JP7689659B2 - 水晶振動素子及びその製造方法 - Google Patents

水晶振動素子及びその製造方法 Download PDF

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Publication number
JP7689659B2
JP7689659B2 JP2024509736A JP2024509736A JP7689659B2 JP 7689659 B2 JP7689659 B2 JP 7689659B2 JP 2024509736 A JP2024509736 A JP 2024509736A JP 2024509736 A JP2024509736 A JP 2024509736A JP 7689659 B2 JP7689659 B2 JP 7689659B2
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Japan
Prior art keywords
axis
quartz crystal
pair
quartz
main surfaces
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JP2024509736A
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English (en)
Japanese (ja)
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JPWO2023181487A5 (https=
JPWO2023181487A1 (https=
Inventor
大輝 後藤
裕司 熊野
魁藏 牧野
貴志 長谷
光洋 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2023181487A1 publication Critical patent/JPWO2023181487A1/ja
Publication of JPWO2023181487A5 publication Critical patent/JPWO2023181487A5/ja
Priority to JP2025088031A priority Critical patent/JP7800758B2/ja
Application granted granted Critical
Publication of JP7689659B2 publication Critical patent/JP7689659B2/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2024509736A 2022-03-22 2022-11-07 水晶振動素子及びその製造方法 Active JP7689659B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025088031A JP7800758B2 (ja) 2022-03-22 2025-05-27 水晶振動素子及びその製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022045837 2022-03-22
JP2022045837 2022-03-22
PCT/JP2022/041362 WO2023181487A1 (ja) 2022-03-22 2022-11-07 水晶振動素子及びその製造方法

Related Child Applications (1)

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JP2025088031A Division JP7800758B2 (ja) 2022-03-22 2025-05-27 水晶振動素子及びその製造方法

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JPWO2023181487A1 JPWO2023181487A1 (https=) 2023-09-28
JPWO2023181487A5 JPWO2023181487A5 (https=) 2024-11-15
JP7689659B2 true JP7689659B2 (ja) 2025-06-09

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JP2024509736A Active JP7689659B2 (ja) 2022-03-22 2022-11-07 水晶振動素子及びその製造方法
JP2025088031A Active JP7800758B2 (ja) 2022-03-22 2025-05-27 水晶振動素子及びその製造方法

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US (2) US12438517B2 (https=)
JP (2) JP7689659B2 (https=)
CN (1) CN118947063A (https=)
WO (1) WO2023181487A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118249776A (zh) * 2022-12-22 2024-06-25 达尔科技股份有限公司 石英晶体谐振器及其制造方法
WO2025182135A1 (ja) * 2024-02-29 2025-09-04 株式会社村田製作所 圧電振動子

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003324332A (ja) 2002-02-28 2003-11-14 Toyo Commun Equip Co Ltd ２回回転ｙカット水晶振動子とこれを用いた発振器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4542355A (en) * 1984-11-07 1985-09-17 The United States Of America As Represented By The Secretary Of The Army Normal coordinate monolithic crystal filter
JP5943160B2 (ja) * 2016-02-08 2016-06-29 セイコーエプソン株式会社 Ｓｃカット水晶基板、振動素子、電子デバイス、発振器、及び電子機器
JP2017192032A (ja) 2016-04-13 2017-10-19 日本電波工業株式会社 水晶振動子
JP2021078062A (ja) 2018-12-19 2021-05-20 日本電波工業株式会社 水晶振動子
US20220345104A1 (en) * 2019-09-16 2022-10-27 David Salt Doubly Rotated Quartz Crystal Resonators With Reduced Sensitivity to Acceleration

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003324332A (ja) 2002-02-28 2003-11-14 Toyo Commun Equip Co Ltd ２回回転ｙカット水晶振動子とこれを用いた発振器

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Publication number Publication date
JP2025119040A (ja) 2025-08-13
US20260012156A1 (en) 2026-01-08
US12438517B2 (en) 2025-10-07
US20240421797A1 (en) 2024-12-19
WO2023181487A1 (ja) 2023-09-28
CN118947063A (zh) 2024-11-12
JP7800758B2 (ja) 2026-01-16
JPWO2023181487A1 (https=) 2023-09-28

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