JP7822383B2 - 試験体のガスリークを検出するガスリーク検知装置およびガスリーク検知方法 - Google Patents

試験体のガスリークを検出するガスリーク検知装置およびガスリーク検知方法

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Publication number
JP7822383B2
JP7822383B2 JP2023534329A JP2023534329A JP7822383B2 JP 7822383 B2 JP7822383 B2 JP 7822383B2 JP 2023534329 A JP2023534329 A JP 2023534329A JP 2023534329 A JP2023534329 A JP 2023534329A JP 7822383 B2 JP7822383 B2 JP 7822383B2
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Japan
Prior art keywords
gas
test
vacuum pump
connector
pressure sensor
Prior art date
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Active
Application number
JP2023534329A
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English (en)
Japanese (ja)
Other versions
JP2023554280A5 (enExample
JP2023554280A (ja
Inventor
ヴェツィヒ・ダニエル
ルース・マルセル
デッカー・シルヴィオ
グレルマン・トマス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
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Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of JP2023554280A publication Critical patent/JP2023554280A/ja
Publication of JP2023554280A5 publication Critical patent/JP2023554280A5/ja
Application granted granted Critical
Publication of JP7822383B2 publication Critical patent/JP7822383B2/ja
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Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L2019/0053—Pressure sensors associated with other sensors, e.g. for measuring acceleration, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/3281—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
JP2023534329A 2020-12-21 2021-12-01 試験体のガスリークを検出するガスリーク検知装置およびガスリーク検知方法 Active JP7822383B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102020134370.1A DE102020134370A1 (de) 2020-12-21 2020-12-21 Gaslecksuchvorrichtung und Gaslecksuchverfahren zur Erkennung eines Gaslecks in einem Prüfling
DE102020134370.1 2020-12-21
PCT/EP2021/083737 WO2022135854A1 (de) 2020-12-21 2021-12-01 Gaslecksuchvorrichtung und gaslecksuchverfahren zur erkennung eines gaslecks in einem prüfling

Publications (3)

Publication Number Publication Date
JP2023554280A JP2023554280A (ja) 2023-12-27
JP2023554280A5 JP2023554280A5 (enExample) 2024-06-14
JP7822383B2 true JP7822383B2 (ja) 2026-03-02

Family

ID=79170731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023534329A Active JP7822383B2 (ja) 2020-12-21 2021-12-01 試験体のガスリークを検出するガスリーク検知装置およびガスリーク検知方法

Country Status (8)

Country Link
US (1) US20240019336A1 (enExample)
EP (1) EP4264218B1 (enExample)
JP (1) JP7822383B2 (enExample)
KR (1) KR20230123937A (enExample)
CN (1) CN116569015A (enExample)
DE (1) DE102020134370A1 (enExample)
TW (1) TWI904305B (enExample)
WO (1) WO2022135854A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
US12031885B2 (en) * 2022-03-31 2024-07-09 Applied Materials, Inc. Leak detection for gas sticks
DE102022111596A1 (de) 2022-05-10 2023-11-16 Inficon Gmbh Lecksuchvorrichtung und Lecksuchverfahren zur Detektion eines Gaslecks in einem Prüfling

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000298073A (ja) 1999-03-31 2000-10-24 Applied Materials Inc デュアルモード・リークディテクタ
JP2006525498A (ja) 2003-05-02 2006-11-09 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング リークディテクタ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1648648C3 (de) 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US5625141A (en) 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
US5343740A (en) * 1993-08-27 1994-09-06 Southeastern Universities Research Association High sensitivity leak detection method and apparatus
US6752013B2 (en) 2000-11-29 2004-06-22 Heidelberger Druckmaschinen Ag Device and method for web tension measurement
DE102008037058A1 (de) * 2008-08-08 2010-02-11 Oerlikon Leybold Vacuum Gmbh Verfahren zur Bestimmung einer Gesamt-Leckrate einer Vakuumanlage sowie eine Vakuumanlage
DE102014223841A1 (de) 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000298073A (ja) 1999-03-31 2000-10-24 Applied Materials Inc デュアルモード・リークディテクタ
JP2006525498A (ja) 2003-05-02 2006-11-09 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング リークディテクタ

Also Published As

Publication number Publication date
EP4264218A1 (de) 2023-10-25
DE102020134370A1 (de) 2022-06-23
TWI904305B (zh) 2025-11-11
EP4264218B1 (de) 2025-02-19
CN116569015A (zh) 2023-08-08
US20240019336A1 (en) 2024-01-18
WO2022135854A1 (de) 2022-06-30
JP2023554280A (ja) 2023-12-27
KR20230123937A (ko) 2023-08-24
TW202225657A (zh) 2022-07-01

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