CN114935878A - 信息处理装置、信息处理方法、物品制造系统和方法 - Google Patents

信息处理装置、信息处理方法、物品制造系统和方法 Download PDF

Info

Publication number
CN114935878A
CN114935878A CN202210099504.8A CN202210099504A CN114935878A CN 114935878 A CN114935878 A CN 114935878A CN 202210099504 A CN202210099504 A CN 202210099504A CN 114935878 A CN114935878 A CN 114935878A
Authority
CN
China
Prior art keywords
processing apparatus
substrate
data
information processing
processed data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN202210099504.8A
Other languages
English (en)
Chinese (zh)
Inventor
川内义洋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN114935878A publication Critical patent/CN114935878A/zh
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0267—Fault communication, e.g. human machine interface [HMI]
    • G05B23/0272—Presentation of monitored results, e.g. selection of status reports to be displayed; Filtering information to the user
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G5/00—Control arrangements or circuits for visual indicators common to cathode-ray tube indicators and other visual indicators
    • G09G5/14—Display of multiple viewports
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M3/00—Printing processes to produce particular kinds of printed work, e.g. patterns
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0208—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the configuration of the monitoring system
    • G05B23/0216—Human interface functionality, e.g. monitoring system providing help to the user in the selection of tests or in its configuration
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048—Interaction techniques based on graphical user interfaces [GUI]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048—Interaction techniques based on graphical user interfaces [GUI]
    • G06F3/0481—Interaction techniques based on graphical user interfaces [GUI] based on specific properties of the displayed interaction object or a metaphor-based environment, e.g. interaction with desktop elements like windows or icons, or assisted by a cursor's changing behaviour or appearance
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/14—Digital output to display device ; Cooperation and interconnection of the display device with other functional units
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G5/00—Control arrangements or circuits for visual indicators common to cathode-ray tube indicators and other visual indicators
    • G09G5/003—Details of a display terminal, the details relating to the control arrangement of the display terminal and to the interfaces thereto
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/409—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by using manual data input [MDI] or by using control panel, e.g. controlling functions with the panel; characterised by control panel details or by setting parameters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/26—Pc applications
    • G05B2219/2602—Wafer processing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32128—Gui graphical user interface
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/36—Nc in input of data, input key till input tape
    • G05B2219/36072—Select pattern, input modification of tolerance

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • General Factory Administration (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN202210099504.8A 2021-02-04 2022-01-27 信息处理装置、信息处理方法、物品制造系统和方法 Withdrawn CN114935878A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021016442A JP7665347B2 (ja) 2021-02-04 2021-02-04 情報処理装置、及び情報処理方法
JP2021-016442 2021-02-04

Publications (1)

Publication Number Publication Date
CN114935878A true CN114935878A (zh) 2022-08-23

Family

ID=82611400

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210099504.8A Withdrawn CN114935878A (zh) 2021-02-04 2022-01-27 信息处理装置、信息处理方法、物品制造系统和方法

Country Status (5)

Country Link
US (1) US12298737B2 (https=)
JP (1) JP7665347B2 (https=)
KR (1) KR20220112673A (https=)
CN (1) CN114935878A (https=)
TW (1) TW202232256A (https=)

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2796482B1 (fr) * 1999-07-16 2002-09-06 Touchtunes Music Corp Systeme de gestion a distance d'au moins un dispositif de reproduction d'informations audiovisuelles
JP3982428B2 (ja) * 2002-09-04 2007-09-26 株式会社日立製作所 欠陥情報解析方法およびその装置
JP2005093922A (ja) * 2003-09-19 2005-04-07 Dainippon Screen Mfg Co Ltd 基板処理システム
TWI401580B (zh) * 2004-11-30 2013-07-11 尼康股份有限公司 A component processing system, an information display method, and a recorded recording medium, an exposure apparatus, a measurement and inspection apparatus
JP4697877B2 (ja) 2006-04-28 2011-06-08 東京エレクトロン株式会社 プロセス情報管理装置、およびプログラム
JP5461778B2 (ja) 2007-04-02 2014-04-02 株式会社日立国際電気 基板処理システム、群管理システム、構成管理プログラム、接続管理プログラム、端末プログラム及び各ハードウェアの接続管理方法
JP2009170612A (ja) 2008-01-15 2009-07-30 Canon Inc 情報処理装置、情報処理方法、処理システムおよびコンピュータプログラム
JP2011129580A (ja) * 2009-12-15 2011-06-30 Toshiba Corp 異常装置検出システムおよび異常装置検出プログラム
JP5144816B2 (ja) 2011-03-02 2013-02-13 三菱電機株式会社 プログラマブル表示器、及び作画データの作成方法
EP2755096A4 (en) 2011-09-05 2014-12-31 Kobayashi Manufacture Co Ltd WORK MANAGEMENT SYSTEM, WORK MANAGEMENT TERMINAL, WORK MANAGEMENT PROGRAM AND METHOD
US9519393B2 (en) * 2011-09-30 2016-12-13 Siemens Schweiz Ag Management system user interface for comparative trend view
JP5673577B2 (ja) * 2012-02-07 2015-02-18 東京エレクトロン株式会社 基板処理装置、基板処理方法及び記憶媒体
JP6222810B2 (ja) * 2012-07-17 2017-11-01 株式会社日立国際電気 管理装置、基板処理装置、基板処理システム、基板処理装置のファイル管理方法及びファイル転送方法
US10290088B2 (en) * 2014-02-14 2019-05-14 Kla-Tencor Corporation Wafer and lot based hierarchical method combining customized metrics with a global classification methodology to monitor process tool condition at extremely high throughput
JP6645993B2 (ja) 2016-03-29 2020-02-14 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 処理装置、装置管理コントローラ、及びプログラム並びに半導体装置の製造方法
EP3291008A1 (en) 2016-09-06 2018-03-07 ASML Netherlands B.V. Method and apparatus to monitor a process apparatus
WO2018138925A1 (ja) * 2017-01-30 2018-08-02 三菱電機株式会社 データ処理装置およびデータ処理方法
JP6894318B2 (ja) 2017-08-04 2021-06-30 株式会社荏原製作所 画面制御プログラムおよび半導体製造装置
CN111684076A (zh) * 2018-01-25 2020-09-18 帝斯曼知识产权资产管理有限公司 纤维蛋白原测试
JP6808684B2 (ja) * 2018-06-14 2021-01-06 キヤノン株式会社 情報処理装置、判定方法、プログラム、リソグラフィシステム、および物品の製造方法
JP7326856B2 (ja) 2019-05-10 2023-08-16 京セラドキュメントソリューションズ株式会社 情報処理装置
US11004710B2 (en) * 2019-06-04 2021-05-11 Applied Materials, Inc. Wafer placement error detection based on measuring a current through an electrostatic chuck and solution for intervention
JP7570822B2 (ja) * 2020-04-28 2024-10-22 キヤノン株式会社 情報処理装置、及び情報処理方法
JP7451287B2 (ja) * 2020-04-30 2024-03-18 東レエンジニアリング先端半導体Ｍｉテクノロジー株式会社 パターン欠陥検出方法

Also Published As

Publication number Publication date
US12298737B2 (en) 2025-05-13
JP7665347B2 (ja) 2025-04-21
JP2022119370A (ja) 2022-08-17
TW202232256A (zh) 2022-08-16
KR20220112673A (ko) 2022-08-11
US20220244700A1 (en) 2022-08-04

Similar Documents

Publication Publication Date Title
EP3582011B1 (en) Information processing apparatus, method, program, lithography system, and manufacturing method of article
JP7732057B2 (ja) 情報処理装置、及び情報処理方法
JP7732048B2 (ja) 情報処理装置、及び情報処理方法
US12298737B2 (en) Information processing apparatus, information processing method, article manufacturing system, and article manufacturing method
CN114859665A (zh) 信息处理装置、信息处理方法、物品制造系统和方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WW01 Invention patent application withdrawn after publication
WW01 Invention patent application withdrawn after publication

Application publication date: 20220823