JP2023554280A5 - - Google Patents
Info
- Publication number
- JP2023554280A5 JP2023554280A5 JP2023534329A JP2023534329A JP2023554280A5 JP 2023554280 A5 JP2023554280 A5 JP 2023554280A5 JP 2023534329 A JP2023534329 A JP 2023534329A JP 2023534329 A JP2023534329 A JP 2023534329A JP 2023554280 A5 JP2023554280 A5 JP 2023554280A5
- Authority
- JP
- Japan
- Prior art keywords
- gas
- test
- connector
- test specimen
- leak detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102020134370.1A DE102020134370A1 (de) | 2020-12-21 | 2020-12-21 | Gaslecksuchvorrichtung und Gaslecksuchverfahren zur Erkennung eines Gaslecks in einem Prüfling |
| DE102020134370.1 | 2020-12-21 | ||
| PCT/EP2021/083737 WO2022135854A1 (de) | 2020-12-21 | 2021-12-01 | Gaslecksuchvorrichtung und gaslecksuchverfahren zur erkennung eines gaslecks in einem prüfling |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023554280A JP2023554280A (ja) | 2023-12-27 |
| JP2023554280A5 true JP2023554280A5 (enExample) | 2024-06-14 |
| JP7822383B2 JP7822383B2 (ja) | 2026-03-02 |
Family
ID=79170731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023534329A Active JP7822383B2 (ja) | 2020-12-21 | 2021-12-01 | 試験体のガスリークを検出するガスリーク検知装置およびガスリーク検知方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20240019336A1 (enExample) |
| EP (1) | EP4264218B1 (enExample) |
| JP (1) | JP7822383B2 (enExample) |
| KR (1) | KR20230123937A (enExample) |
| CN (1) | CN116569015A (enExample) |
| DE (1) | DE102020134370A1 (enExample) |
| TW (1) | TWI904305B (enExample) |
| WO (1) | WO2022135854A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102021119256A1 (de) * | 2021-07-26 | 2023-01-26 | Inficon Gmbh | Leckdetektoren |
| US12031885B2 (en) * | 2022-03-31 | 2024-07-09 | Applied Materials, Inc. | Leak detection for gas sticks |
| DE102022111596A1 (de) | 2022-05-10 | 2023-11-16 | Inficon Gmbh | Lecksuchvorrichtung und Lecksuchverfahren zur Detektion eines Gaslecks in einem Prüfling |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1648648C3 (de) | 1967-04-12 | 1980-01-24 | Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar | Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip |
| US5625141A (en) | 1993-06-29 | 1997-04-29 | Varian Associates, Inc. | Sealed parts leak testing method and apparatus for helium spectrometer leak detection |
| US5343740A (en) * | 1993-08-27 | 1994-09-06 | Southeastern Universities Research Association | High sensitivity leak detection method and apparatus |
| US6286362B1 (en) | 1999-03-31 | 2001-09-11 | Applied Materials, Inc. | Dual mode leak detector |
| US6752013B2 (en) | 2000-11-29 | 2004-06-22 | Heidelberger Druckmaschinen Ag | Device and method for web tension measurement |
| DE10319633A1 (de) * | 2003-05-02 | 2004-11-18 | Inficon Gmbh | Lecksuchgerät |
| DE102008037058A1 (de) * | 2008-08-08 | 2010-02-11 | Oerlikon Leybold Vacuum Gmbh | Verfahren zur Bestimmung einer Gesamt-Leckrate einer Vakuumanlage sowie eine Vakuumanlage |
| DE102014223841A1 (de) | 2014-11-21 | 2016-05-25 | Inficon Gmbh | Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion |
-
2020
- 2020-12-21 DE DE102020134370.1A patent/DE102020134370A1/de active Pending
-
2021
- 2021-12-01 KR KR1020237018618A patent/KR20230123937A/ko active Pending
- 2021-12-01 WO PCT/EP2021/083737 patent/WO2022135854A1/de not_active Ceased
- 2021-12-01 US US18/265,164 patent/US20240019336A1/en active Pending
- 2021-12-01 CN CN202180082457.XA patent/CN116569015A/zh active Pending
- 2021-12-01 JP JP2023534329A patent/JP7822383B2/ja active Active
- 2021-12-01 EP EP21835173.2A patent/EP4264218B1/de active Active
- 2021-12-17 TW TW110147476A patent/TWI904305B/zh active
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