JP7671850B2 - 加熱装置 - Google Patents
加熱装置 Download PDFInfo
- Publication number
- JP7671850B2 JP7671850B2 JP2023536686A JP2023536686A JP7671850B2 JP 7671850 B2 JP7671850 B2 JP 7671850B2 JP 2023536686 A JP2023536686 A JP 2023536686A JP 2023536686 A JP2023536686 A JP 2023536686A JP 7671850 B2 JP7671850 B2 JP 7671850B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating member
- metal plate
- heating
- plate
- heating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 title claims description 104
- 229910052751 metal Inorganic materials 0.000 claims description 97
- 239000002184 metal Substances 0.000 claims description 97
- 125000006850 spacer group Chemical group 0.000 claims description 11
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 18
- 239000007769 metal material Substances 0.000 description 10
- 239000011521 glass Substances 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 229910000833 kovar Inorganic materials 0.000 description 4
- 229910001369 Brass Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910000599 Cr alloy Inorganic materials 0.000 description 3
- -1 Inconel Chemical compound 0.000 description 3
- 229910001374 Invar Inorganic materials 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 239000010951 brass Substances 0.000 description 3
- 239000000788 chromium alloy Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229910001026 inconel Inorganic materials 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229920000742 Cotton Polymers 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000002788 crimping Methods 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
Landscapes
- Resistance Heating (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021119802 | 2021-07-20 | ||
JP2021119802 | 2021-07-20 | ||
PCT/JP2022/026963 WO2023002855A1 (ja) | 2021-07-20 | 2022-07-07 | 加熱装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JPWO2023002855A1 JPWO2023002855A1 (enrdf_load_stackoverflow) | 2023-01-26 |
JPWO2023002855A5 JPWO2023002855A5 (enrdf_load_stackoverflow) | 2024-04-08 |
JP7671850B2 true JP7671850B2 (ja) | 2025-05-02 |
Family
ID=84979169
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023536686A Active JP7671850B2 (ja) | 2021-07-20 | 2022-07-07 | 加熱装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP7671850B2 (enrdf_load_stackoverflow) |
CN (1) | CN117652203A (enrdf_load_stackoverflow) |
WO (1) | WO2023002855A1 (enrdf_load_stackoverflow) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005166368A (ja) | 2003-12-01 | 2005-06-23 | Ngk Insulators Ltd | 加熱装置 |
JP2016207595A (ja) | 2015-04-28 | 2016-12-08 | 日本特殊陶業株式会社 | 加熱装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0646076Y2 (ja) * | 1989-10-12 | 1994-11-24 | 坂口電熱株式会社 | 加熱ヒータ |
JPH04154073A (ja) * | 1990-10-17 | 1992-05-27 | Yoshino Kogyosho Co Ltd | ヒーターブロック |
JPH06117654A (ja) * | 1992-10-06 | 1994-04-28 | Toshiba Corp | 輻射パネル |
JPH11339936A (ja) * | 1998-05-29 | 1999-12-10 | Nissei Denki Kk | 面状ヒータ成形体 |
-
2022
- 2022-07-07 CN CN202280048189.4A patent/CN117652203A/zh active Pending
- 2022-07-07 WO PCT/JP2022/026963 patent/WO2023002855A1/ja active Application Filing
- 2022-07-07 JP JP2023536686A patent/JP7671850B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005166368A (ja) | 2003-12-01 | 2005-06-23 | Ngk Insulators Ltd | 加熱装置 |
JP2016207595A (ja) | 2015-04-28 | 2016-12-08 | 日本特殊陶業株式会社 | 加熱装置 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2023002855A1 (enrdf_load_stackoverflow) | 2023-01-26 |
WO2023002855A1 (ja) | 2023-01-26 |
CN117652203A (zh) | 2024-03-05 |
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