JPWO2023181487A1 - - Google Patents

Info

Publication number
JPWO2023181487A1
JPWO2023181487A1 JP2024509736A JP2024509736A JPWO2023181487A1 JP WO2023181487 A1 JPWO2023181487 A1 JP WO2023181487A1 JP 2024509736 A JP2024509736 A JP 2024509736A JP 2024509736 A JP2024509736 A JP 2024509736A JP WO2023181487 A1 JPWO2023181487 A1 JP WO2023181487A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024509736A
Other languages
Japanese (ja)
Other versions
JPWO2023181487A5 (https=
JP7689659B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023181487A1 publication Critical patent/JPWO2023181487A1/ja
Publication of JPWO2023181487A5 publication Critical patent/JPWO2023181487A5/ja
Priority to JP2025088031A priority Critical patent/JP7800758B2/ja
Application granted granted Critical
Publication of JP7689659B2 publication Critical patent/JP7689659B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2024509736A 2022-03-22 2022-11-07 水晶振動素子及びその製造方法 Active JP7689659B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025088031A JP7800758B2 (ja) 2022-03-22 2025-05-27 水晶振動素子及びその製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022045837 2022-03-22
JP2022045837 2022-03-22
PCT/JP2022/041362 WO2023181487A1 (ja) 2022-03-22 2022-11-07 水晶振動素子及びその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025088031A Division JP7800758B2 (ja) 2022-03-22 2025-05-27 水晶振動素子及びその製造方法

Publications (3)

Publication Number Publication Date
JPWO2023181487A1 true JPWO2023181487A1 (https=) 2023-09-28
JPWO2023181487A5 JPWO2023181487A5 (https=) 2024-11-15
JP7689659B2 JP7689659B2 (ja) 2025-06-09

Family

ID=88100377

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2024509736A Active JP7689659B2 (ja) 2022-03-22 2022-11-07 水晶振動素子及びその製造方法
JP2025088031A Active JP7800758B2 (ja) 2022-03-22 2025-05-27 水晶振動素子及びその製造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025088031A Active JP7800758B2 (ja) 2022-03-22 2025-05-27 水晶振動素子及びその製造方法

Country Status (4)

Country Link
US (2) US12438517B2 (https=)
JP (2) JP7689659B2 (https=)
CN (1) CN118947063A (https=)
WO (1) WO2023181487A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118249776A (zh) * 2022-12-22 2024-06-25 达尔科技股份有限公司 石英晶体谐振器及其制造方法
WO2025182135A1 (ja) * 2024-02-29 2025-09-04 株式会社村田製作所 圧電振動子

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003324332A (ja) * 2002-02-28 2003-11-14 Toyo Commun Equip Co Ltd ２回回転ｙカット水晶振動子とこれを用いた発振器
JP2016096583A (ja) * 2016-02-08 2016-05-26 セイコーエプソン株式会社 Ｓｃカット水晶基板、振動素子、電子デバイス、発振器、及び電子機器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4542355A (en) * 1984-11-07 1985-09-17 The United States Of America As Represented By The Secretary Of The Army Normal coordinate monolithic crystal filter
JP2017192032A (ja) 2016-04-13 2017-10-19 日本電波工業株式会社 水晶振動子
JP2021078062A (ja) 2018-12-19 2021-05-20 日本電波工業株式会社 水晶振動子
US20220345104A1 (en) * 2019-09-16 2022-10-27 David Salt Doubly Rotated Quartz Crystal Resonators With Reduced Sensitivity to Acceleration

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003324332A (ja) * 2002-02-28 2003-11-14 Toyo Commun Equip Co Ltd ２回回転ｙカット水晶振動子とこれを用いた発振器
JP2016096583A (ja) * 2016-02-08 2016-05-26 セイコーエプソン株式会社 Ｓｃカット水晶基板、振動素子、電子デバイス、発振器、及び電子機器

Also Published As

Publication number Publication date
JP2025119040A (ja) 2025-08-13
US20260012156A1 (en) 2026-01-08
US12438517B2 (en) 2025-10-07
US20240421797A1 (en) 2024-12-19
WO2023181487A1 (ja) 2023-09-28
CN118947063A (zh) 2024-11-12
JP7800758B2 (ja) 2026-01-16
JP7689659B2 (ja) 2025-06-09

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