JP7625910B2 - 電気光学装置、電気光学装置の製造方法、および電子機器 - Google Patents
電気光学装置、電気光学装置の製造方法、および電子機器 Download PDFInfo
- Publication number
- JP7625910B2 JP7625910B2 JP2021039995A JP2021039995A JP7625910B2 JP 7625910 B2 JP7625910 B2 JP 7625910B2 JP 2021039995 A JP2021039995 A JP 2021039995A JP 2021039995 A JP2021039995 A JP 2021039995A JP 7625910 B2 JP7625910 B2 JP 7625910B2
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- film
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- insulating film
- electro
- optical device
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- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000000034 method Methods 0.000 title claims description 6
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- 239000004065 semiconductor Substances 0.000 claims description 24
- 239000011229 interlayer Substances 0.000 description 44
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- 239000004973 liquid crystal related substance Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 16
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 150000002736 metal compounds Chemical class 0.000 description 8
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000000565 sealant Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
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- 239000012535 impurity Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
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- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
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- 238000000206 photolithography Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 2
- 229910021342 tungsten silicide Inorganic materials 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
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- 150000002367 halogens Chemical class 0.000 description 1
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136213—Storage capacitors associated with the pixel electrode
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133302—Rigid substrates, e.g. inorganic substrates
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Liquid Crystal (AREA)
- Inorganic Chemistry (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021039995A JP7625910B2 (ja) | 2021-03-12 | 2021-03-12 | 電気光学装置、電気光学装置の製造方法、および電子機器 |
| CN202210241967.3A CN115079474B (zh) | 2021-03-12 | 2022-03-11 | 电光装置和电子设备 |
| US17/692,206 US11703731B2 (en) | 2021-03-12 | 2022-03-11 | Electro-optical device and electronic apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021039995A JP7625910B2 (ja) | 2021-03-12 | 2021-03-12 | 電気光学装置、電気光学装置の製造方法、および電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022139551A JP2022139551A (ja) | 2022-09-26 |
| JP2022139551A5 JP2022139551A5 (https=) | 2024-01-22 |
| JP7625910B2 true JP7625910B2 (ja) | 2025-02-04 |
Family
ID=83194720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021039995A Active JP7625910B2 (ja) | 2021-03-12 | 2021-03-12 | 電気光学装置、電気光学装置の製造方法、および電子機器 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US11703731B2 (https=) |
| JP (1) | JP7625910B2 (https=) |
| CN (1) | CN115079474B (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7585866B2 (ja) * | 2021-02-25 | 2024-11-19 | セイコーエプソン株式会社 | 電気光学装置、及び電子機器 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001013518A (ja) | 1999-07-02 | 2001-01-19 | Sharp Corp | 液晶表示装置およびその製造方法 |
| JP2007187964A (ja) | 2006-01-16 | 2007-07-26 | Seiko Epson Corp | 電気光学装置、電子機器及びプロジェクタ |
| US20130270526A1 (en) | 2012-04-17 | 2013-10-17 | Sung-Ho Kim | Organic light-emitting display apparatus and method of manufacturing organic light-emitting display apparatus |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05265040A (ja) | 1992-03-18 | 1993-10-15 | Sanyo Electric Co Ltd | 液晶表示装置およびその製造方法 |
| JP3078257B2 (ja) * | 1998-04-15 | 2000-08-21 | ティーディーケイ株式会社 | 有機ｅｌ表示装置及びその製造方法 |
| JP2003152086A (ja) | 2001-11-15 | 2003-05-23 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| JP2004271903A (ja) * | 2003-03-07 | 2004-09-30 | Sharp Corp | 薄膜トランジスタ基板およびその製造方法並びに液晶表示装置 |
| JP2004325627A (ja) | 2003-04-23 | 2004-11-18 | Sharp Corp | アクティブマトリクス基板および表示装置 |
| JP2004334064A (ja) | 2003-05-12 | 2004-11-25 | Sharp Corp | 液晶表示装置及びその製造方法 |
| JP2004363300A (ja) * | 2003-06-04 | 2004-12-24 | Sharp Corp | 液晶表示装置 |
| KR100725690B1 (ko) * | 2003-07-08 | 2007-06-07 | 마츠시타 덴끼 산교 가부시키가이샤 | 반도체장치 및 그 제조방법 |
| CN1610117A (zh) * | 2003-10-17 | 2005-04-27 | 松下电器产业株式会社 | 半导体装置及其制造方法 |
| JP4371089B2 (ja) * | 2005-09-01 | 2009-11-25 | セイコーエプソン株式会社 | 液晶装置およびそれを用いた表示装置 |
| JP5982094B2 (ja) * | 2011-03-22 | 2016-08-31 | セイコーエプソン株式会社 | 電気光学装置、投射型表示装置および電子機器 |
| JP6891502B2 (ja) | 2017-01-16 | 2021-06-18 | セイコーエプソン株式会社 | 電気光学装置、電子機器 |
-
2021
- 2021-03-12 JP JP2021039995A patent/JP7625910B2/ja active Active
-
2022
- 2022-03-11 US US17/692,206 patent/US11703731B2/en active Active
- 2022-03-11 CN CN202210241967.3A patent/CN115079474B/zh active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001013518A (ja) | 1999-07-02 | 2001-01-19 | Sharp Corp | 液晶表示装置およびその製造方法 |
| JP2007187964A (ja) | 2006-01-16 | 2007-07-26 | Seiko Epson Corp | 電気光学装置、電子機器及びプロジェクタ |
| US20130270526A1 (en) | 2012-04-17 | 2013-10-17 | Sung-Ho Kim | Organic light-emitting display apparatus and method of manufacturing organic light-emitting display apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115079474A (zh) | 2022-09-20 |
| JP2022139551A (ja) | 2022-09-26 |
| US11703731B2 (en) | 2023-07-18 |
| CN115079474B (zh) | 2023-12-22 |
| US20220291557A1 (en) | 2022-09-15 |
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