JP7803340B2 - 圧電素子、液滴吐出ヘッド、強誘電体メモリ及び圧電アクチュエータ - Google Patents

圧電素子、液滴吐出ヘッド、強誘電体メモリ及び圧電アクチュエータ

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Publication number
JP7803340B2
JP7803340B2 JP2023525724A JP2023525724A JP7803340B2 JP 7803340 B2 JP7803340 B2 JP 7803340B2 JP 2023525724 A JP2023525724 A JP 2023525724A JP 2023525724 A JP2023525724 A JP 2023525724A JP 7803340 B2 JP7803340 B2 JP 7803340B2
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JP
Japan
Prior art keywords
electrode
piezoelectric
piezoelectric element
film
electrode side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023525724A
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English (en)
Japanese (ja)
Other versions
JPWO2022255121A1 (https=
JPWO2022255121A5 (https=
Inventor
裕司 松下
慎太郎 原
秀樹 眞嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
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Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Publication of JPWO2022255121A1 publication Critical patent/JPWO2022255121A1/ja
Publication of JPWO2022255121A5 publication Critical patent/JPWO2022255121A5/ja
Application granted granted Critical
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Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14258—Multi layer thin film type piezoelectric element
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H10D1/682—Capacitors having no potential barriers having dielectrics comprising perovskite structures

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2023525724A 2021-06-03 2022-05-19 圧電素子、液滴吐出ヘッド、強誘電体メモリ及び圧電アクチュエータ Active JP7803340B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021093593 2021-06-03
JP2021093593 2021-06-03
PCT/JP2022/020869 WO2022255121A1 (ja) 2021-06-03 2022-05-19 圧電素子、液滴吐出ヘッド、強誘電体メモリ及び圧電アクチュエータ

Publications (3)

Publication Number Publication Date
JPWO2022255121A1 JPWO2022255121A1 (https=) 2022-12-08
JPWO2022255121A5 JPWO2022255121A5 (https=) 2024-06-17
JP7803340B2 true JP7803340B2 (ja) 2026-01-21

Family

ID=84323254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023525724A Active JP7803340B2 (ja) 2021-06-03 2022-05-19 圧電素子、液滴吐出ヘッド、強誘電体メモリ及び圧電アクチュエータ

Country Status (6)

Country Link
US (1) US20240244979A1 (https=)
EP (1) EP4350790A4 (https=)
JP (1) JP7803340B2 (https=)
CN (1) CN117426156A (https=)
TW (1) TWI825732B (https=)
WO (1) WO2022255121A1 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008294345A (ja) 2007-05-28 2008-12-04 Seiko Epson Corp 強誘電体メモリ装置の製造方法及び強誘電体メモリ装置
JP2010201830A (ja) 2009-03-04 2010-09-16 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置並びに圧電素子
JP2012009661A (ja) 2010-06-25 2012-01-12 Konica Minolta Holdings Inc 圧電素子の製造方法ならびに圧電素子およびそれを用いる振動板
JP2019047114A (ja) 2017-09-06 2019-03-22 ローム株式会社 圧電素子

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2999703B2 (ja) * 1995-12-20 2000-01-17 沖電気工業株式会社 強誘電体薄膜、その形成方法、薄膜形成用塗布液
TW468253B (en) * 1997-01-13 2001-12-11 Hitachi Ltd Semiconductor memory device
JP4811556B2 (ja) * 2004-04-23 2011-11-09 セイコーエプソン株式会社 圧電素子、液体噴射ヘッドおよび液体噴射装置
JP2009071113A (ja) * 2007-09-14 2009-04-02 Fujifilm Corp 圧電素子の駆動方法
JP2010192721A (ja) * 2009-02-19 2010-09-02 Fujifilm Corp 圧電素子とその製造方法、及び液体吐出装置
JP2011061118A (ja) * 2009-09-14 2011-03-24 Seiko Epson Corp 圧電素子、液体噴射ヘッドおよび液体噴射装置
TWI407607B (zh) * 2010-01-22 2013-09-01 Hon Hai Prec Ind Co Ltd 壓電元件及其製備方法
JP6128126B2 (ja) * 2012-08-08 2017-05-17 コニカミノルタ株式会社 圧電素子、圧電デバイス、インクジェットヘッドおよびインクジェットプリンタ
CN110890456B (zh) * 2019-12-05 2022-07-19 湖南嘉业达电子有限公司 一种可抑制银迁移的微孔雾化元件及其制备方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008294345A (ja) 2007-05-28 2008-12-04 Seiko Epson Corp 強誘電体メモリ装置の製造方法及び強誘電体メモリ装置
JP2010201830A (ja) 2009-03-04 2010-09-16 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置並びに圧電素子
JP2012009661A (ja) 2010-06-25 2012-01-12 Konica Minolta Holdings Inc 圧電素子の製造方法ならびに圧電素子およびそれを用いる振動板
JP2019047114A (ja) 2017-09-06 2019-03-22 ローム株式会社 圧電素子

Also Published As

Publication number Publication date
JPWO2022255121A1 (https=) 2022-12-08
TW202312522A (zh) 2023-03-16
CN117426156A (zh) 2024-01-19
EP4350790A4 (en) 2024-09-11
WO2022255121A1 (ja) 2022-12-08
US20240244979A1 (en) 2024-07-18
TWI825732B (zh) 2023-12-11
EP4350790A1 (en) 2024-04-10

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