JPS6353929B2 - - Google Patents
Info
- Publication number
- JPS6353929B2 JPS6353929B2 JP904284A JP904284A JPS6353929B2 JP S6353929 B2 JPS6353929 B2 JP S6353929B2 JP 904284 A JP904284 A JP 904284A JP 904284 A JP904284 A JP 904284A JP S6353929 B2 JPS6353929 B2 JP S6353929B2
- Authority
- JP
- Japan
- Prior art keywords
- blade
- cut
- unit
- cutting
- inner peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 14
- 238000005498 polishing Methods 0.000 description 7
- 239000010432 diamond Substances 0.000 description 6
- 229910003460 diamond Inorganic materials 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 239000010687 lubricating oil Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
- B28D5/029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a plurality of cutting blades
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP904284A JPS60151008A (ja) | 1984-01-20 | 1984-01-20 | マルチブレ−ドスライシング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP904284A JPS60151008A (ja) | 1984-01-20 | 1984-01-20 | マルチブレ−ドスライシング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60151008A JPS60151008A (ja) | 1985-08-08 |
| JPS6353929B2 true JPS6353929B2 (enrdf_load_stackoverflow) | 1988-10-26 |
Family
ID=11709583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP904284A Granted JPS60151008A (ja) | 1984-01-20 | 1984-01-20 | マルチブレ−ドスライシング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60151008A (enrdf_load_stackoverflow) |
-
1984
- 1984-01-20 JP JP904284A patent/JPS60151008A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60151008A (ja) | 1985-08-08 |
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