JP2022034669A - Transport device - Google Patents

Abstract

To provide a structure suitable for miniaturization and cost reduction in a transport device equipped with a pair of hands that are moved by a linear movement mechanism.SOLUTION: A transport device A1 includes a linear movement mechanism 4, first and second hands 5A and 5B that are supported by the linear movement mechanism 4 and convey a workpiece W along a horizontal linear movement stroke GL by the operation of the linear movement mechanism 4, a first drive source M3 that gives driving force to the linear movement mechanism 4 (first and second drive mechanisms 43A, 43B), and a differential gear mechanism 6 interposed between the linear movement mechanism 4 (first and second drive mechanisms 43A, 43B) and a first drive source M3. Further, the transport device A1 includes the first and second drive state switching mechanisms 7A and 7B respectively corresponding to the first and second drive mechanisms 43A and 43B, and switching between a drive-on state and a drive-off state.SELECTED DRAWING: Figure 3

Description

The present invention relates to a transport device, and more particularly to a transport device capable of linearly transporting a thin plate-shaped work such as a substrate.

Among the transfer devices, those having a mechanism for moving the hand along a linear movement process (linear movement mechanism) are simpler and cheaper to configure than so-called articulated robots, and are, for example, semiconductor manufacturing devices. In the manufacturing process of FPD (Flat Panel Display), or in the manufacturing process of FPD (Flat Panel Display), it is often used for loading or unloading wafers or thin plate-shaped workpieces such as glass substrates into each processing chamber.

As a transport device for transporting such a thin plate-shaped work, for example, there is one disclosed in Patent Document 1 below. The transport device comprises a fixed base, a swivel base rotatably supported by the fixed base, a linear movement mechanism supported by the swivel base, and a pair of hands separately supported by the linear movement mechanism. There is. The linear movement mechanism has a pair of drive mechanisms (for example, a belt drive mechanism) for driving each pair of hands, and when the drive mechanism is driven, the hands are linearly moved in the horizontal direction. As a result, the thin plate-shaped workpieces held by the pair of hands can be separately conveyed along the horizontal linear movement stroke.

Inside the fixed base or the swivel base, a motor for swiveling the swivel base and a pair of motors for driving a pair of hands (a pair of drive mechanisms) are arranged. Further, three speed reducers corresponding to each of these three motors are provided, and the driving force of each motor is transmitted to the turning base or the hand via the speed reducer corresponding to the motor.

In recent years, due to the increase in size of glass substrates used for FPDs, for example, the work to be conveyed in the transfer device has also increased in size and has a considerable weight. In addition, it is required to increase the moving distance of the hand holding the work. Then, a plurality of motors for driving a pair of hands and a swivel base and a plurality of speed reducers are also increased in size, respectively, and the weight and cost of these are increased, and the size of the entire transport device tends to be increased.

Japanese Unexamined Patent Publication No. 2008-272847

The present invention has been conceived under such circumstances, and is suitable for miniaturization and cost reduction in a transport device provided with a pair of hands that are moved by a linear movement mechanism. The main task is to provide the structure.

In order to solve the above problems, the following technical means are adopted in the present invention.

The transport device provided by the present invention includes a fixed base, a swivel base rotatably supported around a swivel axis perpendicular to the fixed base, and a linear movement mechanism supported by the swivel base. The first and second hands supported by this linear movement mechanism and transporting the work along the horizontal linear movement stroke by the operation of the linear movement mechanism, and the first drive source that gives a driving force to the linear movement mechanism. A differential gear mechanism having an input shaft, which is interposed between the linear movement mechanism and the first drive source, and to which the driving force of the first drive source is transmitted, and first and second output shafts. The linear movement mechanism has first and second drive shafts connected to the first and second output shafts, and drives the first and second hands, respectively. The drive-on state, which includes the second drive mechanism and allows the rotation of the first output shaft, or the rotation of the first output shaft is transmitted to the first drive shaft, and the first output shaft. A first drive state switching mechanism for stopping rotation or switching between a drive-off state in which the rotation of the first output shaft is not transmitted to the first drive shaft, and rotation of the second output shaft. The drive-on state in which the rotation of the second output shaft is transmitted to the second drive shaft, the rotation of the second output shaft is stopped, or the rotation of the second output shaft is stopped. It is provided with a drive-off state that is not transmitted to the second drive shaft and a second drive state switching mechanism for switching to.

In a preferred embodiment, the first drive mechanism comprises a plurality of first drive shafts arranged along a horizontal axis and a first drive pulley attached to the first drive shaft. A first pulley and a first output belt that is hung around the plurality of first pulleys so as to be along a vertical plane and reciprocates in a predetermined section along a parallel line of the movement stroke, and is described above. The second drive mechanism includes the second drive shaft arranged along the horizontal axis, a plurality of second pulleys including the second drive pulley attached to the second drive shaft, and vertical. The linear movement mechanism includes the second output belt which is hung around the plurality of second pulleys along the plane and reciprocates in a predetermined section along the parallel line of the movement stroke, and the linear movement mechanism is the first. The first and second guide rails that movably support the second hand and the second hand, the first connecting member that connects the first hand and the first output belt, the second hand, and the second hand. Includes a second connecting member that connects the second output belt.

In a preferred embodiment, the first and second output shafts and the first and second drive shafts are arranged coaxially.

In a preferred embodiment, the swivel base includes a swivel cylinder about the swivel axis, and the first drive source is arranged inside the swivel cylinder.

In a preferred embodiment, an elevating base that is vertically supported with respect to the fixed base and supports the swivel base, a second drive source that applies a swivel drive force to the swivel base, and a first drive source. A two-axis output reducer that decelerates and outputs rotation by each of the second drive sources, the elevating base has a cylindrical portion centered on the turning axis, and the two-axis output reducer has a cylindrical portion. The first drive source, the second drive source, and the two-axis output reducer are arranged inside the cylindrical portion.

In a preferred embodiment, a rotation speed detecting means for detecting the rotation speed of the first and second drive shafts is provided.

In a preferred embodiment, the accommodation case is provided above the swivel base and accommodates the differential gear mechanism, between the first and second drive shafts and the accommodation case. , A sealing mechanism is installed.

In a preferred embodiment, a sealing mechanism is interposed between the input shaft of the differential gear mechanism and the upper end of the swivel base.

The transport device according to the present invention includes a linear movement mechanism, first and second hands for transporting a work along a horizontal linear movement stroke by operating the linear movement mechanism, and a linear movement mechanism (first and first). It includes a first drive source that applies a driving force to the drive mechanism (2), and a differential gear mechanism that is interposed between the linear movement mechanism (first and second drive mechanisms) and the first drive source. Further, the transport device includes first and second drive state switching mechanisms corresponding to the first and second drive mechanisms, respectively. According to such a configuration, by appropriately switching the drive state (drive on state or drive off state) of each of the first and second drive state switching mechanisms, the driving force of the first drive source is reduced to the first and second. It can be transmitted to only one of the drive mechanisms of. As a result, it is possible to drive one of the two first and second hands by a single first drive source. Therefore, according to the transport device of the present invention, it is possible to reduce the number of drive sources for driving the linear movement mechanism and the speed reducer corresponding thereto, and it is possible to reduce the size and cost of the entire transport device. Is.

Other features and advantages of the invention will be more apparent by the detailed description given below with reference to the accompanying drawings.

It is an overall perspective view of the transfer apparatus which concerns on 1st Embodiment of this invention. It is a top view of the transport device shown in FIG. It is sectional drawing which follows the line III-III of FIG. It is a partially enlarged view of FIG. It is sectional drawing which follows the VV line of FIG. It is the same cross-sectional view as FIG. 4 which shows the transport device which concerns on the modification of 1st Embodiment. It is the same cross-sectional view as FIG. 3 which shows the transporting apparatus which concerns on 2nd Embodiment of this invention. FIG. 7 is a partially enlarged view of FIG. 7. It is the same cross-sectional view as FIG. 4 which shows the transporting apparatus which concerns on 3rd Embodiment of this invention. It is the same cross-sectional view as FIG. 3 which shows the transport device which concerns on 4th Embodiment of this invention. It is a partially enlarged view of FIG.

Hereinafter, preferred embodiments of the present invention will be specifically described with reference to the drawings.

1 to 5 show a transfer device according to the first embodiment of the present invention. The transport device A1 is for transporting a thin plate-shaped work W such as a substrate for a liquid crystal display panel. As shown in FIGS. 1 to 3, the transfer device A1 has a fixed base 1, a swivel base 2 rotatably supported around a swivel axis Os perpendicular to the fixed base 1, and swivel. The guide member 3 and the linear movement mechanism 4 supported by the base 2, the first and second hands 5A and 5B separately supported by the linear movement mechanism 4, the differential gear mechanism 6, and the first and second hands. The drive state switching mechanisms 7A and 7B and the motors M1, M2 and M3 are provided. The hands 5A and 5B are for holding the thin plate-shaped work W in a horizontal posture.

As is often shown in FIG. 3, the fixed base 1 includes a housing 10 having a substantially cylindrical outer shape, including a bottom wall portion 11, a cylindrical side wall portion 12, and a ceiling wall portion 13. A central opening 13A is formed in the ceiling wall 13. A motor M1 is arranged near the inner lower end of the fixed base 1.

An elevating base 14 is supported inside the fixed base 1. The elevating base 14 has a cylindrical portion 141 having an outer diameter smaller than that of the central opening 13A and having predetermined dimensions in the vertical direction, and an outward flange portion 142 formed at the lower end of the cylindrical portion 141. .. The cylindrical portion 141 has a cylindrical shape centered on the swirling axis Os. A plurality of vertical guide rails 15 are attached to the inner wall of the side wall portion 12 of the housing 10, and a plurality of guide members 16 provided on the outward flange portion 142 of the elevating base 14 are attached to the straight guide rails 15. It is supported so that it can slide up and down. As a result, the elevating base 14 can move in the vertical direction within a predetermined range with respect to the fixed base 1, and at this time, the upper portion of the cylindrical portion 141 of the elevating base 14 appears and disappears from the central opening 13A of the housing 10. Further, the motor M2 is supported on the elevating base 14 (outward flange portion 142).

Between the ceiling wall 13 of the fixed base 1 and the outward flange portion 142 of the elevating base 14, both ends of a bellows 17 arranged so as to surround the cylindrical portion 141 of the elevating base 14 are connected. The bellows 17 airtightly seals between the ceiling wall 13 of the fixed base 1 and the outward flange portion 142 of the elevating base 14 regardless of the vertical movement of the elevating base 14.

Inside the fixed base 1 and outside the bellows 17, there is a screw shaft 181 that is vertically arranged and rotates, and is screwed onto the screw shaft 181 and penetrates the outward flange portion 142 of the elevating base 14. A ball screw mechanism 18 including a fixed nut member 182 is arranged. The screw shaft 181 is linked to the motor M1 by a belt 184 hung on a pulley 183 attached to the lower end thereof, and is rotated in the forward and reverse directions by the drive of the motor M1. By rotating the screw shaft 181 in this way, the elevating base 14 is elevated and lowered.

As shown in FIG. 3, the swivel base 2 includes a swivel cylinder portion 21 and an upper plate 22 integrally connected above the swivel cylinder portion 21. The swivel cylinder portion 21 has a substantially cylindrical shape centered on the swivel axis Os. The swivel cylinder portion 21 is rotatably supported inside the cylindrical portion 141 of the elevating base 14 via bearings 231 and 232 about the swivel axis Os. A seal portion 233 located above the bearings 231 and 232 is also interposed between the cylindrical portion 141 and the swivel cylinder portion 21. The seal portion 233 shields the space above the seal portion 233 and the inner space of the elevating base 14 below the seal portion 233 to maintain airtightness. A motor M2 and a speed reducer 24 are supported on the elevating base 14. A pulley 241 is attached to the input shaft of the speed reducer 24, and a belt 242 is hung between the pulley 241 and the pulley attached to the output shaft of the motor M2. The output shaft of the speed reducer 24 is connected to the lower end of the swivel cylinder portion 21. As a result, when the motor M2 is driven, the swivel base 2 swivels around the swivel axis Os.

As shown in FIGS. 3 and 4, a motor M3 and a speed reducer 25 are arranged inside the swivel cylinder portion 21 of the swivel base 2. The speed reducer 25 is fixed to the lower end surface of the bottom wall 31 of the guide member 3, which will be described later. The motor M3 applies a driving force to the linear moving mechanism 4 (first and second driving mechanisms 43A and 43B described later), and corresponds to an example of the first driving source referred to in the present invention. The input shaft of the speed reducer 25 is connected to the output shaft of the motor M3. The output shaft of the speed reducer 25 is connected to the input shaft 61 of the differential gear mechanism 6 described later.

The guide member 3 has a substantially rectangular box shape in a plan view having a longitudinal axis (moving stroke GL) extending in the horizontal direction, and includes a bottom wall 31, a side wall 32, an inner wall 33, a cover 34, and a case wall 35. Have. An opening is formed in the center of the bottom wall 31, and the output shaft of the speed reducer 25 and the input shaft 61 of the differential gear mechanism 6 are connected through this opening. The guide member 3 (bottom wall 31) is also fixed to the upper plate 22 of the swivel base 2, and when the swivel base 2 is swiveled, it swivels accordingly. The bottom wall 31 of the guide member 3 and the upper plate 22 of the swivel base 2 are hermetically sealed by an annular sealing member (for example, an O-ring) (not shown).

The linear movement mechanism 4 is for transporting the first and second hands 5A and 5B along the horizontal linear movement stroke GL, and is provided on the guide member 3 as shown in FIG. The first and second guide rails 41A, 41B, the first and second drive mechanisms 43A, 43B, which transmit the horizontal driving force to the first and second hands 5A, 5B, and the first and second guide rails 43A, 43B. Includes second connecting members 44a, 44b. The first and second guide rails 41A and 41B are provided in pairs on the left and right sides in the drawing, the first guide rail 41A is arranged inside, and the second guide rail 41B is arranged outside. Will be done. The pair of inner first guide rails 41A are supported by the inner wall 33 of the guide member 3, and the pair of outer second guide rails 41B are supported by the side wall 32.

The first hand 5A is supported by a pair of first guide rails 41A via a pair of support arms 51a formed below the support arms 51a and a slider 42A provided on the support arms 51a. The second hand 5B has a pair of support arms 51b formed so as to bypass the sides of the first hand 5A, and a pair of second guide rails via a slider 42B provided on the support arms 51b. It is supported by 41B. The upper part of each of the guide rails 41A and 41B is covered with the cover 34. The support arm 51a of the first hand 5A penetrates the slit 34a formed on the upper surface of the cover 34, and the support arm 51a is provided with the first connecting member 44a. The first connecting member 44a penetrates the slit formed in the inner wall 33 and is connected to the first output belt 435a of the first drive mechanism 43A described later. As a result, the first connecting member 44a connects the first hand 5A and the first output belt 435a. Further, in the second hand 5B, the support arm 51b penetrates the slit 34b formed on the side surface of the cover 34, and the support arm 51b is provided with the second connecting member 44b. The second connecting member 44b penetrates the slit formed in the inner wall 33 and is connected to the second output belt 435b of the second drive mechanism 43B described later. As a result, the second connecting member 44b connects the second hand 5B and the second output belt 435b.

As is often shown in FIGS. 1 to 3, a plurality of hawk-shaped holding pieces 53a and 53b extending in the longitudinal direction of the guide member 3 are integrally formed on the first and second hands 5A and 5B. The thin plate-shaped work W is placed and held on these holding pieces 53a and 53b. Note that, unlike FIGS. 1 and 2, both the first and second hands 5A and 5B are located above the fixed base 1 in FIGS. 3 and 5.

The first and second drive mechanisms 43A and 43B are for moving the first and second hands 5A and 5B separately along the movement stroke GL. Since the first and second drive mechanisms 43A and 43B basically have the same configuration, the configuration of the first drive mechanism 43A will be specifically described below with respect to the second drive mechanism 43B. Will omit the description as appropriate.

As shown in FIGS. 3 to 5, the first drive mechanism 43A includes a first drive shaft 431a, a first drive pulley 432a, pulleys 433a to 433f, a first output belt 435a, and the like. Is housed in the guide member 3. The first drive shaft 431a is rotatably supported by the guide member 3 around the horizontal axis O1 orthogonal to the swivel axis Os. One end (right side in the figure) of the first drive shaft 431a is connected to the first output shaft 62a of the differential gear mechanism 6 described later. A first drive pulley 432a is provided at the other end (left side in the drawing) of the first drive shaft 431a.

As shown in FIG. 5, the pulleys 433a to 433f are rotatably supported around a predetermined horizontal axis in the guide member 3, respectively. The first output belt 435a is hung around the first drive pulley 432a and the pulleys 433a to 433f (these are a plurality of first pulleys in combination) along the vertical plane. The pulleys 433a and 433b are provided near both ends of the guide member 3 in the longitudinal direction (direction along the moving stroke GL). On the other hand, the pulleys 433c, 433d, 433e, 433f are provided in the vicinity of the first drive pulley 432a, and the pulleys 433c, 433d are arranged outside the first output belt 435a. As a result, an appropriate tension is applied to the first output belt 435a. As the first output belt 435a, for example, a timing belt is preferably used.

The pulleys 433a and 433b are arranged along the parallel lines of the movement stroke GL. In FIG. 5, the region located above the pulleys 433a and 433b in the first output belt 435a is a section 46a parallel to the movement stroke GL, and the first output belt 435a reciprocates in this section 46a. It is configured to move. The other end of the first connecting member 44a, one end of which is connected to the support arm 51a of the first hand 5A, is connected to a predetermined portion of the section 46a of the first output belt 435a. As a result, the first hand 5A slides horizontally along the movement stroke GL while being supported by the two inner first guide rails 41A by the drive of the first drive mechanism 43A.

As shown in FIGS. 3 to 5, the second drive mechanism 43B includes a second drive shaft 431b, a second drive pulley 432b, pulleys 434a to 434f, and a second output belt 435b. Is housed in the guide member 3. The second drive shaft 431b is arranged on the side opposite to the first drive shaft 431a of the first drive mechanism 43A with the swivel axis Os interposed therebetween, and is rotatably supported around the horizontal axis O1 by the guide member 3. Has been done. One end (left side in the figure) of the second drive shaft 431b is connected to the second output shaft 62b of the differential gear mechanism 6 described later. A second drive pulley 432b is provided at the other end (right side in the drawing) of the second drive shaft 431b.

As can be understood from FIG. 5, the pulleys 434a to 434f are rotatably supported around a predetermined horizontal axis in the guide member 3, and are arranged in the same manner as the pulleys 433a to 433f in the first drive mechanism 43A. It is said that. The second output belt 435b is hung around the second drive pulley 432b and the pulleys 434a to 434f (these are a plurality of second pulleys in combination) along the vertical plane. As the second output belt 435b, for example, a timing belt is preferably used. Similar to the first output belt 435a, the second output belt 435b is also configured to be able to reciprocate in a section 46a parallel to the movement stroke GL. The other end of the second connecting member 44b, one end of which is connected to the support arm 51b of the second hand 5B, is connected to the predetermined portion of the section 46a of the second output belt 435b. As a result, the second hand 5B slides horizontally along the movement stroke GL while being supported by the two outer second guide rails 41B by the drive of the second drive mechanism 43B.

The differential gear mechanism 6 is interposed between the linear movement mechanism 4 and the motor M3, and provides an input shaft 61 to which the driving force of the motor M3 is transmitted and the first and second output shafts 62a and 62b. Have. The differential gear mechanism 6 is composed of so-called differential gears. In the differential gear mechanism 6, the rotational driving force transmitted from the motor M3 to the input shaft 61 is transmitted to the first and second output shafts 62a. To. The first and second output shafts 62a are rotatable around the horizontal axis O1 and are arranged on opposite sides of the swivel axis Os. The first drive shaft 431a of the first drive mechanism 43A is connected to the first output shaft 62a, and the second drive shaft 431b of the second drive mechanism 43B is connected to the second output shaft 62b. There is. In the differential gear mechanism 6, when the rotation of the first output shaft 62a is stopped, the rotation of the input shaft 61 is transmitted only to the second output shaft 62b, and when the rotation of the second output shaft 62b is stopped, the rotation of the input shaft 61 The rotation is transmitted only to the first output shaft 62a.

In the present embodiment, the differential gear mechanism 6 is arranged inside the guide member 3. More specifically, the guide member 3 has a storage case portion 30 surrounded by a bottom wall 31, an inner wall 33, and a case wall 35. The accommodating case portion 30 is arranged above the swivel base 2, and the differential gear mechanism 6 is accommodated in the accommodating case portion 30. In the present embodiment, a seal mechanism 45 is interposed between the first and second drive shafts 431a, 431b of the first and second drive mechanisms 43A, 43B and the accommodating case portion 30 (case wall 35). Has been done. The sealing mechanism 45 is composed of, for example, a magnetic fluid unit, and the inner space of the elevating base 14 communicating from the inside of the accommodating case portion 30 via the swivel base 2 is airtightly sealed to the outside by the sealing mechanism 45. ..

The first drive state switching mechanism 7A is attached to the first output shaft 62a and is composed of a brake or a clutch. When the first drive state switching mechanism 7A is configured by a brake, the first drive state switching mechanism 7A has a drive-on state that allows rotation of the first output shaft 62a and a drive-on state of the first output shaft 62a. It is possible to switch between the drive-off state in which the rotation is stopped and the drive-off state as appropriate. When the first drive state switching mechanism 7A is configured by the clutch, the first drive state switching mechanism 7A has a drive-on state in which the rotation of the first output shaft 62a is transmitted to the first drive shaft 431a. And, it is possible to appropriately switch to a drive-off state in which the rotation of the first output shaft 62a is not transmitted to the first drive shaft 431a.

The second drive state switching mechanism 7B is attached to the second output shaft 62b and is composed of a brake or a clutch. When the second drive state switching mechanism 7B is configured by the brake, the second drive state switching mechanism 7B has a drive on state that allows rotation of the second output shaft 62b and a drive on state of the second output shaft 62b. It is possible to switch between the drive-off state in which the rotation is stopped and the drive-off state as appropriate. When the second drive state switching mechanism 7B is configured by the clutch, the second drive state switching mechanism 7B has a drive-on state in which the rotation of the second output shaft 62b is transmitted to the second drive shaft 431b. And, it is possible to appropriately switch to a drive-off state in which the rotation of the second output shaft 62b is not transmitted to the second drive shaft 431b.

When the motor M3 is driven in the transport device A1 having the above configuration, the rotational driving force of the motor M3 is transmitted to the differential gear mechanism 6. When the first drive state switching mechanism 7A is set to the drive on state and the second drive state switching mechanism 7B is set to the drive off state, only the first drive shaft 431a is rotationally driven and the second drive shaft 431b is stopped. do. In this case, only the first drive mechanism 43A is driven, and the first output belt 435a is reciprocated in a predetermined vertical plane with the rotation of the first drive shaft 431a. Then, the first hand 5A slides horizontally along the movement stroke GL while being supported by the two inner side first guide rails 41A.

On the other hand, when the first drive state switching mechanism 7A is set to the drive off state and the second drive state switching mechanism 7B is set to the drive on state, only the second drive shaft 431b is rotationally driven and the first drive shaft 431a is driven. Stops. In this case, only the second drive mechanism 43B is driven, and the second output belt 435b is reciprocated in a predetermined vertical plane as the second drive shaft 431b rotates. Then, the second hand 5B slides horizontally along the movement stroke GL while being supported by the two outer second guide rails 41B.

The transport device A1 of the present embodiment is used, for example, in the manufacturing process of the FPD, for loading or unloading the work into or out of the process chamber. In this case, the transfer device A1 is arranged in a vacuum environment, for example, in a transport chamber in which a plurality of process chambers are arranged on the periphery.

The transport device A1 includes a linear movement mechanism 4, first and second hands 5A and 5B for transporting the work W along a horizontal linear movement stroke GL by the operation of the linear movement mechanism 4, and a linear movement mechanism 4. Differential intervening between the motor M3 that gives the driving force to (first and second drive mechanisms 43A, 43B), the linear movement mechanism 4 (first and second drive mechanisms 43A, 43B), and the motor M3. A gear mechanism 6 is provided. Further, the transport device A1 includes first and second drive state switching mechanisms 7A and 7B corresponding to the first and second drive mechanisms 43A and 43B, respectively. According to such a configuration, the driving force of the motor M3 is changed to the first and the first by appropriately switching the driving states (drive on state or drive off state) of the first and second drive state switching mechanisms 7A and 7B, respectively. It can be transmitted to only one of the drive mechanisms 43A and 43B of 2. As a result, it is possible to drive one of the two first and second hands 5A and 5B by a single motor M3. Therefore, according to the present embodiment, it is possible to reduce the number of motors for driving the linear moving mechanism 4 and the speed reducer corresponding thereto, and it is possible to reduce the size and cost of the entire transport device A1. be.

The first and second drive mechanisms 43A and 43B are respectively configured by a belt type drive mechanism. Further, the first and second hands 5A and 5B are supported by the first and second guide rails 41A and 41B, and the first and second hands 5A and 5B are supported via the first and second connecting members 44a and 44b. It is connected to the output belts 435a and 435b of. According to such a configuration, for example, even when the moving distances of the first and second hands 5A and 5B are extended due to the increase in size of the work W, the first and second guide rails 41A and 41B, and It is possible to easily cope with this by lengthening the first and second output belts 435a and 435b. Therefore, it is possible to appropriately prevent the linear movement mechanism 4 from becoming heavier due to the increase in the movement distance of the first and second hands 5A and 5B.

The first and second output shafts 62a and 62b of the differential gear mechanism 6 and the first and second drive shafts 431a and 431b of the first and second drive mechanisms 43A and 43B are located around the horizontal axis O1, respectively. It is rotatable and arranged coaxially. According to such a configuration, the driving force transmission paths from the differential gear mechanism 6 to the first and second drive pulleys 432a and 432b of the first and second drive mechanisms 43A and 43B are arranged in close proximity to each other. Can be done. This is preferable in order to reduce the size of the transport device A1.

The motor M3 (first drive source) is arranged inside the swivel cylinder portion 21. According to such a configuration, the motor M3 for applying the driving force to the linear moving mechanism 4 can be efficiently arranged in a small space, and is suitable for miniaturization of the transport device A1.

The differential gear mechanism 6 is housed in a housing case portion 30 arranged above the swivel base 2. Further, a sealing mechanism 45 is interposed between the first and second drive shafts 431a and 431b and the accommodating case portion 30 (case wall 35). According to such a configuration, even when the transport device A1 is arranged in a vacuum environment, the inside of the accommodating case portion 30 can be set to a non-vacuum environment, and the differential gear mechanism 6 can be appropriately operated. ..

FIG. 6 shows a modified example of the transport device A1 of the first embodiment. In the drawings after FIG. 6, the same or similar elements as the transport device A1 of the above embodiment are designated by the same reference numerals as those of the above embodiment, and the description thereof will be omitted as appropriate.

The transport device A11 of this modification is different from the transport device A1 of the above embodiment in the structure in which the speed reducer 25 is attached to the guide member 3. In this modification, the speed reducer 25 is fixed to the upper end surface of the bottom wall 31 of the guide member 3. The input shaft of the speed reducer 25 is connected to the output shaft of the motor M3 through the opening in the center of the bottom wall 31. The transfer device A11 of the present modification also has the same effect as the transfer device A1 of the first embodiment.

7 and 8 show a transport device according to a second embodiment of the present invention. In the transport device A2 of the present embodiment, the arrangement of the motors M2 and M3 is significantly different from that of the above embodiment. Further, the transport device A2 includes a two-axis output reducer 26 instead of the speed reducers 24 and 25 in the above-mentioned transport device A1, and various changes have been made accordingly.

The two-axis output reducer 26 of the present embodiment decelerates and outputs the rotation of each of the motor M3 (first drive source) and the motor M2. A fixing flange 261 is provided at the upper end of the 2-axis output reducer 26, and the fixing flange 261 is fixed to the upper end of the cylindrical portion 141 of the elevating base 14. As a result, the 2-axis output reducer 26 is supported by the elevating base 14. The space between the fixing flange 261 and the upper end of the cylindrical portion 141 is airtightly sealed by an annular sealing member (for example, an O-ring) (not shown). In the present embodiment, the two-axis output reducer 26 is arranged inside the cylindrical portion 141.

The motor M2 applies a turning driving force to the turning base 2. Although not shown, the input shaft of the 2-axis output reducer 26 is connected to the output shaft of the motor M2. The motor M3 applies a driving force to the linear moving mechanism 4 (first and second driving mechanisms 43A, 43B). Although not shown, another input shaft of the 2-axis output reducer 26 is connected to the output shaft of the motor M3 (first drive source). The motors M2 and M3 are fixed to the two-axis output reducer 26 by bolting or the like. In the present embodiment, the motors M2 and M3 are arranged inside the cylindrical portion 141.

Further, although not shown, the inside of the two-axis output reducer 26 has a mechanism in which inputs from both motors M2 and M3 are output in a state of matching the turning axis Os. The two output shafts of the two-axis output reducer 26 extend above the fixing flange 261 and are arranged coaxially.

The output shaft linked to the motor M2 in the 2-axis output reducer 26 is fixed to the swivel base 2 (upper plate 22). As a result, when the motor M2 is driven, the swivel base 2 swivels around the swivel axis Os. The motor M2 in the present embodiment (conveyor device A2) corresponds to an example of the second drive source referred to in the present invention. In this embodiment, the swivel base 2 is not provided with the swivel cylinder portion 21, and is substantially composed of only the upper plate 22. The other output shafts associated with the motor M3 in the two-axis output reducer 26 are connected to the input shaft 61 of the differential gear mechanism 6.

The transport device A2 includes a linear movement mechanism 4, first and second hands 5A and 5B for transporting the work W along a horizontal linear movement stroke GL by the operation of the linear movement mechanism 4, and a linear movement mechanism 4. Differential intervening between the motor M3 that gives the driving force to (first and second drive mechanisms 43A, 43B), the linear movement mechanism 4 (first and second drive mechanisms 43A, 43B), and the motor M3. A gear mechanism 6 is provided. Further, the transport device A2 includes first and second drive state switching mechanisms 7A and 7B corresponding to the first and second drive mechanisms 43A and 43B, respectively. According to such a configuration, the driving force of the motor M3 is changed to the first and the first by appropriately switching the driving states (drive on state or drive off state) of the first and second drive state switching mechanisms 7A and 7B, respectively. It can be transmitted to only one of the drive mechanisms 43A and 43B of 2. As a result, it is possible to drive one of the two first and second hands 5A and 5B by a single motor M3. Therefore, according to the present embodiment, it is possible to reduce the number of motors for driving the linear moving mechanism 4 and the speed reducer corresponding thereto, and it is possible to reduce the size and cost of the entire transport device A2. be.

In addition, the transport device A2 of the present embodiment has the same effects as those described above for the transport device A1 of the first embodiment.

Further, in the transport device A2, the motor M3 (first drive source) and the motor M2 (second drive source) are arranged inside the cylindrical portion 141 (elevation base 14). Further, a two-axis output reducer 26 for decelerating the rotation of these motors M2 and M3 is provided, and the two-axis output reducer 26 is also arranged inside the cylindrical portion 141. According to such a configuration, the motors M2 and M3 for applying the driving force to the swivel base 2 and the linear movement mechanism 4 and the two-axis output reducer 26 can be arranged in a more space-saving manner. It is more preferable to reduce the size of the device A2. Further, since the number of speed reducers corresponding to the motors M2 and M3 (two-axis output speed reducer 26 in this embodiment) is reduced, it is suitable for reducing the size and cost of the entire transport device A2.

FIG. 9 shows a transport device according to a third embodiment of the present invention. The transport device A3 of the present embodiment is additionally provided with the rotation speed detecting means 8 as compared with the transport device A2 of the second embodiment.

The rotation speed detecting means 8 detects the rotation speeds of the first and second drive shafts 431a and 431b, respectively. The rotation speed detecting means 8 is composed of, for example, a rotary encoder, and is provided at two locations in the vicinity of the first and second drive pulleys 432a and 432b, respectively.

The transport device A3 of the present embodiment transports the work W along the horizontal linear movement stroke GL by the operation of the linear movement mechanism 4 and the linear movement mechanism 4, and the first and second hands 5A and 5B (FIG. 6). (Not shown), a motor M3 that gives a driving force to the linear movement mechanism 4 (first and second drive mechanisms 43A, 43B), a linear movement mechanism 4 (first and second drive mechanisms 43A, 43B), and a motor. It is provided with a differential gear mechanism 6 interposed between the M3 and the M3. Further, the transport device A3 includes first and second drive state switching mechanisms 7A and 7B corresponding to the first and second drive mechanisms 43A and 43B, respectively. According to such a configuration, the driving force of the motor M3 is changed to the first and the first by appropriately switching the driving states (drive on state or drive off state) of the first and second drive state switching mechanisms 7A and 7B, respectively. It can be transmitted to only one of the drive mechanisms 43A and 43B of 2. As a result, it is possible to drive one of the two first and second hands 5A and 5B by a single motor M3. Therefore, according to the present embodiment, it is possible to reduce the number of motors for driving the linear moving mechanism 4 and the speed reducer corresponding thereto, and it is possible to reduce the size and cost of the entire transport device A3. be.

In the transfer device A3 of the present embodiment, the same operation and effect as described above can be obtained with respect to the transfer device A1 of the first embodiment.

In the present embodiment, the motor M3 (first drive source) and the motor M2 (second drive source) are arranged inside the cylindrical portion 141 (elevation base 14). Further, a two-axis output reducer 26 for decelerating the rotation of these motors M2 and M3 is provided, and the two-axis output reducer 26 is also arranged inside the cylindrical portion 141. According to such a configuration, the motors M2 and M3 for applying the driving force to the swivel base 2 and the linear movement mechanism 4 and the two-axis output reducer 26 can be arranged in a more space-saving manner. It is more preferable to reduce the size of the device A3. Further, since the number of speed reducers corresponding to the motors M2 and M3 (two-axis output speed reducer 26 in this embodiment) is reduced, it is suitable for reducing the size and cost of the entire transport device A3.

Further, the transport device A3 includes a rotation speed detecting means 8 for detecting the rotation speeds of the first and second drive shafts 431a and 431b, respectively. According to such a configuration, the rotation speeds of the first and second drive shafts 431a and 431b are detected when the linear movement mechanism 4 (first and second drive mechanisms 43A and 43B) is driven, and the differential gear mechanism is used. By appropriately correcting the rotation error due to No. 6, the first and second hands 5A and 5B can be slid and traveled at a desired speed along the movement stroke GL.

10 and 11 show a transport device according to a fourth embodiment of the present invention. In the transport device A3 of the third embodiment, the seal mechanism 45 is interposed between the first and second drive shafts 431a, 431b and the accommodation case portion 30 (case wall 35), but this embodiment has the present embodiment. The transport device A4 of the above does not include the sealing mechanism 45, but instead includes the sealing mechanism 27.

The seal mechanism 27 is interposed between the input shaft 61 of the differential gear mechanism 6 and the upper end portion (inner peripheral portion of the upper plate 22) of the swivel base 2. The sealing mechanism 27 is composed of, for example, a magnetic fluid unit, and the inner space of the elevating base 14 communicating with the inside of the swivel base 2 is airtightly sealed to the outside by the sealing mechanism 27. In the present embodiment, the accommodating case portion 30 for hermetically accommodating the differential gear mechanism 6 is not formed, and for example, the inner wall 33 is formed with an opening 331.

The transport device A4 of the present embodiment includes a linear movement mechanism 4, and first and second hands 5A and 5B for transporting the work W along a horizontal linear movement stroke GL by the operation of the linear movement mechanism 4. Between the motor M3 that applies the driving force to the linear movement mechanism 4 (first and second drive mechanisms 43A, 43B), the linear movement mechanism 4 (first and second drive mechanisms 43A, 43B), and the motor M3. An intervening differential gear mechanism 6 is provided. Further, the transport device A4 includes first and second drive state switching mechanisms 7A and 7B corresponding to the first and second drive mechanisms 43A and 43B, respectively. According to such a configuration, the driving force of the motor M3 is changed to the first and the first by appropriately switching the driving states (drive on state or drive off state) of the first and second drive state switching mechanisms 7A and 7B, respectively. It can be transmitted to only one of the drive mechanisms 43A and 43B of 2. As a result, it is possible to drive one of the two first and second hands 5A and 5B by a single motor M3. Therefore, according to the present embodiment, it is possible to reduce the number of motors for driving the linear moving mechanism 4 and the speed reducer corresponding thereto, and it is possible to reduce the size and cost of the entire transport device A4. be.

In addition, the transport device A4 of the present embodiment has the same effect as described above for the transport device A1 of the first embodiment.

In the present embodiment, the motor M3 (first drive source) and the motor M2 (second drive source) are arranged inside the cylindrical portion 141 (elevation base 14). Further, a two-axis output reducer 26 for decelerating the rotation of these motors M2 and M3 is provided, and the two-axis output reducer 26 is also arranged inside the cylindrical portion 141. According to such a configuration, the motors M2 and M3 for applying the driving force to the swivel base 2 and the linear movement mechanism 4 and the two-axis output reducer 26 can be arranged in a more space-saving manner. It is more preferable to reduce the size of the device A4. Further, since the number of speed reducers corresponding to the motors M2 and M3 (two-axis output speed reducer 26 in this embodiment) is reduced, it is suitable for reducing the size and cost of the entire transport device A4.

Further, the transport device A4 includes a rotation speed detecting means 8 for detecting the rotation speeds of the first and second drive shafts 431a and 431b, respectively. According to such a configuration, the rotation speeds of the first and second drive shafts 431a and 431b are detected when the linear movement mechanism 4 (first and second drive mechanisms 43A and 43B) is driven, and the differential gear mechanism is used. By appropriately correcting the rotation error due to No. 6, the first and second hands 5A and 5B can be slid and traveled at a desired speed along the movement stroke GL.

Further, in the present embodiment, a seal mechanism 27 is interposed between the input shaft 61 of the differential gear mechanism 6 and the upper end portion (inner peripheral portion of the upper plate 22) of the swivel base 2. According to such a configuration, when the transport device A4 is arranged in a vacuum environment, the differential gear mechanism 6 itself is exposed to the vacuum environment, so that the accommodation case portion for hermetically accommodating the differential gear mechanism 6 It is not necessary to form 30. Therefore, it is possible to form the opening 331 in the inner wall 33 illustrated in FIG. 11, and the weight of the guide member 3 can be reduced. The differential gear mechanism 6 arranged in a vacuum environment may be coated with vacuum grease or the like as necessary.

Although the embodiments of the present invention have been described above, the scope of the present invention is not limited to the above-described embodiments, and any changes within the scope of the matters described in each claim are the scope of the present invention. Is included in. For example, the rotation speed detecting means 8 provided in the transport device A3 of the third embodiment is additionally provided in the transport device A2 of the second embodiment, but instead of this, the first embodiment is described. The rotation speed detecting means 8 may be additionally provided in the transport device A1 of the embodiment. Further, regarding the seal mechanism 27 equipped in the transfer device A4 of the fourth embodiment, for example, in the transfer device A1 of the first embodiment, the same configuration as the seal mechanism 27 is adopted instead of the seal mechanism 45. You may.

A1, A11, A2, A3, A4: Conveyor, 1: Fixed base, 14: Elevating base, 141: Cylindrical part 2: Swivel base, 21: Swivel cylinder part, 26: 2-axis output reducer, 27: Seal Mechanism, 30: Accommodating case, 4: Linear movement mechanism, 41A: First guide rail, 41B: Second guide rail, 43A: First drive mechanism 4, 43B: Second drive mechanism, 431a: First 1 drive shaft, 431b: second drive shaft, 432a: first drive pulley, 432b: second drive pulley, 435a: first output belt, 435b: second output belt, 44a: first Connecting member, 44b: Second connecting member, 45: Seal mechanism, 46a: Section, 5A: First hand, 5B: Second hand, 6: Differential gear mechanism, 61: Input shaft, 62a: First Output shaft, 62b: 2nd output shaft, 7A: 1st drive state switching mechanism, 7B: 2nd drive state switching mechanism, 8: rotation speed detecting means, M2: motor (second drive source), M3 : Motor (first drive source), Gl: Moving stroke, Os: Swirling axis, O1: Horizontal axis, W: Work

Claims (6)

With a fixed base,
A swivel base that is rotatably supported around a swivel axis perpendicular to this fixed base,
The linear movement mechanism supported by this swivel base and
The first and second hands, which are supported by this linear movement mechanism and convey the work along the horizontal linear movement stroke by the operation of the linear movement mechanism,
The first drive source that gives the driving force to the linear movement mechanism,
A differential gear mechanism that is interposed between the linear movement mechanism and the first drive source and has an input shaft and a first and second output shafts to which the driving force of the first drive source is transmitted. Equipped with
The linear movement mechanism has first and second drive shafts connected to the first and second output shafts, and has first and second drive mechanisms for driving the first and second hands, respectively. Including,
The drive-on state in which the rotation of the first output shaft is allowed or the rotation of the first output shaft is transmitted to the first drive shaft and the rotation of the first output shaft are stopped or the above are described. A drive-off state in which the rotation of the first output shaft is not transmitted to the first drive shaft, a first drive state switching mechanism for switching to, and a drive state switching mechanism.
The drive-on state in which the rotation of the second output shaft is allowed or the rotation of the second output shaft is transmitted to the second drive shaft and the rotation of the second output shaft are stopped or the above are described. A transport device comprising a drive-off state in which rotation of the second output shaft is not transmitted to the second drive shaft, and a second drive state switching mechanism for switching to. The first drive mechanism includes a first drive shaft arranged along a horizontal axis, a plurality of first pulleys including a first drive pulley attached to the first drive shaft, and a plurality of first pulleys. Includes a first output belt that is hung around the plurality of first pulleys along a vertical plane and reciprocates a predetermined section along parallel lines of the movement stroke.
The second drive mechanism includes the second drive shaft arranged along the horizontal axis, a plurality of second pulleys including the second drive pulley attached to the second drive shaft, and a plurality of second pulleys. Includes a second output belt that is hung around the plurality of second pulleys along the vertical plane and reciprocates a predetermined section along the parallel lines of the movement stroke.
The linear movement mechanism is a first connection that connects the first and second guide rails that movably support the first and second hands, respectively, and the first hand and the first output belt. The transport device according to claim 1, further comprising a member and a second connecting member that connects the second hand and the second output belt. The transport device according to claim 2, wherein the first and second output shafts and the first and second drive shafts are coaxially arranged. The swivel base includes a swivel cylinder portion centered on the swivel axis.
The transport device according to claim 2 or 3, wherein the first drive source is arranged inside the swivel cylinder portion. An elevating base that is vertically supported with respect to the fixed base and supports the swivel base, a second drive source that applies a swivel drive force to the swivel base, and the first drive source and the second drive source, respectively. Equipped with a 2-axis output reducer that slows down the rotation and outputs
The elevating base has a cylindrical portion centered on the swivel axis, and has a cylindrical portion.
The two-axis output reducer is supported by the elevating base.
The transfer device according to claim 2 or 3, wherein the first drive source, the second drive source, and the two-axis output reducer are arranged inside the cylindrical portion. The transport device according to any one of claims 1 to 5, further comprising a rotation speed detecting means for detecting the rotation speeds of the first and second drive shafts.

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