JP7820505B2 - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JP7820505B2
JP7820505B2 JP2024519184A JP2024519184A JP7820505B2 JP 7820505 B2 JP7820505 B2 JP 7820505B2 JP 2024519184 A JP2024519184 A JP 2024519184A JP 2024519184 A JP2024519184 A JP 2024519184A JP 7820505 B2 JP7820505 B2 JP 7820505B2
Authority
JP
Japan
Prior art keywords
semiconductor device
resin
recess
thickness direction
terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024519184A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023214500A5 (https=
JPWO2023214500A1 (https=
Inventor
昂平 谷川
大記 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Publication of JPWO2023214500A1 publication Critical patent/JPWO2023214500A1/ja
Publication of JPWO2023214500A5 publication Critical patent/JPWO2023214500A5/ja
Priority to JP2025053922A priority Critical patent/JP7799880B2/ja
Priority to JP2025102667A priority patent/JP7725758B1/ja
Priority to JP2025131436A priority patent/JP2025163208A/ja
Application granted granted Critical
Publication of JP7820505B2 publication Critical patent/JP7820505B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/20—Arrangements for cooling
    • H10W40/25—Arrangements for cooling characterised by their materials
    • H10W40/255—Arrangements for cooling characterised by their materials having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H10W74/114—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D80/00—Assemblies of multiple devices comprising at least one device covered by this subclass
    • H10D80/20—Assemblies of multiple devices comprising at least one device covered by this subclass the at least one device being covered by groups H10D1/00 - H10D48/00, e.g. assemblies comprising capacitors, power FETs or Schottky diodes
    • H10D80/251—FETs covered by H10D30/00, e.g. power FETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D80/00—Assemblies of multiple devices comprising at least one device covered by this subclass
    • H10D80/20—Assemblies of multiple devices comprising at least one device covered by this subclass the at least one device being covered by groups H10D1/00 - H10D48/00, e.g. assemblies comprising capacitors, power FETs or Schottky diodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/411—Chip-supporting parts, e.g. die pads
    • H10W70/413—Insulating or insulated substrates serving as die pads
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/464—Additional interconnections in combination with leadframes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/464—Additional interconnections in combination with leadframes
    • H10W70/468—Circuit boards
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/481—Leadframes for devices being provided for in groups H10D8/00 - H10D48/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65—Shapes or dispositions of interconnections
    • H10W70/658—Shapes or dispositions of interconnections for devices provided for in groups H10D8/00 - H10D48/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/10—Configurations of laterally-adjacent chips
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/761—Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors
    • H10W90/763—Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors between laterally-adjacent chips
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/761—Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors
    • H10W90/764—Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/421—Shapes or dispositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/464—Additional interconnections in combination with leadframes
    • H10W70/467—Multilayered additional interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/853—On the same surface
    • H10W72/871—Bond wires and strap connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/874—On different surfaces
    • H10W72/884—Die-attach connectors and bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/874—On different surfaces
    • H10W72/886—Die-attach connectors and strap connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/811—Multiple chips on leadframes

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP2024519184A 2022-05-02 2023-04-13 半導体装置 Active JP7820505B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2025053922A JP7799880B2 (ja) 2022-05-02 2025-03-27 半導体装置、および半導体装置の製造方法
JP2025102667A JP7725758B1 (ja) 2022-05-02 2025-06-18 半導体装置、および半導体装置の製造方法
JP2025131436A JP2025163208A (ja) 2022-05-02 2025-08-06 半導体装置、および半導体装置の製造方法

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2022075921 2022-05-02
JP2022075921 2022-05-02
JP2022127149 2022-08-09
JP2022127149 2022-08-09
PCT/JP2023/015070 WO2023214500A1 (ja) 2022-05-02 2023-04-13 半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025053922A Division JP7799880B2 (ja) 2022-05-02 2025-03-27 半導体装置、および半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JPWO2023214500A1 JPWO2023214500A1 (https=) 2023-11-09
JPWO2023214500A5 JPWO2023214500A5 (https=) 2025-02-03
JP7820505B2 true JP7820505B2 (ja) 2026-02-25

Family

ID=88646429

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2024519184A Active JP7820505B2 (ja) 2022-05-02 2023-04-13 半導体装置
JP2025053922A Active JP7799880B2 (ja) 2022-05-02 2025-03-27 半導体装置、および半導体装置の製造方法
JP2025102667A Active JP7725758B1 (ja) 2022-05-02 2025-06-18 半導体装置、および半導体装置の製造方法
JP2025131436A Pending JP2025163208A (ja) 2022-05-02 2025-08-06 半導体装置、および半導体装置の製造方法

Family Applications After (3)

Application Number Title Priority Date Filing Date
JP2025053922A Active JP7799880B2 (ja) 2022-05-02 2025-03-27 半導体装置、および半導体装置の製造方法
JP2025102667A Active JP7725758B1 (ja) 2022-05-02 2025-06-18 半導体装置、および半導体装置の製造方法
JP2025131436A Pending JP2025163208A (ja) 2022-05-02 2025-08-06 半導体装置、および半導体装置の製造方法

Country Status (6)

Country Link
US (2) US20250046664A1 (https=)
EP (3) EP4517823A4 (https=)
JP (4) JP7820505B2 (https=)
CN (2) CN119110995A (https=)
DE (1) DE112023001614T5 (https=)
WO (1) WO2023214500A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12417954B2 (en) * 2020-04-27 2025-09-16 Rohm Co., Ltd. Semiconductor device
JP7471526B2 (ja) * 2021-07-28 2024-04-19 三菱電機株式会社 回路接続装置、回転電機装置、及び回路接続装置の製造方法
WO2025154475A1 (ja) * 2024-01-18 2025-07-24 ローム株式会社 半導体装置および半導体装置の製造方法
TW202531523A (zh) * 2024-01-30 2025-08-01 朋程科技股份有限公司 半導體模組及其製作方法
DE102025101191B3 (de) 2025-01-14 2026-03-26 Volkswagen Aktiengesellschaft Vorrichtung für einen Stromwandler, Stromwandler und Fahrzeug

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010182879A (ja) 2009-02-05 2010-08-19 Mitsubishi Electric Corp 電力用半導体装置とその製造方法
JP2011077280A (ja) 2009-09-30 2011-04-14 Mitsubishi Electric Corp 電力用半導体装置およびその製造方法
JP2011165836A (ja) 2010-02-09 2011-08-25 Mitsubishi Electric Corp 電力用半導体装置
JP2012089681A (ja) 2010-10-20 2012-05-10 Mitsubishi Electric Corp パワー半導体装置
US20150103498A1 (en) 2013-10-15 2015-04-16 Fairchild Korea Semiconductor Ltd. Power module package and method of manufacturing the same
WO2022080063A1 (ja) 2020-10-14 2022-04-21 ローム株式会社 半導体モジュール

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JPH04127996U (ja) * 1991-05-16 1992-11-20 ナイルス部品株式会社 モジユールにおける端子の接続構造
DE10324139B4 (de) * 2003-05-26 2005-07-21 Infineon Technologies Ag Mikroelektromechanisches Bauteil und Verfahren zu seiner Herstellung
JP4569473B2 (ja) * 2006-01-04 2010-10-27 株式会社日立製作所 樹脂封止型パワー半導体モジュール
JP5261851B2 (ja) * 2010-04-08 2013-08-14 三菱電機株式会社 半導体装置の製造方法
EP2597675B1 (en) * 2011-04-05 2015-10-21 Panasonic Intellectual Property Management Co., Ltd. Encapsulated semiconductor device and method for producing same
JP6016611B2 (ja) * 2012-12-20 2016-10-26 三菱電機株式会社 半導体モジュール、その製造方法およびその接続方法
KR20150060036A (ko) * 2013-11-25 2015-06-03 삼성전기주식회사 전력 반도체 모듈 및 그 제조 방법
US10319659B2 (en) * 2017-10-13 2019-06-11 Semiconductor Components Industries, Llc Semiconductor package and related methods
JP2021040065A (ja) * 2019-09-04 2021-03-11 ローム株式会社 半導体装置の実装構造
US20230048878A1 (en) * 2020-01-30 2023-02-16 Hitachi Energy Switzerland Ag Power Semiconductor Module with Accessible Metal Clips
JP2021190505A (ja) 2020-05-27 2021-12-13 ローム株式会社 半導体装置
CN112271165A (zh) * 2020-09-28 2021-01-26 华为技术有限公司 半导体封装结构及其制造方法和半导体器件
JP7723678B2 (ja) * 2020-10-14 2025-08-14 ローム株式会社 半導体モジュール

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010182879A (ja) 2009-02-05 2010-08-19 Mitsubishi Electric Corp 電力用半導体装置とその製造方法
JP2011077280A (ja) 2009-09-30 2011-04-14 Mitsubishi Electric Corp 電力用半導体装置およびその製造方法
JP2011165836A (ja) 2010-02-09 2011-08-25 Mitsubishi Electric Corp 電力用半導体装置
JP2012089681A (ja) 2010-10-20 2012-05-10 Mitsubishi Electric Corp パワー半導体装置
US20150103498A1 (en) 2013-10-15 2015-04-16 Fairchild Korea Semiconductor Ltd. Power module package and method of manufacturing the same
WO2022080063A1 (ja) 2020-10-14 2022-04-21 ローム株式会社 半導体モジュール

Also Published As

Publication number Publication date
JP2025094258A (ja) 2025-06-24
JP7725758B1 (ja) 2025-08-19
CN121712087A (zh) 2026-03-20
EP4517823A4 (en) 2026-04-15
JP2025131877A (ja) 2025-09-09
JP7799880B2 (ja) 2026-01-15
EP4629292A3 (en) 2026-04-15
EP4707924A2 (en) 2026-03-11
US20250046664A1 (en) 2025-02-06
EP4629292A2 (en) 2025-10-08
WO2023214500A1 (ja) 2023-11-09
DE112023001614T5 (de) 2025-01-16
JP2025163208A (ja) 2025-10-28
EP4517823A1 (en) 2025-03-05
EP4707924A3 (en) 2026-04-22
CN120751756A (zh) 2025-10-03
CN119110995A (zh) 2024-12-10
JPWO2023214500A1 (https=) 2023-11-09
US20250379111A1 (en) 2025-12-11

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