KR102398519B1 - Workpiece conveying apparatus - Google Patents

Abstract

[Problem] To provide a workpiece conveying apparatus capable of reducing the vertical dimension of the orbiting arm to lower the vertical height and reducing the moment load on the base of the orbiting arm.
[Solution]
The support base 200, the support arm 300 pivotably connected around the main pivot axis X1 with respect to the support base 200, and the support arm 300 around the elbow joint axis X2 A workpiece transport device comprising a hand holding arm 400 rotatably connected to the The support arm motor 220 for turning the support arm 300 with respect to the base part 200 is disposed in the support base part 200 , and rotates the hand holding arm 400 with respect to the support arm 300 . The motor 230 for the hand holding arm for making the hand holding arm 400, and the motors 310 and 320 for the hand for rotating the hand 510 and 520 with respect to the hand holding arm 400 are disposed in the support arm 300, and the elbow In the joint shaft X2, a joint shaft 352 for enabling the hand holding arm 400 to rotate with respect to the support arm 300, and a transmission shaft for transmitting power for rotating the hands 510 and 520 ( 354 and 356 are arranged coaxially, and in the support base 200 , a first speed reduction mechanism 221 for decelerating the output of the motor 220 for the support arm is installed, and in the support arm 300 . is provided with a second speed reduction mechanism 231 for decelerating the output of the motor 230 for the hand holding arm, and the motor 230 for the hand holding arm moves from the elbow joint shaft X2 in the support arm 300 . The second reduction mechanism 231 is provided at a position between the motor 230 for the hand holding arm and the elbow joint shaft X2 while being provided at the separated position.

Description

WORKPIECE CONVEYING APPARATUS {WORKPIECE CONVEYING APPARATUS}

The present invention relates to a workpiece transport device suitable for transporting thin plate-shaped workpieces such as glass substrates and wafers in a vacuum environment.

As shown in FIG. 11 , in a processing system in which the process chamber is radially disposed around the transfer chamber, the workpiece conveying device disposed in the transfer chamber for transferring the workpiece between the process chambers may radially move the workpiece in a plan view. Since it can only move straight, for example, the articulated arm type conveying apparatus which combined the parallel link mechanism as shown in patent document 1 can be used. Such a conveying device can move this hand straight in a plan view while maintaining the posture of the hand holding the workpiece by a small power source due to the function of the parallel link mechanism.

However, in order to achieve compactness by reducing the area occupied by the processing system, as shown in FIG. 12 , the transfer chamber TC is made rectangular, and a plurality (two in the example shown) are formed along the opposite long sides. A new processing system has been proposed, such as arranging a rectangular process chamber (PC) of In such a new processing system, it is necessary to transfer the workpiece between the two process chambers PC along the long side while maintaining the same posture of the hand with respect to the long side. It is not possible to employ a workpiece transport device as shown in Document 1.

In the processing system as shown in FIG. 12, it is considered to use the conveyance apparatus as shown in patent document 2 (particularly, FIGS. 11-13 of this document), for example. The conveying apparatus shown in this patent document 2 is provided with the 1st arm which can pivot with respect to a support base part, the 2nd arm which can pivot with respect to a 1st arm, and is provided with the hand which can turn with the 2nd arm, and is comprised. And, since the turning of the first arm with respect to the support base part, the turning of the second arm with respect to the first arm, and the turning of the hand with respect to the second arm are each independently performed, it is necessary to set the posture of the hand and the movement path of the hand. The degree of freedom is high, and therefore, the transfer device as shown in Patent Document 2 may be capable of transferring the workpiece between the process chambers in the processing system shown in FIG. 12 .

However, in the conveying apparatus shown in Patent Document 2, a reduction gear for decelerating the power for turning the second arm with respect to the first arm and a reduction gear for reducing the power for turning the hand with respect to the second arm, for example, In the 1st arm, it is stacked up and down along the pivot axis of the 2nd arm with respect to this 1st arm. Therefore, the vertical dimension of the arm on which these several reduction gears are laminated|stacked increases, and the vertical height of the whole conveyance apparatus is expanded. As a result, the vertical position of the conveyance path of the workpiece becomes high, and the vertical height of the transfer chamber is forced to increase, which leads to an increase in size and cost of the processing apparatus.

In addition, since the weight of the distal end portion of the revolving arm increases, the motor capacity is increased or the revolving portion is increased in order to cope with the increase in the moment load acting on the base portion of the arm and the inertia load on the motor rotating the arm. increase in mechanical strength is required, and these also lead to enlargement and cost increase of conveying equipment.

JP 2011-101912 A JP 2014-34106 A

The present invention has been devised based on the circumstances described above, and it is possible to reduce the vertical dimension of the orbiting arm to lower the vertical height, and to reduce the moment load on the base of the orbiting arm. The task is to provide.

In order to solve the above problems, the present invention employs the following technical means.

The workpiece transport device provided by the present invention includes a support base, a support arm pivotably connected around a main pivot with respect to the support base, and a hand holding arm pivotably connected around an elbow joint axis with respect to the support arm. A workpiece transport apparatus comprising an arm and a hand rotatably connected to the hand holding arm about a wrist joint axis, wherein the support arm motor for turning the support arm with respect to the support base part comprises: a hand holding arm motor for rotating the hand holding arm with respect to the support arm, and a hand motor for rotating the hand with respect to the hand holding arm are arranged in the support arm, and On the elbow joint shaft, a joint shaft for enabling the hand holding arm to rotate with respect to the support arm and a transmission shaft for transmitting power for rotating the hand are coaxially arranged, and in the support base part , a first deceleration mechanism for decelerating the output of the motor for the support arm is provided, and a second deceleration mechanism for decelerating the output of the motor for the hand holding arm is installed in the support arm, the motor for the hand holding arm is provided , in the support arm, it is provided at a position spaced apart from the elbow joint axis, and the second reduction mechanism is provided at a position between the hand holding arm motor and the elbow joint axis.

In a preferred embodiment, the second reduction mechanism is a reduction gear in which an input rotation shaft and an output rotation shaft are located on the same axis, and between the output shaft of the hand holding arm motor and the input rotation shaft of the second reduction gear is a belt-pulley transmission mechanism. It is linked, and the output rotation shaft of the second reduction gear and the joint shaft are linked by a belt/pulley transmission mechanism.

In a preferred embodiment, the motor for the hand holding arm is disposed opposite to the elbow joint shaft with the main pivot shaft interposed therebetween.

In a preferred embodiment, a third reduction mechanism for decelerating the output of the hand motor is further provided in the support arm.

In a preferred embodiment, the hand motor is provided in the support arm at a position spaced apart from the elbow joint axis, and the third speed reduction mechanism is located between the hand motor and the elbow joint axis. installed.

In a preferred embodiment, the third reduction mechanism is a reduction gear in which an input rotation shaft and an output rotation shaft are located on the same axis, and the output shaft of the hand motor and the input rotation shaft of the third reduction gear are linked by a belt-pulley transmission mechanism and the third reduction gear and the joint shaft are connected by a belt/pulley transmission mechanism.

In a preferred embodiment, the hand motor is disposed opposite to the elbow joint shaft with the main pivot shaft interposed therebetween.

In a further preferred embodiment, a support base portion, a support arm pivotably connected about a main pivot axis with respect to the support base portion, a hand retaining arm pivotably connected about an elbow joint axis with respect to the support arm, and the hand; In the workpiece transport device comprising a hand rotatably connected to a holding arm about a wrist joint axis, a motor for a support arm for turning the support arm with respect to the support base is disposed in the support base, A motor for a hand holding arm for rotating the hand holding arm with respect to the support arm, and a motor for a hand for rotating the hand with respect to the hand holding arm are disposed in the support arm, and on the elbow joint shaft, A joint shaft for enabling the hand holding arm to rotate with respect to the support arm and a transmission shaft for transmitting power for rotating the hand are coaxially arranged, and in the support base, the support arm motor A first reduction mechanism for decelerating the output of is provided in the support arm, a second reduction mechanism for decelerating the output of the hand holding arm motor, and a third deceleration mechanism for decelerating the output of the hand motor is provided, the motor for the hand holding arm is provided in the support arm at a position spaced apart from the elbow joint shaft, and the second speed reduction mechanism is disposed between the hand holding arm motor and the elbow joint shaft. The hand motor is installed in a position spaced apart from the elbow joint shaft in the support arm, and the third speed reduction mechanism is located between the hand motor and the elbow joint shaft. installed in location.

In a preferred embodiment, the second reduction mechanism is a reduction gear in which an input rotation shaft and an output rotation shaft are located on the same axis, and between the output shaft of the hand holding arm motor and the input rotation shaft of the second reduction gear is a belt-pulley transmission mechanism. connected, the output rotation shaft of the second reduction gear and the joint shaft are connected by a belt pulley transmission mechanism, and the third reduction mechanism is a reduction gear in which the input rotation shaft and the output rotation shaft are located on the same axis, and The output shaft of the hand motor and the input rotation shaft of the third reducer are connected by a belt-pulley transmission mechanism, and the output rotation shaft of the third reducer and the joint shaft are connected by a belt-pulley transmission mechanism.

In a preferred embodiment, the motor for the hand holding arm is disposed opposite to the elbow joint axis with the main pivot shaft sandwiched therebetween, and the hand motor is disposed opposite to the elbow joint shaft by sandwiching the main pivot shaft. there is.

In a preferred embodiment, the support base, the main pivot shaft, the support arm, and the elbow joint shaft airtightly maintain a region or the inside of the support arm in the support base in which the motor for the support arm is disposed. structure is installed.

In a preferred embodiment, in the elbow joint shaft, the joint shaft is a hollow shaft, the coaxial power transmission shaft is inserted into the joint shaft, and between the joint shaft and a member that rotatably supports the joint shaft, An airtight seal is provided between the power transmission shaft and the joint shaft and between the power transmission shaft.

In a preferred embodiment, the hermetic seal is a magnetic fluid seal,

According to the workpiece transport apparatus of the present invention having the above configuration, since the third speed reduction mechanism for decelerating the output of the hand holding arm motor is provided at a position spaced apart from the elbow joint and the hand holding arm motor, they are internally It is possible to suppress the increase in the vertical dimension of the support arm installed in the Therefore, the vertical height of the transfer chamber in which the workpiece transport device is installed can be reduced, and the processing device can be made compact. In addition, since it is possible to suppress an increase in the weight of the distal end of the support arm, the moment load acting on the base of the support arm and the inertial load for turning the support arm are also reduced, thereby suppressing the increase in size and cost of this workpiece transport device. can do.

Other features and advantages of the present invention will become more apparent from the detailed description given below with reference to the drawings.

1 is a schematic side view of a workpiece transport apparatus 10A according to a first embodiment of the present invention;
Fig. 2 is a schematic plan view of the workpiece transport apparatus 10A shown in Fig. 1;
Fig. 3 is a schematic longitudinal sectional view of the workpiece transport apparatus 10A shown in Fig. 1;
Fig. 4 is a schematic cross-sectional view taken along line IV-IV of Fig. 3;
Fig. 5 is a schematic cross-sectional view taken along line VV in Fig. 3;
6 is an enlarged cross-sectional view taken along line VI-VI of FIG. 4 ;
7 is a schematic cross-sectional view of a workpiece transport apparatus 10B according to a second embodiment of the present invention;
Fig. 8 is a schematic cross-sectional view taken along line VIII-VIII of Fig. 7;
Fig. 9 is a schematic cross-sectional view taken along line IX-IX of Fig. 7;
Fig. 10 is a schematic cross-sectional view of a workpiece transport apparatus 10C according to a third embodiment of the present invention;
11 is an explanatory diagram of an arrangement example of a process processing system;
12 is an explanatory view of another arrangement example of a process processing system;

EMBODIMENT OF THE INVENTION Hereinafter, preferred embodiment of this invention is described concretely with reference to drawings.

1 to 6 show a workpiece transport apparatus 10A according to a first embodiment of the present invention. This workpiece transport apparatus 10A includes a fixed base portion 100 , a support base portion 200 , a support arm 300 , a hand holding arm 400 , and two hands 510 and 520 . do. This workpiece transport device 10A is installed in, for example, a transfer chamber in a processing system performed in a vacuum environment.

As is well shown in FIG. 3 , the fixed base part 100 receives and holds the support base part 200 so as to be able to move up and down. The supporting base 200 is supported so that its upper part protrudes from the opening 102 installed in the ceiling plate 101 of the fixed base 100, and is movable up and down by a vertical guide (not shown). . Moreover, this support base part 200 is raised and lowered by the ball screw mechanism 105 through which rotation of the motor 103 for raising/lowering is transmitted via the belt-pulley transmission mechanism 104. As shown in FIG.

The support base 200 also has a space S2 surrounded by a cylindrical outer wall 201 , a bottom plate 202 , and a first vacuum sealing unit 250 to be described later. The fixed base part 100 includes a cylindrical outer wall 106 , a bottom plate 107 , a ceiling plate 101 , a bottom plate 202 of the support base 200 , a ceiling plate 101 , and It has a space S1 surrounded by the bellows member 108 interposed between the bottom plate 202 of the support base 200 . These spaces S1 and S2 communicate with each other, and atmospheric pressure outside the transfer chamber is introduced, but is blocked from the vacuum pressure in the transfer chamber TC by the first vacuum sealing unit 250 and the bellows member 108 . .

In the inside of the support base 200, a motor 220 for a support arm for turning the support arm 300 around a main pivot X1 extending in the vertical direction, and a second agent for decelerating the rotation of the motor 220 for the support arm One reduction gear 221 is accommodated. The 1st reduction gear 221 can employ|adopt the thing of a well-known structure in which the planetary gear mechanism was incorporated, for example.

The support arm 300 is pivotably supported around the main pivot axis X1 with respect to the support base 200 via the first vacuum sealing unit 250 . The first vacuum sealing unit 250 rotatably supports a cylindrical shaft (not shown) on the support arm 300 side with respect to a cylindrical shaft (not shown) on the support base portion 200 side, and Between the cylindrical shafts, it is comprised as what provided the 1st sealing structure (not shown) which consists of a magnetic fluid seal, for example. In the present embodiment, the first vacuum sealing unit 250 includes a hollow portion 251 penetrating vertically along the main pivot X1, and the support base portion is interposed therebetween. The inner space of the 200 and the inner space of the support arm 300 are in communication.

The support arm 300 includes a case 301 having an airtight structure extending in the horizontal direction. In this support arm 300, a motor 230 for a hand holding arm for rotating the hand holding arm 400 around an elbow joint axis X2 to be described later, and a motor 230 for a hand holding arm, the rotation of the motor 230 is decelerated. A second speed reducer 231, two hands for rotating the two hands 510, 520 around the wrist joint axis X3 to be described later, motors 310 and 320 for each hand, and motors for each hand 310, Two third reducers 311 and 321 for reducing the rotation of 320 are accommodated. The second reduction gear 231 and the third reduction gear 311 and 321 may also employ, for example, a known one incorporating a planetary gear mechanism.

The motor 230 for the hand holding arm is disposed opposite to the elbow joint axis X2 with the main pivot axis X1 interposed therebetween. The second reduction gear 231 is provided at a position between the main pivot axis X1 and the elbow joint axis X2. The two hand motors 310 and 320 are also located between the main pivot axis X1 and the elbow joint axis X2, and are provided on the main pivot axis X1 side rather than the second reduction gear 231. The two third reduction gears 311 and 321 are provided below the two hand motors 310 and 320, respectively, in direct connection with the two hand motors 310 and 320.

Between the distal end 300a of the support arm 300 and the proximal end 400a of the hand holding arm 400, the hand holding arm 400 can be rotated with respect to the supporting arm 300 around the elbow joint axis X2. A second vacuum sealing including second and third transmission shafts 354 and 356 coaxial with the elbow joint shaft X2, which transmits power for rotating the two hands 510 and 520 while connecting them A unit 350 is installed.

As shown in detail in FIG. 6 , the second vacuum sealing unit 350 has a cylindrical shaft portion 352 (joint shaft) on the hand holding arm 400 side inside the cylindrical shaft portion 351 on the support arm 300 side. A second sealing structure 353 is provided between the cylindrical shaft portions 351 and 352 while supporting the rotatable hollow shaft portion 352 inside the hand holding arm 400 side. While rotatably supporting the transmission shaft 354 , a third sealing structure 355 is provided between the cylindrical shaft portion 352 and the second transmission shaft 354 , and the hollow portion of the second transmission shaft 354 . While rotatably supporting the third transmission shaft 356 in a solid form, a fourth sealing structure 357 is installed between the second transmission shaft 354 and the third transmission shaft 356 to is composed Since the third transmission shaft 356 has a solid shape, by the action of the second, third, and fourth sealing structures 353 , 355 , 357 , the inner space S3 of the support arm 300 is hermetically sealed. In addition, it is suitable for the 2nd, 3rd, and 4th sealing structure 353, 355, 357 to set it as a magnetic fluid seal, for example.

Thereby, the internal space S1 of the fixed base part 100, the internal space S2 of the support base part 200, and the internal space S3 of the support arm 300 become a communication shape and airtight. It is sealed and is isolated from the vacuum pressure of the transfer chamber TC.

In the internal space S3 of the support arm 300 , a pulley 233 provided on the output shaft of the second reduction gear 231 and a pulley 361 provided on the cylindrical shaft portion 352 on the hand holding arm 400 side. An endless belt 362 is caught between them. Moreover, the endless belt 363 is caught between the pulley 235 provided in the input shaft of the 2nd reduction gear 231, and the pulley 234 provided in the output shaft of the motor 230 for hand holding arms. Thereby, the rotation output of the motor 230 for hand holding arm provided in the support arm 300 is the hand holding arm 400 via the endless belt 363, the 2nd speed reducer 231, and the endless belt 362. It is transmitted to the side cylindrical shaft part 352, and can rotate the hand holding arm 400 with respect to the support arm 300 centering on the elbow joint axis X2.

In addition, in the inside of the support arm 300, the pulleys 312 and 322 attached to the third reduction gears 311 and 321 attached to the two hand motors 310 and 320, respectively, the second transmission shaft and Between the pulleys 364 and 366 provided at the lower end of the 3rd transmission shafts 354 and 356, the endless belts 365 and 367 are hooked, respectively. Thereby, with the rotation power of the motors 310 and 320 for hands, the 2nd transmission shaft and 3rd transmission shaft 354, 356 can be rotated independently.

The hand holding arm 400 includes a case 410 extending in the horizontal direction. Unlike the case 301 of the support arm 300 , the case 410 need not have an airtight structure. At the distal end of the hand holding arm 400 , two hands 510 and 520 are supported so as to be able to rotate coaxially with the wrist joint axis X3 as the center. Specifically, the hollow shaft 521 extending from the lower second hand 520 passes through the upper wall 411 of the case 410 and is rotatably supported with respect to the upper wall 411, and the upper first A solid support shaft 511 extending from the hand 510 is rotatably supported with respect to the hollow shaft 521 so as to be inserted through the hollow shaft 521 . The endless belt 542 is caught between the pulley 522 installed at the lower end of the hollow shaft 521 and the pulley 541 installed at the upper end of the third transmission shaft 356, and the lower end of the solid shaft 511 The endless belt 552 is caught between the pulley 512 installed in the and the pulley 551 installed at the upper end of the second transmission shaft 354 . Reference numerals 421 and 422 denote tension pulleys for applying tension to the endless belts 542 and 552 by contacting the endless belts 542 and 552, respectively.

As a result, in the upper first hand 510 , the rotation output of the hand motor 310 is the third reduction gear 311 , the endless belt 365 , the second transmission shaft 354 , and the endless belt 552 . ) through the rotational force transmitted to the solid support shaft 511, it is rotated about the wrist joint shaft X3. In the lower second hand 520 , the rotation output of the hand motor 320 is provided via the third reduction gear 321 , the endless belt 367 , the third transmission shaft 356 , and the endless belt 542 . By the rotational force transmitted to the hollow shaft 521, it is rotated about the wrist joint axis (X3).

In use, the workpiece transport apparatus 10A of the present embodiment is provided, for example, in a transfer chamber TC in a system for processing an organic EL substrate. Specifically, in this workpiece transport device 10A, the top plate 101 of the fixed base 100 constitutes a part of the bottom surface of the transfer chamber TC, and the support arm 300 and the hand holding arm 400 ) and the hands 510 and 520 are installed to be located inside the transfer chamber TC. As described above, the internal space (S1) of the fixed base part 100, the internal space (S2) of the support base part 200, and the internal space (S3) of the support arm 300 are in communication with each other and at the same time Since they are hermetically sealed, these internal spaces can be maintained at atmospheric pressure even when the inside of the transfer chamber TC is in a vacuum environment. Therefore, in these spaces, the lifting motor 103, the motor 220 for the support arm, the first reduction gear 221, the two hand motors 310 and 320, the second and third reduction gears 231, 311, 321 ) can be placed without problems.

By the operation of the elevating motor 103, the support base 200, the support arm 300 connected thereto, and the hand holding arm 400 to the two hands 510 and 520 are configured in the vertical direction. can elevate. By the operation of the motor 220 for the support arm, the support arm 300 can be rotated around the main pivot X1 with respect to the support base 200 . By the operation of the motor 230 for the hand holding arm, the hand holding arm 400 can be rotated around the elbow joint axis X2 with respect to the supporting arm 300 . In addition, by the operation of the motors for the hand (310, 320), it is possible to rotate the two hands (510, 520) with respect to the hand holding arm 400 around the wrist joint axis (X3).

As is clear from the above, a power transmission path for rotating the support arm 300 with respect to the support base 200, a power transmission path for rotating the hand holding arm 400 with respect to the support arm 300, and 2 Power transmission paths for rotating the hands 510 and 520 with respect to the hand holding arm 400 are configured independently of each other. Accordingly, the rotation of the support arm 300 with respect to the support base 200 , rotation of the hand holding arm 400 with respect to the support arm 300 , and the two hands 510 and 520 with respect to the hand holding arm 400 . ), the degree of freedom in selecting the movement path of the two hands 510 and 520 with respect to the main pivot X1 and the posture of the hands 510 and 520 is increased by independently controlling the rotation. Therefore, as in the processing system shown in FIG. 12 , even when the longitudinal central axis CL of each process chamber PC is shifted with respect to the center of the transfer chamber TC, there is no problem. 520) along the longitudinal centerline of each process chamber, the operation is made possible. In addition, by appropriately selecting the rotation angle of the hand holding arm 400 with respect to the support arm 300 and the rotation angle of the two hands 510 and 520 with respect to the hand holding arm 400 in a plan view, The minimum turning radius of the constituent members higher than the support arm 300 in the workpiece transport device 10A can be reduced, and the area occupied in the transfer chamber TC of the workpiece transport device 10A itself is reduced. can be reduced

In addition, since two independently rotatable hands 510 and 520 are provided, for example, an unprocessed workpiece to be loaded next to a predetermined process chamber is loaded onto the second hand 520 and interferes with the process chamber. With the second hand 520 retracted so as not to be rotated, the first hand 510 is put into the process chamber, the processed workpiece is received and taken out, and the first hand 510 is retracted and rotated. By inserting the second hand 520 into the process chamber and performing a series of operations for loading the unprocessed workpiece into the process chamber, the processing of the processed workpiece and the loading of the untreated workpiece from the process chamber can be efficiently performed. can

In addition, since the second speed reducer 231 for decelerating the output of the motor 230 for the hand holding arm is installed to be spaced apart from the elbow joint axis X2, the vicinity of the elbow joint axis X2 of the support arm 300, That is, it is possible to suppress the expansion of the vertical height dimension of the distal end of the support arm 300 to suppress the enlargement of the workpiece transport device 10A and the vertical height of the transfer chamber in which the workpiece transport device 10A is installed. . In addition, since it is possible to suppress the concentration of mechanical components on the tip of the support arm 300, the inertial load on the motor 220 for the support arm is reduced, and the capacity of the motor 220 for the support arm is reduced to reduce the cost. can be promoted

In addition, since the motor 230 for the hand holding arm is disposed on the opposite side of the elbow joint axis X2 with the main pivot X1 interposed therebetween, the motor 230 for the hand holding arm can serve as a counterweight. . Thereby, excessive mechanical strength is not required for the configuration in the vicinity of the main revolving axis X1, which leads to weight reduction, miniaturization, and cost reduction of this workpiece conveying apparatus 10A.

From the above considerations, by suppressing the vertical height of the workpiece conveying device 10A, the processing system can be made compact, and the processing system can be reduced in size and cost.

7 to 9 show a workpiece transport apparatus 10B according to a second embodiment of the present invention. In these drawings, the same or equivalent members or parts as those of the workpiece transport apparatus 10A according to the first embodiment are denoted by the same reference numerals, and detailed descriptions thereof are omitted.

This workpiece conveying device 10B separates two hand motors 310 and 320 and two third reduction gears 311 and 321 for decelerating their outputs, and two third reduction gears 311 and 321 . ) on the elbow joint axis (X2) side with respect to the main pivot axis (X1), hand motors (310, 320) are placed on the opposite side of the elbow joint axis (X2) with the main pivot axis (X1) interposed therebetween. . In accordance with this, an endless belt is provided between the pulleys 312 and 322 provided on the output shaft of each hand motor 310 and 320 and the pulleys 314 and 324 provided on the input shaft of each of the third reduction gears 311 and 321. (315, 325) is turned, and the pulleys 316 and 317 provided on the output shaft of each of the third reduction gears 311 and 321, the second transmission shaft and the third transmission shaft 354 and 356 are installed at the lower ends. Between the pulleys 364 and 366, the endless belts 365 and 367 are rolling, respectively.

Also with this workpiece transport device 10B, the same advantages as those described above with respect to the workpiece transport device 10A can be obtained. Since it is installed on the opposite side of the joint shaft X2, these two hand motors 310 and 320 and the hand holding arm motor 230 can work together to serve as a counterweight, near the main pivot axis X1. It is possible to further reduce the moment load for the configuration of the , so that these components can be further reduced in size and weight.

Fig. 10 shows a workpiece transport apparatus 10C according to a third embodiment of the present invention. In these drawings, the same or equivalent members or parts as those of the workpiece transport apparatus 10A according to the first embodiment are denoted by the same reference numerals, and detailed descriptions thereof are omitted.

In the workpiece transport apparatus 10A according to the first embodiment, two hands 510 and 520 are provided. However, at least one hand may be provided, and the two hands provided in the hand holding arm 400 are Among the power transmission paths, one power transmission path is used to rotate one hand 510 , and another power transmission path is used to roll the hand 510 , for example. Further, also in the workpiece transport apparatus 10C according to the present embodiment, the same advantages as those described above with respect to the workpiece transport device 10A can be obtained.

In the workpiece transport device 10C, as shown in FIG. 10 , in the hand holding arm 400 , the pulley 541 provided on the third transmission shaft 356 and the hand support member 513 are integrated. An endless belt 542 is passed between the pulleys 515 installed on the continuous support shaft 514, and the pulley 551 installed on the second transmission shaft 354, and the support shaft 514 in the axial direction. At the same time, the endless belt 552 is caught between the support shaft 514 and the pulley 512 provided on the shaft 511 of the coaxial shape. And, at the hand support member 513, the proximal end shaft 510a of the hand 510 is supported so as to be rollable, and the bevel gear transmission mechanism 517 is between the proximal end shaft 510a and the supporting shaft 511. is linked by

In this workpiece transport apparatus 10C, the hand support members 513 to 510 are rotated around the wrist joint axis X3 by the power transmitted by the third transmission shaft 356, and the second By the power transmitted by the transmission shaft 354, the hand 510 is rolled around the proximal shaft 510a. Thereby, the workpiece loaded on the hand 510 can be conveyed while correcting the inclination of the rolling direction. In addition, in the configuration shown in Fig. 10, by changing the direction of the proximal end shaft 510a with respect to the hand 510, the hand 510 is pitched by the power transmitted by the third transmission shaft 356. It is also possible to make

Of course, the scope of the present invention is not limited to the above-described embodiments, and all changes within the scope of the matters described in each claim are included in the scope of the present invention.

X1: Main pivot axis X2: Elbow joint axis
X3: wrist joint axis
10A: Workpiece conveying device (first embodiment)
10B: Workpiece conveying device (Second embodiment)
10C: Workpiece conveying device (third embodiment)
100: fixed base portion 103: elevating motor
108: bellows member 200: support base part
220: motor for support arm 221: first reducer
230: motor for hand holding arm 231: second reducer
250: first vacuum sealing unit 300: support arm
310: motor for hand 311: third reducer
320: motor for hand 321: third reducer
350: second vacuum sealing unit 400: hand holding arm
510: first hand 520: second hand

Claims (12)

A support base, a support arm pivotably connected to the support base about the main pivot axis, a hand retaining arm pivotably connected to the support arm about the elbow joint axis on the support arm, and holding the hand In the workpiece transport device comprising a hand rotatably connected around the wrist joint axis on the hand holding arm with respect to the arm,
A motor for a support arm for turning the support arm with respect to the support base is disposed in the support base,
A hand holding arm motor for rotating the hand holding arm with respect to the supporting arm and a hand motor for rotating the hand with respect to the hand holding arm are disposed in the supporting arm,
The motor for the hand holding arm is disposed on the opposite side to the elbow joint shaft with the main pivot shaft interposed therebetween,
On the elbow joint shaft, a joint shaft for enabling the hand holding arm to rotate with respect to the support arm and a transmission shaft for transmitting power for rotating the hand are arranged coaxially,
A first reduction mechanism for decelerating the output of the motor for the support arm is installed in the support base,
and a second speed reduction mechanism for decelerating the output of the motor for the hand holding arm is provided in the support arm at a position between the motor for the hand holding arm and the elbow joint shaft. According to claim 1, wherein two hands are installed, the motor for the hand is installed to rotate the two hands independently, the two motors for the hand are the elbow joint in the support arm A workpiece transport device arranged side by side in the width direction of the support arm at a position spaced apart from the shaft. The workpiece conveying apparatus according to claim 1, wherein the second reduction mechanism is a reduction gear in which an input rotation shaft and an output rotation shaft are located on the same axis. 4. The motor according to claim 3, wherein the output shaft of the hand holding arm motor and the input rotation shaft of the second reduction mechanism are connected by a belt-pulley transmission mechanism, and between the output rotation shaft of the second reduction mechanism and the elbow joint shaft. is a work piece conveying device linked by a belt-pulley transmission mechanism. The workpiece conveying apparatus according to claim 2, wherein a third reduction mechanism for respectively decelerating the outputs of the two hand motors is further provided in the support arm. The work transport apparatus according to claim 5, wherein the third reduction mechanism is provided at a position between the hand motor and the elbow joint shaft. The workpiece conveying apparatus according to claim 6, wherein the third reduction mechanism is a reduction gear in which an input rotation shaft and an output rotation shaft are located on the same axis. 8. The method according to claim 7, wherein the output shaft of the two hand motors and the input rotation shaft of the third reduction mechanism are connected by a belt-pulley transmission mechanism, and between the output rotation shaft of the third reduction mechanism and the transmission shaft is a work piece conveying device linked by a belt-pulley transmission mechanism. The workpiece conveying apparatus according to claim 1, wherein the hand motor is disposed opposite to the elbow joint shaft with the main pivot shaft interposed therebetween. The method according to claim 1, wherein the support base, the main pivot, the support arm, and the elbow joint shaft air-tightly maintain a region in the support base in which the motor for the support arm is disposed and the inside of the support arm. A work piece conveying device with an airtight structure. The joint shaft according to claim 10, wherein in the elbow joint shaft, the elbow joint shaft is a hollow shaft, and the coaxial transmission shaft is inserted through the elbow joint shaft, and between the elbow joint shaft and a member that rotatably supports the elbow joint shaft. , An airtight seal is provided between the transmission shaft and the elbow joint shaft and between the transmission shaft. 12. The apparatus of claim 11, wherein the hermetic seal is a magnetic fluid seal.

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