JP2010177411A - Workpiece conveying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a workpiece conveying device for efficiently releasing heat from a member that is subject to radiant heat. <P>SOLUTION: The workpiece conveying device is provided with a workpiece conveying mechanism for conveying a workpiece. To each part of the outer surface of the workpiece conveying mechanism, a cooling pipe 84 for circulating a refrigerant is attached. The cooling pipe 84 is press-fixed to the outer surface through a fixture 86 while an elastic member 85 is sandwiched. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a work transfer device for transferring a plate-like work in a vacuum space, for example.

  As an apparatus for conveying a plate-like workpiece in a vacuum space, for example, there is one disclosed in Patent Document 1. The workpiece transfer device disclosed in the same document includes a swing base that is held so as to be rotatable with respect to a fixed base, a ball screw slide mechanism that moves a lifting base mounted with the swing base in a vertical direction, and swings with respect to the swing base. A link arm mechanism supported in a possible manner and a hand supported by the link arm mechanism are provided.

  While the hand and link arm mechanism are arranged in a vacuum space, the fixed base has a partition with the vacuum space at the top of the housing, and most of the housing is placed in an atmospheric pressure space below the vacuum space. Is done. Inside the fixed base is housed a drive motor for turning the turning base and driving the link arm mechanism, and further a ball screw slide mechanism and its drive motor.

  In such a workpiece transfer device, peripheral parts are affected by radiant heat in order to handle a workpiece in a high temperature state. Therefore, in the link arm mechanism that is most susceptible to radiant heat, a refrigerant circulation path is formed so as to cool peripheral components from the inside of the fixed base through the turning base. An annular pipe is attached around the guide rail of the link arm mechanism so as to communicate with the refrigerant circulation path.

JP 2007-118171 A

  However, in the conventional workpiece transfer device, the annular pipe for circulating the refrigerant has a circular cross section, and the contact portion of the annular pipe tends to be relatively small with respect to the frame member constituting the link arm mechanism. is there. For this reason, there is a possibility that heat cannot be efficiently released from the frame member that is susceptible to radiant heat.

  The present invention has been conceived under such circumstances, and it is an object of the present invention to provide a work transfer device that can efficiently release heat from a member that is susceptible to radiant heat.

  In order to solve the above problems, the present invention employs the following technical means.

  A workpiece transfer device provided by the present invention is a workpiece transfer device provided with a workpiece transfer mechanism for transferring a workpiece, and cooling pipes for circulating a refrigerant are attached to various locations on the outer surface of the workpiece transfer mechanism. The cooling pipe is pressed and fixed via a fixture with an elastic member sandwiched between the outer surface and the outer surface.

  As a preferred embodiment, the elastic member extends along the longitudinal direction of the cooling pipe.

  As a preferred embodiment, the elastic member is curved before being pressed and fixed in the longitudinal cross section of the cooling pipe.

  As a preferred embodiment, the elastic member is made of a metal member that can be deformed when pressed and fixed.

  As a preferred embodiment, the outer surface of the cooling pipe in contact with the elastic member is formed in a flat shape.

  As a preferred embodiment, a scissor lift mechanism that vertically moves the work transport mechanism mounted thereon, a pedestal that mounts the scissor lift mechanism, and a rotation mechanism that rotates the pedestal around a vertical axis; , Is further provided.

  As a preferred embodiment, the scissor lift mechanism is connected to a stage on which the workpiece transfer mechanism is mounted so as to be rotatable around a horizontal axis while intersecting each other at an intermediate portion, and one upper end portion of the scissor lift mechanism is connected to the stage. The lower end is connected to the pedestal so as to be rotatable about a horizontal axis, and the other upper end is rotatable about the horizontal axis with respect to the stage. The first scissor link consisting of a pair of cross arms connected to the base so as to be slidable in the horizontal direction with respect to the pedestal, and a pair of cross arms having the same connection form as the first scissor link, A second scissor link arranged in parallel to the first scissor link; and the first and second mounted on the pedestal and slidably connected to the pedestal. Saas and a lift driving means for sliding movement the lower end of the cross arm of the link.

  As a preferred embodiment, a lower pipe is provided from the lower end portion to the middle portion of the crossing arm in the first scissor link that is rotatably connected to the pedestal, and the stage is attached to the stage. An upper pipe is attached from an upper end portion to an intermediate portion of the intersecting arm in the second scissor link that is rotatably connected to the first scissor link, and the intersecting portion in the first and second scissor links. Intermediate pipes are connected between the middle parts of the arms so as to communicate with the lower pipe and the upper pipe.

  As a preferred embodiment, the pedestal is provided with a through pipe, and the through pipe communicates with the lower pipe via a lower end portion of the intersecting arm in the first scissor link. At the same time, the upper pipe is connected to the workpiece transfer mechanism via a connection pipe.

  As a preferred embodiment, the entire pipe line communicating from the through pipe to the lower pipe and further through the intermediate pipe to the upper pipe and the connecting pipe is connected to the cooling pipe. A supply pipe and a refrigerant discharge pipe are accommodated.

  According to such a configuration, the cooling pipes are attached to various portions of the outer surface of the workpiece transfer mechanism that is susceptible to radiant heat, and the cooling pipes are pressed and fixed in contact with the outer surface via the elastic member. For this reason, the cooling pipe comes into contact with the outer surface of the work transport mechanism via the elastic member, and the contact portion of the cooling pipe with the outer surface can be made relatively large. Heat can be efficiently released from the constituent members.

  Other features and advantages of the present invention will become more apparent from the detailed description given below with reference to the drawings.

It is a disassembled perspective view which shows one Embodiment of the workpiece conveyance apparatus which concerns on this invention. It is a principal part side view of the workpiece conveyance apparatus shown in FIG. It is a principal part front view of the workpiece conveyance apparatus shown in FIG. It is a perspective view of the workpiece conveyance mechanism with which the workpiece conveyance apparatus shown in FIG. 1 was equipped. FIG. 5 is a partially cutaway plan view of the workpiece transfer mechanism shown in FIG. 4. It is sectional drawing which shows the fixing structure of the cooling pipe provided in the workpiece conveyance mechanism shown in FIG.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  1-6 has shown one Embodiment of the workpiece conveyance apparatus based on this invention. The workpiece transfer device A is for transferring a thin plate-shaped workpiece such as a liquid crystal panel. The work transfer device A includes a lower unit 1 that accommodates a rotation mechanism (not shown), a pedestal 2, a scissor lift mechanism 4, an upper pipe 5, an intermediate pipe 6, a lower pipe 7, and a work transfer mechanism 8 as main components. ing. The lower unit 1 is arranged in an atmospheric pressure space below the floor surface, while the pedestal 2, scissor lift mechanism 4, upper pipe 5, intermediate pipe 6, lower pipe 7, and workpiece transfer mechanism 8 are, for example, disposed inside the chamber. Arranged in a vacuum space. In the workpiece transfer device A, for example, a workpiece heated to around 200 ° C. is transferred in a vacuum space. In FIG. 1, the scissor lift mechanism 4 and the work transport mechanism 8 are separated from each other. Note that the inside of the chamber may not be a complete vacuum space, but may be a space that has been decompressed to some extent. Conversely, it may be a space that has been boosted to some extent. Furthermore, the inside of the chamber may be a space filled with other than air (for example, nitrogen).

  The lower unit 1 accommodates a rotation mechanism that rotates the base 2 around the vertical axis. A rotation mechanism consists of a planetary gear mechanism including a drive motor for rotation, for example. The rotating shaft 10 of the rotating mechanism is formed in a hollow shape, and is coupled to the lower portion of the base 2 via a seal bearing 11 (see FIG. 1). When the rotating shaft 10 rotates, the pedestal 2 is rotated around the vertical axis. The interior of the lower unit 1 is maintained at atmospheric pressure. Since such a lower unit 1 accommodates a rotation mechanism that only rotates the pedestal 2 around the vertical axis, the lower unit 1 is more compact in the height direction than in the prior art. That is, the height of the lower unit 1 is considerably smaller than that of the conventional unit, and the lower unit 1 can be installed in a floor space as shallow as possible.

  The base 2 mounts the scissor lift mechanism 4. A through pipe 3 is provided on the upper surface of the base 2. One end of the through pipe 3 is drawn into the lower unit 1 through the hollow portion of the rotating shaft 10. The other end of the through pipe 3 is connected to the lower pipe 7 via the lower relay pipe 30 (see FIG. 2). Other components provided on the upper surface of the base 2 will be described later.

  The scissor lift mechanism 4 raises and lowers the entire workpiece transfer mechanism 8 in the vertical direction in a state where the workpiece transfer mechanism 8 is mounted. The scissor lift mechanism 4 includes a stage 40 on which the workpiece transfer mechanism 8 is mounted, first and second scissor links 41 and 42, and a lift drive motor 43. The first scissor link 41 has a pair of intersecting arms 410 and 411, and the second scissor link 42 also has a pair of intersecting arms 420 and 421 having the same shape and size. Such first and second scissor links 41 and 42 are divided and arranged in parallel on both sides of the stage 40.

  A pair of brackets 21 and a bearing (not shown) for connecting the lower ends of the cross arms 411 and 421 to be rotatable around the horizontal axis are provided at the rear end of the upper surface of the base 2. A motor box 22 is provided between the bracket 21 and the bracket 21 for accommodating the lift drive motor 43 in an airtightly sealed state. A pair of ball screw shafts 23 and a nut block 24 and a pair of slide rails 25 and a linear block 26 for connecting the lower ends of the cross arms 410 and 420 so as to be slidable in the front-rear and horizontal directions are provided at the front upper end of the base 2. Is provided. The ball screw shaft 23 is rotated by a lift drive motor 43, whereby the nut block 24 screwed to the ball screw shaft 23 slides back and forth. The lower ends of the cross arms 410 and 420 are rotatably connected to both ends of the nut block 24. Lower ends of the cross arms 410 and 420 are supported by the slide rail 25 via the linear block 26.

  As shown in FIG. 3, the through pipe 3 is once drawn into a hermetically sealed motor box 22 and connected to a lower relay pipe 30 protruding from the inside of the motor box 22 to the outside. A swivel joint J1 is provided through the lower end portion of the cross arm 411 and the bracket 21, and the lower relay pipe 30 is connected to the lower end of the lower pipe 7 through the swivel joint J1. Note that FIG. 3 shows a part of the cross arms 410, 411, 420, and 421 in a broken view because the scissor lift mechanism 4 is viewed from the front slightly from the intermediate pipe 6.

  The upper pipe 5 is provided along the outer side from the upper end part of the cross arm 420 to the intermediate part. The intermediate pipe 6 is provided so as to connect between the intermediate portion of the cross arms 410 and 411 and the intermediate portion of the cross arms 420 and 421. As shown in FIG. 3, the lower pipe 7 is provided along the outer side from the middle part to the lower end part of the cross arm 411. An L-shaped joint J2 is provided at an intermediate portion where the intersecting arms 410 and 411 intersect with each other, and the upper end of the lower pipe 7 communicates with one end of the intermediate pipe 6 via the L-shaped joint J2. It is connected. The other end of the intermediate pipe 6 is communicatively connected to the lower end of the upper pipe 5 via a swivel joint J3 provided through an intermediate portion where the cross arms 420 and 421 cross each other.

  A workpiece transfer mechanism 8 is fixed on the upper surface of the stage 40. A pair of brackets 40A and a bearing (not shown) are provided at the rear end of the lower surface of the stage 40 so as to connect the upper ends of the intersecting arms 410 and 420 so as to be rotatable around the horizontal axis. A pair of slide rails 40 </ b> B and a linear guide 40 </ b> C for connecting the upper ends of the intersecting arms 411 and 421 so as to be slidable in the front-rear and horizontal directions are provided at the front end of the lower surface of the stage 40. Connection pipes 40 </ b> E, 40 </ b> F, 40 </ b> G and a through-connection pipe 40 </ b> H are provided from the rear end of the lower surface of the stage 40 to the center. One end of the connection pipe 40E is connected to the upper end of the upper pipe 5 through a swivel joint J4 provided through the upper end of the cross arm 420 and the bracket 40A. The other end of the connection pipe 40E is connected to one end of the connection pipe 40F through an L-shaped joint J5 provided through the upper end of the cross arm 410 and the bracket 40A. The other end of the connection pipe 40F is connected to one end of the connection pipe 40G through an L-shaped joint J6. The other end of the connection pipe 40G is connected to the lower end of a through connection pipe 40H that penetrates the center of the stage 40 via an L-shaped joint J7. The upper end of the through connection pipe 40 </ b> H is connected to the workpiece transfer mechanism 8.

  That is, the through pipe 3, the lower relay pipe 30, the upper pipe 5, the intermediate pipe 6, the lower pipe 7, the connection pipes 40 </ b> E, 40 </ b> F, 40 </ b> G, and the through connection pipe 40 </ b> H communicate from the inside of the lower unit 1 to the workpiece transfer mechanism 8. Forming a pipeline. This conduit is kept at atmospheric pressure by being hermetically sealed. Such a pipe accommodates a power cable for supplying electric power to the slide drive motor and the lift drive motor 43 of the work transport mechanism 8 and further cools the components of the work transport mechanism 8. A refrigerant supply pipe and a refrigerant discharge pipe are accommodated. Thereby, the power cable, the refrigerant supply pipe, and the refrigerant discharge pipe are routed from the inside of the lower unit 1 to the motor box 22 and the workpiece transfer mechanism 8 without being exposed to the vacuum space. In this embodiment, a liquid such as water is used as the refrigerant from the viewpoint of thermal efficiency. In addition, as the refrigerant, for example, dry air (dry air) may be applied.

  The work transport mechanism 8 operates two hands 80 for holding a work, a belt slide mechanism 81 (see FIGS. 4 and 5) for reciprocating linearly moving these hands 80 in the front-rear and horizontal directions, and a belt slide mechanism 81. A sealing box 82 that houses a sliding drive motor for driving the belt, a belt slide mechanism 81, a guide member 83 that holds the sealing box 82, and a cooling pipe 84 for circulating the refrigerant.

  As shown in FIG. 1, the guide member 83 has a main body 83A and a cover 83B, and has a rectangular shape in plan view. As well shown in FIG. 4, the main body 83A is provided with first and second guide rails 83C and 83D each having a set of two rows extending in the longitudinal direction. The lower end 80a of one hand 80 is supported by the first guide rail 83C so as to be movable via a slider 80b, and the second guide rail 83D has the other hand so as not to interfere with the hand 80. The lower end portion of the hand 80 is movably supported via a slider 80c. The first and second guide rails 83C and 83D are covered with a cover 83B, and the cover 83B is configured to project the sliders 80b and 80c outward at portions corresponding to the guide rails 83C and 83D. Slits 80d and 80e are provided (see FIG. 1). Since the lower end 80a of one hand 80 is formed so as to bypass the outside of the other hand 80, the two hands 80 are positioned so as to overlap each other through a gap and interfere with each other. It can be moved in the horizontal direction.

  As shown in FIGS. 4 and 5, two sets of belt slide mechanisms 81 are arranged so as to extend in the longitudinal direction. Each set of belt slide mechanisms 81 has two rows of inner and outer belts 81A and 81B wound around pulleys (not shown). For example, the lower ends 80a of the hands 80 located on the upper side are connected to the belts 81A and 81B in the right two rows via the slider 80b (see FIG. 4). When the right two rows of belts 81A and 81B rotate, the upper hand 80 is moved in the front-rear and horizontal directions along the guide rail 83C. The lower end portion of the hand 80 located on the lower side is connected to the belts 81A and 81B in the left two rows via a slider 80c (see FIG. 4). When the left two rows of belts 81A and 81B rotate, the lower hand 80 is moved in the front-rear and horizontal directions along the guide rail 83D. Such a belt may be provided on each of the left and right sides.

  As well shown in FIG. 5, the sealed box 82 is disposed in the center of the main body 83A. Inside the sealed box 82 are housed slide drive motors 82C and 82D and speed reducers 82E and 82F for rotating the belts 81A and 81B. Drive gears 82G and 82H and tension rollers 82J for driving the belts 81A and 81B are provided on both outer sides of the hermetic box 82, and the belts 81A and 81B are provided on the drive gears 82G and 82H and the tension roller 82J. It is hung. For example, two drive gears 82G and 82H arranged on one side of the box body 82A are supported by a drive shaft (not shown) of a speed reducer 82E protruding outward from a side wall of the box body 82A through an airtight bearing (not shown). These drive gears 82G and 82H are switched in rotation speed and rotation direction by motor control of the slide drive motor 82C. The same applies to the two drive gears 82G and 82H disposed on the other side of the box body 82A. Thereby, the two sets of left and right belts 81A and 81B are independently rotated, and the two hands 80 positioned above and below are independently slid.

  A communication hole (not shown) for penetrating the refrigerant supply pipe and the refrigerant discharge pipe is formed through the bottom of the sealed box 82. The through hole 40H on the stage 40 is connected to the communication hole in a state of being hermetically sealed. The refrigerant supply pipe, the refrigerant discharge pipe, and the power cable are drawn into the sealed box 82 through the through-connecting pipe 40H and the communication hole. Inside the sealed box 82, the tip of the refrigerant supply pipe is connected to the supply branch socket 82K, and the tip of the refrigerant discharge pipe is connected to the discharge branch socket 82L. Two sets of cooling pipes 84 are connected to the supply branch socket 82K so as to be drawn out from the inside of the sealed box 82 to the outside through an airtight through hole. These cooling pipes 84 pass around the belt slide mechanism 81 and return to the inside of the sealed box 82, and are connected to the branching socket 82L for discharge. Such a cooling pipe 84 is disposed so as to surround the belt slide mechanism 81 and the guide rails 83C and 83D. That is, the cooling pipe 84 is attached so that the refrigerant flowing through the cooling pipe 84 circulates around the belt slide mechanism 81 and the guide rails 83C and 83D. Therefore, the belt slide mechanism 81 and the guide rails 83 </ b> C and 83 </ b> D that are easily affected by radiant heat are enhanced in the heat radiation effect by the refrigerant flowing inside the cooling pipe 84.

  As shown in FIG. 6, the cooling pipe 84 is formed of, for example, a square tube made of stainless steel. The frame member 830 constituting the main body 83A is made of, for example, stainless steel, and the cooling pipe 84 is pressed and fixed by a bracket 86 and a bolt 87 as a fixture with the elastic member 85 sandwiched between the outer surface of the frame member 830. Is done. In FIGS. 4 and 5, since a large number of brackets are shown, reference numeral 86 is given to some of the brackets, and reference numerals are omitted for the rest.

  The elastic member 85 is a leaf spring-like metal piece with good thermal conductivity such as aluminum. In the natural state before the cooling pipe 84 is fixed, the elastic member 85 has a slightly curved shape in the transverse cross section of the cooling pipe 84 in the longitudinal direction. When the elastic member 85 is sandwiched between the frame member 830 and the cooling pipe 84 and the cooling pipe 84 is pressed and fixed to the frame member 830 via the bracket 86, the elastic member 85 is cooled with the outer surface of the frame member 830. It is deformed between the outer surface of the pipe 84. At this time, the elastic member 85 is pressed between the frame member 830 and the cooling pipe 84, and the contact area with the frame member 830 and the cooling pipe 84 increases in the process of being pressed. In FIG. 6, for convenience, the contact surface of the elastic member 85 in a fixed state is illustrated as a flat surface, but the contact surface may be a slightly curved surface.

  If the cooling pipe 84 is pressed and fixed to the frame member 830 only through the bracket 86 without using the elastic member 85, the outer surface of the frame member 830 and the outer surface of the cooling pipe 84 are not in close contact with each other. , It will be in the state where only a part contacts. Alternatively, the state is almost close to point contact. The reason is that it is difficult to make the outer surface of the frame member 830 (here, the portion to which the bracket 86 is attached) and the outer surface of the cooling pipe 84 into an ideal plane. There is also a factor that deformation occurs due to thermal strain. Furthermore, if the material is relatively hard, such as stainless steel, for example, the outer surface of the frame member 830 and the outer surface of the cooling pipe 84 cannot be brought into close contact with each other because they are hardly deformed to the extent that they are pressed and fixed. As a result, as described above, only a part is in contact, and sometimes close to point contact. Therefore, even if the cooling pipe 84 is pressed and fixed to the frame member 830 only through the bracket 86, only a slight contact area can be secured between the outer surface of the frame member 830 and the outer surface of the cooling pipe 84. As a result, the cooling effect by the cooling pipe 84 is reduced.

  On the other hand, when the elastic member 85 is used as in the present embodiment, the elastic member 85 is deformed and pressed between the outer surface of the frame member 830 and the outer surface of the cooling pipe 84 as described above. , The contact area between the elastic member 85 and the outer surface of the cooling pipe 84 increases. As a result, when the elastic member 85 is used, the contact area between the outer surface of the frame member 830 and the outer surface of the cooling pipe 84 becomes larger than when the elastic member 85 is not used.

  Further, when the cooling pipe 84 is pressed and fixed using the elastic member 85, the outer surface of the frame member 830 and the elastic member 85 are reliably in contact with each other. At this time, since the elastic member 85 is deformed between the outer surface of the frame member 830 and the outer surface of the cooling pipe 84, the outer surface of the frame member 830 and the elastic member 85 are pressed while reliably contacting each other. In the process, the contact area between the outer surface of the frame member 830 and the elastic member 85 increases.

  That is, the contact area between the elastic member 85 and the outer surface of the cooling pipe 84 and the contact area between the outer surface of the frame member 830 and the elastic member 85 both increase in the process in which the elastic member 85 is pressed. It becomes larger than the case where it only contacts and does not deform. As a result, compared with the case where the elastic member 85 is not used, the cooling effect by the cooling pipe 84 can be enhanced by increasing the contact area.

  As can be seen from the above, the elastic member 85 is a metal member that can be deformed when pressed and fixed, and is preferably made of a metal having good thermal conductivity. That is, the elastic member 85 is preferably made of a material that is softer than the material of the frame member 830 and the cooling pipe 84, and preferably has a shape that can be deformed when pressed and fixed. Therefore, as described above, when the cooling pipe 84 and the frame member 830 are made of stainless steel, the elastic member 85 is made of a metal that is softer than these materials, for example, aluminum. The shape of the elastic member 85 is not limited to the shape shown in FIG. 6, but may be a shape curved in a corrugated shape, for example. Moreover, the shape like an expanded metal may be sufficient.

  With the configuration of the elastic member 85 as described above, the heat of the frame member 830 is quickly transmitted to the refrigerant flowing through the inside of the cooling pipe 84 through the elastic member 85 and the pipe wall of the cooling pipe 84. Therefore, the heat from the frame member 830 is quickly released through the refrigerant.

  As shown in FIG. 5, the bracket 86 is used to press and fix the cooling pipe 84 to the frame member 830 at a plurality of locations in the longitudinal direction of the cooling pipe 84, but the interval is determined as appropriate. The elastic member 85 may have a shape extending along the longitudinal direction of the cooling pipe 84 and may have a length in the longitudinal direction similar to that of the cooling pipe 84, or may be shorter than that. In the case of shortening, it is preferable to use a plurality of elastic members 85 so that the entire contact area is as wide as possible. Regarding the elastic member 85 and the bracket 86, the length of the cooling pipe 84 and how to arrange the elastic member 85 and the bracket 86 may be determined in consideration of the actual cooling effect.

  Next, the operation of the workpiece transfer apparatus A will be described.

  When delivering a workpiece in the vacuum space, the scissor lift mechanism 4 operates so that the workpiece transfer mechanism 8 moves in the horizontal direction while holding the workpiece, and the entire workpiece transfer mechanism 8 is moved up and down in the vertical direction. The rotation mechanism housed in the lower unit 1 rotates the scissor lift mechanism 4 and the workpiece transfer mechanism 8 integrally. Thereby, the workpiece is transported from a predetermined position in the three-dimensional space to a desired position.

  As shown in FIG. 2, when the scissor lift mechanism 4 operates, the ball screw shaft 23 is rotated, and the nut block 24 is slid along the ball screw shaft 23 in the horizontal direction along the ball screw shaft 23. Since the lower ends of the cross arms 410 and 420 are connected to both ends of the nut block 24, the lower ends of the cross arms 410 and 420 slide along the slide rail 25.

  As the lower ends of the intersecting arms 410 and 420 slide, the lower ends of the intersecting arms 411 and 421 and the upper ends of the intersecting arms 410 and 420 rotate around the brackets 21 and 40A, and the intersecting arms 411. , 421 slidably move along the slide rail 40B. Thereby, the stage 40 moves up and down in the vertical direction while maintaining the horizontal posture.

  For example, as shown in FIG. 2, when the stage 40 is lowered vertically to the height position indicated by the phantom line by the operation of the scissor lift mechanism 4, the entire workpiece transfer mechanism 8 (not shown) mounted on the stage 40 is also moved. By pulling down to the lowest height position with respect to the base 2, the height position of the hand 80 can be kept as low as possible.

  Even if the stage 40 is lowered to the lowest position by the operation of the scissor lift mechanism 4, a gap is generated in the height direction between the base 2 and the stage 40 due to the characteristics of the scissor lift mechanism 4. If the motor box 22 is provided so as to fit in the gap in the height direction, the scissor lift mechanism 4 can be downsized in the height direction, and the space on the base 2 can be effectively utilized.

  Since the height direction dimension of the motor box 22 is determined by the size of the lift drive motor 43 and the like, there may be a case where the motor box 22 does not fit in the gap generated when the stage 40 is lowered to the lowest position. That is, when the stage 40 is lowered to the lowest position by the operation of the scissor lift mechanism 4, the motor box 22 and the stage 40 or the connection pipes 40E and 40G may come into contact with each other. As a method for avoiding this problem, for example, the operation in the height direction of the scissor lift mechanism 4 may be controlled so that the motor box 22 and the stage 40 and the connection pipes 40E and 40G do not come into contact with each other. Furthermore, it is preferable to provide a mechanism for preventing contact. That is, the stage 40 can only be lowered to a predetermined position that is somewhat higher than the lowest possible position, but the difference in height is slight, so that the effect of downsizing in the height direction can be hardly achieved. Has no effect.

  As an avoidance method different from the above, for example, the motor box 22 may be provided at a position where it does not contact the stage 40 or the connection pipes 40E, 40G. Therefore, if necessary, the area of the base 2 may be increased. At this time, if a gear box is interposed between the lift drive motor 43 and the ball screw shaft 23 as necessary, the degree of freedom of the installation position of the motor box 22 is increased.

  During the operation of the scissor lift mechanism 4, the upper pipe 5, the intermediate pipe 6, the lower pipe 7, and the connection pipe 40 </ b> E attached to the cross arms 410, 411, 420, and 421 change the relative positional relationship. Let The upper pipe 5, the intermediate pipe 6, the lower pipe 7, and the connection pipe 40E are connected in a pivotable manner to each other through hermetically sealed swivel joints J1, J3, J4 and an L-shaped joint J2. Therefore, the refrigerant supply pipe and the refrigerant discharge pipe drawn inside are not disturbed. Even during operation of the rotating mechanism, the refrigerant supply pipe and the refrigerant discharge pipe are not complicatedly entangled or greatly bent, and a stable piping posture is maintained along the cross arms 410, 411, 420, 421. .

  The workpiece transfer mechanism 8 is most susceptible to thermal influences by radiant heat from a heated workpiece. In particular, the belt slide mechanism 81 and the guide rails 83C and 83D, which are required to have high dimensional accuracy during workpiece conveyance, must avoid thermal influences as much as possible. Therefore, in this embodiment, a cooling pipe 84 is provided so as to surround the belt slide mechanism 81 and the guide rails 83C and 83D, and the belt slide mechanism 81 and the guide rail are formed by the refrigerant circulating through the inside of the cooling pipe 84. 83C and 83D are efficiently cooled.

  Specifically, the radiant heat from the work is transmitted to the frame member 830 through the hand 80. The cooling pipe 84 is in contact with the frame member 830 throughout the plate spring-like elastic member 85. Therefore, the heat from the frame member 830 is quickly transmitted to the refrigerant flowing through the cooling pipe 84 through the elastic member 85 and the cooling pipe 84. Accordingly, the thermal influence on the belt slide mechanism 81 and the guide rails 83C and 83D is alleviated, and the workpiece is conveyed with high accuracy by the workpiece conveying mechanism 8 having a high cooling effect.

  Therefore, according to the workpiece transfer apparatus A of the present embodiment, the cooling pipe 84 is provided on the outer surface of the frame member 830 that is susceptible to radiant heat in the vicinity of the belt slide mechanism 81 and the guide rails 83C and 83D, and the outer surface is elastic. Since the entire cooling pipe 84 is brought into contact via the member 85, the contact portion of the cooling pipe 84 can be enlarged to efficiently release heat from the frame member 830, and the belt slide mechanism 81 and the guide rails 83C and 83D can be released. Can be suppressed as much as possible. As a result, the belt slide mechanism 81 and the guide rails 83C and 83D, which are greatly related to the conveyance accuracy, can be thermally stabilized to convey the workpiece with high accuracy.

  The workpiece transfer device A is provided with a workpiece transfer mechanism 8, a scissor lift mechanism 4, and a rotation mechanism. Of these, in particular, the rotation mechanism only needs to be provided below the pedestal 2, and therefore the lower unit 1 that accommodates the rotation mechanism. The height dimension can be suppressed. Thereby, the height of the pedestal 2 can be reduced, and the entire workpiece transfer apparatus A can be easily reduced in size, which in turn can contribute to downsizing of the manufacturing equipment, particularly in the height direction. Specifically, the lower unit 1 can be installed in a floor space as shallow as possible.

  Since the refrigerant supply pipe and the refrigerant discharge pipe can be guided through a pipe line from the lower unit 1 to the workpiece transfer mechanism 8, the refrigerant supply pipe and the refrigerant discharge pipe can be routed in a stable piping posture without any trouble in the operation of the scissor lift mechanism 4 and the rotation mechanism. Can do.

  Moreover, the height position of the hand 80 from the pedestal 2 can be kept as low as possible by lowering the work transport mechanism 8 downward in the vertical direction by the scissor lift mechanism 4.

  The present invention is not limited to the embodiment described above.

  In the above-described embodiment, what is indicated by reference numerals J1, J3, and J4 is a swivel joint, and what is indicated by reference numerals J2 and J5 is an L-shaped joint as a non-rotating joint, but is not limited thereto. What is indicated by reference signs J1, J2, and J5 may be a swivel joint, and those indicated by reference signs J3 and J4 may be L-shaped joints. In any case, the swivel joint may allow the rotation of the intermediate pipe 6 and the connection pipe 40E that occur when the scissor lift mechanism 4 operates. That is, for example, if all of the joints J2 to J5 are L-shaped joints, both ends of the intermediate pipe 6 and the connection pipe 40E are in a non-rotatable connection form, so that the scissor lift mechanism 4 operates. Can not be. From such a viewpoint, in the scissor lift mechanism 4, in addition to the joint J1, the joint disposed on one side of each of the intermediate pipe 6 and the connection pipe 40E is a swivel joint, so that the scissor lift mechanism 4 is It can be moved up and down without restriction. Of course, all the joints J1 to J5 may be swivel joints, but the cost can be reduced by making some of the joints L-shaped as described above.

  The cooling pipe is not limited to the square shape as in the above embodiment, and may be a semicircular cross section, for example. In this case, the cooled outer surface of the cooling pipe is opposed to the outer surface of the frame member, and the cooling pipe is pressed and fixed through the bracket with the elastic member sandwiched between the outer surface and the frame member. The In short, the outer surface of the cooling pipe in contact with the elastic member may be flat. The outer surface may be somewhat curved, but is preferably as flat as possible from the viewpoint of thermal conductivity. In this way, when the shape of the cooling pipe is semicircular in cross section, the shape of the bracket can also be matched to the shape of the cooling pipe. In addition, since the outer surface of the cooling pipe in contact with the elastic member is planar, it is preferable that the outer surface of the frame member (here, the portion facing the elastic member) is also planar.

A Work transfer device J1, J3, J4 Swivel joint (rotary joint)
2 pedestal 3 through pipe 4 scissor lift mechanism 40 stage 40H through connection pipe 41 first scissor link 410, 411 cross arm 42 second scissor link 420, 421 cross arm 43 lift drive motor 5 upper pipe 6 intermediate pipe 7 lower Piping 8 Work transport mechanism 80 Hand 81 Belt slide mechanism 83 Guide member 83C, 83D Guide rail 830 Frame member 84 Cooling pipe 85 Elastic member 86 Bracket (fixing tool)

Claims (10)

A workpiece transfer device having a workpiece transfer mechanism for transferring a workpiece,
Cooling pipes for circulating the refrigerant are attached to various places on the outer surface of the workpiece transfer mechanism.
The work conveying apparatus, wherein the cooling pipe is pressed and fixed via a fixture in a state where an elastic member is sandwiched with respect to the outer surface.   The work conveying apparatus according to claim 1, wherein the elastic member extends along a longitudinal direction of the cooling pipe.   The work conveying apparatus according to claim 1, wherein the elastic member is curved before being pressed and fixed in a cross section in a longitudinal direction of the cooling pipe.   The work conveying apparatus according to claim 1, wherein the elastic member is made of a metal member that is deformable when pressed and fixed.   The work conveying apparatus according to claim 1, wherein an outer side surface of the cooling pipe in contact with the elastic member is formed in a flat shape. A scissor lift mechanism that vertically moves the workpiece transfer mechanism mounted thereon;
A base on which the scissor lift mechanism is mounted;
A rotation mechanism for rotating the pedestal about a vertical axis;
The workpiece transfer apparatus according to claim 1, further comprising: The scissor lift mechanism is
A stage on which the workpiece transfer mechanism is mounted;
Crossing each other at the middle, it is connected so as to be able to rotate around the horizontal axis, one upper end can slide in the horizontal direction relative to the stage, and the lower end can rotate around the horizontal axis relative to the pedestal A pair of intersecting arms connected to each other so that the other upper end is rotatable about a horizontal axis with respect to the stage and the lower end is slidably movable in the horizontal direction with respect to the pedestal. A first scissor link
A second scissor link comprising a pair of intersecting arms having the same connection form as the first scissor link, and arranged in parallel to the first scissor link;
And a lift driving means for slidingly moving a lower end portion of the intersecting arm in the first and second scissor links that are mounted on the pedestal and are slidably connected to the pedestal. Item 7. The workpiece transfer apparatus according to Item 6.   A lower pipe is attached to the first scissor link connected to the pedestal from the lower end portion to the middle portion of the first scissor link and is connected to the stage so as to be rotatable. An upper pipe is provided from the upper end portion to the middle portion of the intersecting arm in the second scissor link, and between the middle portions of the intersecting arms in the first and second scissor links. The workpiece transfer apparatus according to claim 7, wherein an intermediate pipe is connected to communicate with the lower pipe and the upper pipe.   The pedestal is provided with a through pipe, and the through pipe communicates with the lower pipe via a lower end portion of the intersecting arm in the first scissor link, and the upper pipe is The workpiece transfer apparatus according to claim 8, wherein the workpiece transfer device is connected to the workpiece transfer mechanism via a connection pipe.   A refrigerant supply pipe connected to the cooling pipe and a refrigerant discharge pipe are connected to the entire pipe line that communicates from the through pipe to the lower pipe, and further through the intermediate pipe to the upper pipe and the connection pipe. The work conveyance apparatus of Claim 9 accommodated.

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