JPS6281100U - - Google Patents

Info

Publication number
JPS6281100U
JPS6281100U JP17241285U JP17241285U JPS6281100U JP S6281100 U JPS6281100 U JP S6281100U JP 17241285 U JP17241285 U JP 17241285U JP 17241285 U JP17241285 U JP 17241285U JP S6281100 U JPS6281100 U JP S6281100U
Authority
JP
Japan
Prior art keywords
electron beam
vacuum exhaust
exhaust device
accelerator
beam accelerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17241285U
Other languages
English (en)
Other versions
JPH054000Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17241285U priority Critical patent/JPH054000Y2/ja
Publication of JPS6281100U publication Critical patent/JPS6281100U/ja
Application granted granted Critical
Publication of JPH054000Y2 publication Critical patent/JPH054000Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Particle Accelerators (AREA)

Description

【図面の簡単な説明】
第１図は、この考案の一実施例に係る電子線照
射装置を示す概略図である。第２図は、従来の電
子線照射装置の一例を示す概略図である。 １…電子線加速器、５…ゲートバルブ、６…油
拡散ポンプ、７…油回転ポンプ、１０…真空ゲー
ジ、１１…被照射物、１２…函体、Ｅ…電子線、
Ａ…空気。

Claims (1)

    【実用新案登録請求の範囲】
  1. 被照射物に電子線を照射するための電子線加速
    器と、当該電子線加速器の内部を真空排気するた
    めの真空排気機器を有し、前記真空排気機器を気
    密性の函体内に一括して収納したことを特徴とす
    る電子線照射装置。
JP17241285U 1985-11-09 1985-11-09 Expired - Lifetime JPH054000Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17241285U JPH054000Y2 (ja) 1985-11-09 1985-11-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17241285U JPH054000Y2 (ja) 1985-11-09 1985-11-09

Publications (2)

Publication Number Publication Date
JPS6281100U true JPS6281100U (ja) 1987-05-23
JPH054000Y2 JPH054000Y2 (ja) 1993-01-29

Family

ID=31108922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17241285U Expired - Lifetime JPH054000Y2 (ja) 1985-11-09 1985-11-09

Country Status (1)

Country Link
JP (1) JPH054000Y2 (ja)

Also Published As

Publication number Publication date
JPH054000Y2 (ja) 1993-01-29

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