CN117426156A - 压电元件、液滴排出头、铁电存储器以及压电致动器 - Google Patents

压电元件、液滴排出头、铁电存储器以及压电致动器 Download PDF

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Publication number
CN117426156A
CN117426156A CN202280039712.7A CN202280039712A CN117426156A CN 117426156 A CN117426156 A CN 117426156A CN 202280039712 A CN202280039712 A CN 202280039712A CN 117426156 A CN117426156 A CN 117426156A
Authority
CN
China
Prior art keywords
electrode
piezoelectric
piezoelectric element
film
electrode side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280039712.7A
Other languages
English (en)
Chinese (zh)
Inventor
松下裕司
原慎太郎
真嶋秀树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Publication of CN117426156A publication Critical patent/CN117426156A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14258—Multi layer thin film type piezoelectric element
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H10D1/682—Capacitors having no potential barriers having dielectrics comprising perovskite structures

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN202280039712.7A 2021-06-03 2022-05-19 压电元件、液滴排出头、铁电存储器以及压电致动器 Pending CN117426156A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-093593 2021-06-03
JP2021093593 2021-06-03
PCT/JP2022/020869 WO2022255121A1 (ja) 2021-06-03 2022-05-19 圧電素子、液滴吐出ヘッド、強誘電体メモリ及び圧電アクチュエータ

Publications (1)

Publication Number Publication Date
CN117426156A true CN117426156A (zh) 2024-01-19

Family

ID=84323254

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280039712.7A Pending CN117426156A (zh) 2021-06-03 2022-05-19 压电元件、液滴排出头、铁电存储器以及压电致动器

Country Status (6)

Country Link
US (1) US20240244979A1 (https=)
EP (1) EP4350790A4 (https=)
JP (1) JP7803340B2 (https=)
CN (1) CN117426156A (https=)
TW (1) TWI825732B (https=)
WO (1) WO2022255121A1 (https=)

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2999703B2 (ja) * 1995-12-20 2000-01-17 沖電気工業株式会社 強誘電体薄膜、その形成方法、薄膜形成用塗布液
TW468253B (en) * 1997-01-13 2001-12-11 Hitachi Ltd Semiconductor memory device
JP4811556B2 (ja) * 2004-04-23 2011-11-09 セイコーエプソン株式会社 圧電素子、液体噴射ヘッドおよび液体噴射装置
JP2008294345A (ja) * 2007-05-28 2008-12-04 Seiko Epson Corp 強誘電体メモリ装置の製造方法及び強誘電体メモリ装置
JP2009071113A (ja) * 2007-09-14 2009-04-02 Fujifilm Corp 圧電素子の駆動方法
JP2010192721A (ja) * 2009-02-19 2010-09-02 Fujifilm Corp 圧電素子とその製造方法、及び液体吐出装置
JP2010201830A (ja) * 2009-03-04 2010-09-16 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置並びに圧電素子
JP2011061118A (ja) * 2009-09-14 2011-03-24 Seiko Epson Corp 圧電素子、液体噴射ヘッドおよび液体噴射装置
TWI407607B (zh) * 2010-01-22 2013-09-01 Hon Hai Prec Ind Co Ltd 壓電元件及其製備方法
JP5776142B2 (ja) * 2010-06-25 2015-09-09 コニカミノルタ株式会社 振動板
JP6128126B2 (ja) * 2012-08-08 2017-05-17 コニカミノルタ株式会社 圧電素子、圧電デバイス、インクジェットヘッドおよびインクジェットプリンタ
JP7107782B2 (ja) * 2017-09-06 2022-07-27 ローム株式会社 圧電素子
CN110890456B (zh) * 2019-12-05 2022-07-19 湖南嘉业达电子有限公司 一种可抑制银迁移的微孔雾化元件及其制备方法

Also Published As

Publication number Publication date
JP7803340B2 (ja) 2026-01-21
JPWO2022255121A1 (https=) 2022-12-08
TW202312522A (zh) 2023-03-16
EP4350790A4 (en) 2024-09-11
WO2022255121A1 (ja) 2022-12-08
US20240244979A1 (en) 2024-07-18
TWI825732B (zh) 2023-12-11
EP4350790A1 (en) 2024-04-10

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