KR20230123937A - 테스트 대상의 가스 누출을 식별하기 위한 가스 누출 감지 장치 및 가스 누출 감지 방법 - Google Patents

테스트 대상의 가스 누출을 식별하기 위한 가스 누출 감지 장치 및 가스 누출 감지 방법 Download PDF

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Publication number
KR20230123937A
KR20230123937A KR1020237018618A KR20237018618A KR20230123937A KR 20230123937 A KR20230123937 A KR 20230123937A KR 1020237018618 A KR1020237018618 A KR 1020237018618A KR 20237018618 A KR20237018618 A KR 20237018618A KR 20230123937 A KR20230123937 A KR 20230123937A
Authority
KR
South Korea
Prior art keywords
gas
test
vacuum pump
connector
test object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020237018618A
Other languages
English (en)
Korean (ko)
Inventor
다니엘 베트찌히
마르셀 루쓰
실비오 데커
토마스 그렐만
Original Assignee
인피콘 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 인피콘 게엠베하 filed Critical 인피콘 게엠베하
Publication of KR20230123937A publication Critical patent/KR20230123937A/ko
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L2019/0053—Pressure sensors associated with other sensors, e.g. for measuring acceleration, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/3281—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
KR1020237018618A 2020-12-21 2021-12-01 테스트 대상의 가스 누출을 식별하기 위한 가스 누출 감지 장치 및 가스 누출 감지 방법 Pending KR20230123937A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102020134370.1A DE102020134370A1 (de) 2020-12-21 2020-12-21 Gaslecksuchvorrichtung und Gaslecksuchverfahren zur Erkennung eines Gaslecks in einem Prüfling
DE102020134370.1 2020-12-21
PCT/EP2021/083737 WO2022135854A1 (de) 2020-12-21 2021-12-01 Gaslecksuchvorrichtung und gaslecksuchverfahren zur erkennung eines gaslecks in einem prüfling

Publications (1)

Publication Number Publication Date
KR20230123937A true KR20230123937A (ko) 2023-08-24

Family

ID=79170731

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237018618A Pending KR20230123937A (ko) 2020-12-21 2021-12-01 테스트 대상의 가스 누출을 식별하기 위한 가스 누출 감지 장치 및 가스 누출 감지 방법

Country Status (8)

Country Link
US (1) US20240019336A1 (enExample)
EP (1) EP4264218B1 (enExample)
JP (1) JP7822383B2 (enExample)
KR (1) KR20230123937A (enExample)
CN (1) CN116569015A (enExample)
DE (1) DE102020134370A1 (enExample)
TW (1) TWI904305B (enExample)
WO (1) WO2022135854A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
US12031885B2 (en) * 2022-03-31 2024-07-09 Applied Materials, Inc. Leak detection for gas sticks
DE102022111596A1 (de) 2022-05-10 2023-11-16 Inficon Gmbh Lecksuchvorrichtung und Lecksuchverfahren zur Detektion eines Gaslecks in einem Prüfling

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1648648C3 (de) 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US5625141A (en) 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
US5343740A (en) * 1993-08-27 1994-09-06 Southeastern Universities Research Association High sensitivity leak detection method and apparatus
US6286362B1 (en) 1999-03-31 2001-09-11 Applied Materials, Inc. Dual mode leak detector
US6752013B2 (en) 2000-11-29 2004-06-22 Heidelberger Druckmaschinen Ag Device and method for web tension measurement
DE10319633A1 (de) * 2003-05-02 2004-11-18 Inficon Gmbh Lecksuchgerät
DE102008037058A1 (de) * 2008-08-08 2010-02-11 Oerlikon Leybold Vacuum Gmbh Verfahren zur Bestimmung einer Gesamt-Leckrate einer Vakuumanlage sowie eine Vakuumanlage
DE102014223841A1 (de) 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion

Also Published As

Publication number Publication date
EP4264218A1 (de) 2023-10-25
DE102020134370A1 (de) 2022-06-23
TWI904305B (zh) 2025-11-11
EP4264218B1 (de) 2025-02-19
CN116569015A (zh) 2023-08-08
US20240019336A1 (en) 2024-01-18
WO2022135854A1 (de) 2022-06-30
JP2023554280A (ja) 2023-12-27
TW202225657A (zh) 2022-07-01
JP7822383B2 (ja) 2026-03-02

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20230601

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20240819

Comment text: Request for Examination of Application