial robot 1 is provided with: hands 5, 6; a hand support member 7 to which the hand 5 is fixed; a hand support member 8 to which the hand 6 is fixed; an arm 9 that holds the hand support members 7, 8 so as to enable the hand support members 7, 8 to linearly reciprocate in the same horizontal direction; a first drive mechanism for causing the hand support member 7 to reciprocate with respect to the arm 9; and a second drive mechanism for causing the hand support member 8 to reciprocate with respect to the arm 9. A motor that constitutes a part of the first drive mechanism and a motor that constitutes a part of the second drive mechanism are disposed inside the center portion of the arm 9.

Description

産業用ロボットIndustrial robot
　本発明は、真空中で搬送対象物を搬送する産業用ロボットに関する。 The present invention relates to an industrial robot that transports an object to be transported in vacuum.
　従来、ガラス基板を搬送する産業用ロボットが知られている（たとえば、特許文献１参照）。特許文献１に記載の産業用ロボットは、ガラス基板が搭載される第１ハンドおよび第２ハンドと、第１ハンドが固定される第１ハンド支持部材と、第２ハンドが固定される第２ハンド支持部材と、第１ハンド支持部材および第２ハンド支持部材を保持するアームと、アームを保持するアーム支持部材とを備えている。アームは、前後方向に細長い略直方体状に形成されている。第１ハンド支持部材および第２ハンド支持部材は、アームに対して前後方向へ直線的に往復移動可能となっている。 DESCRIPTION OF RELATED ART Conventionally, the industrial robot which conveys a glass substrate is known (for example, refer patent document 1). The industrial robot described in Patent Document 1 includes a first hand and a second hand on which a glass substrate is mounted, a first hand support member to which the first hand is fixed, and a second hand to which the second hand is fixed. A support member, an arm for holding the first hand support member and the second hand support member, and an arm support member for holding the arm. The arm is formed in a substantially rectangular shape elongated in the front-rear direction. The first hand support member and the second hand support member are linearly reciprocally movable in the front-rear direction with respect to the arm.
　また、特許文献１に記載の産業用ロボットは、アームに対して第１ハンド支持部材を往復移動させる第１駆動機構と、アームに対して第２ハンド支持部材を往復移動させる第２駆動機構とを備えている。第１駆動機構は、外周面にオネジが形成される第１ネジ部材と、第１ハンド支持部材に固定されるとともに第１ネジ部材に係合する第１ナット部材と、第１ネジ部材を回転させる第１モータとを備えている。第２駆動機構は、外周面にオネジが形成される第２ネジ部材と、第２ハンド支持部材に固定されるとともに第２ネジ部材に係合する第２ナット部材と、第２ネジ部材を回転させる第２モータとを備えている。第１モータは、アームの内部の前端側に固定され、第２モータは、アームの内部の後端側に固定されている。 Further, the industrial robot described in Patent Document 1 includes a first drive mechanism for reciprocating the first hand support member with respect to the arm, and a second drive mechanism for reciprocating the second hand support member with respect to the arm. Is equipped. The first drive mechanism rotates a first screw member whose male screw is formed on the outer peripheral surface, a first nut member fixed to the first hand support member and engaged with the first screw member, and a first screw member. And a first motor. The second drive mechanism rotates a second screw member whose male screw is formed on the outer peripheral surface, a second nut member fixed to the second hand support member and engaged with the second screw member, and a second screw member. And a second motor. The first motor is fixed to the front end side inside the arm, and the second motor is fixed to the rear end side inside the arm.
　また、従来、真空中でガラス基板を搬送する産業用ロボットが知られている（たとえば、特許文献２参照）。特許文献２に記載の産業用ロボットは、ガラス基板が搭載されるハンドと、ハンドが先端側に回動可能に連結されるアームと、アームの基端側が回動可能に連結される本体部とを備えている。この産業用ロボットは、トランスファーチャンバーと、トランスファーチャンバーを囲むように配置される複数のプロセスチャンバーとを備える製造システムに組み込まれて使用される。トランスファーチャンバーおよびプロセスチャンバーの内部は、真空になっている。 Also, conventionally, an industrial robot for transporting a glass substrate in vacuum is known (see, for example, Patent Document 2). The industrial robot described in Patent Document 2 includes a hand on which a glass substrate is mounted, an arm to which the hand is pivotably connected to the tip end, and a main body portion to which the base end of the arm is pivotably connected. Is equipped. This industrial robot is used by being incorporated into a manufacturing system comprising a transfer chamber and a plurality of process chambers arranged to surround the transfer chamber. The transfer chamber and the interior of the process chamber are evacuated.
　特許文献２に記載の産業用ロボットのハンドおよびアームは、トランスファーチャンバーの中に配置されている。プロセスチャンバーには、各種の機器が設置されており、プロセスチャンバーでは、ガラス基板に対する各種の処理が実行される。特許文献２に記載の産業用ロボットは、プロセスチャンバーからのガラス基板の搬出やプロセスチャンバーへのガラス基板の搬入を行う。なお、プロセスチャンバーでは、高温環境下でガラス基板に対する処理が実行されることがあり、高温環境下でガラス基板に対する処理が実行されるプロセスチャンバーでは、その内部温度が高くなっている。 The hand and arm of the industrial robot described in Patent Document 2 are disposed in a transfer chamber. Various apparatuses are installed in the process chamber, and various processes are performed on the glass substrate in the process chamber. The industrial robot described in Patent Document 2 carries out the glass substrate from the process chamber and carries the glass substrate into the process chamber. In the process chamber, processing may be performed on the glass substrate in a high temperature environment, and the internal temperature of the process chamber in which the processing on the glass substrate is performed in the high temperature environment is high.
特開２０１５－８０８２８号公報JP, 2015-80828, A 特開２０１５－１３９８５４号公報JP, 2015-139854, A
　本願発明者は、特許文献２に記載の産業用ロボットのように真空中でガラス基板等の搬送対象物を搬送する産業用ロボットとして、特許文献１に記載の産業用ロボットのようにアームに対して直線的に往復移動する第１ハンドおよび第２ハンドを有する産業用ロボットの採用を検討している。 The inventor of the present invention is an industrial robot for transporting a transfer target such as a glass substrate in vacuum like the industrial robot described in Patent Document 2 with respect to the arm like the industrial robot described in Patent Document 1 We are considering the adoption of an industrial robot with a first hand and a second hand that reciprocate linearly.
　しかしながら、特許文献１に記載の産業用ロボットでは、アームの内部の前端側に第１モータが固定され、アームの内部の後端側に第２モータが固定されているため、この産業用ロボットによって、高温環境下でガラス基板の処理が実行されるプロセスチャンバー（すなわち、高温になっているプロセスチャンバー）に対する搬送対象物の搬入や搬出を行う場合、第１モータまたは第２モータが高温のプロセスチャンバーに近づく。また、第１モータまたは第２モータが高温のプロセスチャンバーに近づくと、第１モータまたは第２モータの温度が高くなって、第１モータまたは第２モータが熱の影響で損傷するおそれが高くなる。 However, in the industrial robot described in Patent Document 1, the first motor is fixed to the front end side inside the arm, and the second motor is fixed to the rear end side inside the arm. When carrying objects in and out of a process chamber in which processing of a glass substrate is performed in a high temperature environment (that is, a process chamber at high temperature), the first motor or the second motor is a high temperature process chamber Approach to In addition, when the first motor or the second motor approaches the high temperature process chamber, the temperature of the first motor or the second motor becomes high, and the possibility that the first motor or the second motor may be damaged by the heat becomes high. .
　そこで、本発明の課題は、アームに対して直線的に往復移動する第１ハンドおよび第２ハンドを有するとともに真空中で搬送対象物を搬送する産業用ロボットにおいて、たとえば、高温になっているプロセスチャンバーに対する搬送対象物の搬入や搬出を行う場合であっても、第１ハンドを移動させるための第１モータおよび第２ハンドを移動させるための第２モータの、熱の影響による損傷を抑制することが可能な産業用ロボットを提供することにある。 Therefore, an object of the present invention is, for example, a process in which the temperature is high in an industrial robot having a first hand and a second hand reciprocally moving linearly with respect to an arm and transporting an object to be transported in vacuum. Even in the case of carrying in and out of the object to be transferred from the chamber, the damage due to the heat of the first motor for moving the first hand and the second motor for moving the second hand is suppressed It is to provide an industrial robot capable of
　上記の課題を解決するため、本発明の産業用ロボットは、真空中で搬送対象物を搬送する産業用ロボットであって、搬送対象物が搭載される第１ハンドおよび第２ハンドと、第１ハンドが固定される第１ハンド支持部材と、第２ハンドが固定される第２ハンド支持部材と、第１ハンド支持部材と第２ハンド支持部材とが水平方向の同じ方向へ直線的に往復移動可能となるように第１ハンド支持部材および第２ハンド支持部材を保持するアームと、アームに対して第１ハンド支持部材を往復移動させる第１駆動機構と、アームに対して第２ハンド支持部材を往復移動させる第２駆動機構とを備え、第１駆動機構は、駆動源としての第１モータを備え、第２駆動機構は、駆動源としての第２モータを備え、第１モータおよび第２モータは、アームの中心部分の内部に配置されていることを特徴とする。 In order to solve the above problems, an industrial robot according to the present invention is an industrial robot that transports an object to be transported in vacuum, and the first hand and the second hand on which the object to be transported is mounted; The first hand support member to which the hand is fixed, the second hand support member to which the second hand is fixed, and the first hand support member and the second hand support member reciprocate linearly in the same horizontal direction. An arm for holding the first hand support member and the second hand support member so as to be possible, a first drive mechanism for reciprocating the first hand support member with respect to the arm, and a second hand support member for the arm A second drive mechanism for reciprocating the motor, the first drive mechanism comprises a first motor as a drive source, and the second drive mechanism comprises a second motor as a drive source, the first motor and the second Motor is a Wherein the of being disposed within the central portion.
　本発明の産業用ロボットでは、第１モータおよび第２モータは、アームの中心部分の内部に配置されている。そのため、本発明の産業用ロボットで、たとえば、高温になっているプロセスチャンバーに対する搬送対象物の搬入や搬出を行う場合であっても、第１モータおよび第２モータと、高温のプロセスチャンバーとの距離を確保することが可能になる。したがって、本発明では、たとえば、高温になっているプロセスチャンバーに対する搬送対象物の搬入や搬出を行う場合であっても、第１モータおよび第２モータの温度の上昇を抑制することが可能になり、その結果、第１モータおよび第２モータの、熱の影響による損傷を抑制することが可能になる。 In the industrial robot of the present invention, the first motor and the second motor are disposed inside the central portion of the arm. Therefore, with the industrial robot according to the present invention, for example, even when carrying in and out the object to be transferred to and from the high temperature process chamber, the first motor and the second motor and the high temperature process chamber It becomes possible to secure the distance. Therefore, according to the present invention, it is possible to suppress the temperature rise of the first motor and the second motor, for example, even when carrying in and out of the object to be transferred to and from the process chamber which is at a high temperature. As a result, damage to the first motor and the second motor due to the influence of heat can be suppressed.
　本発明において、産業用ロボットは、たとえば、アームが回動可能に連結される本体部を備え、アームの中心が本体部に連結されている。本発明では、アームの中心部分の内部に第１モータおよび第２モータが配置されているため、この場合には、本体部に対して回動するアーム等のイナーシャを低減することが可能になる。 In the present invention, the industrial robot includes, for example, a main body portion to which an arm is rotatably connected, and a center of the arm is connected to the main body portion. In the present invention, since the first motor and the second motor are disposed inside the central portion of the arm, in this case, it is possible to reduce the inertia of the arm or the like which pivots with respect to the main body. .
　本発明において、アームの中心部分の内部には、第１モータおよび第２モータが配置される内部空間が形成され、内部空間は、大気圧となっていることが好ましい。このように構成すると、本発明の産業用ロボットで、たとえば、高温になっているプロセスチャンバーに対する搬送対象物の搬入や搬出を行う場合であっても、第１モータおよび第２モータを効率的に冷却することが可能になる。したがって、たとえば、高温になっているプロセスチャンバーに対する搬送対象物の搬入や搬出を行う場合であっても、第１モータおよび第２モータの温度の上昇を効果的に抑制することが可能になり、その結果、第１モータおよび第２モータの、熱の影響による損傷を防止することが可能になる。また、このように構成すると、第１モータおよび第２モータの潤滑剤として高価な真空グリースを使用する必要がなくなるため、産業用ロボットのイニシャルコストおよびランニングコストを低減することが可能になる。 In the present invention, it is preferable that an inner space in which the first motor and the second motor are disposed be formed inside the central portion of the arm, and the inner space be at atmospheric pressure. According to this structure, the first motor and the second motor can be efficiently used in the industrial robot according to the present invention, for example, even when carrying in or out the object to be transferred to or from the process chamber which is at a high temperature. It becomes possible to cool. Therefore, for example, even in the case of carrying in and out the object to be transferred to and from the process chamber which is at a high temperature, it becomes possible to effectively suppress the temperature rise of the first motor and the second motor. As a result, it is possible to prevent damage of the first motor and the second motor due to the influence of heat. Moreover, since it becomes unnecessary to use expensive vacuum grease as a lubricant of a 1st motor and a 2nd motor if comprised in this way, it becomes possible to reduce the initial cost and running cost of an industrial robot.
　本発明において、内部空間には、第１モータの出力軸と第２モータの出力軸とが反対方向に突出するように第１モータおよび第２モータが配置され、第１駆動機構は、第１モータの出力軸に連結される第１回転軸と、第１回転軸を回転可能に支持するとともに内部空間からの空気の流出を防ぐ第１磁性流体シールとを備え、第２駆動機構は、第２モータの出力軸に連結される第２回転軸と、第２回転軸を回転可能に支持するとともに内部空間からの空気の流出を防ぐ第２磁性流体シールとを備え、アームは、内部空間を画定するとともに第１磁性流体シールを保持する第１壁部と、内部空間を画定するとともに第２磁性流体シールを保持する第２壁部とを備えることが好ましい。 In the present invention, the first motor and the second motor are disposed in the internal space so that the output shaft of the first motor and the output shaft of the second motor project in the opposite direction, and the first drive mechanism is configured to And a second drive mechanism is provided with a first rotation shaft connected to the output shaft of the motor, and a first magnetic fluid seal that rotatably supports the first rotation shaft and prevents the outflow of air from the internal space. A second rotating shaft connected to the output shaft of the motor, and a second magnetic fluid seal rotatably supporting the second rotating shaft and preventing the outflow of air from the internal space, the arm including the internal space It is preferable to have a first wall defining and holding the first magnetic fluid seal, and a second wall defining the interior space and holding the second magnetic fluid seal.
　このように構成すると、アームの内部においては、アームの中心部分に形成される内部空間のみが大気圧となる。したがって、アームの端部まで大気圧となる空間が広がっている場合と比較して、アームの内部の構成を簡素化することが可能になるとともに、真空領域へ空気が流出するおそれを低減することが可能になる。また、このように構成すると、アームの中心側に第１磁性流体シールおよび第２磁性流体シールが配置されるため、たとえば、高温のプロセスチャンバーに対する搬送対象物の搬入や搬出を行う場合であっても、第１磁性流体シールおよび第２磁性流体シールと、高温のプロセスチャンバーとの距離を確保することが可能になる。したがって、第１磁性流体シールおよび第２磁性流体シールの温度の上昇を抑制することが可能になり、その結果、第１磁性流体シールおよび第２磁性流体シールの、熱の影響による損傷を抑制することが可能になる。 With this configuration, in the interior of the arm, only the internal space formed in the central portion of the arm is at atmospheric pressure. Therefore, it is possible to simplify the internal configuration of the arm and to reduce the risk of air flowing out to a vacuum region, as compared with the case where the space that is at atmospheric pressure is extended to the end of the arm. Becomes possible. Also, with this configuration, since the first magnetic fluid seal and the second magnetic fluid seal are disposed on the center side of the arm, for example, it is the case of carrying in and out the object to be transferred to the high temperature process chamber Also, the distance between the first magnetic fluid seal and the second magnetic fluid seal and the high temperature process chamber can be secured. Therefore, it is possible to suppress an increase in the temperature of the first magnetic fluid seal and the second magnetic fluid seal, and as a result, suppress the damage of the first magnetic fluid seal and the second magnetic fluid seal due to the influence of heat. It becomes possible.
　本発明において、たとえば、第１回転軸は、アームに対する第１ハンド支持部材および第２ハンド支持部材の移動方向と第１回転軸の軸方向とが一致するように配置され、第２回転軸は、アームに対する第１ハンド支持部材および第２ハンド支持部材の移動方向と第２回転軸の軸方向とが一致するように配置され、第１駆動機構は、第１回転軸の先端部に固定される第１傘歯車と、第１傘歯車に噛み合う第２傘歯車と、第２傘歯車が固定される第３回転軸と、第３回転軸に固定される２個の第１駆動プーリとを備え、第２駆動機構は、第２回転軸の先端部に固定される第３傘歯車と、第３傘歯車に噛み合う第４傘歯車と、第４傘歯車が固定される第４回転軸と、第４回転軸に固定される２個の第２駆動プーリとを備えている。 In the present invention, for example, the first rotation shaft is disposed such that the moving direction of the first hand support member and the second hand support member with respect to the arm coincides with the axial direction of the first rotation shaft, and the second rotation shaft is And the first drive mechanism is fixed to the tip of the first rotation shaft so that the moving direction of the first hand support member and the second hand support member with respect to the arm coincides with the axial direction of the second rotation shaft. A first bevel gear, a second bevel gear meshing with the first bevel gear, a third rotation shaft to which the second bevel gear is fixed, and two first drive pulleys fixed to the third rotation shaft The second drive mechanism includes a third bevel gear fixed to a tip end portion of the second rotation shaft, a fourth bevel gear meshing with the third bevel gear, and a fourth rotation shaft to which the fourth bevel gear is fixed , And two second drive pulleys fixed to the fourth rotation shaft.
　本発明において、第１駆動機構は、第４回転軸に回転可能に保持される２個の第１従動プーリと、第１ハンド支持部材に固定されるとともに第１駆動プーリと第１従動プーリとに架け渡される２本の第１ベルトとを備え、第２駆動機構は、第３回転軸に回転可能に保持される２個の第２従動プーリと、第２ハンド支持部材に固定されるとともに第２駆動プーリと第２従動プーリとに架け渡される２本の第２ベルトとを備え、第２傘歯車は、第３回転軸の軸方向における第３回転軸の中心側に固定され、２個の第１駆動プーリのそれぞれは、第３回転軸の軸方向における第３回転軸の両端部のそれぞれに固定され、第２従動プーリは、第２傘歯車と第１駆動プーリとの間で第３回転軸に回転可能に保持され、第４傘歯車は、第４回転軸の軸方向における第４回転軸の中心側に固定され、２個の第１従動プーリのそれぞれは、第４回転軸の軸方向における第４回転軸の両端部のそれぞれに回転可能に保持され、第２駆動プーリは、第４傘歯車と第１従動プーリとの間で第４回転軸に固定されていることが好ましい。 In the present invention, the first drive mechanism includes two first driven pulleys rotatably held by the fourth rotation shaft, and is fixed to the first hand support member, and further includes the first drive pulley and the first driven pulley. And the second drive mechanism is fixed to the second hand support member and the two second driven pulleys rotatably held by the third rotation shaft. The second bevel gear is fixed to the center side of the third rotation shaft in the axial direction of the third rotation shaft, and the second bevel gear is provided with two second belts bridged between the second drive pulley and the second driven pulley. Each of the first drive pulleys is fixed to each end of the third rotary shaft in the axial direction of the third rotary shaft, and the second driven pulley is between the second bevel gear and the first drive pulley. The fourth bevel gear is rotatably supported by the third rotation shaft, and the fourth bevel gear is axially aligned with the fourth rotation shaft. The two first driven pulleys, which are fixed to the center side of the fourth rotation shaft at each of the first and second rotation shafts, are rotatably held at both ends of the fourth rotation shaft in the axial direction of the fourth rotation shaft. The pulley is preferably fixed to the fourth rotation shaft between the fourth bevel gear and the first driven pulley.
　このように構成すると、第１駆動プーリが固定される第３回転軸に第２従動プーリが回転可能に保持され、第２駆動プーリが固定される第４回転軸に第１従動プーリが回転可能に保持されているため、第１従動プーリが回転可能に保持される軸や第２従動プーリが回転可能に保持される軸が別途設けられている場合と比較して、産業用ロボットの構成を簡素化することが可能になる。また、このように構成すると、２本の第１ベルトと２本の第２ベルトとが水平方向で並ぶように配置されるため、上下方向におけるアームの厚さを薄くすることが可能になる。したがって、産業用ロボットの高さを低くすることが可能になる。 According to this structure, the second driven pulley is rotatably held by the third rotary shaft to which the first drive pulley is fixed, and the first driven pulley is rotatable to the fourth rotary shaft to which the second drive pulley is fixed. Compared with the case where the shaft on which the first driven pulley is rotatably held and the shaft on which the second driven pulley is rotatably held are separately provided, the configuration of the industrial robot is It becomes possible to simplify. Moreover, since it arrange | positions so that two 1st belts and two 2nd belts may be located in a line with a horizontal direction if comprised in this way, it becomes possible to make thickness of the arm in an up-down direction thin. Therefore, it is possible to lower the height of the industrial robot.
　以上のように、本発明では、アームに対して直線的に往復移動する第１ハンドおよび第２ハンドを有するとともに真空中で搬送対象物を搬送する産業用ロボットにおいて、たとえば、高温になっているプロセスチャンバーに対する搬送対象物の搬入や搬出を行う場合であっても、第１ハンドを移動させるための第１モータおよび第２ハンドを移動させるための第２モータの、熱の影響による損傷を抑制することが可能になる。 As described above, in the present invention, for example, in the industrial robot having the first hand and the second hand that linearly reciprocates with respect to the arm and transporting the object to be transported in vacuum, the temperature is high, for example. Even in the case of carrying in and out of the object to be transferred into and from the process chamber, the damage due to the heat of the first motor for moving the first hand and the second motor for moving the second hand is suppressed It will be possible to
本発明の実施の形態にかかる産業用ロボットの平面図である。1 is a plan view of an industrial robot according to an embodiment of the present invention. 図１に示す産業用ロボットの側面図である。It is a side view of the industrial robot shown in FIG. 図１に示す産業用ロボットの背面図である。It is a rear view of the industrial robot shown in FIG. （Ａ）は、図１に示すアームの内部構造を説明するための平面図であり、（Ｂ）は、（Ａ）のＥ－Ｅ方向からアームの内部構造を説明するための図である。(A) is a top view for demonstrating the internal structure of the arm shown in FIG. 1, (B) is a figure for demonstrating the internal structure of an arm from the EE direction of (A). （Ａ）は、図４（Ａ）のＦ部の拡大図であり、（Ｂ）は、図４（Ｂ）のＧ部の拡大図である。(A) is an enlarged view of a portion F in FIG. 4 (A), and (B) is an enlarged view of a portion G in FIG. 4 (B). （Ａ）は、図４（Ａ）のＨ部の拡大図であり、（Ｂ）は、図４（Ａ）のＪ部の拡大図である。(A) is an enlarged view of H part of FIG. 4 (A), (B) is an enlarged view of J part of FIG. 4 (A). （Ａ）は、図４（Ａ）のＫ－Ｋ方向からアームの内部構造を説明するための図であり、（Ｂ）は、図４（Ａ）のＬ－Ｌ方向からアームの内部構造を説明するための図である。(A) is a figure for demonstrating the internal structure of an arm from the KK direction of FIG. 4 (A), (B) is an internal structure of an arm from the LL direction of FIG. 4 (A). It is a figure for demonstrating. 図４（Ｂ）のＮ－Ｎ方向から第１ハンド支持部材、第２ハンド支持部材、アーム、第１駆動機構および第２駆動機構の構成を説明するための断面図である。FIG. 5 is a cross-sectional view for describing the configuration of a first hand support member, a second hand support member, an arm, a first drive mechanism, and a second drive mechanism, as viewed from the direction NN in FIG. 4B. 図４（Ｂ）のＱ－Ｑ方向から第１ハンド支持部材、第２ハンド支持部材、アーム、第１駆動機構および第２駆動機構の構成を説明するための断面図である。FIG. 5 is a cross-sectional view for describing a configuration of a first hand support member, a second hand support member, an arm, a first drive mechanism, and a second drive mechanism in the direction of QQ in FIG. 4B. 本発明の他の実施の形態にかかるアームの内部構造を説明するための図である。It is a figure for demonstrating the internal structure of the arm concerning other embodiment of this invention.
　以下、図面を参照しながら、本発明の実施の形態を説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
　（産業用ロボットの概略構成）
　図１は、本発明の実施の形態にかかる産業用ロボット１の平面図である。図２は、図１に示す産業用ロボット１の側面図である。図３は、図１に示す産業用ロボット１の背面図である。 (Schematic configuration of industrial robot)
FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. FIG. 2 is a side view of the industrial robot 1 shown in FIG. FIG. 3 is a rear view of the industrial robot 1 shown in FIG.
　本形態の産業用ロボット１（以下、「ロボット１」とする。）は、搬送対象物である液晶ディスプレイ用のガラス基板２（以下、「基板２」とする。）を真空中で搬送するロボットである。このロボット１は、液晶ディスプレイ装置の製造システムに組み込まれて使用される。この製造システムは、中心に配置されるトランスファーチャンバー３（以下、「チャンバー３」とする。）と、チャンバー３を囲むように配置される複数のプロセスチャンバー４（以下、「チャンバー４」とする。）とを備えている（図１参照）。 The industrial robot 1 of this embodiment (hereinafter referred to as "robot 1") is a robot that conveys a glass substrate 2 for liquid crystal display (hereinafter referred to as "substrate 2"), which is an object to be conveyed, in vacuum. It is. The robot 1 is used by being incorporated into a liquid crystal display device manufacturing system. In this manufacturing system, a transfer chamber 3 (hereinafter, referred to as “chamber 3”) disposed at the center and a plurality of process chambers 4 (hereinafter, “chamber 4”) disposed to surround the chamber 3 are provided. And (see FIG. 1).
　チャンバー３、４の内部は、真空になっている。すなわち、チャンバー３、４は、真空チャンバーである。チャンバー３の内部には、ロボット１の一部が配置されている。ロボット１は、チャンバー４への基板２の搬入とチャンバー４からの基板２の搬出とを行う。チャンバー４の内部には、各種の装置等が配置されており、チャンバー４の内部では、基板２に対して各種の処理が行われる。本形態のチャンバー４では、高温環境下で基板２に対する処理が実行される。そのため、チャンバー４の内部温度は高くなっている。 The inside of the chambers 3 and 4 is vacuum. That is, the chambers 3 and 4 are vacuum chambers. Inside the chamber 3, a part of the robot 1 is disposed. The robot 1 carries in the substrate 2 to the chamber 4 and carries out the substrate 2 from the chamber 4. Various devices and the like are disposed in the chamber 4, and various processes are performed on the substrate 2 in the chamber 4. In the chamber 4 of the present embodiment, processing on the substrate 2 is performed in a high temperature environment. Therefore, the internal temperature of the chamber 4 is high.
　ロボット１は、基板２が搭載される第１ハンドとしてのハンド５と、基板２が搭載される第２ハンドとしてのハンド６と、ハンド５が固定される第１ハンド支持部材としてのハンド支持部材７と、ハンド６が固定される第２ハンド支持部材としてのハンド支持部材８と、ハンド支持部材７、８を保持するアーム９と、アーム９が回動可能に連結される本体部１０とを備えている。 The robot 1 includes a hand 5 as a first hand on which the substrate 2 is mounted, a hand 6 as a second hand on which the substrate 2 is mounted, and a hand support member as a first hand support member to which the hand 5 is fixed. 7, a hand support member 8 as a second hand support member to which the hand 6 is fixed, an arm 9 for holding the hand support members 7 and 8, and a body portion 10 to which the arm 9 is rotatably coupled. Have.
　本体部１０は、アーム９の中心部が固定される円柱状の昇降部材１２（図２参照）と、昇降部材１２を昇降させる昇降機構と、昇降部材１２を回動させる回動機構と、これらの構成が収容されるケース体１３とを備えている。ケース体１３は、略有底円筒状に形成されている。ケース体１３の上端には、円板状に形成されたフランジ１４が固定されている。フランジ１４には、昇降部材１２の上端側部分が配置される貫通孔が形成されている。 The main body unit 10 includes a columnar elevating member 12 (see FIG. 2) to which the central portion of the arm 9 is fixed, an elevating mechanism for elevating the elevating member 12, a pivoting mechanism for pivoting the elevating member 12, And a case body 13 in which the configuration of the above is accommodated. The case body 13 is formed in a substantially bottomed cylindrical shape. A flange 14 formed in a disk shape is fixed to the upper end of the case body 13. The flange 14 is formed with a through hole in which the upper end portion of the elevating member 12 is disposed.
　ハンド５、６およびアーム９は、本体部１０の上側に配置されている。上述のように、ロボット１の一部は、チャンバー３の内部に配置されている。具体的には、ロボット１の、フランジ１４の下端面よりも上側の部分がチャンバー３の内部に配置されている。すなわち、ロボット１の、フランジ１４の下端面よりも上側の部分は、真空領域ＶＲの中に配置されており、ハンド５、６およびアーム９は、真空チャンバー内（真空中）に配置されている。一方、ロボット１の、フランジ１４の下端面よりも下側の部分は、大気領域ＡＲの中（大気中）に配置されている。 The hands 5 and 6 and the arm 9 are disposed on the upper side of the main body 10. As described above, a part of the robot 1 is disposed inside the chamber 3. Specifically, a portion of the robot 1 above the lower end surface of the flange 14 is disposed inside the chamber 3. That is, a portion of the robot 1 above the lower end surface of the flange 14 is disposed in the vacuum region VR, and the hands 5 and 6 and the arm 9 are disposed in the vacuum chamber (in vacuum). . On the other hand, the portion of the robot 1 below the lower end surface of the flange 14 is disposed in the atmosphere region AR (in the atmosphere).
　アーム９は、ハンド支持部材７とハンド支持部材８とが水平方向の同じ方向へ直線的に往復移動可能となるようにハンド支持部材７、８を保持している。ロボット１は、アーム９に対してハンド支持部材７を往復移動させる第１駆動機構としての駆動機構１７と、アーム９に対してハンド支持部材８を往復移動させる第２駆動機構としての駆動機構１８とを備えている（図４参照）。 The arm 9 holds the hand support members 7 and 8 so that the hand support member 7 and the hand support member 8 can linearly reciprocate in the same horizontal direction. The robot 1 has a drive mechanism 17 as a first drive mechanism for reciprocating the hand support member 7 with respect to the arm 9 and a drive mechanism 18 as a second drive mechanism for reciprocate the hand support member 8 with respect to the arm 9. And (see FIG. 4).
　以下、ハンド５、６、ハンド支持部材７、８、アーム９および駆動機構１７、１８の具体的な構成を説明する。なお、以下の説明では、アーム９に対するハンド支持部材７、８の移動方向である図１等のＸ方向を「前後方向」とし、上下方向（鉛直方向）と前後方向とに直交する図１等のＹ方向を「左右方向」とする。また、前後方向のうちのＸ１方向側を「前」側とし、その反対側であるＸ２方向側を「後ろ」側とする。 Hereinafter, specific configurations of the hands 5 and 6, the hand support members 7 and 8, the arm 9, and the drive mechanisms 17 and 18 will be described. In the following description, the X direction in FIG. 1 etc., which is the moving direction of the hand support members 7 and 8 with respect to the arm 9, is referred to as “front and back direction”, and is perpendicular to the vertical direction (vertical direction) The Y direction of is the "left and right direction". Further, in the front-rear direction, the X1 direction side is referred to as the “front” side, and the opposite X2 direction side is referred to as the “rear” side.
　（ハンド、ハンド支持部材、アームおよび駆動機構の構成）
　図４（Ａ）は、図１に示すアーム９の内部構造を説明するための平面図であり、図４（Ｂ）は、図４（Ａ）のＥ－Ｅ方向からアーム９の内部構造を説明するための図である。図５（Ａ）は、図４（Ａ）のＦ部の拡大図であり、図５（Ｂ）は、図４（Ｂ）のＧ部の拡大図である。図６（Ａ）は、図４（Ａ）のＨ部の拡大図であり、図６（Ｂ）は、図４（Ａ）のＪ部の拡大図である。図７（Ａ）は、図４（Ａ）のＫ－Ｋ方向からアーム９の内部構造を説明するための図であり、図７（Ｂ）は、図４（Ａ）のＬ－Ｌ方向からアーム９の内部構造を説明するための図である。図８は、図４（Ｂ）のＮ－Ｎ方向からハンド支持部材７、８、アーム９および駆動機構１７、１８の構成を説明するための断面図である。図９は、図４（Ｂ）のＱ－Ｑ方向からハンド支持部材７、８、アーム９および駆動機構１７、１８の構成を説明するための断面図である。 (Configuration of hand, hand support member, arm and drive mechanism)
FIG. 4A is a plan view for explaining the internal structure of the arm 9 shown in FIG. 1, and FIG. 4B shows the internal structure of the arm 9 from the EE direction of FIG. 4A. It is a figure for demonstrating. FIG. 5 (A) is an enlarged view of a part F of FIG. 4 (A), and FIG. 5 (B) is an enlarged view of a part G of FIG. 4 (B). 6 (A) is an enlarged view of a portion H in FIG. 4 (A), and FIG. 6 (B) is an enlarged view of a portion J in FIG. 4 (A). FIG. 7A is a view for explaining the internal structure of the arm 9 from the direction of arrows K in FIG. 4A, and FIG. 7B is from the direction of LL in FIG. 4A. It is a figure for demonstrating the internal structure of the arm 9. FIG. FIG. 8 is a cross-sectional view for describing the configuration of the hand support members 7, 8, the arm 9, and the drive mechanisms 17, 18 from the direction NN in FIG. 4B. FIG. 9 is a cross-sectional view for describing the configurations of the hand support members 7 and 8, the arm 9 and the drive mechanisms 17 and 18 in the direction of QQ in FIG. 4B.
　ハンド５は、基板２が搭載される複数のフォーク２０と、複数のフォーク２０の基端部（後端部）が固定されるハンド基部２１とを備えている。ハンド６は、ハンド５と同様に、基板２が搭載される複数のフォーク２０と、複数のフォーク２０の基端部（後端部）が固定されるハンド基部２２とを備えている。本形態のハンド５、６は、６本のフォーク２０を備えている。フォーク２０は、前後方向に細長い直線状に形成されている。ハンド基部２１、２２は、左右方向に細長い略長方形状の平板状に形成されている。ハンド基部２１の長さ（左右方向の長さ）は、ハンド基部２２の長さ（左右方向の長さ）よりも長くなっている。 The hand 5 includes a plurality of forks 20 on which the substrate 2 is mounted, and a hand base 21 to which base ends (rear ends) of the plurality of forks 20 are fixed. Similar to the hand 5, the hand 6 includes a plurality of forks 20 on which the substrate 2 is mounted, and a hand base 22 to which base ends (rear ends) of the plurality of forks 20 are fixed. The hands 5, 6 in this embodiment are provided with six forks 20. The fork 20 is formed in an elongated linear shape in the front-rear direction. The hand bases 21 and 22 are formed in a substantially rectangular flat plate shape elongated in the left-right direction. The length (length in the left-right direction) of the hand base 21 is longer than the length (length in the left-right direction) of the hand base 22.
　ハンド５とハンド６とは、前後方向から見たときに、上下方向で互いに重なるように配置されている。本形態では、前後方向から見たときに、ハンド５が上側に配置され、ハンド６が下側に配置されている。すなわち、前後方向から見たときに、ハンド基部２１が上側に配置され、ハンド基部２２が下側に配置されている。また、図３に示すように、ハンド５とハンド６とは、前後方向から見たときに、ハンド基部２１の中心とハンド基部２２の中心とが左右方向において一致するように配置されている。すなわち、ハンド５とハンド６とは、前後方向から見たときに、ハンド５の中心とハンド６の中心とが左右方向において一致するように配置されている。 The hand 5 and the hand 6 are arranged so as to overlap each other in the vertical direction when viewed from the front and rear direction. In the present embodiment, the hand 5 is disposed on the upper side and the hand 6 is disposed on the lower side when viewed from the front-rear direction. That is, when viewed from the front-rear direction, the hand base 21 is disposed on the upper side, and the hand base 22 is disposed on the lower side. Further, as shown in FIG. 3, the hand 5 and the hand 6 are arranged such that the center of the hand base 21 and the center of the hand base 22 coincide in the left-right direction when viewed from the front-rear direction. That is, the hand 5 and the hand 6 are arranged such that the center of the hand 5 and the center of the hand 6 coincide in the left-right direction when viewed in the front-rear direction.
　アーム９は、ハンド６の下側に配置されている。このアーム９は、前後方向に細長い略直方体状に形成されている。また、アーム９は、中空状に形成されている。アーム９の左右方向の幅は、ハンド５、６の左右方向の幅よりも狭くなっている。アーム９は、前後方向から見たときに、ハンド５、６の中心とアーム９の中心とが左右方向において一致するように配置されている。アーム９は、アーム９のフレームであるアームフレーム２３と、アーム９の上下、左右および前後の側面を構成するカバー部材２４と、アーム９の中心部に配置される箱状のモータ収容部材２５と、モータ収容部材２５の上面に固定される上面カバー２６とを備えている。なお、図４～図９では、カバー部材２４の図示を省略している。 The arm 9 is disposed below the hand 6. The arm 9 is formed in a substantially rectangular shape elongated in the front-rear direction. Also, the arm 9 is formed in a hollow shape. The width in the left-right direction of the arm 9 is narrower than the width in the left-right direction of the hands 5 and 6. The arm 9 is disposed such that the centers of the hands 5 and 6 and the center of the arm 9 coincide with each other in the left-right direction when viewed from the front-rear direction. The arm 9 includes an arm frame 23 which is a frame of the arm 9, a cover member 24 constituting upper and lower, right and left and front and rear sides of the arm 9, and a box-shaped motor housing member 25 disposed at the center of the arm 9. And an upper surface cover 26 fixed to the upper surface of the motor housing member 25. In FIG. 4 to FIG. 9, the illustration of the cover member 24 is omitted.
　アームフレーム２３は、前後方向におけるアーム９の全域でアーム９のフレームを構成している。このアームフレーム２３は、アームフレーム２３の右側面を構成する右側板部２３ａと、アームフレーム２３の左側面を構成する左側板部２３ｂと、アームフレーム２３の上側面を構成する上側板部２３ｃと、アームフレーム２３の下側面を構成する下側板部２３ｄとを備えている。 The arm frame 23 constitutes a frame of the arm 9 in the entire area of the arm 9 in the front-rear direction. The arm frame 23 includes a right side plate portion 23a constituting a right side surface of the arm frame 23, a left side plate portion 23b constituting a left side surface of the arm frame 23, and an upper side plate portion 23c constituting an upper side surface of the arm frame 23. And a lower side plate portion 23d that constitutes the lower side surface of the arm frame 23.
　右側板部２３ａ、左側板部２３ｂ、上側板部２３ｃおよび下側板部２３ｄは、平板状に形成されている。右側板部２３ａは、右側板部２３ａの厚さ方向と左右方向とが一致するように配置され、左側板部２３ｂは、左側板部２３ｂの厚さ方向と左右方向とが一致するように配置されている。上側板部２３ｃは、上側板部２３ｃの厚さ方向と上下方向とが一致するように配置され、下側板部２３ｄは、下側板部２３ｄの厚さ方向と上下方向とが一致するように配置されている。 The right side plate portion 23a, the left side plate portion 23b, the upper side plate portion 23c, and the lower side plate portion 23d are formed in a flat plate shape. The right side plate portion 23a is disposed such that the thickness direction of the right side plate portion 23a coincides with the left and right direction, and the left side plate portion 23b is disposed such that the thickness direction of the left side plate portion 23b coincides with the left and right direction It is done. The upper side plate portion 23c is arranged such that the thickness direction of the upper side plate portion 23c coincides with the vertical direction, and the lower side plate portion 23d is arranged such that the thickness direction of the lower side plate portion 23d coincides with the vertical direction It is done.
　右側板部２３ａと左側板部２３ｂとは、左右方向に間隔をあけた状態で配置されている。上側板部２３ｃは、右側板部２３ａの上端および左側板部２３ｂの上端にネジによって固定されている。下側板部２３ｄは、右側板部２３ａの下端および左側板部２３ｂの下端にネジによって固定されている。上側板部２３ｃの右端および下側板部２３ｄの右端は、右側板部２３ａよりも右側に配置され、上側板部２３ｃの左端および下側板部２３ｄの左端は、左側板部２３ｂよりも左側に配置されている。 The right side plate portion 23a and the left side plate portion 23b are disposed in the state of being spaced apart in the left-right direction. The upper side plate portion 23c is fixed to the upper end of the right side plate portion 23a and the upper end of the left side plate portion 23b by screws. The lower side plate portion 23d is fixed to the lower end of the right side plate portion 23a and the lower end of the left side plate portion 23b by screws. The right end of the upper side plate portion 23c and the right end of the lower side plate portion 23d are disposed on the right side of the right side plate portion 23a, and the left end of the upper side plate portion 23c and the left end of the lower side plate portion 23d are disposed on the left side of the left side plate portion 23b It is done.
　モータ収容部材２５は、上面側が開口する略直方体の箱状に形成されている。また、モータ収容部材２５は、前後方向に細長い略直方体の箱状に形成されている。モータ収容部材２５には、駆動機構１７を構成する後述のモータ３７と、駆動機構１８を構成する後述のモータ３８とが収容されている。モータ収容部材２５は、アームフレーム２３の中心部分に固定されている。すなわち、モータ収容部材２５は、アーム９の中心部分に配置されている。モータ収容部材２５の底面の中心は、昇降部材１２の上端に固定されている。すなわち、アーム９の中心は、本体部１０に回動可能に連結されている。なお、モータ収容部材２５の、下端部以外の大半部分は、左右方向において、右側板部２３ａと左側板部２３ｂとの間に配置されている（図５（Ａ）、図９参照）。 The motor housing member 25 is formed in a substantially rectangular parallelepiped box shape whose upper surface side is open. Further, the motor housing member 25 is formed in a box shape of a substantially rectangular parallelepiped elongated in the front-rear direction. The motor accommodating member 25 accommodates a motor 37 described later constituting the drive mechanism 17 and a motor 38 described later constituting the drive mechanism 18. The motor housing member 25 is fixed to a central portion of the arm frame 23. That is, the motor housing member 25 is disposed at the central portion of the arm 9. The center of the bottom surface of the motor housing member 25 is fixed to the upper end of the elevating member 12. That is, the center of the arm 9 is rotatably connected to the main body 10. Most parts other than the lower end of the motor housing member 25 are disposed between the right side plate 23a and the left side plate 23b in the left-right direction (see FIGS. 5A and 9).
　上面カバー２６は、長方形の平板状に形成されている。上面カバー２６は、モータ収容部材２５の上面側に形成される開口部を塞ぐようにモータ収容部材２５の上面に固定されている。アーム９の中心部分の内部には、モータ収容部材２５と上面カバー２６とによって画定される内部空間Ｓが形成されている。モータ収容部材２５の底面部の中心には、上下方向に貫通する貫通穴２５ａが形成されている。上述のように、昇降部材１２は、円筒状に形成されている。昇降部材１２は、貫通穴２５ａを囲むようにモータ収容部材２５の底面に固定されており、ケース体１３の内部と内部空間Ｓとが通じている。ケース体１３の内部および内部空間Ｓは、大気圧となっている。 The upper surface cover 26 is formed in a rectangular flat plate shape. The upper surface cover 26 is fixed to the upper surface of the motor accommodation member 25 so as to close an opening formed on the upper surface side of the motor accommodation member 25. An internal space S defined by the motor housing member 25 and the top cover 26 is formed inside the central portion of the arm 9. At the center of the bottom surface portion of the motor housing member 25, a through hole 25a penetrating in the vertical direction is formed. As described above, the elevating member 12 is formed in a cylindrical shape. The elevating member 12 is fixed to the bottom surface of the motor housing member 25 so as to surround the through hole 25a, and the inside of the case body 13 communicates with the internal space S. The internal space S of the case body 13 is at atmospheric pressure.
　図８、図９に示すように、右側板部２３ａの右面および左側板部２３ｂの左面には、ハンド支持部材７を前後方向へ案内するためのガイドレール２９が固定されている。また、右側板部２３ａの右面および左側板部２３ｂの左面には、ハンド支持部材８を前後方向へ案内するためのガイドレール３０が固定されている。ガイドレール２９、３０は、ガイドレール２９、３０の長手方向と前後方向とが一致するように、右側板部２３ａおよび左側板部２３ｂに固定されている。 As shown in FIGS. 8 and 9, guide rails 29 for guiding the hand support member 7 in the front-rear direction are fixed to the right surface of the right side plate portion 23a and the left surface of the left side plate portion 23b. Further, a guide rail 30 for guiding the hand support member 8 in the front-rear direction is fixed to the right surface of the right side plate portion 23a and the left surface of the left side plate portion 23b. The guide rails 29, 30 are fixed to the right side plate portion 23a and the left side plate portion 23b so that the longitudinal direction of the guide rails 29, 30 and the longitudinal direction coincide with each other.
　本形態では、前後方向で分割された複数のガイドレール２９が右側板部２３ａおよび左側板部２３ｂに固定されている（図７参照）。同様に、前後方向で分割された複数のガイドレール３０が右側板部２３ａおよび左側板部２３ｂに固定されている。右側板部２３ａの右面に固定されるガイドレール２９と、左側板部２３ｂの左面に固定されるガイドレール２９とは、上下方向において同じ位置に配置されている。同様に、右側板部２３ａの右面に固定されるガイドレール３０と、左側板部２３ｂの左面に固定されるガイドレール３０とは、上下方向において同じ位置に配置されている。また、ガイドレール３０は、ガイドレール２９の上側に配置されている。 In this embodiment, a plurality of guide rails 29 divided in the front-rear direction are fixed to the right side plate portion 23a and the left side plate portion 23b (see FIG. 7). Similarly, a plurality of guide rails 30 divided in the front-rear direction are fixed to the right side plate portion 23a and the left side plate portion 23b. The guide rail 29 fixed to the right side of the right side plate portion 23a and the guide rail 29 fixed to the left side of the left side plate portion 23b are arranged at the same position in the vertical direction. Similarly, the guide rail 30 fixed to the right surface of the right side plate portion 23a and the guide rail 30 fixed to the left surface of the left side plate portion 23b are arranged at the same position in the vertical direction. Further, the guide rail 30 is disposed on the upper side of the guide rail 29.
　ハンド支持部材７は、ガイドレール２９に沿って前後方向にスライドする２個のスライド部７ａと、ハンド５のハンド基部２１が固定される２個のハンド固定部７ｂとから構成されている。同様に、ハンド支持部材８は、ガイドレール３０に沿って前後方向にスライドする２個のスライド部８ａと、ハンド６のハンド基部２２が固定される２個のハンド固定部８ｂとから構成されている。 The hand support member 7 is composed of two slide portions 7 a that slide in the front-rear direction along the guide rails 29 and two hand fixing portions 7 b to which the hand base 21 of the hand 5 is fixed. Similarly, the hand support member 8 is composed of two slide portions 8a that slide in the front-rear direction along the guide rails 30, and two hand fixing portions 8b to which the hand base 22 of the hand 6 is fixed. There is.
　図８、図９に示すように、２個のスライド部７ａのそれぞれは、右側板部２３ａおよび左側板部２３ｂの左右方向の外側に配置されている。２個のスライド部８ａのそれぞれは、右側板部２３ａおよび左側板部２３ｂの左右方向の外側に配置されている。また、２個のスライド部８ａは、２個のスライド部７ａの上側に配置されている。図３に示すように、右側に配置されるスライド部７ａ、８ａの右端部分は、カバー部材２４の右側面よりも右側へ突出し、左側に配置されるスライド部７ａ、８ａの左端部分は、カバー部材２４の左側面よりも左側へ突出している。 As shown in FIGS. 8 and 9, each of the two slide portions 7a is disposed on the outer side in the left-right direction of the right side plate portion 23a and the left side plate portion 23b. Each of the two slide parts 8a is arrange | positioned on the outer side of the left-right direction of the right side plate part 23a and the left side plate part 23b. Moreover, the two slide parts 8a are arrange | positioned above the two slide parts 7a. As shown in FIG. 3, the right end portions of the slide portions 7a and 8a disposed on the right side project to the right with respect to the right side surface of the cover member 24 and the left end portions of the slide portions 7a and 8a disposed on the left side are the cover It projects to the left from the left side surface of the member 24.
　２個のハンド固定部７ｂのうちの一方のハンド固定部７ｂは、右側に配置されるスライド部７ａの右端側から右斜め上側に向かって伸びるようにこのスライド部７ａに固定されており、このハンド固定部７ｂの上端には、図３に示すように、ハンド基部２１の右端部分の下面が固定されている。他方のハンド固定部７ｂは、左側に配置されるスライド部７ａの左端側から左斜め上側に向かって伸びるようにこのスライド部７ａに固定されており、このハンド固定部７ｂの上端には、図３に示すように、ハンド基部２１の左端部分の下面が固定されている。 One hand fixing portion 7b of the two hand fixing portions 7b is fixed to the slide portion 7a so as to extend obliquely from the right end side of the slide portion 7a disposed on the right side to the upper right side. The lower surface of the right end portion of the hand base portion 21 is fixed to the upper end of the hand fixing portion 7b as shown in FIG. The other hand fixing portion 7b is fixed to the slide portion 7a so as to extend from the left end side of the slide portion 7a disposed on the left side toward the upper left, and the upper end of the hand fixing portion 7b As shown in 3, the lower surface of the left end portion of the hand base 21 is fixed.
　２個のハンド固定部８ｂのうちの一方のハンド固定部８ｂは、右側に配置されるスライド部８ａの右端側から右斜め上側に向かって伸びるようにこのスライド部８ａに固定されており、このハンド固定部８ｂの上端には、図３に示すように、ハンド基部２２の、左右方向の中心よりも右寄りの部分の下面が固定されている。他方のハンド固定部８ｂは、左側に配置されるスライド部８ａの左端側から左斜め上側に向かって伸びるようにこのスライド部８ａに固定されており、このハンド固定部８ｂの上端には、図３に示すように、ハンド基部２２の、左右方向の中心よりも左寄りの部分の下面が固定されている。 One hand fixing portion 8b of the two hand fixing portions 8b is fixed to the slide portion 8a so as to extend obliquely from the right end side of the slide portion 8a disposed on the right side to the upper right side. At the upper end of the hand fixing portion 8b, as shown in FIG. 3, the lower surface of a portion of the hand base 22 that is closer to the right than the center in the left-right direction is fixed. The other hand fixing portion 8b is fixed to the slide portion 8a so as to extend from the left end side of the slide portion 8a disposed on the left side to the upper left, and the upper end of the hand fixing portion 8b As shown in FIG. 3, the lower surface of the left side of the hand base 22 with respect to the center in the left-right direction is fixed.
　右側に配置されるスライド部７ａには、右側に配置されるガイドレール２９に係合するガイドブロック３１が固定され、左側に配置されるスライド部７ａには、左側に配置されるガイドレール２９に係合するガイドブロック３１が固定されている。同様に、右側に配置されるスライド部８ａには、右側に配置されるガイドレール３０に係合するガイドブロック３２が固定され、左側に配置されるスライド部８ａには、左側に配置されるガイドレール３０に係合するガイドブロック３２が固定されている。 The guide block 31 engaged with the guide rail 29 disposed on the right side is fixed to the slide portion 7 a disposed on the right side, and the slide portion 7 a disposed on the left side is attached to the guide rail 29 disposed on the left side The guide block 31 to be engaged is fixed. Similarly, the guide block 32 engaged with the guide rail 30 disposed on the right is fixed to the slide 8a disposed on the right, and the guide 8 disposed on the left is disposed on the slide 8a disposed on the left A guide block 32 engaged with the rail 30 is fixed.
　具体的には、２個のスライド部７ａのそれぞれに３個のガイドブロック３１が前後方向に間隔をあけた状態で固定されている（図７（Ｂ）参照）。また、２個のスライド部８ａのそれぞれに３個のガイドブロック３２が前後方向に間隔をあけた状態で固定されている（図７（Ａ）参照）。本形態では、ガイドレール２９とガイドブロック３１とによってハンド支持部材７を前後方向へ案内するガイド機構３３が構成されている。また、ガイドレール３０とガイドブロック３２とによってハンド支持部材８を前後方向へ案内するガイド機構３４が構成されている。 Specifically, three guide blocks 31 are fixed to each of the two slide portions 7a with a space in the front-rear direction (see FIG. 7B). Further, three guide blocks 32 are fixed to each of the two slide portions 8a in a state of being spaced in the front-rear direction (see FIG. 7A). In the present embodiment, a guide mechanism 33 configured to guide the hand support member 7 in the front-rear direction is configured by the guide rail 29 and the guide block 31. Further, the guide rail 30 and the guide block 32 constitute a guide mechanism 34 for guiding the hand support member 8 in the front-rear direction.
　駆動機構１７、１８は、アーム９の内部に配置されている。駆動機構１７は、駆動源としてのモータ３７を備えている。駆動機構１８は、駆動源としてのモータ３８を備えている。モータ３７、３８は、内部空間Ｓに配置されている。すなわち、モータ３７、３８は、アーム９の中心部分の内部に配置されている。モータ３７、３８は、所定のブラケットを介して、モータ収容部材２５に固定されている。モータ３７とモータ３８とは、前後方向に間隔をあけた状態で配置されている。具体的には、モータ３７が後ろ側に配置され、モータ３８が前側に配置されている。本形態のモータ３７は、第１モータであり、モータ３８は、第２モータである。 The drive mechanisms 17 and 18 are disposed inside the arm 9. The drive mechanism 17 includes a motor 37 as a drive source. The drive mechanism 18 includes a motor 38 as a drive source. The motors 37 and 38 are disposed in the internal space S. That is, the motors 37, 38 are disposed inside the central portion of the arm 9. The motors 37 and 38 are fixed to the motor housing member 25 via predetermined brackets. The motor 37 and the motor 38 are disposed in the state of being spaced apart in the front-rear direction. Specifically, the motor 37 is disposed on the rear side, and the motor 38 is disposed on the front side. The motor 37 of this embodiment is a first motor, and the motor 38 is a second motor.
　モータ３７、３８は、モータ３７、３８の出力軸の軸方向と前後方向とが一致するように配置されている。また、モータ３７、３８は、モータ３７の出力軸とモータ３８の出力軸とが反対方向に突出するように内部空間Ｓに配置されている。具体的には、モータ３７の出力軸が後ろ側に向かって突出し、モータ３８の出力軸が前側に向かって突出するように、モータ３７、３８が内部空間Ｓに配置されている。前後方向から見たときに、モータ３７の回転中心とモータ３８の回転中心とは一致している。また、前後方向から見たときに、モータ３７、３８の回転中心とアーム９の中心とは略一致している。なお、モータ３７、３８には、冷却用のエア配管（図示省略）が巻き付けられている。 The motors 37 and 38 are arranged such that the axial direction of the output shaft of the motors 37 and 38 coincides with the front-rear direction. The motors 37 and 38 are disposed in the internal space S such that the output shaft of the motor 37 and the output shaft of the motor 38 protrude in the opposite direction. Specifically, the motors 37, 38 are disposed in the internal space S such that the output shaft of the motor 37 projects rearward and the output shaft of the motor 38 projects forward. When viewed from the front-rear direction, the rotation center of the motor 37 and the rotation center of the motor 38 coincide with each other. Further, when viewed in the front-rear direction, the rotation centers of the motors 37 and 38 and the center of the arm 9 substantially coincide with each other. Note that air pipes (not shown) for cooling are wound around the motors 37 and 38.
　また、駆動機構１７は、モータ３７の出力軸に連結される第１回転軸としての回転軸３９と、回転軸３９の先端部に固定される第１傘歯車としての傘歯車４０と、傘歯車４０に噛み合う第２傘歯車としての傘歯車４１と、傘歯車４１が固定される第３回転軸としての回転軸４２とを備えている。同様に、駆動機構１８は、モータ３８の出力軸に連結される第２回転軸としての回転軸４３と、回転軸４３の先端部に固定される第３傘歯車としての傘歯車４４と、傘歯車４４に噛み合う第４傘歯車としての傘歯車４５と、傘歯車４５が固定される第４回転軸としての回転軸４６とを備えている。 Further, the drive mechanism 17 includes a rotation shaft 39 as a first rotation shaft connected to the output shaft of the motor 37, a bevel gear 40 as a first bevel gear fixed to the tip of the rotation shaft 39, and a bevel gear A bevel gear 41 as a second bevel gear meshing with 40 and a rotation shaft 42 as a third rotation shaft to which the bevel gear 41 is fixed are provided. Similarly, the drive mechanism 18 includes a rotary shaft 43 as a second rotary shaft connected to the output shaft of the motor 38, a bevel gear 44 as a third bevel gear fixed to the tip of the rotary shaft 43, and a umbrella A bevel gear 45 as a fourth bevel gear meshing with the gear 44 and a rotation shaft 46 as a fourth rotation shaft to which the bevel gear 45 is fixed are provided.
　さらに、駆動機構１７は、回転軸４２に固定される２個の駆動プーリ４８と、回転軸４６に回転可能に保持される２個の従動プーリ４９と、駆動プーリ４８と従動プーリ４９とに架け渡される２本のベルト５０とを備えている。同様に、駆動機構１８は、回転軸４６に固定される２個の駆動プーリ５２と、回転軸４２に回転可能に保持される２個の従動プーリ５３と、駆動プーリ５２と従動プーリ５３とに架け渡される２本のベルト５４とを備えている。本形態の駆動プーリ４８は第１駆動プーリであり、従動プーリ４９は第１従動プーリであり、ベルト５０は第１ベルトであり、駆動プーリ５２は第２駆動プーリであり、従動プーリ５３は第２従動プーリであり、ベルト５４は第２ベルトである。 Furthermore, the drive mechanism 17 spans two drive pulleys 48 fixed to the rotation shaft 42, two driven pulleys 49 rotatably held by the rotation shaft 46, the drive pulley 48 and the driven pulley 49. It has two belts 50 to be delivered. Similarly, the drive mechanism 18 comprises two drive pulleys 52 fixed to the rotary shaft 46, two driven pulleys 53 rotatably held by the rotary shaft 42, a drive pulley 52 and a driven pulley 53. It has two belts 54 to be bridged. The drive pulley 48 of this embodiment is a first drive pulley, the driven pulley 49 is a first driven pulley, the belt 50 is a first belt, the drive pulley 52 is a second drive pulley, and the driven pulley 53 is The belt 54 is a second driven pulley.
　回転軸３９は、回転軸３９の軸方向と前後方向とが一致するように配置されており、モータ３７の出力軸の先端（後端）にカップリング５５を介して連結されている（図５参照）。回転軸４３は、回転軸４３の軸方向と前後方向とが一致するように配置されており、モータ３８の出力軸の先端（前端）にカップリング５５を介して連結されている（図５参照）。傘歯車４０、４１、回転軸４２、駆動プーリ４８および従動プーリ５３は、アーム９の後端側の内部に配置されている。傘歯車４４、４５、回転軸４６、駆動プーリ５２および従動プーリ４９は、アーム９の前端側の内部に配置されている。 The rotary shaft 39 is disposed such that the axial direction of the rotary shaft 39 coincides with the front-rear direction, and is connected to the front end (rear end) of the output shaft of the motor 37 via a coupling 55 (FIG. 5) reference). The rotating shaft 43 is disposed so that the axial direction of the rotating shaft 43 coincides with the front-rear direction, and is connected to the tip (front end) of the output shaft of the motor 38 via a coupling 55 (see FIG. 5) ). The bevel gears 40 and 41, the rotation shaft 42, the drive pulley 48 and the driven pulley 53 are disposed inside the rear end side of the arm 9. The bevel gears 44 and 45, the rotation shaft 46, the drive pulley 52 and the driven pulley 49 are disposed inside the front end side of the arm 9.
　また、駆動機構１７は、回転軸３９を回転可能に保持するとともに内部空間Ｓからの空気の流出を防ぐ第１磁性流体シールとしての磁性流体シール５６を備えている。同様に、駆動機構１８は、回転軸４３を回転可能に保持するとともに内部空間Ｓからの空気の流出を防ぐ第２磁性流体シールとしての磁性流体シール５７を備えている。図５に示すように、磁性流体シール５６は、モータ収容部材２５の後面を構成する後壁部２５ｂに固定されている。磁性流体シール５７は、モータ収容部材２５の前面を構成する前壁部２５ｃに固定されている。 Further, the drive mechanism 17 is provided with a magnetic fluid seal 56 as a first magnetic fluid seal that holds the rotating shaft 39 rotatably and prevents the outflow of air from the internal space S. Similarly, the drive mechanism 18 is provided with a magnetic fluid seal 57 as a second magnetic fluid seal that holds the rotating shaft 43 rotatably and prevents the outflow of air from the internal space S. As shown in FIG. 5, the magnetic fluid seal 56 is fixed to a rear wall 25 b that constitutes the rear surface of the motor housing member 25. The magnetic fluid seal 57 is fixed to a front wall 25 c that constitutes the front surface of the motor housing member 25.
　具体的には、磁性流体シール５６は、後壁部２５ｂを前後方向で貫通する貫通穴の中に挿通された状態で後壁部２５ｂに固定され、磁性流体シール５７は、前壁部２５ｃを前後方向で貫通する貫通穴の中に挿通された状態で前壁部２５ｃに固定されている。すなわち、アーム９は、内部空間Ｓを画定するとともに磁性流体シール５６を保持する後壁部２５ｂと、内部空間Ｓを画定するとともに磁性流体シール５７を保持する前壁部２５ｃとを備えている。本形態の後壁部２５ｂは第１壁部であり、前壁部２５ｃは第２壁部である。 Specifically, the magnetic fluid seal 56 is fixed to the rear wall 25b in a state of being inserted into a through hole that penetrates the rear wall 25b in the front-rear direction, and the magnetic fluid seal 57 has a front wall 25c. It is being fixed to front wall 25c in the state where it was inserted in the penetration hole penetrated by the direction of order. That is, the arm 9 includes a rear wall 25 b which defines the inner space S and holds the magnetic fluid seal 56, and a front wall 25 c which defines the inner space S and holds the magnetic fluid seal 57. The rear wall 25b of this embodiment is a first wall, and the front wall 25c is a second wall.
　また、回転軸３９、４３は、アームフレーム２３に固定される複数の軸受５９に回転可能に支持されている。なお、本形態の回転軸３９は、長さの短い２本の短軸と、長さの長い１本の長軸とによって形成されている。２本の短軸のうちの一方の短軸は、カップリング５５を介してモータ３７の出力軸に連結されるとともに磁性流体シール５６に回転可能に保持されている。他方の短軸には、傘歯車４０が固定されている。一方の短軸と長軸の前端とは、磁性流体シール５６の後ろ側に配置されるカップリング６０によって連結され（図５参照）、他方の短軸と長軸の後端とは、最も後ろ側の軸受５９の前側に配置されるカップリング６０によって連結されている（図６（Ｂ）参照）。 The rotating shafts 39 and 43 are rotatably supported by a plurality of bearings 59 fixed to the arm frame 23. In addition, the rotating shaft 39 of this form is formed of two short axes of short length, and one long axis of one long axis. One of the two short shafts is coupled to the output shaft of the motor 37 via a coupling 55 and is rotatably held by the magnetic fluid seal 56. A bevel gear 40 is fixed to the other short axis. One short axis and the front end of the long axis are connected by a coupling 60 disposed behind the magnetic fluid seal 56 (see FIG. 5), and the other short axis and the rear end of the long axis are the rearmost It is connected by the coupling 60 arrange | positioned in the front side of the bearing 59 of a side (refer FIG. 6 (B)).
　同様に、本形態の回転軸４３は、長さの短い２本の短軸と、長さの長い１本の長軸とによって形成されている。２本の短軸のうちの一方の短軸は、カップリング５５を介してモータ３８の出力軸に連結されるとともに磁性流体シール５７に回転可能に保持されている。他方の短軸には、傘歯車４４が固定されている。一方の短軸と長軸の後端とは、磁性流体シール５７の前側に配置されるカップリング６０によって連結され（図５参照）、他方の短軸と長軸の前端とは、最も前側の軸受５９の後ろ側に配置されるカップリング６０によって連結されている（図６（Ａ）参照）。なお、回転軸３９、４３は、１本の長軸によって構成されていても良い。 Similarly, the rotation shaft 43 of the present embodiment is formed by two short axes with a short length and one long axis with a long length. One of the two short shafts is connected to the output shaft of the motor 38 via a coupling 55 and is rotatably held by the magnetic fluid seal 57. A bevel gear 44 is fixed to the other short axis. One short axis and the rear end of the long axis are connected by a coupling 60 disposed on the front side of the magnetic fluid seal 57 (see FIG. 5), and the other short axis and the front end of the long axis are the frontmost It connects by the coupling 60 arrange | positioned at the back side of the bearing 59 (refer FIG. 6 (A)). The rotating shafts 39 and 43 may be configured by one long axis.
　回転軸４２は、傘歯車４０の後ろ側に配置されている。回転軸４２は、回転軸４２の軸方向と左右方向とが一致するように配置されており、モータ３７の動力で左右方向を回転の軸方向として回転する。すなわち、回転軸４２に固定される駆動プーリ４８は、モータ３７の動力で左右方向を回転の軸方向として回転する。また、回転軸４２に回転可能に保持される従動プーリ５３も、左右方向を回転の軸方向として回転する。傘歯車４１は、左右方向における回転軸４２の中心側に固定されている。 The rotation shaft 42 is disposed on the rear side of the bevel gear 40. The rotation shaft 42 is disposed such that the axial direction of the rotation shaft 42 coincides with the left and right direction, and rotates with the power of the motor 37 as the rotation axial direction. That is, the drive pulley 48 fixed to the rotation shaft 42 rotates with the power of the motor 37 as the rotation axial direction in the left-right direction. Further, the driven pulley 53 rotatably held by the rotating shaft 42 also rotates with the left and right direction as an axial direction of rotation. The bevel gear 41 is fixed to the center side of the rotation shaft 42 in the left-right direction.
　回転軸４６は、傘歯車４４の前側に配置されている。回転軸４６は、回転軸４６の軸方向と左右方向とが一致するように配置されており、モータ３８の動力で左右方向を回転の軸方向として回転する。すなわち、回転軸４６に固定される駆動プーリ５２は、モータ３８の動力で左右方向を回転の軸方向として回転する。また、回転軸４６に回転可能に保持される従動プーリ４９も、左右方向を回転の軸方向として回転する。傘歯車４５は、左右方向における回転軸４６の中心側に固定されている。 The rotation shaft 46 is disposed on the front side of the bevel gear 44. The rotating shaft 46 is disposed so that the axial direction of the rotating shaft 46 coincides with the left and right direction, and rotates with the power of the motor 38 as the rotating axial direction. That is, the drive pulley 52 fixed to the rotating shaft 46 rotates with the power of the motor 38 as the rotation axial direction in the left-right direction. Further, the driven pulley 49 rotatably held by the rotating shaft 46 also rotates with the left and right direction as an axial direction of rotation. The bevel gear 45 is fixed to the center side of the rotation shaft 46 in the left-right direction.
　２個の駆動プーリ４８のそれぞれは、左右方向における回転軸４２の両端部のそれぞれに固定されている。従動プーリ５３は、傘歯車４１と駆動プーリ４８との間で回転軸４２に回転可能に保持されており、２個の従動プーリ５３は、２個の駆動プーリ４８よりも左右方向の内側に配置されている。２個の従動プーリ４９のそれぞれは、左右方向における回転軸４６の両端部のそれぞれに回転可能に保持されている。駆動プーリ５２は、傘歯車４５と従動プーリ４９との間で回転軸４６に固定されており、２個の駆動プーリ５２は、２個の従動プーリ４９よりも左右方向の内側に配置されている。 Each of the two drive pulleys 48 is fixed to each end of the rotary shaft 42 in the left-right direction. The driven pulley 53 is rotatably held on the rotating shaft 42 between the bevel gear 41 and the drive pulley 48, and the two driven pulleys 53 are disposed inside the two drive pulleys 48 in the left-right direction. It is done. Each of the two driven pulleys 49 is rotatably held at each of both ends of the rotary shaft 46 in the left-right direction. The drive pulley 52 is fixed to the rotating shaft 46 between the bevel gear 45 and the driven pulley 49, and the two drive pulleys 52 are disposed on the inner side in the left-right direction than the two driven pulleys 49. .
　ベルト５０は、ハンド支持部材７に固定されている。具体的には、所定の取付部材およびボルトによって、２本のベルト５０のそれぞれの一部が２個のスライド部７ａのそれぞれの上端部に固定されている。本形態のベルト５０は、有端ベルトであり、駆動プーリ４８および従動プーリ４９に架け渡されたベルト５０の両端部のそれぞれが取付部材およびボルトによってスライド部７ａに固定されている（図７（Ｂ）参照）。なお、ベルト５０は、環状に形成された無端ベルトであっても良い。 The belt 50 is fixed to the hand support member 7. Specifically, a part of each of the two belts 50 is fixed to the upper end of each of the two slide parts 7 a by a predetermined mounting member and a bolt. The belt 50 according to the present embodiment is an end belt, and both ends of the belt 50 stretched over the drive pulley 48 and the driven pulley 49 are fixed to the slide portion 7a by the attachment member and the bolt (FIG. B) see). The belt 50 may be an endless belt formed in an annular shape.
　ベルト５４は、ハンド支持部材８に固定されている。具体的には、所定の取付部材およびボルトによって、２本のベルト５４のそれぞれの一部が２個のスライド部８ａのそれぞれの下端部に固定されている。ベルト５０と同様に、本形態のベルト５４は、有端ベルトであり、駆動プーリ５２および従動プーリ５３に架け渡されたベルト５４の両端部のそれぞれが取付部材およびボルトによってスライド部８ａに固定されている（図７（Ａ）参照）。なお、ベルト５４は、環状に形成された無端ベルトであっても良い。 The belt 54 is fixed to the hand support member 8. Specifically, a portion of each of the two belts 54 is fixed to the lower end portion of each of the two slide portions 8 a by a predetermined mounting member and a bolt. Similar to the belt 50, the belt 54 of this embodiment is an end belt, and both ends of the belt 54 which is bridged by the drive pulley 52 and the driven pulley 53 are fixed to the slide portion 8a by the attachment member and the bolt. (See FIG. 7A). The belt 54 may be an endless belt formed in an annular shape.
　駆動プーリ４８、５２および従動プーリ４９、５３が上述のように配置されているため、前後方向から見たときに、２本のベルト５０のそれぞれは、モータ３７、３８の左右の両側のそれぞれに配置され、２本のベルト５４のそれぞれは、モータ３７、３８の左右の両側のそれぞれに配置されている。また、ベルト５４は、ベルト５０と左右方向で隣り合うように、かつ、ベルト５０と同じ高さで配置されている。すなわち、アーム９の内部の左右の両端側において、ベルト５４は、左右方向の内側でベルト５０と隣り合うように、かつ、ベルト５０と同じ高さで配置されている。 Since the drive pulleys 48 and 52 and the driven pulleys 49 and 53 are arranged as described above, the two belts 50 are respectively provided on the left and right sides of the motors 37 and 38 when viewed from the front-rear direction. The two belts 54 are disposed on the left and right sides of the motors 37 and 38, respectively. The belt 54 is disposed adjacent to the belt 50 in the left-right direction and at the same height as the belt 50. That is, the belt 54 is disposed at the same height as the belt 50 so as to be adjacent to the belt 50 on the inner side in the left-right direction on both left and right end sides inside the arm 9.
　（本形態の主な効果）
　以上説明したように、本形態では、モータ３７、３８は、アーム９の中心部分の内部に配置されている。そのため、本形態では、内部が高温になっているチャンバー４に対する基板２の搬入や搬出をロボット１が行う場合であっても、モータ３７、３８と、高温のチャンバー４との距離を確保することが可能になる（図１参照）。したがって、本形態では、高温になっているチャンバー４に対する基板２の搬入や搬出をロボット１が行う場合であっても、モータ３７、３８の温度の上昇を抑制することが可能になり、その結果、モータ３７、３８の、熱の影響による損傷を抑制することが可能になる。また、本形態では、本体部１０に回動可能に連結されるアーム９の中心部にモータ３７、３８が配置されているため、本体部１０に対して回動するアーム９等のイナーシャを低減することが可能になる。 (Main effects of this form)
As described above, in the present embodiment, the motors 37 and 38 are disposed inside the central portion of the arm 9. Therefore, in the present embodiment, even when the robot 1 carries the substrate 2 into and out of the chamber 4 whose temperature is high, the distance between the motors 37 and 38 and the high temperature chamber 4 is secured. Is possible (see Figure 1). Therefore, in the present embodiment, even when the robot 1 carries in and out the substrate 2 to and from the chamber 4 at high temperature, it is possible to suppress the temperature rise of the motors 37 and 38, and as a result , Damage to the motor 37, 38 due to the influence of heat. Further, in the present embodiment, since the motors 37 and 38 are disposed at the central portion of the arm 9 rotatably coupled to the main body portion 10, inertia of the arm 9 etc. which rotates relative to the main body portion 10 is reduced. It will be possible to
　本形態では、モータ３７、３８が配置される内部空間Ｓは、大気圧となっている。そのため、本形態では、高温のチャンバー４に対する基板２の搬入や搬出をロボット１が行う場合であっても、冷却用のエアを用いてモータ３７、３８を効率的に冷却することが可能になる。したがって、本形態では、高温のチャンバー４に対する基板２の搬入や搬出をロボット１が行う場合であっても、モータ３７、３８の温度の上昇を効果的に抑制することが可能になり、その結果、モータ３７、３８の、熱の影響による損傷を防止することが可能になる。また、本形態では、大気圧となっている内部空間Ｓにモータ３７、３８が配置されているため、モータ３７、３８の潤滑剤として高価な真空グリースを使用する必要がなくなる。したがって、本形態では、ロボット１のイニシャルコストおよびランニングコストを低減することが可能になる。 In the present embodiment, the internal space S in which the motors 37 and 38 are disposed has an atmospheric pressure. Therefore, in the present embodiment, even when the robot 1 carries in and out the substrate 2 to and from the high temperature chamber 4, the motors 37 and 38 can be efficiently cooled using the cooling air. . Therefore, in the present embodiment, even when the robot 1 carries in and out the substrate 2 to and from the high temperature chamber 4, the temperature rise of the motors 37 and 38 can be effectively suppressed, and as a result , Damage to the motors 37, 38 due to the influence of heat. Further, in the present embodiment, since the motors 37, 38 are disposed in the internal space S at atmospheric pressure, it is not necessary to use expensive vacuum grease as a lubricant for the motors 37, 38. Therefore, in this embodiment, the initial cost and the running cost of the robot 1 can be reduced.
　本形態では、回転軸３９を回転可能に支持するとともに内部空間Ｓからの空気の流出を防ぐ磁性流体シール５６が、内部空間Ｓを画定する後壁部２５ｂに取り付けられ、回転軸４３を回転可能に支持するとともに内部空間Ｓからの空気の流出を防ぐ磁性流体シール５７が、内部空間Ｓを画定する前壁部２５ｃに取り付けられている。そのため、本形態では、アーム９の内部において、アーム９の中心部分に形成される内部空間Ｓのみが大気圧となる。したがって、本形態では、アーム９の端部まで大気圧となる空間が広がっている場合と比較して、アーム９の内部の構成を簡素化することが可能になるとともに、真空領域ＶＲへ空気が流出するおそれを低減することが可能になる。 In the present embodiment, a magnetic fluid seal 56 that rotatably supports the rotation shaft 39 and prevents the outflow of air from the internal space S is attached to the rear wall 25 b that defines the internal space S, and the rotation shaft 43 can be rotated. A magnetic fluid seal 57 is attached to the front wall 25c that defines the inner space S to support the inner space S and to prevent the air from flowing out of the inner space S. Therefore, in the present embodiment, only the internal space S formed in the central portion of the arm 9 has the atmospheric pressure inside the arm 9. Therefore, in the present embodiment, the internal configuration of the arm 9 can be simplified as compared with the case where the space to be the atmospheric pressure is extended to the end of the arm 9, and air can be discharged to the vacuum region VR. It becomes possible to reduce the risk of spillage.
　また、本形態では、アーム９の中心側に磁性流体シール５６、５７が配置されているため、高温のチャンバー４に対する基板２の搬入や搬出をロボット１が行う場合であっても、磁性流体シール５６、５７と高温のチャンバー４との距離を確保することが可能になる。したがって、本形態では、磁性流体シール５６、５７の温度の上昇を抑制することが可能になり、その結果、磁性流体シール５６、５７の、熱の影響による損傷を抑制することが可能になる。 Further, in the present embodiment, since the magnetic fluid seals 56, 57 are disposed on the center side of the arm 9, even when the robot 1 carries in and out the substrate 2 to and from the high temperature chamber 4, the magnetic fluid seal It becomes possible to secure the distance between 56 and 57 and the high temperature chamber 4. Therefore, in the present embodiment, it is possible to suppress the temperature rise of the magnetic fluid seals 56, 57, and as a result, it is possible to suppress the damage of the magnetic fluid seals 56, 57 due to the influence of heat.
　本形態では、駆動プーリ４８が固定される回転軸４２に従動プーリ５３が回転可能に保持され、駆動プーリ５２が固定される回転軸４６に従動プーリ４９が回転可能に保持されている。そのため、本形態では、従動プーリ５３が回転可能に保持される軸や従動プーリ４９が回転可能に保持される軸が別途設けられている場合と比較して、ロボット１の構成を簡素化することが可能になる。また、本形態では、アーム９の内部に配置される２本のベルト５０と２本のベルト５４とが左右方向で並ぶように配置されているため、アーム９の厚さ（上下方向の厚さ）を薄くすることが可能になる。したがって、本形態では、ロボット１の高さを低くすることが可能になる。 In this embodiment, the driven pulley 53 is rotatably held by the rotary shaft 42 to which the drive pulley 48 is fixed, and the driven pulley 49 is rotatably held by the rotary shaft 46 to which the drive pulley 52 is fixed. Therefore, in this embodiment, the configuration of the robot 1 is simplified as compared with the case where the shaft on which the driven pulley 53 is rotatably held and the shaft on which the driven pulley 49 is rotatably held are separately provided. Becomes possible. Further, in the present embodiment, since the two belts 50 and the two belts 54 arranged inside the arm 9 are arranged side by side in the left-right direction, the thickness of the arm 9 (thickness in the vertical direction) ) Can be made thinner. Therefore, in the present embodiment, the height of the robot 1 can be lowered.
　（他の実施の形態）
　上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。 (Other embodiments)
The embodiment described above is an example of the preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.
　上述した形態では、従動プーリ４９は、回転軸４６に回転可能に保持されているが、従動プーリ４９を回転可能に保持する軸が別途設けられていても良い。同様に、上述した形態では、従動プーリ５３は、回転軸４２に回転可能に保持されているが、従動プーリ５３を回転可能に保持する軸が別途設けられていても良い。また、上述した形態では、ベルト５４は、左右方向の内側でベルト５０と隣り合うように配置されているが、たとえば、右側に配置されるベルト５０の右側にベルト５４が配置されていても良いし、左側に配置されるベルト５０の左側にベルト５４が配置されていても良い。 In the embodiment described above, the driven pulley 49 is rotatably held by the rotary shaft 46, but a shaft for rotatably holding the driven pulley 49 may be separately provided. Similarly, in the embodiment described above, the driven pulley 53 is rotatably held by the rotating shaft 42, but a shaft for rotatably holding the driven pulley 53 may be separately provided. Further, in the embodiment described above, the belt 54 is disposed adjacent to the belt 50 inside in the left-right direction, but the belt 54 may be disposed on the right side of the belt 50 disposed on the right side, for example Alternatively, the belt 54 may be disposed on the left side of the belt 50 disposed on the left side.
　上述した形態において、図１０に示すように、ベルト５０とベルト５４とが上下方向で重なるように配置されていても良い。具体的には、前後方向から見たときに、モータ３７、３８の左右の両側のそれぞれにおいて、ベルト５０とベルト５４とが上下方向で重なるように配置されていても良い。この場合であっても、モータ３７、３８は、アーム９の中心部分の内部に配置されている。なお、図１０では、上述した形態と同様の構成については同一の符号を付している。 In the embodiment described above, as shown in FIG. 10, the belt 50 and the belt 54 may be arranged to overlap in the vertical direction. Specifically, when viewed from the front and rear direction, the belt 50 and the belt 54 may be arranged to overlap in the vertical direction on both left and right sides of the motors 37 and 38, respectively. Even in this case, the motors 37, 38 are disposed inside the central portion of the arm 9. In FIG. 10, the same components as those described above are denoted by the same reference numerals.
　上述した形態では、ベルト５０、５４を用いてハンド支持部材７、８を前後方向に移動させているが、上述の特許文献１に記載された産業用ロボットのように、ネジ部材を用いてハンド支持部材７、８を前後方向に移動させても良い。この場合であっても、モータ３７、３８は、アーム９の中心部分の内部に配置されている。また、上述した形態において、特許文献１に記載された産業用ロボットのように、アーム９は、アーム支持部材に対して前後方向に直線的に往復移動可能となるようにアーム支持部材に保持されていても良い。 In the embodiment described above, the hand support members 7 and 8 are moved in the front-rear direction using the belts 50 and 54, but like the industrial robot described in the above-mentioned Patent Document 1, the hand using screw members The support members 7 and 8 may be moved in the front-rear direction. Even in this case, the motors 37, 38 are disposed inside the central portion of the arm 9. In the embodiment described above, as in the industrial robot described in Patent Document 1, the arm 9 is held by the arm support member so as to be linearly reciprocally movable in the front-rear direction with respect to the arm support member. May be
　上述した形態において、モータ３７、３８の出力軸と左右方向とが一致するようにモータ３７、３８が配置されていても良い。また、上述した形態において、アーム９の内部の全体が大気圧となっていても良い。また、アーム９の内部の全体が真空となっていても良い。すなわち、モータ３７、３８は、真空中に配置されていても良い。さらに、上述した形態では、ロボット１によって搬送される搬送対象物は液晶ディスプレイ用のガラス基板２であるが、ロボット１によって搬送される搬送対象物は、たとえば、有機ＥＬ（有機エレクトロルミネッセンス）ディスプレイ用のガラス基板であっても良いし、ガラス基板２以外の搬送対象物であっても良い。 In the embodiment described above, the motors 37 and 38 may be arranged such that the output shafts of the motors 37 and 38 coincide with the left and right direction. In the embodiment described above, the entire inside of the arm 9 may be at atmospheric pressure. Further, the entire inside of the arm 9 may be vacuum. That is, the motors 37 and 38 may be disposed in a vacuum. Furthermore, in the embodiment described above, the object to be transported by the robot 1 is the glass substrate 2 for liquid crystal display, but the object to be transported by the robot 1 is, for example, for organic EL (organic electroluminescence) display The glass substrate may be an object of conveyance other than the glass substrate 2.
　１　ロボット（産業用ロボット）
　２　基板（ガラス基板、搬送対象物）
　５　ハンド（第１ハンド）
　６　ハンド（第２ハンド）
　７　ハンド支持部材（第１ハンド支持部材）
　８　ハンド支持部材（第２ハンド支持部材）
　９　アーム
　１０　本体部
　１７　駆動機構（第１駆動機構）
　１８　駆動機構（第２駆動機構）
　２５ｂ　後壁部（第１壁部）
　２５ｃ　前壁部（第２壁部）
　３７　モータ（第１モータ）
　３８　モータ（第２モータ）
　３９　回転軸（第１回転軸）
　４０　傘歯車（第１傘歯車）
　４１　傘歯車（第２傘歯車）
　４２　回転軸（第３回転軸）
　４３　回転軸（第２回転軸）
　４４　傘歯車（第３傘歯車）
　４５　傘歯車（第４傘歯車）
　４６　回転軸（第４回転軸）
　４８　駆動プーリ（第１駆動プーリ）
　４９　従動プーリ（第１従動プーリ）
　５０　ベルト（第１ベルト）
　５２　駆動プーリ（第２駆動プーリ）
　５３　従動プーリ（第２従動プーリ）
　５４　ベルト（第２ベルト）
　５６　磁性流体シール（第１磁性流体シール）
　５７　磁性流体シール（第２磁性流体シール）
　Ｓ　内部空間 1 Robot (industrial robot)
2 Substrates (glass substrates, objects to be transported)
5 hands (1st hand)
6 hands (second hand)
7 hand support member (first hand support member)
8 hand support member (second hand support member)
9 arm 10 main body 17 drive mechanism (first drive mechanism)
18 Drive mechanism (second drive mechanism)
25b back wall (first wall)
25c front wall (second wall)
37 Motor (1st motor)
38 Motor (2nd motor)
39 Rotation axis (1st rotation axis)
40 Bevel gear (1st bevel gear)
41 Bevel gear (2nd bevel gear)
42 Axis of rotation (3rd axis of rotation)
43 Axis of rotation (second axis of rotation)
44 Bevel gear (3rd bevel gear)
45 bevel gear (4th bevel gear)
46 Axis of rotation (4th axis of rotation)
48 Drive pulley (1st drive pulley)
49 driven pulley (first driven pulley)
50 belts (first belt)
52 Drive pulley (second drive pulley)
53 Driven pulley (2nd driven pulley)
54 belt (second belt)
56 Magnetic Fluid Seal (First Magnetic Fluid Seal)
57 Magnetic fluid seal (2nd magnetic fluid seal)
S internal space

Claims (6)

  1. 　真空中で搬送対象物を搬送する産業用ロボットであって、
    　前記搬送対象物が搭載される第１ハンドおよび第２ハンドと、前記第１ハンドが固定される第１ハンド支持部材と、前記第２ハンドが固定される第２ハンド支持部材と、前記第１ハンド支持部材と前記第２ハンド支持部材とが水平方向の同じ方向へ直線的に往復移動可能となるように前記第１ハンド支持部材および前記第２ハンド支持部材を保持するアームと、前記アームに対して前記第１ハンド支持部材を往復移動させる第１駆動機構と、前記アームに対して前記第２ハンド支持部材を往復移動させる第２駆動機構とを備え、
    　前記第１駆動機構は、駆動源としての第１モータを備え、
    　前記第２駆動機構は、駆動源としての第２モータを備え、
    　前記第１モータおよび前記第２モータは、前記アームの中心部分の内部に配置されていることを特徴とする産業用ロボット。     An industrial robot for transporting an object to be transported in vacuum,
    A first hand and a second hand on which the object to be transferred is mounted, a first hand support member to which the first hand is fixed, a second hand support member to which the second hand is fixed, and the first hand An arm for holding the first hand support member and the second hand support member so that the hand support member and the second hand support member can linearly reciprocate in the same horizontal direction, and the arm A first drive mechanism for reciprocating the first hand support member, and a second drive mechanism for reciprocating the second hand support member relative to the arm,
    The first drive mechanism includes a first motor as a drive source,
    The second drive mechanism includes a second motor as a drive source,
    An industrial robot, wherein the first motor and the second motor are disposed inside a central portion of the arm.
  2. 　前記アームが回動可能に連結される本体部を備え、
    　前記アームの中心が前記本体部に連結されていることを特徴とする請求項１記載の産業用ロボット。     The arm is rotatably connected to the main body;
    The industrial robot according to claim 1, wherein a center of the arm is connected to the main body.
  3. 　前記アームの中心部分の内部には、前記第１モータおよび前記第２モータが配置される内部空間が形成され、
    　前記内部空間は、大気圧となっていることを特徴とする請求項２記載の産業用ロボット。     An internal space in which the first motor and the second motor are disposed is formed inside a central portion of the arm,
    The industrial robot according to claim 2, wherein the internal space is at atmospheric pressure.
  4. 　前記内部空間には、前記第１モータの出力軸と前記第２モータの出力軸とが反対方向に突出するように前記第１モータおよび前記第２モータが配置され、
    　前記第１駆動機構は、前記第１モータの出力軸に連結される第１回転軸と、前記第１回転軸を回転可能に支持するとともに前記内部空間からの空気の流出を防ぐ第１磁性流体シールとを備え、
    　前記第２駆動機構は、前記第２モータの出力軸に連結される第２回転軸と、前記第２回転軸を回転可能に支持するとともに前記内部空間からの空気の流出を防ぐ第２磁性流体シールとを備え、
    　前記アームは、前記内部空間を画定するとともに前記第１磁性流体シールを保持する第１壁部と、前記内部空間を画定するとともに前記第２磁性流体シールを保持する第２壁部とを備えることを特徴とする請求項３記載の産業用ロボット。     The first motor and the second motor are disposed in the inner space such that the output shaft of the first motor and the output shaft of the second motor project in opposite directions.
    A first magnetic fluid rotatably supports a first rotation shaft connected to an output shaft of the first motor, and the first rotation shaft, and a first magnetic fluid that prevents the outflow of air from the internal space. Equipped with a seal,
    The second drive mechanism rotatably supports a second rotation shaft connected to the output shaft of the second motor, and the second rotation shaft, and a second magnetic fluid that prevents the air from flowing out from the internal space Equipped with a seal,
    The arm includes a first wall defining the inner space and holding the first magnetic fluid seal, and a second wall defining the inner space and holding the second magnetic fluid seal. The industrial robot according to claim 3, characterized in that
  5. 　前記第１回転軸は、前記アームに対する前記第１ハンド支持部材および前記第２ハンド支持部材の移動方向と前記第１回転軸の軸方向とが一致するように配置され、
    　前記第２回転軸は、前記アームに対する前記第１ハンド支持部材および前記第２ハンド支持部材の移動方向と前記第２回転軸の軸方向とが一致するように配置され、
    　前記第１駆動機構は、前記第１回転軸の先端部に固定される第１傘歯車と、前記第１傘歯車に噛み合う第２傘歯車と、前記第２傘歯車が固定される第３回転軸と、前記第３回転軸に固定される２個の第１駆動プーリとを備え、
    　前記第２駆動機構は、前記第２回転軸の先端部に固定される第３傘歯車と、前記第３傘歯車に噛み合う第４傘歯車と、前記第４傘歯車が固定される第４回転軸と、前記第４回転軸に固定される２個の第２駆動プーリとを備えることを特徴とする請求項４記載の産業用ロボット。     The first rotation shaft is disposed such that the moving direction of the first hand support member and the second hand support member with respect to the arm coincides with the axial direction of the first rotation shaft.
    The second rotation shaft is disposed such that the moving direction of the first hand support member and the second hand support member with respect to the arm coincides with the axial direction of the second rotation shaft.
    The first drive mechanism includes a first bevel gear fixed to a tip end portion of the first rotation shaft, a second bevel gear meshing with the first bevel gear, and a third rotation to which the second bevel gear is fixed A shaft, and two first drive pulleys fixed to the third rotation shaft,
    The second drive mechanism includes a third bevel gear fixed to an end portion of the second rotation shaft, a fourth bevel gear meshing with the third bevel gear, and a fourth rotation to which the fourth bevel gear is fixed 5. The industrial robot according to claim 4, further comprising: a shaft and two second drive pulleys fixed to the fourth rotation shaft.
  6. 　前記第１駆動機構は、前記第４回転軸に回転可能に保持される２個の第１従動プーリと、前記第１ハンド支持部材に固定されるとともに前記第１駆動プーリと前記第１従動プーリとに架け渡される２本の第１ベルトとを備え、
    　前記第２駆動機構は、前記第３回転軸に回転可能に保持される２個の第２従動プーリと、前記第２ハンド支持部材に固定されるとともに前記第２駆動プーリと前記第２従動プーリとに架け渡される２本の第２ベルトとを備え、
    　前記第２傘歯車は、前記第３回転軸の軸方向における前記第３回転軸の中心側に固定され、
    　２個の前記第１駆動プーリのそれぞれは、前記第３回転軸の軸方向における前記第３回転軸の両端部のそれぞれに固定され、
    　前記第２従動プーリは、前記第２傘歯車と前記第１駆動プーリとの間で前記第３回転軸に回転可能に保持され、
    　前記第４傘歯車は、前記第４回転軸の軸方向における前記第４回転軸の中心側に固定され、
    　２個の前記第１従動プーリのそれぞれは、前記第４回転軸の軸方向における前記第４回転軸の両端部のそれぞれに回転可能に保持され、
    　前記第２駆動プーリは、前記第４傘歯車と前記第１従動プーリとの間で前記第４回転軸に固定されていることを特徴とする請求項５記載の産業用ロボット。     The first drive mechanism includes two first driven pulleys rotatably held by the fourth rotation shaft, and is fixed to the first hand support member, and the first drive pulley and the first driven pulley. And two first belts that are
    The second drive mechanism includes two second driven pulleys rotatably held by the third rotation shaft, and is fixed to the second hand support member, and the second drive pulley and the second driven pulley. And two second belts that are
    The second bevel gear is fixed to the center side of the third rotation axis in the axial direction of the third rotation axis,
    Each of the two first drive pulleys is fixed to each of both end portions of the third rotation shaft in the axial direction of the third rotation shaft,
    The second driven pulley is rotatably held on the third rotation shaft between the second bevel gear and the first drive pulley.
    The fourth bevel gear is fixed to the center side of the fourth rotation axis in the axial direction of the fourth rotation axis,
    Each of the two first driven pulleys is rotatably held at each of both ends of the fourth rotation shaft in the axial direction of the fourth rotation shaft,
    The industrial robot according to claim 5, wherein the second drive pulley is fixed to the fourth rotation shaft between the fourth bevel gear and the first driven pulley.
PCT/JP2018/026255 2017-07-28 2018-07-12 Industrial robot WO2019021834A1 (en)

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