JP7705944B2 - 高熱伝導性窒化珪素焼結体、窒化珪素基板、窒化珪素回路基板、および半導体装置 - Google Patents

高熱伝導性窒化珪素焼結体、窒化珪素基板、窒化珪素回路基板、および半導体装置 Download PDF

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JP7705944B2
JP7705944B2 JP2023545603A JP2023545603A JP7705944B2 JP 7705944 B2 JP7705944 B2 JP 7705944B2 JP 2023545603 A JP2023545603 A JP 2023545603A JP 2023545603 A JP2023545603 A JP 2023545603A JP 7705944 B2 JP7705944 B2 JP 7705944B2
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silicon nitride
crystal grains
sintered body
less
nitride crystal
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JPWO2023032982A1 (https=
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克之 青木
康広 五戸
健太郎 岩井
孝幸 深澤
栄人 山形
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Toshiba Corp
Niterra Materials Co Ltd
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Toshiba Materials Co Ltd
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