CN118947063A - 水晶振动元件及其制造方法 - Google Patents

水晶振动元件及其制造方法 Download PDF

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Publication number
CN118947063A
CN118947063A CN202280093940.2A CN202280093940A CN118947063A CN 118947063 A CN118947063 A CN 118947063A CN 202280093940 A CN202280093940 A CN 202280093940A CN 118947063 A CN118947063 A CN 118947063A
Authority
CN
China
Prior art keywords
axis
crystal
pair
main surfaces
degrees
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280093940.2A
Other languages
English (en)
Chinese (zh)
Inventor
后藤大辉
熊野裕司
牧野魁藏
长谷贵志
山田光洋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN118947063A publication Critical patent/CN118947063A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN202280093940.2A 2022-03-22 2022-11-07 水晶振动元件及其制造方法 Pending CN118947063A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022045837 2022-03-22
JP2022-045837 2022-03-22
PCT/JP2022/041362 WO2023181487A1 (ja) 2022-03-22 2022-11-07 水晶振動素子及びその製造方法

Publications (1)

Publication Number Publication Date
CN118947063A true CN118947063A (zh) 2024-11-12

Family

ID=88100377

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280093940.2A Pending CN118947063A (zh) 2022-03-22 2022-11-07 水晶振动元件及其制造方法

Country Status (4)

Country Link
US (2) US12438517B2 (https=)
JP (2) JP7689659B2 (https=)
CN (1) CN118947063A (https=)
WO (1) WO2023181487A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118249776A (zh) * 2022-12-22 2024-06-25 达尔科技股份有限公司 石英晶体谐振器及其制造方法
WO2025182135A1 (ja) * 2024-02-29 2025-09-04 株式会社村田製作所 圧電振動子

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4542355A (en) * 1984-11-07 1985-09-17 The United States Of America As Represented By The Secretary Of The Army Normal coordinate monolithic crystal filter
JP2003324332A (ja) * 2002-02-28 2003-11-14 Toyo Commun Equip Co Ltd ２回回転ｙカット水晶振動子とこれを用いた発振器
JP5943160B2 (ja) * 2016-02-08 2016-06-29 セイコーエプソン株式会社 Ｓｃカット水晶基板、振動素子、電子デバイス、発振器、及び電子機器
JP2017192032A (ja) 2016-04-13 2017-10-19 日本電波工業株式会社 水晶振動子
JP2021078062A (ja) 2018-12-19 2021-05-20 日本電波工業株式会社 水晶振動子
US20220345104A1 (en) * 2019-09-16 2022-10-27 David Salt Doubly Rotated Quartz Crystal Resonators With Reduced Sensitivity to Acceleration

Also Published As

Publication number Publication date
JP2025119040A (ja) 2025-08-13
US20260012156A1 (en) 2026-01-08
US12438517B2 (en) 2025-10-07
US20240421797A1 (en) 2024-12-19
WO2023181487A1 (ja) 2023-09-28
JP7800758B2 (ja) 2026-01-16
JP7689659B2 (ja) 2025-06-09
JPWO2023181487A1 (https=) 2023-09-28

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