JPH01115604A - ウエハの切断装置 - Google Patents

ウエハの切断装置

Info

Publication number
JPH01115604A
JPH01115604A JP62274537A JP27453787A JPH01115604A JP H01115604 A JPH01115604 A JP H01115604A JP 62274537 A JP62274537 A JP 62274537A JP 27453787 A JP27453787 A JP 27453787A JP H01115604 A JPH01115604 A JP H01115604A
Authority
JP
Japan
Prior art keywords
grindstone
ingot
hone
rotating body
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62274537A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0471688B2 (enrdf_load_stackoverflow
Inventor
Katsuo Honda
本田　勝男
Susumu Sawafuji
進 沢藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP62274537A priority Critical patent/JPH01115604A/ja
Priority to EP19920119722 priority patent/EP0534499A3/en
Priority to EP88101301A priority patent/EP0313714B1/en
Priority to DE88101301T priority patent/DE3884903T2/de
Priority to US07/150,376 priority patent/US4852304A/en
Priority to KR1019880001384A priority patent/KR930001284B1/ko
Priority to US07/344,956 priority patent/US4894956A/en
Publication of JPH01115604A publication Critical patent/JPH01115604A/ja
Publication of JPH0471688B2 publication Critical patent/JPH0471688B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/003—Multipurpose machines; Equipment therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mining & Mineral Resources (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP62274537A 1987-10-29 1987-10-29 ウエハの切断装置 Granted JPH01115604A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP62274537A JPH01115604A (ja) 1987-10-29 1987-10-29 ウエハの切断装置
EP19920119722 EP0534499A3 (en) 1987-10-29 1988-01-29 Method for slicing a wafer
EP88101301A EP0313714B1 (en) 1987-10-29 1988-01-29 Apparatus and method for slicing a wafer
DE88101301T DE3884903T2 (de) 1987-10-29 1988-01-29 Vorrichtung und Verfahren zum Abschneiden einer Halbleiterscheibe.
US07/150,376 US4852304A (en) 1987-10-29 1988-01-29 Apparatus and method for slicing a wafer
KR1019880001384A KR930001284B1 (ko) 1987-10-29 1988-02-13 웨이퍼 절단장치 및 그 방법
US07/344,956 US4894956A (en) 1987-10-29 1989-04-28 Apparatus and method for slicing a wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62274537A JPH01115604A (ja) 1987-10-29 1987-10-29 ウエハの切断装置

Publications (2)

Publication Number Publication Date
JPH01115604A true JPH01115604A (ja) 1989-05-08
JPH0471688B2 JPH0471688B2 (enrdf_load_stackoverflow) 1992-11-16

Family

ID=17543090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62274537A Granted JPH01115604A (ja) 1987-10-29 1987-10-29 ウエハの切断装置

Country Status (1)

Country Link
JP (1) JPH01115604A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0393509A (ja) * 1989-09-07 1991-04-18 Tokyo Seimitsu Co Ltd スライシングマシンの切断方法
EP0750972A1 (en) * 1995-06-30 1997-01-02 Tokyo Seimitsu Co.,Ltd. Ingot slicing machine with built-in grinder
CN116117619A (zh) * 2022-12-30 2023-05-16 江苏福旭科技有限公司 一种太阳能级单晶硅片表面处理设备

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0393509A (ja) * 1989-09-07 1991-04-18 Tokyo Seimitsu Co Ltd スライシングマシンの切断方法
EP0750972A1 (en) * 1995-06-30 1997-01-02 Tokyo Seimitsu Co.,Ltd. Ingot slicing machine with built-in grinder
US5836808A (en) * 1995-06-30 1998-11-17 Tokyo Seimitsu Co., Ltd. Slicing machine with built-in grinder
CN116117619A (zh) * 2022-12-30 2023-05-16 江苏福旭科技有限公司 一种太阳能级单晶硅片表面处理设备
CN116117619B (zh) * 2022-12-30 2023-10-13 江苏福旭科技有限公司 一种太阳能级单晶硅片表面处理设备

Also Published As

Publication number Publication date
JPH0471688B2 (enrdf_load_stackoverflow) 1992-11-16

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