TWI904305B - 用於辨識測試目標內的漏氣之漏氣偵測裝置及漏氣偵測方法 - Google Patents

用於辨識測試目標內的漏氣之漏氣偵測裝置及漏氣偵測方法

Info

Publication number
TWI904305B
TWI904305B TW110147476A TW110147476A TWI904305B TW I904305 B TWI904305 B TW I904305B TW 110147476 A TW110147476 A TW 110147476A TW 110147476 A TW110147476 A TW 110147476A TW I904305 B TWI904305 B TW I904305B
Authority
TW
Taiwan
Prior art keywords
gas
test
vacuum pump
detector
connector
Prior art date
Application number
TW110147476A
Other languages
English (en)
Chinese (zh)
Other versions
TW202225657A (zh
Inventor
席維歐 德克
丹尼爾 維奇格
馬塞爾 盧斯
湯瑪斯 格瑞曼
Original Assignee
德商英飛康股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 德商英飛康股份有限公司 filed Critical 德商英飛康股份有限公司
Publication of TW202225657A publication Critical patent/TW202225657A/zh
Application granted granted Critical
Publication of TWI904305B publication Critical patent/TWI904305B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L2019/0053—Pressure sensors associated with other sensors, e.g. for measuring acceleration, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/3281—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
TW110147476A 2020-12-21 2021-12-17 用於辨識測試目標內的漏氣之漏氣偵測裝置及漏氣偵測方法 TWI904305B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102020134370.1A DE102020134370A1 (de) 2020-12-21 2020-12-21 Gaslecksuchvorrichtung und Gaslecksuchverfahren zur Erkennung eines Gaslecks in einem Prüfling
DE102020134370.1 2020-12-21

Publications (2)

Publication Number Publication Date
TW202225657A TW202225657A (zh) 2022-07-01
TWI904305B true TWI904305B (zh) 2025-11-11

Family

ID=79170731

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110147476A TWI904305B (zh) 2020-12-21 2021-12-17 用於辨識測試目標內的漏氣之漏氣偵測裝置及漏氣偵測方法

Country Status (8)

Country Link
US (1) US20240019336A1 (enExample)
EP (1) EP4264218B1 (enExample)
JP (1) JP7822383B2 (enExample)
KR (1) KR20230123937A (enExample)
CN (1) CN116569015A (enExample)
DE (1) DE102020134370A1 (enExample)
TW (1) TWI904305B (enExample)
WO (1) WO2022135854A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
US12031885B2 (en) * 2022-03-31 2024-07-09 Applied Materials, Inc. Leak detection for gas sticks
DE102022111596A1 (de) 2022-05-10 2023-11-16 Inficon Gmbh Lecksuchvorrichtung und Lecksuchverfahren zur Detektion eines Gaslecks in einem Prüfling

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6286362B1 (en) * 1999-03-31 2001-09-11 Applied Materials, Inc. Dual mode leak detector
EP1620706B1 (de) * 2003-05-02 2007-05-23 Inficon GmbH Lecksuchgerät
TW201011272A (en) * 2008-08-08 2010-03-16 Oerlikon Leybold Vacuum Gmbh A method for determining the total leak rate of a vacuum system and vacuum system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1648648C3 (de) 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US5625141A (en) 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
US5343740A (en) * 1993-08-27 1994-09-06 Southeastern Universities Research Association High sensitivity leak detection method and apparatus
US6752013B2 (en) 2000-11-29 2004-06-22 Heidelberger Druckmaschinen Ag Device and method for web tension measurement
DE102014223841A1 (de) 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6286362B1 (en) * 1999-03-31 2001-09-11 Applied Materials, Inc. Dual mode leak detector
EP1620706B1 (de) * 2003-05-02 2007-05-23 Inficon GmbH Lecksuchgerät
TW201011272A (en) * 2008-08-08 2010-03-16 Oerlikon Leybold Vacuum Gmbh A method for determining the total leak rate of a vacuum system and vacuum system

Also Published As

Publication number Publication date
EP4264218A1 (de) 2023-10-25
DE102020134370A1 (de) 2022-06-23
EP4264218B1 (de) 2025-02-19
CN116569015A (zh) 2023-08-08
US20240019336A1 (en) 2024-01-18
WO2022135854A1 (de) 2022-06-30
JP2023554280A (ja) 2023-12-27
KR20230123937A (ko) 2023-08-24
TW202225657A (zh) 2022-07-01
JP7822383B2 (ja) 2026-03-02

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