JP7665347B2 - 情報処理装置、及び情報処理方法 - Google Patents

情報処理装置、及び情報処理方法 Download PDF

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Publication number
JP7665347B2
JP7665347B2 JP2021016442A JP2021016442A JP7665347B2 JP 7665347 B2 JP7665347 B2 JP 7665347B2 JP 2021016442 A JP2021016442 A JP 2021016442A JP 2021016442 A JP2021016442 A JP 2021016442A JP 7665347 B2 JP7665347 B2 JP 7665347B2
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Japan
Prior art keywords
processing
substrate
data
display
processing data
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JP2021016442A
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English (en)
Japanese (ja)
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JP2022119370A5 (https=
JP2022119370A (ja
Inventor
義洋 川内
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2021016442A priority Critical patent/JP7665347B2/ja
Priority to TW111100503A priority patent/TW202232256A/zh
Priority to KR1020220007582A priority patent/KR20220112673A/ko
Priority to CN202210099504.8A priority patent/CN114935878A/zh
Priority to US17/589,485 priority patent/US12298737B2/en
Publication of JP2022119370A publication Critical patent/JP2022119370A/ja
Publication of JP2022119370A5 publication Critical patent/JP2022119370A5/ja
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0267—Fault communication, e.g. human machine interface [HMI]
    • G05B23/0272—Presentation of monitored results, e.g. selection of status reports to be displayed; Filtering information to the user
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G5/00—Control arrangements or circuits for visual indicators common to cathode-ray tube indicators and other visual indicators
    • G09G5/14—Display of multiple viewports
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M3/00—Printing processes to produce particular kinds of printed work, e.g. patterns
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0208—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the configuration of the monitoring system
    • G05B23/0216—Human interface functionality, e.g. monitoring system providing help to the user in the selection of tests or in its configuration
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048—Interaction techniques based on graphical user interfaces [GUI]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048—Interaction techniques based on graphical user interfaces [GUI]
    • G06F3/0481—Interaction techniques based on graphical user interfaces [GUI] based on specific properties of the displayed interaction object or a metaphor-based environment, e.g. interaction with desktop elements like windows or icons, or assisted by a cursor's changing behaviour or appearance
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/14—Digital output to display device ; Cooperation and interconnection of the display device with other functional units
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G5/00—Control arrangements or circuits for visual indicators common to cathode-ray tube indicators and other visual indicators
    • G09G5/003—Details of a display terminal, the details relating to the control arrangement of the display terminal and to the interfaces thereto
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/409—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by using manual data input [MDI] or by using control panel, e.g. controlling functions with the panel; characterised by control panel details or by setting parameters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/26—Pc applications
    • G05B2219/2602—Wafer processing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32128—Gui graphical user interface
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/36—Nc in input of data, input key till input tape
    • G05B2219/36072—Select pattern, input modification of tolerance

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • General Factory Administration (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2021016442A 2021-02-04 2021-02-04 情報処理装置、及び情報処理方法 Active JP7665347B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2021016442A JP7665347B2 (ja) 2021-02-04 2021-02-04 情報処理装置、及び情報処理方法
TW111100503A TW202232256A (zh) 2021-02-04 2022-01-06 資訊處理設備、資訊處理方法、物品製造系統、以及物品製造方法
KR1020220007582A KR20220112673A (ko) 2021-02-04 2022-01-19 정보처리장치, 정보처리방법, 물품 제조 시스템, 및 물품 제조방법
CN202210099504.8A CN114935878A (zh) 2021-02-04 2022-01-27 信息处理装置、信息处理方法、物品制造系统和方法
US17/589,485 US12298737B2 (en) 2021-02-04 2022-01-31 Information processing apparatus, information processing method, article manufacturing system, and article manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021016442A JP7665347B2 (ja) 2021-02-04 2021-02-04 情報処理装置、及び情報処理方法

Publications (3)

Publication Number Publication Date
JP2022119370A JP2022119370A (ja) 2022-08-17
JP2022119370A5 JP2022119370A5 (https=) 2023-11-21
JP7665347B2 true JP7665347B2 (ja) 2025-04-21

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Application Number Title Priority Date Filing Date
JP2021016442A Active JP7665347B2 (ja) 2021-02-04 2021-02-04 情報処理装置、及び情報処理方法

Country Status (5)

Country Link
US (1) US12298737B2 (https=)
JP (1) JP7665347B2 (https=)
KR (1) KR20220112673A (https=)
CN (1) CN114935878A (https=)
TW (1) TW202232256A (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004153228A (ja) 2002-09-04 2004-05-27 Hitachi Ltd 欠陥情報解析方法およびその装置
JP2005093922A (ja) 2003-09-19 2005-04-07 Dainippon Screen Mfg Co Ltd 基板処理システム
WO2006059625A1 (ja) 2004-11-30 2006-06-08 Nikon Corporation デバイス処理システム、情報表示方法、プログラム、及び記録媒体
JP2011129580A (ja) 2009-12-15 2011-06-30 Toshiba Corp 異常装置検出システムおよび異常装置検出プログラム

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JP4697877B2 (ja) 2006-04-28 2011-06-08 東京エレクトロン株式会社 プロセス情報管理装置、およびプログラム
JP5461778B2 (ja) 2007-04-02 2014-04-02 株式会社日立国際電気 基板処理システム、群管理システム、構成管理プログラム、接続管理プログラム、端末プログラム及び各ハードウェアの接続管理方法
JP2009170612A (ja) 2008-01-15 2009-07-30 Canon Inc 情報処理装置、情報処理方法、処理システムおよびコンピュータプログラム
JP5144816B2 (ja) 2011-03-02 2013-02-13 三菱電機株式会社 プログラマブル表示器、及び作画データの作成方法
EP2755096A4 (en) 2011-09-05 2014-12-31 Kobayashi Manufacture Co Ltd WORK MANAGEMENT SYSTEM, WORK MANAGEMENT TERMINAL, WORK MANAGEMENT PROGRAM AND METHOD
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JP6222810B2 (ja) * 2012-07-17 2017-11-01 株式会社日立国際電気 管理装置、基板処理装置、基板処理システム、基板処理装置のファイル管理方法及びファイル転送方法
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Publication number Priority date Publication date Assignee Title
JP2004153228A (ja) 2002-09-04 2004-05-27 Hitachi Ltd 欠陥情報解析方法およびその装置
JP2005093922A (ja) 2003-09-19 2005-04-07 Dainippon Screen Mfg Co Ltd 基板処理システム
WO2006059625A1 (ja) 2004-11-30 2006-06-08 Nikon Corporation デバイス処理システム、情報表示方法、プログラム、及び記録媒体
JP2011129580A (ja) 2009-12-15 2011-06-30 Toshiba Corp 異常装置検出システムおよび異常装置検出プログラム

Also Published As

Publication number Publication date
US12298737B2 (en) 2025-05-13
JP2022119370A (ja) 2022-08-17
CN114935878A (zh) 2022-08-23
TW202232256A (zh) 2022-08-16
KR20220112673A (ko) 2022-08-11
US20220244700A1 (en) 2022-08-04

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