JP7845048B2 - 液体噴射ヘッド及び液体噴射装置並びに圧電デバイス - Google Patents

液体噴射ヘッド及び液体噴射装置並びに圧電デバイス

Info

Publication number
JP7845048B2
JP7845048B2 JP2022085846A JP2022085846A JP7845048B2 JP 7845048 B2 JP7845048 B2 JP 7845048B2 JP 2022085846 A JP2022085846 A JP 2022085846A JP 2022085846 A JP2022085846 A JP 2022085846A JP 7845048 B2 JP7845048 B2 JP 7845048B2
Authority
JP
Japan
Prior art keywords
region
electrode
pressure chamber
layer
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022085846A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023173529A5 (https=
JP2023173529A (ja
Inventor
泰志 山崎
政貴 森
栄樹 平井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2022085846A priority Critical patent/JP7845048B2/ja
Priority to US18/322,423 priority patent/US12466184B2/en
Priority to CN202310603098.9A priority patent/CN117124733A/zh
Publication of JP2023173529A publication Critical patent/JP2023173529A/ja
Publication of JP2023173529A5 publication Critical patent/JP2023173529A5/ja
Application granted granted Critical
Publication of JP7845048B2 publication Critical patent/JP7845048B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2022085846A 2022-05-26 2022-05-26 液体噴射ヘッド及び液体噴射装置並びに圧電デバイス Active JP7845048B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022085846A JP7845048B2 (ja) 2022-05-26 2022-05-26 液体噴射ヘッド及び液体噴射装置並びに圧電デバイス
US18/322,423 US12466184B2 (en) 2022-05-26 2023-05-23 Liquid ejecting head, liquid ejecting apparatus, and piezoelectric device
CN202310603098.9A CN117124733A (zh) 2022-05-26 2023-05-25 液体喷射头、液体喷射装置以及压电器件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022085846A JP7845048B2 (ja) 2022-05-26 2022-05-26 液体噴射ヘッド及び液体噴射装置並びに圧電デバイス

Publications (3)

Publication Number Publication Date
JP2023173529A JP2023173529A (ja) 2023-12-07
JP2023173529A5 JP2023173529A5 (https=) 2025-03-11
JP7845048B2 true JP7845048B2 (ja) 2026-04-14

Family

ID=88860632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022085846A Active JP7845048B2 (ja) 2022-05-26 2022-05-26 液体噴射ヘッド及び液体噴射装置並びに圧電デバイス

Country Status (3)

Country Link
US (1) US12466184B2 (https=)
JP (1) JP7845048B2 (https=)
CN (1) CN117124733A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115210891B (zh) * 2020-02-26 2026-03-17 株式会社村田制作所 压电器件

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009234254A (ja) 2008-03-03 2009-10-15 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
JP2015166142A (ja) 2014-03-03 2015-09-24 株式会社リコー 液体吐出ヘッド、画像形成装置
JP2017042952A (ja) 2015-08-25 2017-03-02 セイコーエプソン株式会社 電子デバイス、圧電デバイス、液体噴射ヘッド、及び、これらの製造方法
JP2017065050A (ja) 2015-09-30 2017-04-06 ブラザー工業株式会社 液体吐出装置及び液体吐出装置の製造方法
US20190329551A1 (en) 2018-04-27 2019-10-31 Stmicroelectronics S.R.L. Fluid ejection device with piezoelectric actuator and manufacturing process thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5316782B2 (ja) 2009-03-10 2013-10-16 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
JP6206666B2 (ja) * 2013-11-01 2017-10-04 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP2015166160A (ja) 2014-03-04 2015-09-24 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、液体噴射ヘッドの製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009234254A (ja) 2008-03-03 2009-10-15 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
JP2015166142A (ja) 2014-03-03 2015-09-24 株式会社リコー 液体吐出ヘッド、画像形成装置
JP2017042952A (ja) 2015-08-25 2017-03-02 セイコーエプソン株式会社 電子デバイス、圧電デバイス、液体噴射ヘッド、及び、これらの製造方法
JP2017065050A (ja) 2015-09-30 2017-04-06 ブラザー工業株式会社 液体吐出装置及び液体吐出装置の製造方法
US20190329551A1 (en) 2018-04-27 2019-10-31 Stmicroelectronics S.R.L. Fluid ejection device with piezoelectric actuator and manufacturing process thereof

Also Published As

Publication number Publication date
US12466184B2 (en) 2025-11-11
US20230382114A1 (en) 2023-11-30
JP2023173529A (ja) 2023-12-07
CN117124733A (zh) 2023-11-28

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