JP5021397B2 - Transport device - Google Patents

Description

  The present invention relates to a transfer device, and more particularly to a double-hand type transfer device suitable for horizontally transferring a thin plate-like workpiece such as a wafer in a vacuum atmosphere in semiconductor manufacturing, for example.

  Among transfer devices, those having a mechanism for moving a hand along a linear movement process are simpler and less expensive than so-called articulated robots. For example, in a manufacturing process of a semiconductor manufacturing apparatus, etc. These are widely used for loading or unloading thin plate-like workpieces such as wafers into and from each process chamber.

  An example of such a transport device is disclosed in Patent Document 1 below. As shown in FIG. 1 or FIG. 2 of the same document, the transport device disclosed in Patent Document 1 is configured to have a swivel base (first arm 11) that can be swung around a vertical axis and extends in the horizontal direction. A pair of arms (second arms 6a and 6b) are provided at both ends of the turning base. A pair of hands (third arms 3a and 3b) are rotatably provided at the respective distal end portions of these arms. The pair of hands are arranged apart from each other in the vertical direction in order to avoid interference with each other, and in a standby state, these hands are in a positional relationship where they are overlapped vertically. Each hand is driven via a timing belt wound around a pulley provided at each rotation location. Here, as can be understood with reference to FIG. 6 of Patent Document 1, the angular velocity of the turning operation of the turning base, the angular velocity of the turning operation of the arm with respect to the turning base, and the angular velocity of the turning operation of the hand with respect to the arm are predetermined. By configuring so that the ratio becomes, it is possible to move each hand forward and backward along a horizontal linear movement stroke.

  Such a transfer apparatus is used for, for example, carrying a workpiece into or out of a process chamber in a semiconductor device manufacturing process. Loading and unloading of workpieces into and from each process chamber is performed, for example, by placing a vacuum transfer module between the atmospheric transfer module and each process chamber and transferring the workpiece through the vacuum transfer module. The vacuum transfer module includes a transport chamber in which a plurality of process chambers are arranged at the periphery, and a load lock connecting the atmospheric transfer module and the transport chamber, and the vacuum transfer module is operable in a vacuum atmosphere in the transport chamber. A seed transport device is arranged and configured. The transfer device receives the workpiece in the load lock and transfers it into the transport chamber, and then loads the workpiece into one of the process chambers, receives the processed workpiece from the process chamber, and transfers it into the load lock. It operates like this. A stage for placing a workpiece is provided in the load lock, and the workpiece is transferred by the hand of the transfer device on this stage.

  The conveyance device disclosed in Patent Document 1 is a so-called double-hand type configured with two hands. Compared with the one-hand type, the double-hand type transfer device holds the unprocessed work in one hand when, for example, the unprocessed work is loaded into the process chamber after unloading the processed work from the process chamber. In this state, it is possible to extend the other hand and collect the processed workpiece, and then extend one hand to load the unprocessed workpiece into the process chamber. Efficiency of loading and unloading the workpiece into the process chamber Is increased.

  However, the conventional transport device disclosed in Patent Document 1 has a structure in which the arm is rotated with respect to the turning base and the hand is rotated with respect to the arm. That is, the arm or the hand is provided with two turning points. For this reason, as the hand moves back and forth, a relatively large vibration is generated in the hand due to the two turning positions. In addition, if there are two turning points, there is a disadvantage that the arm is easy to sag when the hand advances. Furthermore, as can be understood with reference to FIG. 5 of Patent Document 1, when the upper hand moves forward and backward, the rotating portion between the hand and the arm moves directly above the lower hand. Since it passes, there is a possibility that the workpiece placed on the lower hand is contaminated by particles generated in the rotating portion.

Japanese Patent Laid-Open No. 10-163296

  The present invention has been conceived under such circumstances, and eliminates the above-described disadvantages in a transport apparatus having two hands each operated so as to have a horizontal linear movement stroke. Or the problem is that it can be reduced at least.

  In order to solve the above problems, the present invention employs the following technical means.

The conveying device provided by the present invention includes a swivel base capable of swiveling around a vertical swivel axis, and a vertical first that is located at an equal distance from the swivel axis with respect to the swivel base with the swivel axis interposed therebetween. The first and second arms supported so as to be rotatable about the second rotation axis and the first and second arms, respectively, are fixedly supported, and hold a thin plate-like workpiece. First and second hands that can be turned, turning drive means for turning the turning base around the turning axis, and arm driving means for turning the first and second arms around the turning axis; The arm driving means includes a motor mounted on the turning base and that drives the first arm and the second arm in common, and the motor has an output shaft thereof. So that is oriented vertically The output shaft is provided with an output pulley, and the first and second arms are respectively rotated around the first and second rotation shafts. A driven pulley is integrally provided, and the first driven pulley is provided between the output pulley and the first driven pulley and between the output pulley and the second driven pulley, respectively. The transmission belt is wound around so that the pulley and the second driven pulley rotate in opposite directions, and the first and second hands are positioned at the same height, Each has a reference point at which the center of the work to be held is located, and the turning driving means and the arm driving means are interlocked to select either one of the first and second hands. The reference point To move the horizontal straight line passing through the pivot axis, it is moved between a reference retreat position and advance position, when one of the hands are in the reference retreat position, the first and second hand They are characterized in that they are in a point-symmetrical positional relationship around the pivot axis and are separated from each other .

  Hereinafter, a preferred embodiment of a transport device according to the present invention will be described in detail with reference to the drawings.

Figures 1-6 show a conveying device according to implementation embodiments of the present invention. The transfer device A1 is for transferring a thin plate-like workpiece W such as a wafer. As shown in FIGS. 1 to 3, the transport device A <b> 1 includes a fixed base 1, a swivel base 2 supported so as to be swivel around a swivel axis Os perpendicular to the fixed base 1, and a swivel base And turning drive means 3 for turning 2 around the turning axis Os. A pair of arms 4A and 4B are rotatably supported on the turning base 2, and arm driving means 5 for rotating the arms 4A and 4B is provided. A pair of hands 6A and 6B are supported on the pair of arms 4A and 4B, respectively. The hands 6A and 6B are for holding the thin plate-like workpiece W in a horizontal posture.

  As shown well in FIG. 3, the fixed base 1 includes a housing 1 </ b> A having a substantially columnar outer shape including a bottom wall portion 11, a cylindrical side wall portion 12, and an inward intermediate wall 13. A central opening 13A is formed in the intermediate wall 13. The bottom wall portion 11 is a portion for attaching a motor M1 and a screw shaft 161 described later.

  An elevating base 14 is supported inside the fixed base 1. The elevating base 14 has a cylindrical portion 141 having an outer diameter smaller than that of the central opening 13A and having a predetermined dimension in the vertical direction, an outward annular portion 142 connected to the cylindrical portion 141, an intermediate housing 143, and a lower cylindrical portion 144. And an outward flange portion 145 formed at the lower end of the lower cylindrical portion 144. A motor M2 is fixed to the intermediate housing 143. A vertical guide rail (not shown) is attached to the inner wall of the side wall portion 12 of the housing 1A, and a guide member (not shown) provided on the outward flange portion 145 of the elevating base 14 moves vertically with respect to the linear guide rail. It is supported so as to be slidable in the direction. Thereby, the elevating base 14 can move within a predetermined range in the vertical direction with respect to the fixed base 1, and at this time, the upper portion of the cylindrical portion 141 of the elevating base 14 protrudes and appears from the center opening 13 </ b> A.

Between the intermediate wall 13 of the fixed base 1 and the outward annular portion 142 of the elevating base 14, both ends of the bellows 15 arranged so as to surround the cylindrical portion 141 of the elevating base 14 are connected. The bellows 15 hermetically seals between the intermediate wall 13 of the fixed base 1 and the outward annular portion 142 of the lift base 14 regardless of the vertical movement of the lift base 14.

  Inside the fixed base 1 is also a screw shaft 161 that is arranged and rotated in the vertical direction, and a nut member 162 that is screwed into the screw shaft 161 and fixed to the outward flange portion 145 of the elevating base 14 in a penetrating manner. A ball screw mechanism 16 comprising: The screw shaft 161 is linked to the motor M1 by a belt 164 wound around a pulley 163 attached to the lower end of the screw shaft 161, and is rotated in the forward and reverse directions by driving the motor M1. By rotating the screw shaft 161 in this way, the elevating base 14 is raised and lowered.

The turning base 2 includes an upper housing 21, a lower housing 22, and a cylindrical shaft 23 connected to the lower housing 22. The cylindrical shaft 23 is supported inside the cylindrical portion 141 of the elevating base 14 via a bearing 241 so as to be rotatable about the turning axis Os. A seal mechanism 242 is interposed between the cylindrical portion 141 and the cylindrical shaft 23 above the bearing 241. The seal mechanism 242 shields the space above the seal mechanism 242 and the inner space of the elevating base 14 below the seal mechanism 242 to maintain airtightness. A pulley 231 is integrally provided at the lower end of the cylindrical shaft 23. A motor M <b> 3 is fixed to the intermediate wall 221 of the lower housing 22.

  The swivel driving means 3 is for swiveling the swivel base 2 around the swivel axis Os regardless of the vertical position of the elevating base 14, and as shown in FIG. A pulley 231, a motor M 2 fixed to the intermediate housing 143 of the elevating base 14, a pulley 31 provided on the output shaft of the motor M 2, and a belt 32 wound around the pulleys 231 and 31 are configured. ing. The pulley 231 is linked to the motor M <b> 2 via the belt 32 and the pulley 31. Thus, when the motor M2 is rotated forward and backward, the turning base 2 is turned in the forward and reverse directions around the turning axis Os.

  As shown in FIGS. 1 to 3, the arms 4 </ b> A and 4 </ b> B are supported so as to be rotatable around vertical rotation axes O <b> 1 and O <b> 2 in a posture in which the longitudinal direction is horizontal. The arms 4A and 4B are provided at the same height as shown in FIG. Shaft portions 41a and 41b are extended vertically downward at the base end portions of the arms 4A and 4B, respectively, and the shaft portions 41a and 41b are provided in bearings in openings provided in the upper portion of the upper housing 21 of the turning base 2. It is rotatably supported via 243. The rotation axes O1 and O2 are located at an equal distance from the rotation axis Os with the rotation axis Os interposed therebetween.

  The arm drive means 5 is for rotating the arms 4A and 4B around the rotation axes O1 and O2, and is disposed in the upper housing 21 of the rotation base 2. As shown in FIG. 3, the arm driving means 5 includes a motor M3, an output shaft 51 connected to the motor M3, an output pulley 52 provided at the upper end of the output shaft 51, and the arms 4A and 4B. Driven pulleys 42a and 42b provided at the lower ends of the shaft portions 41a and 41b, and two sets of transmission belts 53A and 53B are provided. The output shaft 51 is supported by the upper housing 21 or the lower housing 22 of the swing base 2 via a bearing 245 so as to be rotatable around the swing axis Os. A seal mechanism 246 is provided between the output shaft 51 and the upper housing 21 or the lower housing 22 so as to maintain airtightness above the bearing 245. Accordingly, the inside of the lower housing 22 and the inner space of the elevating base 14 communicating from the inside through the cylindrical shaft 23 are hermetically sealed to the outside.

  The transmission belt 53A is composed of, for example, two end belts 531 and 532. One end of each end belt 531 and 532 is connected and fixed to the output pulley 52, and the other end is It is connected and fixed to the driven pulley 42a. Further, as clearly shown in FIG. 4, the transmission belt 53A (the end belts 531 and 532) is attached to the output pulley 52 and the driven pulley 42a in an annular shape. As a result, the driven pulley 42 a rotates in the same direction as the output pulley 52.

  On the other hand, the transmission belt 53B is composed of, for example, two end belts 533, 534. Each end belt 533, 534 is connected and fixed to the output pulley 52 at one end, The end is connected and fixed to the driven pulley 42b. Further, as clearly shown in FIG. 4, the transmission belt 53B (end belts 533, 534) is attached to the output pulley 52 and the driven pulley 42b in a crossing manner. As a result, when the output pulley 52 rotates, the driven pulley 42 b rotates in the opposite direction to the output pulley 52.

  As can be understood from such a configuration, the motor M3 rotates the arms 4A and 4B in common. When the motor M3 is driven, the driven pulley 42a and the driven pulley 42b are rotated in opposite directions. At this time, the arms 4A and 4B are rotated in opposite directions in synchronization.

As shown in FIG. 1 or FIG. 2, the hands 6A and 6B are fixedly provided at the respective distal ends of the arms 4A and 4B, and these hands 6A and 6B are located at the same height. Yes. Each of the hands 6A and 6B is formed with partial circular concave steps 61a and 61b for mounting and holding a circular workpiece W of a predetermined size such as a semiconductor wafer, for example, and the centers of the partial circles are The reference points S1 and S2 are set where the center of the workpiece W should be located. In the present embodiment, for example, the distance from the rotation axis O1 to the reference point S1 is equal to the distance from the rotation axis Os to the rotation axis O1, and the distance from the rotation axis O2 to the reference point S2 is The distance from the turning axis Os to the turning axis O2 is the same. As a result, as shown in FIG. 5, for example, the turning base 2 is driven to turn in the direction of arrow N1, and at the same time, the turning base 2 is turned in the direction opposite to the turning movement of the turning base 2 (arrow N2 direction). When the arm 4A is rotated at a double angular velocity, the reference point S1 of the hand 6A advances and moves away from the turning axis Os along a moving stroke GL on a horizontal straight line passing through the turning axis Os (see arrow N3). ). Note that the distance from the rotation axis O1 to the reference point S1 and the distance from the rotation axis Os to the rotation axis O1 are not necessarily equal. If these distances are different, when the reference point S1 of the hand 6A is moved along the movement stroke GL, the angular velocity of the turning operation of the arm 4A is twice the angular velocity of the turning operation of the turning base 2. Don't be. This is the same also in the conveyance apparatus A2 you later.

  Further, as shown in FIG. 2, the hands 6A and 6B have a line segment connecting the pivot axis Os and the pivot axis O1, the pivot axis O1 and the reference at a predetermined reference position (hereinafter referred to as a reference retracted position). The angle θ1 formed by the line segment connecting the points S1 and the angle θ2 formed by the line segment connecting the rotation axis Os and the rotation axis O2 and the line segment connecting the rotation axis O2 and the reference point S2 are equal to each other. Has been. That is, when in the reference retracted position, the hands 6A and 6B are in a point-symmetric positional relationship with the turning axis Os as the center. In the present embodiment, the angles θ1 and θ2 at the reference retreat position are each 40 °. In addition, at the reference retreat position, the hands 6A and 6B are contained in a circle C1 that is the periphery of the rotation trajectory of the turning base 2, and are always located inside the circle C1 even if the turning base 2 turns. is doing.

  The advance operation of the hands 6A and 6B can be performed by interlocking the turning drive means 3 and the arm drive means 5. Specifically, for example, as described above with reference to FIG. 5, when the motors M <b> 2 and M <b> 3 are driven and controlled so that the angular velocity of the turning operation of the arm 4 </ b> A is twice the angular velocity of the turning operation of the turning base 2. The hand 6A advances so that the reference point S1 moves along the movement stroke GL. FIG. 6 shows a state where the hand 6A is at the most advanced position within the set range (hereinafter referred to as an advanced position) by a solid line and a state where the hand 6A is at the reference retreat position by a broken line. In the present embodiment, the turning base 2 turns 40 degrees around the turning axis Os with respect to the fixed base 1 by the advance operation from the reference retraction position to the advance position of the hand 6A, and the hand 6A moves with respect to the turn base 2. Is rotated by 80 ° around the rotation axis O1. At this time, the other hand 6B rotates about the rotation axis O2 by 80 ° in the direction opposite to the hand 4A (direction of arrow N4). Therefore, at the advanced position of the hand 6A, the other hand 6B has an angle θ2 formed by a line segment connecting the rotation axis Os and the rotation axis O2 and a line segment connecting the rotation axis O2 and the reference point S2. It is at the position and is located inside the circle C1.

  The transfer device A1 having the above-described configuration is used for carrying a workpiece into or out of a process chamber, for example, in semiconductor manufacturing. In this case, for example, as shown in FIG. 7, the transfer device A1 is disposed in a vacuum atmosphere in a transport chamber T in which a plurality of process chambers P are disposed in the periphery. The transport chamber T can communicate with the process chamber P through an openable door D. The transfer device A1 can transfer the workpiece W to the process chamber P by opening the door D. FIG. 7 shows a configuration example in which the transport chamber T has an octagonal shape in plan view, and a process chamber P or a load lock can be arranged on each side of the octagonal shape.

  In the transfer device A1, for example, when an unprocessed work W is loaded into the process chamber P after the processed work W is unloaded from the process chamber P, first, the swivel driving means 3 is operated to operate the work W The swivel base 2 is swung around the swivel axis Os so that the hand 6A on which no is placed faces the process chamber P. Next, as shown in FIG. 8, the door D is moved while the hand 6A is rotated so that the reference point S1 moves linearly along the movement stroke GL by interlocking the turning drive means 3 and the arm drive means 5. Through the process chamber P. Next, the processed workpiece W in the chamber P is received by the hand 6A, the turning driving means 3 and the arm driving means 5 are interlocked to perform the operation opposite to the advance operation, and the hand 6A is moved backward from the process chamber P. It is pulled back into the transport chamber T and retracted to the reference retracting position. Subsequently, the swivel drive means 3 and the other hand 6B on which the unprocessed workpiece W is placed are swung 180 degrees so that the other hand 6B faces the process chamber P. By linking the arm driving means 5, the hand 6B is advanced into the process chamber P to deliver the work W, and the hand 6B is retracted and pulled back into the transport chamber T. The delivery of the workpiece W in the process chamber P is performed by raising or lowering the lifting base 14 as appropriate.

  In this way, in the transport device A1, the two hands 6A and 6B fixedly supported on the arms 4A and 4B interfere with each other by appropriately operating the turning drive means 3 and the arm drive means 5. The advancing / retreating operation is repeated between the reference retracted position and the advanced position so that each of the reference points S1, S2 moves linearly along a predetermined movement stroke GL without doing so.

  In the double-handed transfer device A1 of the present embodiment, the arm 4A to the hand 6A or the arm 4B to the hand 6B has a single turning position, compared to a configuration in which the hand rotates with respect to the arm. , The rotation location is reduced by one location. For this reason, inconveniences such as vibration and sagging that occur due to the rotating part are reduced.

  Further, in the transport device A1, only one motor M3 is used as a drive source for rotating the two arms 4A and 4B. That is, by devising the arrangement of the arms 4A, 4B to the hands 6A, 6B and the configuration of the transmission belts 53A, 53B in the arm driving means 5, the two arms 4A, 4B can be driven without inconvenience by the common motor M3. Can do. According to such a configuration, the structure of the double-handed transfer device A1 can be simplified, which contributes to a reduction in manufacturing cost of the transfer device A1.

  In the transport device A1, the hands 6A and 6B are provided at the same height and are operated without interfering with each other. According to such a configuration, the overall height of the transfer apparatus A1 can be kept low, which contributes to downsizing of the transport chamber T and the like in which the transfer apparatus A1 is to be disposed.

9 to 11 show a transport apparatus A2 according to the first reference example of the present invention. In FIG 9 subsequent figures, the upper you facilities form the same or similar elements are denoted by the same reference numerals, and a description thereof is omitted.

In the transport device A2, as shown in FIG. 9, the hands 6A and 6B are located on the same side with respect to the straight line connecting the rotation axes O1 and O2 when in the reference retracted position. hand 6A in reference retreat position, 6B is different from the configuration of you facilities form on matching the positional relationship of point symmetry with respect to the pivot axis Os. At this reference retreat position, an angle θ1 formed by a line segment connecting the turning axis Os and the rotation axis O1, a line segment connecting the rotation axis Os and the rotation axis O2, and a line segment connecting the rotation axis O2 and the reference point S2. And the distance from the reference point S1 of the hand 6A to the turning axis Os and the distance from the reference point S2 of the hand 6B to the turning axis Os are the same. Further, the arms 4A to 6A and the arms 4B to 6B are provided at positions having different vertical heights, and the hands 6A and 6B are located close to each other so as to overlap vertically at the reference retreat position. Yes.

Further, in the transport device A2, the configuration of the arm driving means 5 is different from the transport device A1 of the above embodiment. Specifically, as reflected in Figure 10, Den dynamic belt 53A for driving the arm 4A ', and the transmission belt 53B for driving the arm 4B' are both an endless belt. The transmission belt 53A ′ is looped around the output pulley 52 and the driven pulley 42a, and the transmission belt 53B ′ is looped around the output pulley 52 and the driven pulley 42b. Thereby, when the output belt 52 rotates, the driven pulleys 42a and 42b rotate in the same direction.

  When the hand 6A is advanced, it can be performed by interlocking the turning drive means 3 and the arm drive means 5. Specifically, as shown in FIG. 11, the motors M2 and M3 are set so that the angular velocity of the turning operation of the arm 4A (arrow N2 direction) is twice the angular velocity of the turning base turning operation (arrow N1 direction). When the drive control is performed, the hand 6A advances so that the reference point S1 is separated from the turning axis Os along the moving stroke GL on the horizontal straight line passing through the turning axis Os (see arrow N3). At this time, the other hand 6B rotates about the rotation axis O2 in the same direction as the hand 4A (arrow N4 direction). In FIG. 11, the state in which the hand 6A is in the advanced position is represented by a solid line, and the state in which the hand 6A is in the reference retracted position is represented by a broken line.

In the conveyance apparatus A2 double hand type of the reference example, the arm 4A-hand 6A or the arm 4B to hand 6B, turning point is only one place, as above you facilities embodiment, times Inconveniences such as vibration and sagging caused by the moving part are reduced. Further, since the two arms 4A and 4B are driven by the common motor M3, the structure of the double-handed transfer device A2 can be simplified, and the manufacturing cost of the transfer device A2 can be reduced. To do.

  In addition, in the transport device A2, the hands 6A and 6B in the reference retreat position are located on the same side with respect to the straight line connecting the rotation axes O1 and O2, and are arranged close to each other so as to overlap vertically. For this reason, for example, when the unprocessed workpiece W is loaded into the process chamber after the processed workpiece W is unloaded from the process chamber, the swivel base 2 is moved after the processed workpiece W is collected by the one hand 6A. The other hand 6B on which the unprocessed workpiece W is placed can be directed to the process chamber only by turning slightly. Therefore, according to the transfer device A2, the processed and unprocessed workpieces W can be quickly delivered, which contributes to shortening the production cycle time in semiconductor manufacturing.

  Although the hands 6A and 6B are positioned so as to overlap each other, the rotation axes O1 and O2, which are the rotation positions of the arms 4A and 4B, are spaced apart from each other with the rotation axis Os interposed therebetween. Even if the arms 4A and 4B are rotated, the rotation axis O1 of the upper arm 4A does not pass right above the hand 6B disposed on the lower side. For this reason, the problem of particle contamination does not occur in the workpiece W placed on the lower hand 6B.

12 to 14 show a transport apparatus A3 according to a second reference example of the present invention. In the transfer device A3, as clearly shown in FIG. 13, the arm driving means 5 includes two motors M4 and M5 for individually driving the two arms 4A and 4B. The arm 4A is linked to the motor M4 by an endless belt 53A ″ hung between an output pulley 52A provided on the output shaft 51A of the motor M4 and the driven pulley 42a. The arm 4B is linked to the motor M5. Is connected to the motor M5 by an endless belt 53B "wound around an output pulley 52B provided on the output shaft 51B and a driven pulley 42b. With this configuration, the two arms 4A and 4B can be independently rotated by the corresponding motors M4 and M5.

In addition, the conveying device A3, as reflected in Figure 12, the arm 4A, is different from the 4B or hand 6A, 6B are top you facilities Constitution of. Specifically, the distance from the rotation axis O1 to the reference point S1 is larger than the distance from the rotation axis Os to the rotation axis O1, and the distance from the rotation axis O2 to the reference point S2. Is greater than the distance from the pivot axis Os to the pivot axis O2. That is, the arms 4A and 4B have relatively large longitudinal dimensions. Thereby, the conveying device A3 of the present embodiment, the reference retreat position, the arm 4A, 4B or hand 6A, the posture of the 6B is different from the above you facilities embodiment for swivel 2. The arms 4A and 4B have a curved shape in which one side edges 43a and 43b in the width direction are recessed in plan view.

When the hand 6A is advanced, it can be performed by interlocking the turning drive means 3 and the arm drive means 5. Specifically, by controlling the motors M2 and M4, as shown in FIG. 14, the hand 6A causes the reference axis O1 to move along the movement stroke GL on the horizontal straight line passing through the rotation axis Os. Advances away from. In the present reference example , since the distance from the rotation axis O1 to the reference point S1 is greater than the distance from the rotation axis Os to the rotation axis O1, the angular velocity of the turning operation of the arm 4A is that of the turning base 2. It is smaller than twice the angular velocity of the turning motion. At this time, since the arm 4 </ b> A is independently rotated, the other arm 4 </ b> B continues to take the same posture with respect to the turning base 2. In FIG. 14, the state in which the hand 6A is in the advanced position is indicated by a solid line, and the state in the intermediate position is indicated by a broken line.

In the double-handed transfer device A3 of this reference example , the arm 4A to the hand 6A, or the arm 4B to the hand 6B has only one turning position. Therefore, similarly to the above you facilities embodiment, inconvenience such as vibration and sagging caused by the rotating portion is reduced.

  As can be understood with reference to FIG. 14, in the transfer device A3, since the one side edge 43a of the arm 4A is recessed, in the process of entering the hand 6A into the process chamber P, It is avoided that the arm 4A interferes with the opening. According to such a configuration, the planar size of the transport chamber T or the process chamber P can be further reduced.

  Further, in the transfer device A3, since the longitudinal dimension of the arm 4A is relatively large, the advance stroke of the hand 6A can be increased.

  Although the embodiment of the present invention has been described above, the technical scope of the present invention is not limited to the above-described embodiment. Various modifications can be made to the specific configuration of each part of the transport device according to the present invention without departing from the spirit of the invention.

  Although the above embodiment has been described on the assumption that it is used in a vacuum atmosphere, it is needless to say that the transfer device according to the present invention can be configured to be used under atmospheric pressure.

It is an overall perspective view of a conveying device according to implementation embodiments of the present invention, showing a state where the hand is at the reference retreat position. It is a top view of the conveying apparatus shown in FIG. It is sectional drawing which follows the III-III line of FIG. It is sectional drawing which follows the IV-IV line of FIG. It is a top view which shows the state which one hand of the conveying apparatus shown in FIG. 1 exists in the intermediate position of a movement stroke. It is a top view which shows the state which one hand of the conveying apparatus shown in FIG. 1 exists in an advance position. It is explanatory drawing of the use condition of the conveying apparatus shown in FIG. It is explanatory drawing of the use condition of the conveying apparatus shown in FIG. It is a top view of the conveying apparatus which concerns on the 1st reference example of this invention, and shows the state in which each hand exists in a reference | standard retraction position. It is sectional drawing which follows the XX line of FIG. FIG. 10 is a plan view showing a state in which one hand of the transport device shown in FIG. 9 is in the advanced position. It is a top view similar to FIG. 2 which shows the conveying apparatus which concerns on the 2nd reference example of this invention. It is sectional drawing which follows the XIII-XIII line | wire of FIG. It is a top view which shows the state which has one hand of the conveying apparatus shown in FIG. 12 in an advance position.

Explanation of symbols

A1, A2, A3 Conveying device GL Movement stroke M3 Motor M4 (First) motor M5 (Second) motor Os Rotating axis O1 (First) Rotating axis O2 (Second) Rotating axis W Work 2 Turning base 3 Turning drive means 4A (first) arm 4B (second) arm 5 Arm drive means 6A (first) hand 6B (second) hand 51 output shaft 52 output pulley 42a (first) Driven pulley 42b (second) driven pulleys 53A, 53A ', 53B, 53B' transmission belts 53A ", 53B" endless belts (belts)

Claims (1)

A swivel base capable of swiveling around a vertical swivel axis;
First and second arms supported so as to be rotatable about vertical first and second rotation axes that are equidistant from the rotation axis with respect to the rotation base with respect to the rotation base. When,
First and second hands that are fixedly supported by each of the first and second arms and can hold a thin plate-like workpiece;
A turning drive means for turning the turning base around the turning axis;
Arm driving means for rotating the first and second arms around the rotation axis,
The arm driving means is configured to include a motor mounted on the turning base and driving the first arm and the second arm in common.
The motor is arranged such that its output shaft is oriented in the vertical direction, and the output shaft is provided with an output pulley, while the first and second arms are respectively provided with the first and second motors. The first driven pulley and the second driven pulley that rotate around the rotation shaft are integrally provided, and between the output pulley and the first driven pulley, and between the output pulley and the second driven pulley. Between the pulleys, the transmission belt is wound around so that the first driven pulley and the second driven pulley rotate in opposite directions, respectively.
The first and second hands are located at the same height,
Each of the above-mentioned hands has a reference point where the center of the work to be held is to be located,
The swivel driving means and the arm driving means are interlocked so that either one of the first and second hands selected is retreated so that the reference point moves on a horizontal straight line passing through the swivel axis. Move between position and advance position ,
When one of the hands is in the reference retracted position, the first and second hands are in a point-symmetrical positional relationship with respect to the turning axis and are separated from each other. apparatus.

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