JPH01110400U - - Google Patents

Info

Publication number
JPH01110400U
JPH01110400U JP650488U JP650488U JPH01110400U JP H01110400 U JPH01110400 U JP H01110400U JP 650488 U JP650488 U JP 650488U JP 650488 U JP650488 U JP 650488U JP H01110400 U JPH01110400 U JP H01110400U
Authority
JP
Japan
Prior art keywords
electron beam
irradiation
window
grid
plating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP650488U
Other languages
English (en)
Other versions
JPH0616400Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP650488U priority Critical patent/JPH0616400Y2/ja
Publication of JPH01110400U publication Critical patent/JPH01110400U/ja
Application granted granted Critical
Publication of JPH0616400Y2 publication Critical patent/JPH0616400Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)

Description

【図面の簡単な説明】
第１図は非走査型電子線照射装置の略断面図。
第２図は照射窓の部分の拡大断面図。第３図は本
考案の実施例を示すグリツドの斜視図。第４図は
本考案の他の実施例を示すグリツドの斜視図。 １……カソードフイラメント、２……カソード
シールド、３……加速チヤンバ、４……照射窓、
５……箱体、６……Ｘ線遮蔽体、７……搬送コン
ベア、８……グリツド、９……窓箔、１０……窓
箔押え、１１……ガス入口、１２……ガス出口、
１３……冷却水通し穴、１４，１４′……開口、
１５……被処理物、１６……非開口部、１７……
クロムメツキ層、２０……電子線、２１〜２６…
…ローラ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 加速チヤンバによつて囲まれた真空中において
    電子線を発生し加速し照射窓４の窓箔９を通して
    電子線を大気中へとり出し被処理物１５に照射す
    る事とした電子線照射装置において、照射窓４を
    構成する多数の開口１４，１４′を有するグリツ
    ド８が銅で作られており、少なくとも電子線の当
    たる方の面にクロムメツキ層１７が設けられてい
    る事を特徴とする電子線照射装置。
JP650488U 1988-01-20 1988-01-20 電子線照射装置 Expired - Lifetime JPH0616400Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP650488U JPH0616400Y2 (ja) 1988-01-20 1988-01-20 電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP650488U JPH0616400Y2 (ja) 1988-01-20 1988-01-20 電子線照射装置

Publications (2)

Publication Number Publication Date
JPH01110400U true JPH01110400U (ja) 1989-07-25
JPH0616400Y2 JPH0616400Y2 (ja) 1994-04-27

Family

ID=31210740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP650488U Expired - Lifetime JPH0616400Y2 (ja) 1988-01-20 1988-01-20 電子線照射装置

Country Status (1)

Country Link
JP (1) JPH0616400Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013024557A (ja) * 2011-07-14 2013-02-04 Hamamatsu Photonics Kk 電子線照射装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013024557A (ja) * 2011-07-14 2013-02-04 Hamamatsu Photonics Kk 電子線照射装置

Also Published As

Publication number Publication date
JPH0616400Y2 (ja) 1994-04-27

Similar Documents

Publication Publication Date Title
JPH01110400U (ja)
JPH0248900U (ja)
JPS6413659U (ja)
JPS6348200U (ja)
JPH03104900U (ja)
JPS62129760U (ja)
JPS63175155U (ja)
JPH01119052U (ja)
JPH0315421U (ja)
JPS6413662U (ja)
JPH0616399Y2 (ja) 電子線加速装置の照射窓
JPH0342034Y2 (ja)
JPH0248898U (ja)
JPS6361123U (ja)
JPS6394957U (ja)
JPS63111748U (ja)
JPS6455659U (ja)
JPH01115153U (ja)
JPH01166000A (ja) 電子線照射装置のビームシャッタ
JPH034299U (ja)
JPS6281100U (ja)
RU96102739A (ru) Способ подготовки субстрата для выращивания грибов
JPS6057046U (ja) Ｘ線光電子分析用ｘ線発生装置
JPS6124700U (ja) 電子線照射装置
JPS6413660U (ja)