JPH0333037Y2 - - Google Patents

Description

[Detailed description of the invention] (a) Industrial application field The present invention relates to an apparatus for operating an equipment mount in a closed chamber, and in particular, for example, for driving a grating or mirror of a spectroscopic analyzer installed in a vacuum chamber. Regarding the equipment mount actuating device of the section.

(b) Prior Art A conventional device of this type was as shown in FIG.
That is, the connection tube opening 1 provided on the wall of the cylindrical vacuum chamber 1
The tip surface of a was a cylindrical surface 1b centered on the X-axis corresponding to the central axis O of the cylindrical chamber, and an X-axis slide table 1c was slidably mounted on this. The distal end surface of this table 1c is a cylindrical surface 1d centered on the Y-axis, and a Y-axis sliding table 1e is slidably mounted thereon. Furthermore, an equipment mounting base support arm 1f was mounted on the X-axis sliding base 1e so as to be rotatable around the Z-axis. Therefore, not only did the three rotating sliding parts require sophisticated sealing, but also the centering accuracy of the sliding surfaces was poor, making machining and assembly adjustments difficult.

(c) Purpose The purpose of the present invention is to provide a device that eliminates the above-mentioned drawbacks, avoids introducing a rotating shaft into a closed chamber, and eliminates sliding surfaces that can cause leaks.

(d) Structure To achieve this purpose, the structure of the present invention is as follows.

In a device for operating an equipment mount in a sealed room, in which the equipment mount 13 in the sealed room 1 is displaced from the outside of the room by penetrating the wall of the room, the first connecting tube 1b provided on the wall of the room is provided. a support tube 2 fixed to the support tube 2 extending through the inside thereof to approximately the center of the chamber; a first frame 11 rotatably mounted on the support tube; and a rotation axis Z of the first frame. a second frame 12 rotatably mounted around an axis X perpendicular to the second frame; and a second frame 12 rotatably mounted around an axis Y perpendicular to each of the rotational axes 11 and 12 of the first and second frames at one point. a third frame 13 on which equipment is mounted; and a third frame 13 extending from the back surface of the third frame so as to be approximately perpendicular to a plane formed by the rotation axes of the second and third frames 11 and 12, and supporting the support. A first tube extending through the inside of the tube 2 to near the chamber outlet of the support tube.
A seal cylinder having a lever 21, a bottomed cylinder 23a that covers and rotatably supports the tip of the first lever, and a flexible seal cylinder 23c connected between the tip and the inside of the support cylinder 2. a portion 23 extending from a side surface of the first frame 11;
A second lever 22 extends to the outside of the container through the second connecting tube opening 1c, and a flexible seal tube 26b is provided at least in part to seal between the second lever and the second connecting tube opening 1c. an X-axis operating section 30 connected to the first lever 21 so as to rotate the third frame 13 about the X-axis; A Y-axis actuator 40 is connected to the first lever 21 to rotate the first frame 11 around the Y-axis, and a Y-axis actuator 40 is connected to the second lever 22 to rotate the first frame 11 around the Z-axis. and a Z-axis operating section 50.

(E) Embodiment An embodiment of the present invention will be described below based on the drawings. In FIG. 1, the cylindrical body 1a of the vacuum chamber 1
Regarding the central axis O (corresponding to the Y-axis Y described later)
The first and second connecting cylinders 1b, 1 are placed on the chamber wall separated by 90 degrees.
c is provided to protrude toward the outside of the room. A support cylinder 2 is fixed to the tip of the first cylinder 1b so as to extend through the inside thereof to approximately the center of the chamber 1. The central axis of this cylinder 2 corresponds to a Z-axis Z perpendicular to the axis O.

Now, here, at the tip of the support cylinder 2, an equipment mount 13 is rotatably mounted around three mutually orthogonal axes, which are the most important of the present invention. That is, the first frame 11 is rotatably attached to the support cylinder 2 via the ball bearing 3. The frame 11 has a through hole 11c that is perpendicular to the central axis Z of the cylinder 2 and communicates with the hole of the cylinder 2.
It consists of a substrate 11a with a base plate 11a, and an arm 11b standing upright from the periphery of the base plate 11a. In addition, a shaft 12b is attached to the arm 11b so that the first frame 11 can freely rotate around the X-axis perpendicular to the Z-axis, which is the axis of rotation.
The second frame 12 is mounted via. The second frame consists of an annular base 12a. Furthermore, the second
Inside the frame 12, a third frame 13 serving as a mounting base for various devices (grating A in the figure) is rotatably mounted via a shaft 13b. The third frame has a flat container-like main body 13a. Therefore, the axis 13b of the third frame 13 is rotated so as to be rotatable around the Y axis Y, which is perpendicular to the rotation axes Z and X of the first and second frames 11 and 12 at one point.
is placed.

With this, grating A is X, Y, Z
It can be rotated around three axes.

Next, in order to rotate the third frame 13 around the X and Y axes, a first lever 21 is provided to protrude from the back surface of the third frame 13. This lever is the second and third lever.
The support cylinder 2 extends approximately perpendicularly to the plane formed by the X and Y axes, which are the rotational axes of the frame.
It passes through the inside of the room and extends to the vicinity of the room exit.

The space between the first lever 21 and the support tube 2 is sealed, and the first lever 21 is allowed to rotate slightly.
A seal cylinder portion 23 is provided. That is, a bottomed cylindrical body 23a is attached to cover the tip of the first lever 21 via a ball bearing 23b, and a flexible member 23a is attached between the tip of this cylindrical body 23a (inner end of the room) and the inside of the support tube 2. A bellows 23c serving as a seal cylinder is connected. Cylindrical body 23
The first arm 24 is connected to the first lever 21 from the bottom outer surface of a.
It is installed protrudingly so that it is in a straight line with.

Next, in order to slightly rotate the first frame 11 around the Z-axis, a second lever 22 protrudes from the side surface of the first frame and extends to the outside of the container through the second connecting tube opening 1c. Then, in the same manner as described above, the flange 2 fixed to the second lever 22 is
6a and the bellows 26b constitute a seal cylinder portion 26.

Further, the first lever 2 is rotated so as to slightly rotate the third frame 13 around the Y axis, the second frame 12 around the X axis, and the first frame 11 around the Z axis.
1, an X-axis actuator 30, a Y-axis actuator 40, and a Z-axis actuator 50 of the second lever 22 are connected.

That is, in the X-axis operating section 30, as shown in FIGS. 1 and 2, a motor 32 is installed on an X-axis stand 31 fixed to the container 1, and the tip of the X-axis operating threaded rod 33 is moved forward and backward by the motor 32. A Y-axis stand 41, which will be described later, is fixed to the
It slides along the shaft guide 34.

Similarly, in the Y-axis operating section 40, the Y-axis
A motor 42 and an operating rod 43 are provided on the shaft stand 41. A connecting block 45 fixed to the tip of the actuating rod 43 slides along a Y-axis guide 44 provided on the Y-axis stand 41. The connecting block 45 is connected to the first arm 24 via a spherical bearing 46.

In addition, in the Z-axis operating section 50, the first, third,
4. As shown in the figure, the bracket 5 fixed to the container 1
5, the Z-axis table 5 is connected via an axis 56 parallel to the Z-axis.
1 is mounted so as to be slightly rotatable. A motor 52 and a Z-axis operating threaded rod 53 that is moved forward and backward by the motor 52 are provided on this stand. A connecting block 57 fixed to the tip of the threaded rod 53 is connected to the tip of the second lever 22 via a spherical bearing 58, and the block 57 slides along a Z-axis guide 54 fixed to the Z-axis base 51. move.

In FIG. 1, 1d and 1e are the entrance and exit of the light beam to the grating A, and 1f is an observation port provided on the Z axis.

Next, the operating state will be explained. To slightly rotate grating A around the X-axis, use the X-axis actuator 3.
When the motor 32 of No. 0 is started, the actuating rod 33 moves forward or backward slightly, thereby the Y-axis stand 41 moves forward and backward in the Y-axis direction, and the third frame 13 moves to the gray direction via the first lever 21. It rotates slightly around the X axis together with the ding A around the axis 12b of the second frame 12. Similarly, rotation around the Y-axis is also performed by the Y-axis operating section 40.

Next, in order to rotate around the Z-axis, use the Z-axis operating section 5.
When the motor 52 of 0 is started, the actuating rod 53 moves forward or backward, thereby the Z-axis base 51 swings around the shaft 56, and the connecting block 57 swings in an arcuate trajectory around the Z-axis. However, the second lever 22 swings around the Z-axis, and the first frame 11 rotates slightly around the Z-axis together with the second frame 12. At this time, rotation of the first lever 21 is allowed by the bearing 23b of the seal cylinder portion 23.

Connecting blocks 45 and 57 are connected to spherical bearings 46 at the tips of the first and second levers 21 and 22, respectively.
and 58, the first and second levers 21, 22 are allowed to swing relative to the linear reciprocating movements of the actuating rods 33, 43, and 53. Making the Z-axis stand 51 swingable via the shaft 56 helps to widen the swing amplitude of the second lever 22.

The present invention is applicable not only to vacuum chambers but also to pressurized chambers maintained at a pressure greater than atmospheric pressure.

(F) Effect As described above, the present invention supports a device mounting base with a structure that is rotatable around three mutually orthogonal axes, and drives the base in two ways: around the X and Y axes and around the Z axis. Each operation was performed by swinging a lever. In addition, a flexible seal cylinder is connected between the lever and the inner surface of the container through which the lever penetrates to the outside. Therefore,
There are no swinging parts, no distortion due to wear, etc., no introduction of rotation into the vacuum, and no leakage from this part. Additionally, since there is no longer a need for a seal on the rotating shaft, baking can be performed at high temperatures without being limited by sealing materials. Moreover, since the equipment mounting base can be rotated independently on each of the X, Y, and Z axes, the rotation angle can be calculated by an electronic computer without interference, making automatic control possible.

[Brief explanation of the drawing]

Fig. 1 is a partially cutaway front view showing an embodiment of the present invention, Figs. 2 and 3 are - and - side views thereof, respectively, Fig. 4 is a - side view of Fig. 3, and Fig. 5 is a side view of Fig. 3. FIG. 2 is a longitudinal cross-sectional view of a conventional equipment mount actuating device. 1... Vacuum chamber, 1a... Cylindrical body, 1b... First connection tube, 1c... Second connection tube, 2... Support tube,
11...first frame, 12...second frame,
13...Third frame, 21...First lever, 2
2...Second lever, 23, 26...Seal cylinder part,
30...X-axis operating section, 40...Y-axis operating section, 50
...Z-axis operating section.

Claims (1)

[Claims for Utility Model Registration] (1) An apparatus for operating an equipment mount in a sealed room, which displaces the equipment mount 13 in the sealed room 1 from the outside of the room by penetrating the wall of the room, A support tube 2 fixed to a first connection tube opening 1b provided on a chamber wall and extending through the inside thereof to approximately the center of the chamber, and a first frame 11 rotatably mounted on the support tube. , a second frame 12 rotatably mounted on the first frame around an axis X perpendicular to the rotation axis Z thereof, and one point for each of the rotation axes of the first and second frames 11 and 12. A third frame 1 is rotatably mounted around an axis Y orthogonal to the third frame 1 to which equipment is attached.
3, and a first lever projecting from the back surface of the third frame so as to be approximately perpendicular to the plane formed by the rotational axes of the second and third frames 12 and 13, and extending to the vicinity of the chamber outlet of the support tube. 21 and
a seal cylinder part 23 having a bottomed cylinder body 23a that covers and rotatably supports the tip of the first lever, and a flexible seal cylinder 23c connected between the tip and the inside of the support cylinder 2; Said first frame 1
1 from the side of the second connection tube opening 1.
a second lever 22 extending through c to the outside of the container;
and a seal cylinder portion 26 having a flexible seal cylinder 26b at least in part so as to seal between the second lever and the second connection cylinder opening 1c, and the third frame 13 are rotated around the X axis. an X-axis actuator 30 connected to the first lever 21 so as to rotate the second frame 12 about the Y-axis together with the third frame 13; Y-axis operating section 40
and a Z-axis actuator 50 connected to the second lever 22 so as to rotate the first frame 11 about the Z-axis. (2) Each of the X-axis, Y-axis, and Z-axis operating portions is connected directly or indirectly to an operating rod that reciprocates in a linear manner with respect to the tips of the first and second levers via a spherical bearing. An apparatus for operating an equipment mount in a closed room according to claim 1, characterized in that the apparatus comprises: