CN116569015A - 用于识别测试对象中的气体泄漏的气体泄漏检测设备和气体泄漏检测方法 - Google Patents

用于识别测试对象中的气体泄漏的气体泄漏检测设备和气体泄漏检测方法 Download PDF

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Publication number
CN116569015A
CN116569015A CN202180082457.XA CN202180082457A CN116569015A CN 116569015 A CN116569015 A CN 116569015A CN 202180082457 A CN202180082457 A CN 202180082457A CN 116569015 A CN116569015 A CN 116569015A
Authority
CN
China
Prior art keywords
gas
test
vacuum pump
test object
connector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180082457.XA
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English (en)
Chinese (zh)
Inventor
丹尼尔·维茨格
马塞尔·鲁特
西尔维奥·德克尔
托马斯·格林曼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of CN116569015A publication Critical patent/CN116569015A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L2019/0053—Pressure sensors associated with other sensors, e.g. for measuring acceleration, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/3281—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
CN202180082457.XA 2020-12-21 2021-12-01 用于识别测试对象中的气体泄漏的气体泄漏检测设备和气体泄漏检测方法 Pending CN116569015A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102020134370.1A DE102020134370A1 (de) 2020-12-21 2020-12-21 Gaslecksuchvorrichtung und Gaslecksuchverfahren zur Erkennung eines Gaslecks in einem Prüfling
DE102020134370.1 2020-12-21
PCT/EP2021/083737 WO2022135854A1 (de) 2020-12-21 2021-12-01 Gaslecksuchvorrichtung und gaslecksuchverfahren zur erkennung eines gaslecks in einem prüfling

Publications (1)

Publication Number Publication Date
CN116569015A true CN116569015A (zh) 2023-08-08

Family

ID=79170731

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180082457.XA Pending CN116569015A (zh) 2020-12-21 2021-12-01 用于识别测试对象中的气体泄漏的气体泄漏检测设备和气体泄漏检测方法

Country Status (8)

Country Link
US (1) US20240019336A1 (enExample)
EP (1) EP4264218B1 (enExample)
JP (1) JP7822383B2 (enExample)
KR (1) KR20230123937A (enExample)
CN (1) CN116569015A (enExample)
DE (1) DE102020134370A1 (enExample)
TW (1) TWI904305B (enExample)
WO (1) WO2022135854A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
US12031885B2 (en) * 2022-03-31 2024-07-09 Applied Materials, Inc. Leak detection for gas sticks
DE102022111596A1 (de) 2022-05-10 2023-11-16 Inficon Gmbh Lecksuchvorrichtung und Lecksuchverfahren zur Detektion eines Gaslecks in einem Prüfling

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1648648C3 (de) 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US5625141A (en) 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
US5343740A (en) * 1993-08-27 1994-09-06 Southeastern Universities Research Association High sensitivity leak detection method and apparatus
US6286362B1 (en) 1999-03-31 2001-09-11 Applied Materials, Inc. Dual mode leak detector
US6752013B2 (en) 2000-11-29 2004-06-22 Heidelberger Druckmaschinen Ag Device and method for web tension measurement
DE10319633A1 (de) * 2003-05-02 2004-11-18 Inficon Gmbh Lecksuchgerät
DE102008037058A1 (de) * 2008-08-08 2010-02-11 Oerlikon Leybold Vacuum Gmbh Verfahren zur Bestimmung einer Gesamt-Leckrate einer Vakuumanlage sowie eine Vakuumanlage
DE102014223841A1 (de) 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion

Also Published As

Publication number Publication date
EP4264218A1 (de) 2023-10-25
DE102020134370A1 (de) 2022-06-23
TWI904305B (zh) 2025-11-11
EP4264218B1 (de) 2025-02-19
US20240019336A1 (en) 2024-01-18
WO2022135854A1 (de) 2022-06-30
JP2023554280A (ja) 2023-12-27
KR20230123937A (ko) 2023-08-24
TW202225657A (zh) 2022-07-01
JP7822383B2 (ja) 2026-03-02

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